Driving device and magnetic measuring equipment

Abstract

The utility model relates to the technical field of magnetic measurement, and discloses a driving device which comprises a detection area, a driving part and a taking and sending part. The driving part comprises a first driving motor and a transmission shaft extending into the detection area, and the transmission shaft is connected with the first driving motor. The taking and conveying part comprises a first displacement device and a taking and conveying shaft connected with the first displacement device, and the first displacement device can drive the taking and conveying shaft to extend into the detection area to be in transmission with the transmission shaft. Wherein the sample can be fixed on the taking and feeding shaft. The transmission shaft drives the taking and conveying shaft fixed with the sample to rotate, so that the sample can rotate, the irradiation position of detection light on the sample is changed, the magnetic measurement equipment can measure different positions of the sample, and the measurement efficiency of the magnetic measurement equipment is improved. The utility model also discloses magnetic measurement equipment.

Description

Technical Field

[0001] This application relates to the field of magnetic measurement technology, and for example to a driving device and a magnetic measurement equipment. Background Technology

[0002] Currently, magnetic measurement technology plays an important role in physics, materials science, and engineering. Among them, magneto-optical Kerr effect (MOKE) measurement technology, as an effective magnetic characterization method, is widely used to study the magnetic properties of materials. However, existing MOKE equipment has relatively low temporal resolution, making it difficult to capture the dynamic magnetization process of samples on ultrafast timescales, thus limiting the study of transient phenomena in magnetic materials.

[0003] This research presents a pulsed MOKE device employing pulsed excitation, which uses short-duration pulsed magnetic fields or currents to excite the magnetization state of a sample. By using short-duration pulsed excitation, the device can capture the dynamic magnetization process of the sample on an ultrafast timescale, thereby achieving higher temporal resolution and providing strong support for the study of transient phenomena in magnetic materials.

[0004] In the process of implementing the embodiments of this disclosure, at least the following problems were found in the related art:

[0005] In measuring the magnetism of a sample at different locations using relevant techniques, the sample position needs to be adjusted multiple times to ensure the detection light illuminates different positions, which is time-consuming and necessitates improving the measurement efficiency of the magnetic measurement equipment. To improve the measurement efficiency, the equipment needs to be able to perform magnetic measurements at all different locations on the sample. Therefore, how to change the illumination position of the detection light on the sample has become a pressing technical problem to be solved.

[0006] The information disclosed in the background section is only intended to enhance the understanding of the background of this utility model, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0007] To provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended as a general commentary, nor is it intended to identify key / important components or describe the scope of protection of these embodiments, but rather as a prelude to the detailed description that follows.

[0008] This disclosure provides a driving device and a magnetic measuring device to change the irradiation position of the detection light on the sample, enabling the magnetic measuring device to measure different positions of the sample, thereby improving the measurement efficiency of the magnetic measuring device.

[0009] In some embodiments, the driving device includes: a detection area; a driving part including a first driving motor and a transmission shaft extending into the detection area, the transmission shaft being connected to the first driving motor; and a picking and feeding part including a first displacement device and a picking and feeding shaft connected to the first displacement device, the first displacement device being able to drive the picking and feeding shaft to extend into the detection area and drive the transmission shaft; wherein, the sample can be fixed on the picking and feeding shaft.

[0010] Optionally, the drive unit further includes: a base plate; a support assembly including at least one support unit disposed on the base plate, a drive shaft mounted on the support unit, and the support units being located between a first end and a second end of the drive shaft; wherein the first end is the connection end between the drive shaft and the first drive motor, and the second end is the transmission end between the drive shaft and the pick-and-place shaft.

[0011] Optionally, the support assembly includes: a transmission support disposed at the second end of the transmission shaft; and at least one intermediate support disposed between the transmission support and the first end.

[0012] Optionally, the pick-and-place shaft includes: a support section connected to the first displacement device; a rotating section rotatably connected to the support section; and a sample fixing section, one end of which is connected to the rotating section and the other end of which is a transmission surface.

[0013] Optionally, the first displacement device can drive the pick-and-place shaft to extend axially into the detection area.

[0014] Optionally, the first displacement device includes: a first movable element; at least one fixed frame disposed on the first movable element, and a pick-and-place shaft mounted on the fixed frame.

[0015] Optionally, the fixing frame includes: a first fixing frame disposed at the first end of the first movable element; and a second fixing frame disposed at the second end of the first movable element opposite to the first end.

[0016] Optionally, the drive device further includes: a detection chamber, including a first window and a second window, the first window being located on the side where the drive shaft extends and the second window being located on the side where the pick-and-place shaft extends; wherein the detection area is located inside the detection chamber, and both the first window and the second window are in communication with the interior and exterior of the detection chamber.

[0017] Optionally, the drive shaft and the pick-and-place shaft are coaxial, and the first window and the second window are arranged on opposite sides of the detection chamber along the axial direction of the drive shaft and the pick-and-place shaft.

[0018] In some embodiments, the magnetic measuring device includes: a magnetic field generating unit, the magnetic field generating unit including a bracket, an excitation coil fixed on the bracket and a detection chamber located inside the excitation coil; wherein the excitation coil generates a magnetic field along the axial direction of the excitation coil in the detection area; and the aforementioned driving device.

