Scribing saw drying table with air knife

Abstract

The utility model discloses a dicing saw drying table with an air knife, the dicing saw drying table comprises a drying table main body, a linear moving assembly, a drying assembly, a top plate and a liquid blocking assembly, the top end of the drying table main body is provided with a liquid discharging groove, the corners of the bottom of the drying table main body are uniformly provided with supporting rods, the linear moving assembly is arranged at the top of the drying table main body, and the drying assembly is arranged on the top of the drying table main body. The drying assembly comprises an air cylinder arranged on the linear moving assembly, a fixing plate arranged at the bottom of the air cylinder and an air knife body connected with a bearing of the fixing plate, the top plate is connected to the front end and the rear end of the fixing plate in a hinged mode, and the liquid blocking assembly comprises a hydraulic cylinder arranged on the drying table body, a top seat arranged at the top end of the hydraulic cylinder and a surrounding plate arranged on the top seat. By arranging the liquid drainage groove, the liquid drainage hole, the top plate and the liquid blocking assembly, water or liquid flying out can be blocked, water or liquid can be conveniently collected, and meanwhile the surrounding plate can be conveniently replaced.

Description

Technical Field

[0001] This utility model relates to the technical field of dicing machine drying table, specifically a dicing machine drying table with an air knife. Background Technology

[0002] Dicing machine drying tables are core equipment in precision machining fields such as semiconductors and electronics manufacturing, used for efficient drying of wafers or substrates after dicing. Their design must be closely matched to the dicing process. To facilitate drying of diced wafers or substrates, air knives can be used. Air knives use high-pressure airflow (such as compressed air or nitrogen) to form a narrow, high-speed airflow blade, utilizing its strong impact and shearing force to quickly remove residual moisture or liquid from the substrate surface. However, when using air knives, residual moisture or liquid is blown away, increasing the difficulty of collection and presenting certain drawbacks. Therefore, we propose a dicing machine drying table with an integrated air knife. Utility Model Content

[0003] The present invention aims to solve the problems existing in the prior art or related technologies.

[0004] Therefore, the technical solution adopted by this utility model is as follows: a drying table for a dicing machine with an air knife, comprising a drying table body, a linear motion assembly, a drying assembly, a top plate, and a liquid-blocking assembly. The top of the drying table body is provided with a drain groove, and support rods are evenly distributed at the corners of the bottom of the drying table body. The linear motion assembly is arranged on the top of the drying table body. The drying assembly includes a cylinder arranged on the linear motion assembly, a fixed plate arranged at the bottom of the cylinder, and an air knife body connected to the fixed plate bearing. The top plate is hinged to the front and rear ends of the fixed plate. The liquid-blocking assembly includes a hydraulic cylinder arranged on the drying table body, a top seat arranged at the top of the hydraulic cylinder, and a surrounding plate arranged on the top seat.

[0005] Preferably, the inner wall of the drainage tank is provided with a drainage hole, which is rectangular.

[0006] Preferably, the linear motion assembly includes a fixed base disposed at the top of the drying table body, a drive motor disposed at the rear side of the fixed base, a lead screw disposed at the output end of the drive motor, and a bracket threadedly connected to the lead screw.

[0007] Preferably, the fixed base and the connected drive motor and lead screw form a group, and two groups are symmetrically arranged.

[0008] Preferably, a flexible hose is provided on the top of the air knife body and passes through the fixing plate, a heating tube is provided inside the air knife body, and several nozzles are provided at the bottom of the air knife body.

[0009] Preferably, a rotary motor is provided on the right side of the air knife body, and the rotary motor is located on the right side of the fixed plate.

[0010] Preferably, the top of the enclosure is provided with two horizontal plates, and each of the two horizontal plates has a round hole.

