Magnetic measurement device

Abstract

The utility model relates to the technical field of magnetic measurement, and discloses a magnetic measurement device which comprises a magnet exciting coil and a detection assembly. A detection chamber is formed on the inner side of the excitation coil, and a sample is arranged in the detection chamber. The detection assembly comprises a first detection device and a second detection device which are used for detecting the magnetism of the sample through detection light, the corresponding first detection light and second detection light can respectively enter the first surface and the second surface of the sample from different inlets of the detection chamber, and the irradiation positions of the first detection light and the second detection light are variable. In the process of measuring the sample by exciting the magnetism of the sample through the pulsed magnetic field each time, the first surface and the second surface of the sample are simultaneously measured through the variable detection light path, so that the magnetism of more areas of the sample can be simultaneously measured within approximately the same measurement time; therefore, the measurement efficiency of the magnetic measurement equipment is improved in the dimensions of multiple measurements and single measurement.

Description

Technical Field

[0001] This application relates to the field of magnetic measurement technology, and for example to a magnetic measurement device. Background Technology

[0002] Currently, magnetic measurement technology plays an important role in physics, materials science, and engineering. Among them, magneto-optical Kerr effect (MOKE) measurement technology, as an effective magnetic characterization method, is widely used to study the magnetic properties of materials. However, existing MOKE equipment has relatively low temporal resolution, making it difficult to capture the dynamic magnetization process of samples on ultrafast timescales, thus limiting the study of transient phenomena in magnetic materials.

[0003] This research presents a pulsed MOKE device employing pulsed excitation, which uses short-duration pulsed magnetic fields or currents to excite the magnetization state of a sample. By using short-duration pulsed excitation, the device can capture the dynamic magnetization process of the sample on an ultrafast timescale, thereby achieving higher temporal resolution and providing strong support for the study of transient phenomena in magnetic materials.

[0004] In the process of implementing the embodiments of this disclosure, at least the following problems were found in the related art:

[0005] Related technologies employ pulse excitation to achieve higher temporal resolution in magnetic measurement devices. However, in practical applications, the long charging time of the pulsed magnetic field and the rapid rise and fall times with short durations result in short measurement times for samples in both multiple and single measurements, leading to low measurement efficiency.

[0006] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0008] This disclosure provides a magnetic measuring device to improve the measurement efficiency of magnetic measuring equipment.

[0009] In some embodiments, the magnetic measuring device includes: an excitation coil with a detection chamber formed inside, and a sample disposed in the detection chamber; a detection assembly including a detection device for detecting the magnetic properties of the sample by means of detection light, the detection device including a first detection device and a second detection device, wherein a first detection light of the first detection device and a second detection light of the second detection device can be incident on a first surface and a second surface of the sample from different entrances of the detection chamber, respectively, and the irradiation positions of the first detection light and the second detection light are variable.

[0010] Optionally, the magnetic measuring device further includes: a third displacement device, corresponding to the first detection device, for driving the first detection device to move and changing the irradiation position of the first detection light; and a fourth displacement device, corresponding to the second detection device, for driving the second detection device to move and changing the irradiation position of the second detection light.

[0011] Optionally, the detection device includes: a light source, a polarizer, an analyzer, and a detector; wherein, the detection light emitted by the light source passes through the polarizer and is directed toward the sample, and after being reflected by the sample, it passes through the analyzer and reaches the detector.

[0012] Optionally, the detection light is incident on the sample surface at a non-zero incident angle.

[0013] Optionally, the detection device includes: a light source, a polarizer, a beam splitter, an analyzer, and a detector; wherein, the detection light emitted by the light source passes through the polarizer and the beam splitter and is directed toward the sample, and after being reflected by the sample, it returns to the beam splitter and passes through the analyzer to reach the detector.

[0014] Optionally, the detection device includes: a light source, a polarizer, a beam splitter, an analyzer, a detector, and a reflector; wherein, the detection light emitted by the light source passes through the polarizer, the beam splitter, and the reflector before entering the sample, and after being reflected by the sample, it returns to the reflector and passes through the beam splitter and the analyzer to reach the detector.

[0015] Optionally, the magnetic measuring device further includes: a fifth displacement device, which is configured corresponding to the reflector of the first detection device, for driving the reflector of the first detection device to move and changing the illumination position of the first detection light; and a sixth displacement device, which is configured corresponding to the reflector of the second detection device, for driving the reflector of the second detection device to move and changing the illumination position of the second detection light.

[0016] Optionally, the detection light is incident perpendicularly on the sample surface.

[0017] Optionally, the sample can be rotatably positioned within the detection chamber.