[0019] The driving device and magnetic measuring equipment provided in this disclosure can achieve the following technical effects:

[0020] The driving device includes a detection area, a driving section, and a pick-and-place section. The driving section includes a first driving motor and a transmission shaft extending into the detection area, the transmission shaft being connected to the first driving motor. The pick-and-place section includes a first displacement device and a pick-and-place shaft connected to the first displacement device. The first displacement device can drive the pick-and-place shaft to extend into the detection area and drive the transmission shaft. The sample can be fixed on the pick-and-place shaft. By driving the pick-and-place shaft, which holds the sample, to rotate, the sample can be rotated, thereby changing the position of the detection light on the sample. This allows the magnetic measuring device to measure different positions of the sample, improving the measurement efficiency of the magnetic measuring device.

[0021] The above general description and the description below are exemplary and illustrative only and are not intended to limit this application. Attached Figure Description

[0022] One or more embodiments are illustrated by way of example with reference to the accompanying drawings. These illustrations and drawings do not constitute a limitation on the embodiments. Elements having the same reference numerals in the drawings are shown as similar elements. The drawings are not to be scaled. And wherein:

[0023] Figure 1 This is a schematic diagram of the overall structure of a magnetic measuring device provided in an embodiment of this disclosure;

[0024] Figure 2 This is a schematic diagram of a sample structure provided in an embodiment of this disclosure;

[0025] Figure 3 This is a schematic diagram of an optical path structure provided in an embodiment of this disclosure;

[0026] Figure 4 This is a schematic diagram of another optical path structure provided in an embodiment of this disclosure;

[0027] Figure 5 This is a schematic diagram of another optical path structure provided in an embodiment of this disclosure;

[0028] Figure 6 This is a schematic diagram of another optical path structure provided in an embodiment of this disclosure;

[0029] Figure 7 This is a schematic diagram of a drive unit structure provided in an embodiment of this disclosure;

[0030] Figure 8 This is a schematic diagram of a magnetic field generating unit structure provided in an embodiment of this disclosure;

[0031] Figure 9This is a schematic diagram of a pickup and delivery unit structure provided in an embodiment of this disclosure;

[0032] Figure 10 This is a schematic diagram of a partial structure of a pickup and delivery unit provided in an embodiment of this disclosure;

[0033] Figure 11 This is a schematic diagram of a sample mounting section provided in an embodiment of this disclosure;

[0034] Figure 12 This is a schematic diagram of a transfer unit structure provided in an embodiment of this disclosure;

[0035] Figure 13 This is a schematic diagram of a second displacement device structure provided in an embodiment of this disclosure;

[0036] Figure 14 This is a schematic diagram of a telescopic component structure provided in an embodiment of this disclosure.

[0037] Figure label:

[0038] 10: Excitation coil; 11: Detection chamber; 12: Sample; 13: Support; 14: First base; 15: Transmission surface; 16: Connecting part;

[0039] 20: First detection device; 21: Second detection device; 22: Light source; 23: Polarizer; 24: Beam splitter; 25: Analyzer; 26: Detector; 261: First detector; 262: Second detector; 27: Mirror; 28: Wollaston prism; 29: Detection light;

[0040] 30: First drive motor; 31: Transmission shaft; 32: Pick-up and delivery shaft; 321: Support section; 322: Rotating section; 323: Sample fixing section; 33: Transmission support; 34: Intermediate support; 35: Base plate; 36: First movable element; 37: First fixed frame; 38: Second fixed frame; 39: Second drive motor;

[0041] 40: Robotic arm; 41: Sample box; 411: Receiving slot; 42: Second base; 43: Third drive motor; 44: Second movable element; 45: Fourth drive motor; 46: Telescopic mechanism; 47: Sample holder; 48: Adsorption head;

[0042] 50: Expansion wall; 52: Connecting flange; 54: Detection light spot; 55: Spot movement range; 56: Fixing hole; 57: Coupling. Detailed Implementation

[0043] To provide a more detailed understanding of the features and technical content of the embodiments of this disclosure, the implementation of the embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. The accompanying drawings are for illustrative purposes only and are not intended to limit the embodiments of this disclosure. In the following technical description, for ease of explanation, several details are used to provide a full understanding of the disclosed embodiments. However, one or more embodiments may still be implemented without these details. In other cases, well-known structures and devices may be simplified in their depiction to simplify the drawings.

[0044] It should be noted that, unless otherwise specified, the embodiments and features described in the present disclosure can be combined with each other.

[0045] Combination Figures 1 to 14 As shown, this disclosure provides a magnetic measurement device, including a main measuring device, a driving device, a transmission device, a sample pick-and-place device, and an optical measuring device. Each of the aforementioned devices comprises at least one or more of a transfer unit, a pick-and-place unit, a magnetic field generating unit, a driving unit, and a measuring unit. The transfer unit is used to transfer a sample 12 to the pick-and-place unit. The pick-and-place unit is used to fix the sample 12 transferred by the transfer unit and to deliver the sample 12 into the magnetic field generating unit. The magnetic field generating unit is used to generate a magnetic field acting on the sample 12. The measuring unit is used to measure the magnetic characteristics of the sample 12.

[0046] In the embodiments of this disclosure, sample 12 can be of any type and includes at least a first side and a second side, such as a disk, wafer, or silicon wafer. The following will use a disk-shaped sample 12, such as a disk, as an example to describe the various solutions of the embodiments of this disclosure.