[0011] By adopting the above technical solution, the beneficial effects achieved by this utility model are as follows: The hydraulic cylinder of this utility model can drive the surrounding plate to move up and down through the horizontal plate. When it moves to a suitable height, the surrounding plate can block splashing water or liquid. The two top plates are located directly above the main body of the drying table, which can further block water or liquid, effectively preventing water or liquid from flying out and being difficult to collect. Then, the drain trough can collect water or liquid and discharge it through the drain hole. Finally, the round hole allows the top seat to be inserted into the horizontal plate, so that the surrounding plate can be quickly installed and disassembled for replacement. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model;

[0013] Figure 2 This utility model Figure 1 Schematic diagram of the main structure of the central drying table;

[0014] Figure 3 This utility model Figure 1 Schematic diagram of the main structure of the stroke knife;

[0015] Figure 4 This utility model Figure 1 A schematic diagram of the intermediate fluid baffle assembly.

[0016] Figure label:

[0017] 100. Drying table body; 101. Support rod; 102. Drainage tank; 103. Drainage hole;

[0018] 200. Linear motion component; 201. Fixed base; 202. Drive motor; 203. Lead screw; 204. Bracket;

[0019] 300. Drying assembly; 301. Cylinder; 302. Fixing plate; 303. Air knife body; 304. Hose; 305. Rotary motor; 306. Heating element; 307. Nozzle;

[0020] 400, Top Slab;

[0021] 500, Liquid-blocking assembly; 501, Hydraulic cylinder; 502, Top seat; 503, Enclosure plate; 504, Horizontal plate; 505, Round hole. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be noted that, unless otherwise specified, the embodiments and features of the present utility model can be combined with each other.

[0023] The following describes some embodiments of the present invention with reference to the accompanying drawings, providing a drying table for a dicing machine with an air knife.

[0024] Example 1:

[0025] Reference Figure 1-4 This is the first embodiment of the present invention. This embodiment provides a dicing machine drying table with an air knife, including a drying table body 100, a linear movement component 200, a drying component 300, a top plate 400, and a liquid baffle component 500.

[0026] Specifically, a drain trough 102 is provided at the top of the drying table body 100, and a drain hole 103 is provided on the inner wall of the drain trough 102. The drain hole 103 is rectangular. Support rods 101 are evenly distributed at the corners of the bottom of the drying table body 100. During use, residual moisture and liquid on the wafer or substrate can be collected through the drain trough 102, and then the moisture and liquid in the drain trough 102 can be discharged through the drain hole 103 for collection. The support rods 101 can support and fix the drying table body 100.

[0027] Specifically, the linear motion assembly 200 is arranged on the top of the drying table body 100. The linear motion assembly 200 includes a fixed base 201 arranged on the top of the drying table body 100, a drive motor 202 arranged on the rear side of the fixed base 201, a lead screw 203 arranged on the output end of the drive motor 202, and a bracket 204 threadedly connected to the lead screw 203. The fixed base 201, the drive motor 202 and the lead screw 203 connected thereto form a group, and two groups are symmetrically arranged. In use, the drive motor 202 can drive the lead screw 203 to rotate, thereby pushing the bracket 204, so as to drive the drying assembly 300 to move linearly to dry the wafer or substrate. The bracket 204 can support and fix the drying assembly 300.

[0028] Specifically, the drying assembly 300 includes a cylinder 301 mounted on the linear motion assembly 200, a fixed plate 302 mounted at the bottom of the cylinder 301, and an air knife body 303 connected to the fixed plate 302 by a bearing. A flexible hose 304 is mounted on the top of the air knife body 303 and passes through the fixed plate 302. A heating tube 306 is mounted inside the air knife body 303, and several nozzles 307 are mounted on the bottom of the air knife body 303. A rotary motor 305 is mounted on the right side of the air knife body 303, located on the right side of the fixed plate 302. In use, an air supply device can be connected through the flexible hose 304, allowing the air supply device to deliver high-pressure airflow to the nozzles 307 of the air knife body 303 for spraying. Simultaneously, the heating tube 306 can heat the air. The height of the air knife body 303 can be adjusted by the cylinder 301 to dry the wafer or substrate, and the angle of the nozzles 307 can be adjusted by the rotary motor 305 to ensure thorough drying.

[0029] Specifically, the top plate 400 is hinged to the front and rear ends of the fixed plate 302. During use, the top plate 400 can block water or liquid, effectively preventing water or liquid from flying out and being difficult to collect.