[0018] Optionally, the first and second detection beams move at least radially along the sample.

[0019] The magnetic measuring device provided in this disclosure can achieve the following technical effects:

[0020] The magnetic measurement device includes an excitation coil and a detection assembly. A detection chamber is formed inside the excitation coil, and the sample is placed within the detection chamber. The detection assembly includes a first detection device and a second detection device for detecting the sample's magnetism using detection light. The first and second detection lights can be incident on the first and second surfaces of the sample from different entrances to the detection chamber, respectively, and their illumination positions are variable. During each measurement process by exciting the sample's magnetism with a pulsed magnetic field, the variable detection light path simultaneously measures both the first and second surfaces of the sample. This allows for the simultaneous measurement of the magnetism of more regions of the sample within approximately the same measurement time, thereby improving the measurement efficiency of the magnetic measurement device in both multiple and single-measurement dimensions.

[0021] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0022] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are shown as similar elements. The drawings are not to be scaled. And wherein:

[0023] Figure 1 This is a schematic diagram of the overall structure of a magnetic measuring device provided in an embodiment of this disclosure;

[0024] Figure 2 This is a schematic diagram of a sample structure provided in an embodiment of this disclosure;

[0025] Figure 3 This is a schematic diagram of an optical path structure provided in an embodiment of this disclosure;

[0026] Figure 4 This is a schematic diagram of another optical path structure provided in an embodiment of this disclosure;

[0027] Figure 5 This is a schematic diagram of another optical path structure provided in an embodiment of this disclosure.

[0028] Figure label:

[0029] 10: Excitation coil; 11: Detection chamber; 12: Sample;

[0030] 20: First detection device; 21: Second detection device; 22: Light source; 23: Polarizer; 24: Beam splitter; 25: Analyzer; 26: Detector; 27: Mirror; 29: Detection light;

[0031] 30: First drive motor; 31: Drive shaft; 32: Pick-up and delivery shaft; 33: Transmission support;

[0032] 54: Detection light spot; 55: Light spot movement range; 56: Fixing hole. Detailed Implementation

[0033] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0034] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0035] Combination Figures 1 to 5 As shown, this embodiment of the present disclosure provides a magnetic measuring device, including a magnetic measuring apparatus, which includes an excitation coil 10 and a detection component. A detection chamber is formed inside the excitation coil 10, and a sample 12 is disposed within the detection chamber. The detection component includes a detection device for detecting the magnetism of the sample 12 using a detection light 29. The detection device includes a first detection device 20 and a second detection device 21. The first detection light from the first detection device 20 and the second detection light from the second detection device 21 can respectively enter the first and second surfaces of the sample 12 from different entrances of the detection chamber, and the irradiation positions of the first and second detection lights on the first and second surfaces of the sample 12 are variable.

[0036] In the embodiments of this disclosure, sample 12 can be of any type and includes at least a first side and a second side, such as a disk, wafer, or silicon wafer. The following will use a disk-shaped sample 12, such as a disk, as an example to describe the various solutions of the embodiments of this disclosure.

[0037] In this embodiment, the magnetic field generating unit includes a support and an excitation coil 10 fixed on the support. A wire is wound around the axis of the drive shaft 31 to form the excitation coil 10. The excitation coil 10 is coaxially arranged with the drive shaft 31 and / or the pick-and-place shaft 32. The diameter of the excitation coil 10 is larger than the diameter of the drive shaft 31 and / or the pick-and-place shaft 32. The inner side of the excitation coil 10 is the detection chamber. Alternatively, the excitation coil 10 can be wound on the support, with the portion wound on the support forming a cylinder. The excitation coil 10 can be wound around the surface of this cylinder, and the inner side of the cylinder is the detection chamber. The excitation coil 10 may also not be wound on the support, but simply fixed from both sides by the support; in this case, the inner side of the excitation coil 10 is the detection space.

[0038] In this embodiment, the detection chamber 11 includes at least a plurality of windows, such as a first window through which the first detection light passes and a second window through which the second detection light passes. The number of windows in the detection chamber 11 corresponds to the number of sides of the sample 12 to be tested. For example, if the sample 12 has three or four sides to be tested, the detection chamber 11 may be provided with three or four windows corresponding to the sides to be tested, through which the detection light 29 can pass.