[0047] Optionally, the driving device includes a detection area, a driving section, and a pick-and-place section. The driving section includes a first driving motor 30 and a transmission shaft 31 extending into the detection area, with the transmission shaft 31 connected to the first driving motor 30. The pick-and-place section includes a first displacement device and a pick-and-place shaft 32 connected to the first displacement device, which can drive the pick-and-place shaft 32 to extend into the detection area and drive the transmission shaft 31. The sample 12 can be fixed on the pick-and-place shaft 32.

[0048] In this embodiment, the first drive motor 30 is connected to the transmission shaft 31 via a coupling 57. The detection area is located within the detection chamber 11. The first displacement device can drive the pick-and-place shaft 32 to move, causing the pick-and-place shaft 32 to extend from the second window of the detection chamber 11 into the interior of the detection chamber 11, enter the detection area, and make transmission contact with the transmission shaft 31. The first drive motor 30 can drive the transmission shaft 31 to rotate, causing the pick-and-place shaft 32, which is in transmission contact with the transmission shaft 31, to rotate.

[0049] In this embodiment of the disclosure, the first displacement device can drive the pick-and-place shaft 32 to extend into the detection chamber 11 in any direction, such as the axial direction, any direction intersecting the axial direction, or other directions.

[0050] Using the driving device provided in this embodiment, when measuring sample 12, the drive shaft 32 extends into the detection area and drives the transmission shaft 31. At this time, the drive shaft 31 rotates, which in turn drives the drive shaft 32, on which sample 12 is fixed, to rotate, causing sample 12 to rotate. This changes the irradiation position of the detection light 29 on sample 12, enabling the magnetic measuring device to measure different positions of sample 12, thus improving the measurement efficiency of the magnetic measuring device. Furthermore, because the power charging time of the pulsed magnetic field is relatively long, and the rise and fall edges of the pulsed magnetic field are fast and short in duration, by changing the pose of sample 12, it is possible to measure as much of the test area of ​​sample 12 as possible within a single pulse cycle, thereby improving the measurement efficiency of the magnetic measuring device in the dimension of single pulse cycle measurement.

[0051] Optionally, the drive unit further includes a base plate 35 and a support assembly. The support assembly includes at least one support unit disposed on the base plate 35, and the drive shaft 31 is mounted on the support unit. The support units are all located between a first end and a second end of the drive shaft 31. The first end is the connection end between the drive shaft 31 and the first drive motor 30, and the second end is the transmission end between the drive shaft 31 and the pick-and-place shaft 32.

[0052] In this embodiment, the support unit can be any structure capable of supporting the drive shaft 31, such as an H-shaped support structure or a concave support structure. The support unit can be one or more, specifically one, two, or three. For example, one support unit can be provided at the first end, one support unit at the second end, or one or more support units can be provided between the first and second ends.

[0053] Thus, the base plate 35 and the support assembly provide a stable support foundation for the drive shaft 31, ensuring its smoothness and accuracy during operation. The support assembly includes at least one support unit located between the first and second ends of the drive shaft 31. This effectively distributes the force on the drive shaft 31, preventing deformation or damage due to uneven force distribution, thereby extending its service life. Furthermore, mounting the drive shaft 31 on the support unit facilitates its installation and removal, and complies with equipment maintenance and repair.

[0054] Optionally, the support assembly includes a transmission support 33 and at least one intermediate support 34. The transmission support 33 is disposed at the second end of the transmission shaft 31. The at least one intermediate support 34 is disposed between the transmission support 33 and the first end.

[0055] In this embodiment, any number of intermediate supports 34 can be provided between the transmission support 33 and the first end, such as one intermediate support 34 between the transmission support 33 and the first end, or two intermediate supports 34 between the transmission support 33 and the first end. The specific number of intermediate supports 34 can be determined according to the length of the transmission shaft 31, and the length of the transmission shaft 31 is positively correlated with the number of intermediate supports 34.

[0056] Thus, the transmission support 33 is located at the second end of the transmission shaft 31, directly supporting the transmission end of the transmission shaft 31. This ensures the stability and accuracy of the transmission shaft 31 when it is in transmission with the pick-up and delivery shaft 32, reducing vibration and swaying during transmission, thereby improving transmission efficiency and reliability. The intermediate support 34 is located between the transmission support 33 and the first end, further dispersing the force on the transmission shaft 31 and preventing deformation or damage to the transmission shaft 31 due to uneven force distribution. This enhances the rigidity and stability of the entire transmission system and extends the service life of the transmission shaft 31. The layout of providing the transmission support 33 at the end and the intermediate support 34 in the middle ensures that the transmission shaft 31 is effectively supported at different positions. This improves the smoothness of operation and measurement accuracy of the entire drive device, ensures the accuracy and stability of the sample 12's position during rotation, and ultimately enhances the overall performance and measurement efficiency of the magnetic measurement equipment.

[0057] Optionally, the pick-and-place shaft 32 includes a support section 321, a rotating section 322, and a sample fixing section 323. The support section 321 is connected to the first displacement device. The rotating section 322 is rotatably connected to the support section 321. One end of the sample fixing section 323 is connected to the rotating section 322, and the other end is a transmission surface 15.