[0030] Specifically, the liquid-blocking assembly 500 includes a hydraulic cylinder 501 mounted on the main body 100 of the drying table, a top seat 502 mounted on the top of the hydraulic cylinder 501, and a surrounding plate 503 mounted on the top seat 502. The top of the surrounding plate 503 is provided with two horizontal plates 504, each with a round hole 505. In use, the hydraulic cylinder 501 can drive the top seat 502. Since the top seat 502 can be inserted into the round hole 505 of the horizontal plate 504, the hydraulic cylinder 501 can drive the surrounding plate 503 to move, so as to adjust the height of the surrounding plate 503. After adjustment, the surrounding plate 503 can block splashed water or liquid, effectively preventing water or liquid from flying out and being difficult to collect.

[0031] The working principle and usage process of this utility model are as follows: During use, the two hydraulic cylinders 501 of the liquid-blocking assembly 500 can be extended. The extension of the two hydraulic cylinders 501 will cause the top seat 502 to move upwards. During this upward movement, the top seat 502 will pass through the round hole 505 of the horizontal plate 504. After passing through, it will cause the horizontal plate 504 and the surrounding plate 503 to move upwards to a suitable height. Then, the hose 304 of the drying assembly 300 can be connected to the air supply device. After connection, the air supply device can deliver high-pressure airflow to the air knife body 303 for spraying, while simultaneously controlling the heating. The tube 306 is heated, and then the cylinder 301 is controlled to drive the air knife body 303 to move up and down until it reaches a suitable height. Then, the drive motor 202 of the linear motion component 200 is controlled to run. The running drive motor 202 can drive the bracket 204, cylinder 301 and air knife body 303 to move linearly through the lead screw 203, so as to dry the diced wafer or substrate. During the drying process, the surrounding plate 503 and the top plate 400 can block splashing water and liquid. The blocked splashing water and liquid will fall into the drain tank 102 and then be discharged through the drain hole 103.

[0032] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A drying table for a dicing machine with an air knife, characterized in that, include: A drain trough (102) is provided at the top of the drying table body (100), and support rods (101) are evenly distributed at the corners of the bottom of the drying table body (100). A linear motion assembly (200) is disposed on top of the drying table body (100); The drying assembly (300) includes a cylinder (301) arranged on the linear motion assembly (200), a fixing plate (302) arranged at the bottom of the cylinder (301), and an air knife body (303) that is connected to the fixing plate (302) by a bearing. The top plate (400) is hinged to the front and rear ends of the fixed plate (302); The liquid-blocking assembly (500) includes a hydraulic cylinder (501) mounted on the main body (100) of the drying table, a top seat (502) mounted on the top of the hydraulic cylinder (501), and a surrounding plate (503) mounted on the top seat (502).

2. The drying table for a dicing machine with an air knife according to claim 1, characterized in that, The inner wall of the drain trough (102) is provided with a drain hole (103), which is rectangular.

3. A dicing machine drying table with an air knife according to claim 1, characterized in that, The linear motion assembly (200) includes a fixed base (201) disposed at the top of the drying table body (100), a drive motor (202) disposed at the rear side of the fixed base (201), a lead screw (203) disposed at the output end of the drive motor (202), and a bracket (204) threadedly connected to the lead screw (203).

4. A dicing machine drying table with an air knife according to claim 3, characterized in that, The fixed base (201) and the connected drive motor (202) and lead screw (203) form a group, and two groups are symmetrically arranged.

5. A dicing machine drying table with an air knife according to claim 1, characterized in that, The top of the air knife body (303) is provided with a flexible tube (304), and the flexible tube (304) passes through the fixing plate (302). The interior of the air knife body (303) is provided with a heating tube (306), and the bottom of the air knife body (303) is provided with a number of nozzles (307).

6. A dicing machine drying table with an air knife according to claim 1, characterized in that, A rotary motor (305) is arranged on the right side of the air knife body (303), and the rotary motor (305) is arranged on the right side of the fixed plate (302).

7. A dicing machine drying table with an air knife according to claim 1, characterized in that, The top of the enclosure (503) is provided with two horizontal plates (504), and each of the two horizontal plates (504) has a round hole (505).

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