[0039] The magnetic measuring device provided in this embodiment includes an excitation coil 10 and a detection assembly. A detection chamber 11 is formed inside the excitation coil 10, and a sample 12 is disposed within the detection chamber 11. The detection assembly includes a first detection device 20 and a second detection device 21 for detecting the magnetism of the sample 12 using detection light 29. The corresponding first and second detection lights can be incident on the first and second surfaces of the sample 12 from different entrances of the detection chamber 11, and the illumination positions of the first and second detection lights are variable. During each measurement of the sample 12 by exciting its magnetism with a pulsed magnetic field, the first and second surfaces of the sample 12 are simultaneously measured using the variable detection light 29. This allows for the simultaneous measurement of the magnetism of more areas of the sample 12 within approximately the same measurement time, thereby improving the measurement efficiency of the magnetic measuring device in both multiple and single-measurement dimensions.

[0040] Optionally, the magnetic measuring device further includes a third displacement device and a fourth displacement device. The third displacement device is configured correspondingly to the first detection device 20 and is used to drive the first detection device 20 to move, thereby changing the illumination position of the first detection light. The fourth displacement device is configured correspondingly to the second detection device 21 and is used to drive the second detection device 21 to move, thereby changing the illumination position of the second detection light.

[0041] In this embodiment of the present disclosure, the sample 12 is rotatably disposed in the detection chamber of the detection chamber. Specifically, the sample 12 can rotate about the central axis perpendicular to the fixing hole 56, and the detection light spot 54 can move along the light spot movement range 55.

[0042] In this embodiment, the third and fourth displacement devices can drive the first detection device 20 and the second detection device 21 to move in any direction, such as radial displacement along the sample 12, circumferential displacement along the sample 12, or axial displacement along the sample 12. In other embodiments, the third and fourth displacement devices can also drive the first detection device 20 and the second detection device 21 to rotate. For example, they can rotate around the geometric centers of the first detection device 20 and the second detection device 21, or around the geometric center of the sample 12. Correspondingly, the third and fourth displacement devices can be any devices capable of driving the first detection device 20 and the second detection device 21 to move. For example, the third and fourth displacement devices can be linear displacement devices that use a sliding groove and a slider to drive displacement, or they can be rotary displacement devices, etc.

[0043] In this way, the first detection device 20 and the second detection device 21 are driven to move by the third displacement device and the fourth displacement device respectively, thereby changing the irradiation position of the first detection light and the second detection light on the sample 12, and realizing the change of the detection position of different surfaces of the sample 12.

[0044] Optionally, the detection device includes a light source 22, a polarizer 23, an analyzer 25, and a detector 26. The detection light 29 emitted by the light source 22 passes through the polarizer 23 and is directed toward the sample 12. After being reflected by the sample 12, it passes through the analyzer 25 and reaches the detector 26.

[0045] In this embodiment, the detection light 29, after passing through the analyzer 25, is incident obliquely on the sample 12, and the relative positions of the light source 22, polarizer 23, analyzer 25, and detector 26 are fixed. By adjusting the overall position of the light source 22, polarizer 23, analyzer 25, and detector 26, and ensuring that the incident angle of the detection light 29 remains unchanged during the position adjustment process, the detection light 29 reflected from the sample 12 can accurately reach the detector 26 after passing through the analyzer 25, thereby changing the illumination position of the detection light 29 on the sample 12.

[0046] In this way, the detection light 29 emitted by the light source 22 reaches the surface of the sample 12 directly after passing through the polarizer 23. The reflected detection light 29 then hits the analyzer 25, and finally reaches the detector 26 after being analyzed by the analyzer 25, thus realizing the detection of the magnetism of the sample 12.

[0047] Optionally, the detection light 29 is incident on the surface of the sample 12 at a non-zero incident angle.

[0048] In this embodiment of the disclosure, the non-zero incident angle includes any non-zero angle, specifically any angle in (0, 90°).

[0049] In this way, when the detection light 29 is incident on the surface of the sample 12 at a non-zero incident angle, the detection light 29 interacts with the surface of the sample 12. By analyzing the characteristics of the reflected detection light 29, such as intensity, polarization state, and phase, local information of the sample 12 in the incident light spot area can be obtained to study the surface structure, optical properties, and film thickness of the sample 12.

[0050] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, and a detector 26. The detection light 29 emitted by the light source 22 passes through the polarizer 23 and the beam splitter 24 and is directed toward the sample 12. After being reflected by the sample 12, it returns to the beam splitter 24 and passes through the analyzer 25 to reach the detector 26.

[0051] In this embodiment, the relative positions of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26 are fixed. By adjusting the overall position of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26, and ensuring that the detection light 29 is always perpendicularly incident on the sample 12, the detection light 29 reflected by the sample 12 can be made to return along the original path to the beam splitter 24, and finally reach the detector 26 through the analyzer 25, thereby changing the illumination position of the detection light 29 on the sample 12.