[0058] In this embodiment, the support section 321 includes a support portion for connection to the first displacement device and a connecting portion 16 for connection to the rotating section 322 and / or the sample fixing section 323. The support portion and the connecting portion 16 are connected via a connecting flange 52. The connecting portion 16 is rotatably connected to the rotating section 322. The support section 321 is fixedly connected to the first displacement device, so that the first displacement device can drive the pick-and-place shaft 32 to move via the support section 321. The rotating section 322 is rotatably connected to the support section 321, and the rotating section 322 can rotate relative to the support section 321. One end of the sample fixing section 323 is fixedly connected to the rotating section 322, so that the sample fixing section 323 can drive the rotating section 322 to rotate, thereby allowing the sample 12 to rotate relative to the support section 321.

[0059] Thus, the pick-and-place shaft 32 includes a support section 321, a rotating section 322, and a sample fixing section 323. This segmented structural design enables the pick-and-place shaft 32 to perform multiple functions. The support section 321 is connected to the first displacement device, providing a stable support and driving foundation for the entire pick-and-place shaft 32, ensuring its smoothness and accuracy when axially extending into the detection area. The rotating section 322 is rotatably connected to the support section 321, allowing the pick-and-place shaft 32 to rotate after extending into the detection area, thereby rotating the sample 12 on the sample fixing section 323 and changing the irradiation position of the detection light 29 on the sample 12. One end of the sample fixing section 323 is connected to the rotating section 322, and the other end is a transmission surface 15. This not only firmly fixes the sample 12, ensuring its stability during rotation, but also allows for power transmission through the transmission surface 15 to the transmission shaft 31.

[0060] Optionally, the first displacement device can drive the pick-and-place shaft 32 to extend axially into the detection area.

[0061] In this way, the first displacement device can drive the pick-and-place shaft 32 to extend into the detection area axially. The axial drive makes the movement of the pick-and-place shaft 32 more stable and controllable, reducing the shaking and displacement of the sample 12 during the transmission process, which helps to protect the sample 12 and the equipment and extend the service life of the equipment.

[0062] Optionally, the first displacement device includes a first movable element 36 and at least one fixed frame. The at least one fixed frame is disposed on the first movable element 36, and the pick-and-place shaft 32 is mounted on the fixed frame.

[0063] In this embodiment, the first displacement device can be any device capable of driving the pick-and-place shaft 32 to displacement, such as a contact displacement device or a non-contact displacement device. Contact displacement devices include mechanisms involving a slider and a groove, gear transmission mechanisms, and / or cam mechanisms. Non-contact displacement devices include magnetic drive mechanisms, pneumatic and hydraulic mechanisms, electromagnetic drive mechanisms, and / or thermal expansion drive mechanisms. The first movable element 36 is the moving part of the first displacement device. A fixed frame is mounted on the first movable element 36. The first movable element 36 includes a slider in a slider-groove mechanism, and / or a follower in a cam mechanism, and / or a magnetic follower in a magnetic drive mechanism.

[0064] In this embodiment, the fixing frame can be any structure capable of fixing the pick-and-place shaft 32 to the first movable element 36. For example, an H-shaped support structure, or a concave support structure, etc. The fixing frame can be one or more, specifically one, two, or three. For example, a fixing frame can be provided at one end of the first movable element 36, and a fixing frame at the opposite end, or fixing frames can be provided at both ends, etc.

[0065] Thus, the first displacement device consists of a first movable element 36 and at least one fixed frame. The at least one fixed frame is disposed on the first movable element 36 and can be flexibly configured according to the length and weight of the pick-and-place shaft 32. Multiple fixed frames can better distribute the weight and force of the pick-and-place shaft 32, making the installation and fixation of the pick-and-place shaft 32 more stable. This ensures that when the pick-and-place shaft 32 is driven to extend axially into the detection area, the pick-and-place shaft 32 can maintain a stable state, reducing shaking and offset, and improving the accuracy and reliability of the measurement.

[0066] Optionally, the fixing frame includes a first fixing frame 37 and a second fixing frame 38. The first fixing frame 37 is disposed at a first end of the first movable element 36. The second fixing frame 38 is disposed at a second end of the first movable element 36 opposite to the first end.

[0067] Thus, the fixing frame consists of a first fixing frame 37 and a second fixing frame 38, which are respectively set at the first end and the second end of the first movable element 36. The symmetrical distribution design can more evenly distribute the weight and force of the pick-and-place shaft 32, effectively improving the stability and balance of the pick-and-place shaft 32 during axial movement and rotation.

[0068] Optionally, the drive device further includes a detection chamber 11. The detection chamber 11 includes a first window and a second window, the first window being located on the side where the drive shaft 31 extends, and the second window being located on the side where the pick-and-place shaft 32 extends. The detection area is located within the detection chamber 11, and both the first and second windows communicate with the interior and exterior of the detection chamber 11.

[0069] In this embodiment, the drive shaft 31 extends into the detection chamber 11 through the first window, and the pick-and-place shaft 32 extends into the detection chamber 11 through the second window. The size, shape, and / or area of ​​the first and second windows may be the same or different. The first or second window can be set to any size, shape, and / or area. For example, the shape of the first or second window may be set to a circle, rectangle, or trapezoid, etc., and the areas of the first and second windows may be equal or unequal, as long as the detection light 29 can enter the sample 12 without obstruction from the first and / or second windows. For example, if the sample 12 is rotatable, the detection light 29 can enter the sample 12 without obstruction along at least one radius of the sample 12 from the first and / or second windows; or, if the sample 12 cannot rotate and move, the detection light 29 can enter at least all areas to be detected of the sample 12 without obstruction from the first and / or second windows.

[0070] In this way, the addition of a detection chamber 11 to the drive unit provides a relatively independent and stable space for the detection area, effectively isolating external interference and ensuring the stability and accuracy of the measurement process. The detection chamber 11 is equipped with a first window and a second window, corresponding to the insertion sides of the drive shaft 31 and the pick-and-place shaft 32, respectively. This allows the drive shaft 31 and the pick-and-place shaft 32 to move more smoothly and accurately into and out of the detection area, avoiding mutual interference and improving the operating efficiency and reliability of the equipment. Furthermore, both the first and second windows are connected to the interior and exterior of the detection chamber 11, facilitating gas exchange and pressure balance within and outside the chamber. This prevents pressure differences from affecting the normal operation of the equipment and allows for the creation of specific measurement environments within the detection chamber 11, such as controlling temperature and humidity or filling with protective gas, to meet the measurement requirements of different samples 12, further enhancing the applicability and measurement accuracy of the magnetic measurement equipment.

[0071] Optionally, the drive shaft 31 and the pick-up and delivery shaft 32 are coaxial, and the first window and the second window are arranged on opposite sides of the detection chamber 11 along the axial direction of the drive shaft 31 and the pick-up and delivery shaft 32.

[0072] In this way, the drive shaft 31 and the pick-and-place shaft 32 are coaxial, ensuring that they move in the same straight line. This effectively improves the accuracy and stability of sample 12 transmission, reduces errors and vibrations caused by misalignment of the axes, and improves the accuracy and reliability of the measurement. Furthermore, the first and second windows are positioned on opposite sides of the detection chamber 11 along the axial direction of the drive shaft 31 and the pick-and-place shaft 32, making the movement of the drive shaft 31 and the pick-and-place shaft 32 into and out of the detection chamber 11 smoother and more precise, avoiding mutual interference, simplifying the mechanical structure, and improving the compactness and space utilization of the equipment.

[0073] Optionally, the main measuring device includes an excitation coil 10 and a detection assembly. A detection chamber 11 is formed inside the excitation coil 10, and the sample 12 is disposed inside the detection chamber 11. The detection assembly includes a detection device for detecting the magnetism of the sample 12 by means of a detection light 29. The detection device includes a first detection device 20 and a second detection device 21. The first detection light of the first detection device 20 and the second detection light of the second detection device 21 can be incident on the first and second surfaces of the sample 12 from different entrances of the detection chamber 11, respectively, and the irradiation positions of the first detection light and the second detection light on the first and second surfaces of the sample 12 are variable.

[0074] In this embodiment, the magnetic field generating unit includes a support 13 and an excitation coil 10 fixed on the support 13. The excitation coil 10 is coaxially arranged with the drive shaft 31 and / or the pick-and-place shaft 32. The diameter of the excitation coil 10 is larger than the diameter of the drive shaft 31 and / or the pick-and-place shaft 32. The inner side of the excitation coil 10 is the detection chamber 11. The excitation coil 10 can be wound around the support 13, and the portion of the excitation coil 10 wound on the support 13 is cylindrical. The excitation coil 10 can be wound around the surface of this cylinder, and the inner side of the cylinder is the detection chamber 11. Alternatively, the excitation coil 10 can be unwound from the support 13, and fixed only from both sides by the support 13. In this case, the inner side of the excitation coil 10 is the detection space.

[0075] In this embodiment of the present disclosure, the detection chamber 11 includes at least a plurality of windows, such as a first window through which the first detection light passes and a second window through which the second detection light passes. The number of windows in the detection chamber 11 is set in accordance with the number of sides of the sample 12 to be tested. For example, if the sample 12 has three or four sides to be tested, the detection chamber 11 may be provided with three or four windows corresponding to the sides to be tested through which the detection light 29 can pass.

[0076] The magnetic measuring device provided in this embodiment includes an excitation coil 10 and a detection component. A detection chamber 11 is formed inside the excitation coil 10, and a sample 12 is disposed within the detection chamber 11. The detection component includes a first detection device 20 and a second detection device 21 for detecting the magnetism of the sample 12 using a detection light 29. The corresponding first and second detection lights can be incident on the first and second surfaces of the sample 12 from different entrances of the detection chamber 11, and the illumination positions of the first and second detection lights are variable. During each measurement of the sample 12 by changing its magnetism using a pulsed magnetic field, the first and second surfaces of the sample 12 are measured simultaneously via a variable detection optical path. This allows for the simultaneous measurement of the magnetism of more regions of the sample 12 within approximately the same measurement time, thereby improving the measurement efficiency of the magnetic measuring device in both multiple and single-measurement dimensions.

[0077] Optionally, the magnetic measuring device further includes a third displacement device and a fourth displacement device. The third displacement device is configured correspondingly to the first detection device 20 and is used to drive the first detection device 20 to move, thereby changing the illumination position of the first detection light. The fourth displacement device is configured correspondingly to the second detection device 21 and is used to drive the second detection device 21 to move, thereby changing the illumination position of the second detection light.

[0078] In this embodiment, the sample 12 is rotatably disposed in the detection chamber 11. Specifically, the sample 12 can rotate around the central axis perpendicular to the fixing hole 56, and the detection light spot 54 can move along the spot movement range 55.