[0052] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then the detection light 29 is made to be perpendicular to the surface of the sample 12 by the beam splitter 24. After being reflected by the sample 12, the detection light 29 returns to the beam splitter 24 along the original path. The beam splitter 24 then splits the light and directs it to the analyzer 25. Finally, the analyzer 25 reaches the detector, thereby effectively analyzing the reflection characteristics of polarized light by the sample 12 to study the optical properties of the sample 12, such as reflectivity and changes in polarization state, and thus obtaining information about the surface or internal structure of the sample 12. At the same time, the use of the beam splitter 24 makes the optical path more flexible, which facilitates the adjustment of the optical path or the introduction of other optical components during the detection process to achieve more complex detection functions.

[0053] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, a detector 26, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27 before entering the sample 12. After being reflected by the sample 12, it returns to the reflector 27 and then passes through the beam splitter 24 and the analyzer 25 before reaching the detector 26.

[0054] In this embodiment, the relative positions of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26 are fixed, and the reflector 27 can be displaced along the optical axis of the detection light 29 emitted from the beam splitter 24. During the displacement, the incident angle of the detection light 29 emitted from the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 reflected by the reflector 27 is always perpendicular to the sample 12. Since the incident angle of the detection light 29 emitted from the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 is always perpendicular to the sample 12, the detection light 29 reflected by the sample 12 can always return to the reflector 27 and beam splitter 24 along the original path during the displacement of the reflector 27. Therefore, by simply controlling the displacement of the reflector 27 along the optical axis of the detection light 29 emitted from the beam splitter 24, the irradiation of the detection light 29 at different positions on the sample 12 can be achieved.

[0055] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then guided by the beam splitter 24 and the reflector 27 to be incident on the surface of the sample 12. The detection light 29 reflected by the sample 12 returns along the same path, passes through the reflector 27 and the beam splitter 24 again, and finally passes through the analyzer 25 to reach the detector 26. By simply adjusting the reflector 27, the illumination position of the detection light 29 on the sample 12 can be adjusted, enabling the detection of different positions on different surfaces of the sample 12.

[0056] Optionally, the magnetic measuring device further includes a fifth displacement device and a sixth displacement device. The fifth displacement device is configured corresponding to the reflector 27 of the first detection device 20 and is used to drive the reflector 27 of the first detection device 20 to move, thereby changing the illumination position of the first detection light. The sixth displacement device is configured corresponding to the reflector 27 of the second detection device 21 and is used to drive the reflector 27 of the second detection device 21 to move, thereby changing the illumination position of the second detection light.

[0057] In this embodiment, the fifth and sixth displacement devices can respectively drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to move in any direction, such as radial displacement along the sample 12, circumferential displacement along the sample 12, or axial displacement along the sample 12. In other embodiments, the fifth and sixth displacement devices can also respectively drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to rotate. For example, rotating around the geometric center of the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21, or rotating around the geometric center of the sample 12, etc. Correspondingly, the fifth and sixth displacement devices can be any devices capable of driving the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to move. For example, the fifth and sixth displacement devices can be linear displacement devices that use a sliding groove and a slider to drive displacement, or they can be rotary displacement devices, etc.

[0058] In this way, the reflector 27 of the first detection device 20 is driven by the fifth displacement device, and the reflector 27 of the second detection device 21 is driven by the sixth displacement device, thereby changing the irradiation position of the detection light 29 on the first and second surfaces of the sample 12.

[0059] Optionally, the detection light 29 is incident perpendicularly on the surface of the sample 12.

[0060] In this way, by making the detection light 29 incident perpendicularly on the surface of the sample 12, the detection light 29 can be returned along the original path, thereby changing the irradiation position of the detection light 29 on the sample 12.

[0061] Optionally, sample 12 is rotatably disposed within the detection chamber of detection 11.

[0062] In this embodiment of the disclosure, the sample 12 can be rotated about any axis, such as an axis perpendicular to the surface of the sample 12 and passing through the geometric center of the sample 12, or an axis parallel to the surface of the sample 12 and passing through the geometric center of the sample 12, etc.

[0063] In this way, by rotating sample 12, the illumination position of detection light 29 on sample 12 can be changed. This can be achieved both when the optical path cannot be moved and when the optical path moves together, to achieve a faster and more accurate change in the illumination position of detection light 29.

[0064] Optionally, the first detection light and the second detection light move at least radially in the sample 12.

[0065] In this embodiment, sample 12 can be a disc-shaped sample 12 having a first surface and a second surface. The first detection light and the second detection light move along any radial direction of the disc-shaped sample 12, such as moving along a radial direction coinciding with the Y-axis, or moving along a radial direction forming a predetermined angle with the Y-axis. In other embodiments, the first detection light and the second detection light can also move non-radially, such as moving along any straight line that does not pass through the center point, such as a straight line parallel to a radius coinciding with the Y-axis, or a straight line parallel to a radius forming a predetermined angle with the Y-axis.

[0066] In this way, by controlling the optical path to move the first detection light and the second detection light along the radial direction of the sample 12, as long as the sample 12 is rotated, the detection light 29 can irradiate all positions of the sample 12, that is, magnetic measurements can be performed on all positions of the sample 12.

[0067] In practical applications, sample 12 is a disk, which is fixed to the pick-and-place shaft 32 through fixing hole 56. The magnetic field direction of excitation coil 10 is along the axial direction of the disk, and a detection chamber 11 is formed inside the excitation coil 10. A first window and a second window are provided on opposite sides of the detection chamber 11. The pick-and-place shaft 32 extends into the detection chamber 11 through the second window, enabling it to bring the disk into the detection chamber 11. It is connected to the drive shaft 31, which extends into the detection chamber 11 through the first window. A drive support 33 is provided at the drive end of the drive shaft 31 to increase stability during transmission. The first drive motor 30 can drive the drive shaft 31 to rotate, thereby rotating the pick-and-place shaft 32 and thus rotating the disk. The detection light 29 of the first detection device 20 can enter the first surface of the disk through the first gap between the first window and the drive shaft 31 to achieve magnetic detection of the first surface of the disk. The detection light 29 of the second detection device 21 can enter the second surface of the disk through the second gap between the second window and the pick-and-place shaft 32 to achieve magnetic detection of the second surface of the disk. Furthermore, the projection of the disk surface along the disk axis lies within the projections of the first gap and the second gap along the disk axis. When it is necessary to change the measurement position, it is only necessary to rotate the disk and / or move the first detection device 20 and / or the second detection device 21, thereby enabling magnetic measurement of the entire area of ​​both sides of the disk.

[0068] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A magnetic measuring device, characterized in that, include: An excitation coil forms a detection chamber on its inner side, and the sample is placed inside the detection chamber. The detection assembly includes a detection device for detecting the magnetism of a sample by means of detection light. The detection device includes a first detection device and a second detection device. The first detection light of the first detection device and the second detection light of the second detection device can be incident on the first and second surfaces of the sample from different entrances of the detection chamber, respectively, and the irradiation positions of the first detection light and the second detection light are variable.

2. The apparatus according to claim 1, characterized in that, Also includes: The third displacement device is configured corresponding to the first detection device and is used to drive the first detection device to move and change the irradiation position of the first detection light. The fourth displacement device is configured corresponding to the second detection device and is used to drive the second detection device to move and change the irradiation position of the second detection light.

3. The apparatus according to claim 2, characterized in that, The detection device includes: The system consists of a light source, a polarizer, an analyzer, and a detector. The detection light emitted by the light source passes through the polarizer and is directed toward the sample. After being reflected by the sample, the light passes through the analyzer and reaches the detector.

4. The apparatus according to claim 3, characterized in that, The detection light is incident on the sample surface at a non-zero incident angle.

5. The apparatus according to claim 2, characterized in that, The detection device includes: The system consists of a light source, a polarizer, a beam splitter, an analyzer, and a detector. The detection light emitted by the light source passes through the polarizer and beam splitter before being directed toward the sample. After being reflected by the sample, the light returns to the beam splitter and passes through the analyzer to reach the detector.

6. The apparatus according to claim 1, characterized in that, The detection device includes: The system consists of a light source, a polarizer, a beam splitter, an analyzer, a detector, and a reflector. The detection light emitted by the light source passes through the polarizer, beam splitter, and reflector before entering the sample. After being reflected by the sample, the light returns to the reflector and then passes through the beam splitter and analyzer to reach the detector.

7. The apparatus according to claim 6, characterized in that, Also includes: The fifth displacement device is configured corresponding to the reflector of the first detection device and is used to drive the reflector of the first detection device to move and change the irradiation position of the first detection light. The sixth displacement device is configured corresponding to the reflector of the second detection device and is used to drive the reflector of the second detection device to move and change the irradiation position of the second detection light.

8. The apparatus according to claim 5 or 6, characterized in that, The detection light is incident perpendicularly on the sample surface.

9. The apparatus according to any one of claims 1 to 7, characterized in that, The sample is rotatably positioned within the detection chamber.

10. The apparatus according to any one of claims 1 to 7, characterized in that, The first and second detection beams move at least radially along the sample.

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