[0079] In this embodiment, the third and fourth displacement devices can drive the first detection device 20 and the second detection device 21 to move in any direction, such as radial displacement along the sample 12, circumferential displacement along the sample 12, or axial displacement along the sample 12. In other embodiments, the third and fourth displacement devices can also drive the first detection device 20 and the second detection device 21 to rotate. For example, they can rotate around the geometric centers of the first detection device 20 and the second detection device 21, or around the geometric center of the sample 12. Correspondingly, the third and fourth displacement devices can be any devices capable of driving the first detection device 20 and the second detection device 21 to move. For example, the third and fourth displacement devices can be linear displacement devices that use a sliding groove and a slider to drive displacement, or they can be rotary displacement devices, etc.

[0080] In this way, the first detection device 20 and the second detection device 21 are driven to move by the third displacement device and the fourth displacement device respectively, thereby changing the irradiation position of the first detection light and the second detection light on the sample 12, and realizing the change of the detection position of different surfaces of the sample 12.

[0081] Optionally, the detection device includes a light source 22, a polarizer 23, an analyzer 25, and a detector 26. The detection light 29 emitted by the light source 22 passes through the polarizer 23 and is directed toward the sample 12. After being reflected by the sample 12, it passes through the analyzer 25 and reaches the detector 26.

[0082] In this embodiment, the detection light 29, after passing through the analyzer 25, is incident obliquely on the sample 12, and the relative positions of the light source 22, polarizer 23, analyzer 25, and detector 26 are fixed. By adjusting the overall position of the light source 22, polarizer 23, analyzer 25, and detector 26, and ensuring that the incident angle of the detection light 29 remains unchanged during the position adjustment process, the detection light 29 reflected from the sample 12 can accurately reach the detector 26 after passing through the analyzer 25, thereby changing the illumination position of the detection light 29 on the sample 12.

[0083] In this way, the detection light 29 emitted by the light source 22 reaches the surface of the sample 12 directly after passing through the polarizer 23. The reflected detection light 29 then hits the analyzer 25, and finally reaches the detector 26 after being analyzed by the analyzer 25, thus realizing the detection of the magnetism of the sample 12.

[0084] Optionally, the detection light 29 is incident on the surface of the sample 12 at a non-zero incident angle.

[0085] In this embodiment of the disclosure, the non-zero incident angle includes any non-zero angle, specifically (0, 90°).

[0086] In this way, when the detection light 29 is incident on the surface of the sample 12 at a non-zero incident angle, the detection light 29 interacts with the surface of the sample 12. By analyzing the characteristics of the reflected detection light 29, such as intensity, polarization state, and phase, local information of the sample 12 in the incident light spot area can be obtained to study the surface structure, optical properties, and film thickness of the sample 12.

[0087] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, and a detector 26. The detection light 29 emitted by the light source 22 passes through the polarizer 23 and the beam splitter 24 and is directed toward the sample 12. After being reflected by the sample 12, it returns to the beam splitter 24 and passes through the analyzer 25 to reach the detector 26.

[0088] In this embodiment, the relative positions of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26 are fixed. By adjusting the overall position of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26, and ensuring that the detection light 29 is always perpendicularly incident on the sample 12, the detection light 29 reflected by the sample 12 can be made to return along the original path to the beam splitter 24, and finally reach the detector 26 through the analyzer 25, thereby changing the illumination position of the detection light 29 on the sample 12.

[0089] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then the detection light 29 is made to be perpendicular to the surface of the sample 12 by the beam splitter 24. After being reflected by the sample 12, the detection light 29 returns to the beam splitter 24 along the original path. The beam splitter 24 then splits the light and directs it to the analyzer 25. Finally, the analyzer 25 reaches the detector, thereby effectively analyzing the reflection characteristics of polarized light by the sample 12 to study the optical properties of the sample 12, such as reflectivity and changes in polarization state, and thus obtaining information about the surface or internal structure of the sample 12. At the same time, the use of the beam splitter 24 makes the optical path more flexible, which facilitates the adjustment of the optical path or the introduction of other optical components during the detection process to achieve more complex detection functions.

[0090] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, a detector 26, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27 before entering the sample 12. After being reflected by the sample 12, it returns to the reflector 27 and then passes through the beam splitter 24 and the analyzer 25 before reaching the detector 26.

[0091] In this embodiment, the relative positions of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26 are fixed, and the reflector 27 can be displaced along the optical axis of the detection light 29 emitted from the beam splitter 24. During the displacement, the incident angle of the detection light 29 emitted from the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 reflected by the reflector 27 is always perpendicular to the sample 12. Since the incident angle of the detection light 29 emitted from the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 is always perpendicular to the sample 12, the detection light 29 reflected by the sample 12 can always return to the reflector 27 and beam splitter 24 along the original path during the displacement of the reflector 27. Therefore, by simply controlling the displacement of the reflector 27 along the optical axis of the detection light 29 emitted from the beam splitter 24, the irradiation of the detection light 29 at different positions on the sample 12 can be achieved.

[0092] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then guided by the beam splitter 24 and the reflector 27 to be incident on the surface of the sample 12. The detection light 29 reflected by the sample 12 returns along the same path, passes through the reflector 27 and the beam splitter 24 again, and finally passes through the analyzer 25 to reach the detector 26. By simply adjusting the reflector 27, the illumination position of the detection light 29 on the sample 12 can be adjusted, enabling the detection of different positions on different surfaces of the sample 12.

[0093] Optionally, the magnetic measuring device further includes a fifth displacement device and a sixth displacement device. The fifth displacement device is configured corresponding to the reflector 27 of the first detection device 20 and is used to drive the reflector 27 of the first detection device 20 to move, thereby changing the illumination position of the first detection light. The sixth displacement device is configured corresponding to the reflector 27 of the second detection device 21 and is used to drive the reflector 27 of the second detection device 21 to move, thereby changing the illumination position of the second detection light.

[0094] In this embodiment, the fifth and sixth displacement devices can respectively drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to move in any direction, such as radial displacement along the sample 12, circumferential displacement along the sample 12, or axial displacement along the sample 12. In other embodiments, the fifth and sixth displacement devices can also respectively drive the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to rotate. For example, rotating around the geometric center of the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21, or rotating around the geometric center of the sample 12, etc. Correspondingly, the fifth and sixth displacement devices can be any devices capable of driving the reflector 27 of the first detection device 20 and the reflector 27 of the second detection device 21 to move. For example, the fifth and sixth displacement devices can be linear displacement devices that use a sliding groove and a slider to drive displacement, or they can be rotary displacement devices, etc.

[0095] In this way, the reflector 27 of the first detection device 20 is driven by the fifth displacement device, and the reflector 27 of the second detection device 21 is driven by the sixth displacement device, thereby changing the irradiation position of the detection light 29 on the first and second surfaces of the sample 12.

[0096] Optionally, the detection light 29 is incident perpendicularly on the surface of the sample 12.

[0097] In this way, by making the detection light 29 incident perpendicularly on the surface of the sample 12, the detection light 29 can be returned along the original path, thereby changing the irradiation position of the detection light 29 on the sample 12.

[0098] Optionally, the sample 12 is rotatably disposed within the detection chamber 11.

[0099] In this embodiment of the disclosure, the sample 12 can be rotated about any axis, such as an axis perpendicular to the surface of the sample 12 and passing through the geometric center of the sample 12, or an axis parallel to the surface of the sample 12 and passing through the geometric center of the sample 12, etc.

[0100] In this way, by rotating sample 12, the illumination position of detection light 29 on sample 12 can be changed. This can be achieved both when the optical path cannot be moved and when the optical path moves together, to achieve a faster and more accurate change in the illumination position of detection light 29.

[0101] Optionally, the first detection light and the second detection light move at least radially in the sample 12.

[0102] In this embodiment, sample 12 can be a disc-shaped sample 12 having a first surface and a second surface. The first detection light and the second detection light move along any radial direction of the disc-shaped sample 12, such as moving along a radial direction coinciding with the Y-axis, or moving along a radial direction forming a predetermined angle with the Y-axis. In other embodiments, the first detection light and the second detection light can also move non-radially, such as moving along any straight line that does not pass through the center point, such as a straight line parallel to a radius coinciding with the Y-axis, or a straight line parallel to a radius forming a predetermined angle with the Y-axis.

[0103] In this way, by controlling the optical path to move the first detection light and the second detection light along the radial direction of the sample 12, as long as the sample 12 is rotated, the detection light 29 can irradiate all positions of the sample 12, that is, magnetic measurements can be performed on all positions of the sample 12.

[0104] Optionally, the transmission device includes a detection area, a pick-and-place section, and a transfer section. The pick-and-place section includes a first displacement device and a pick-and-place shaft 32 connected to the first displacement device, wherein the first displacement device can drive the pick-and-place shaft 32 to extend into the detection area. The transfer section includes a robotic arm 40 for gripping the sample 12, wherein the robotic arm 40 can transfer the gripped sample 12 to the pick-and-place shaft 32, and the pick-and-place shaft 32 can fix the sample 12 transferred by the robotic arm 40.

[0105] In this embodiment, the sample 12 can be transferred using any type of robotic arm 40, such as an adsorption robotic arm 40 or a clamping robotic arm 40, depending on the type of sample 12 or the testing requirements. For example, the robotic arm 40 includes a base and a main body, with the main body connected to the base, and includes joints and links connected in sequence; wherein each joint provides at least one degree of freedom to the adjacent link.

[0106] The transmission device provided in this embodiment includes a detection area, a pick-up and delivery section, and a transfer section. The pick-up and delivery section includes a first displacement device and a pick-up and delivery shaft 32 connected to the first displacement device. The first displacement device can drive the pick-up and delivery shaft 32 to extend into the detection area. The transfer section includes a robotic arm 40 for gripping a sample 12. The robotic arm 40 can transfer the gripped sample 12 to the pick-up and delivery shaft 32, which can fix the sample 12 transferred by the robotic arm 40. After gripping the sample 12, the robotic arm 40 transfers it to the pick-up and delivery shaft 32, and fixes the sample 12 to achieve rotation. Finally, the pick-up and delivery shaft 32 is controlled to extend into the detection area, promptly delivering the sample 12 fixed on the pick-up and delivery shaft 32 into the detection area. By providing a transmission device combining a robotic arm 40 and a pick-up and delivery shaft 32, it is possible to ensure that the sample 12 is promptly loaded into the detection area and rotates.

[0107] Optionally, the transfer unit also includes a sample box 41. The sample box 41 includes a third window and a second displacement device. The third window is located at the bottom of the sample box 41, and the second displacement device is located below the sample box 41. The second displacement device is used to lift the sample 12 at a selected position through the third window.

[0108] In this embodiment of the disclosure, the sample box 41 can be of any shape, such as a cuboid or a cube, wherein the top surface of the sample box 41 is uncovered and a third window is provided on the bottom surface.

[0109] Thus, the transfer unit is equipped with a sample box 41, which provides storage space for samples 12 and can accommodate multiple samples 12, thereby improving the batch processing capacity of the equipment. The sample box 41 is designed with a third window and a second displacement device. The third window is located at the bottom, which facilitates the second displacement device to lift the sample 12 from below. The second displacement device lifts the sample 12 at the selected position through the third window, making the selection and transfer of the sample 12 more accurate and efficient.

[0110] Optionally, the second displacement device includes a second base 42, a second movable element 44 mounted on the second base 42, and a telescopic assembly connected to the second movable element 44. The second movable element 44 can drive the telescopic assembly to any position corresponding to the third window, and the telescopic assembly can extend from the third window into the sample box 41 to lift the sample 12.

[0111] In this embodiment, the second displacement device is similar to the first displacement device, and can be any device capable of driving the displacement of the pick-and-place shaft 32, such as a contact displacement device or a non-contact displacement device. Contact displacement devices include mechanisms involving a slider and a groove, gear transmission mechanisms, and / or cam mechanisms. Non-contact displacement devices include magnetic drive mechanisms, pneumatic and hydraulic mechanisms, electromagnetic drive mechanisms, and / or thermal expansion drive mechanisms. The second displacement device includes a third drive motor 43, and a second movable element 44 is the moving part of the second displacement device. The third drive motor 43 drives the displacement of the second movable element 44. A telescopic assembly is disposed on the second movable element 44. The second movable element 44 includes a slider in a slider-groove mechanism, and / or a follower in a cam mechanism, and / or a magnetic follower in a magnetic drive mechanism.

[0112] In this way, the second movable element 44 can drive the telescopic assembly to move to any position corresponding to the third window, realizing flexible selection and lifting of the sample 12 at different positions within the sample box 41, thus meeting diverse measurement needs. The telescopic assembly extends into the sample box 41 from the third window to lift the sample 12, making the transfer process of the sample 12 smoother and more efficient, reducing the shaking and offset of the sample 12 during transfer, and protecting the sample 12 and the equipment.

[0113] Optionally, the telescopic assembly includes a telescopic mechanism 46, a sample holder 47, and a fourth drive motor 45. The telescopic mechanism 46 is connected to the second sliding assembly. The sample holder 47 is disposed at the top of the telescopic mechanism 46. The fourth drive motor 45 is connected to the telescopic mechanism 46 and is used to drive the telescopic mechanism 46 to extend and retract, so that the sample holder 47 extends from the third window into the sample box 41 to lift the sample 12.

[0114] In this way, the fourth drive motor 45 drives the telescopic mechanism 46 to extend and retract, so that the sample holder 47 extends from the third window into the sample box 41 to lift the sample 12. This effectively utilizes the space, allowing the sample box 41 to compactly store multiple samples 12, while ensuring that the sample 12 can be accurately lifted to the designated position, which is convenient for the robotic arm 40 to grasp and for subsequent measurement operations.

[0115] Optionally, the sample box 41 also includes at least two receiving slots 411. The shape of each receiving slot 411 is adapted to the shape of the sample 12.

[0116] In this embodiment of the disclosure, a positioning plate may be provided between each receiving slot 411 to separate the space of each receiving slot 411 and the sample 12 within the receiving slot 411. The bottom openings of the multiple receiving slots 411 together form a third window at the bottom of the sample box 41. The sample holder 47 can extend into each receiving slot 411 from the third window to push the sample 12 within each receiving slot 411 out along the receiving slot 411.

[0117] Thus, the sample box 41 is provided with at least two receiving slots 411, which can store multiple samples 12 at one time, adapting to the needs of batch measurement. The shape of each receiving slot 411 is adapted to the shape of the sample 12, ensuring that the sample 12 is stably placed during storage and transportation, avoiding displacement or damage of the sample 12 due to shape mismatch, and improving the accuracy and reliability of measurement.

[0118] Optionally, the transfer device further includes a detection chamber 11. The detection chamber 11 includes a second window located on the side where the pick-and-place shaft 32 extends and communicates with the detection chamber 11. The detection area is located within the detection chamber 11, and the area of ​​the second window is larger than the cross-sectional area of ​​the sample 12.

[0119] In this embodiment of the disclosure, the area of ​​the second window being greater than the cross-sectional area of ​​the sample 12 means that the projection of the cross-section of the sample 12 is located within the projection of the second window in the cross-sectional direction of the sample 12.

[0120] In this way, the transmission device is equipped with a detection chamber 11, providing a relatively independent and stable space for the detection area, effectively isolating external interference and ensuring the stability and accuracy of the measurement process. A second window is provided in the detection chamber 11, located on the side where the pick-and-place shaft 32 extends and communicating with the detection chamber 11. This allows the pick-and-place shaft 32 to move more smoothly and accurately into and out of the detection area, avoiding mutual interference and improving the operating efficiency and reliability of the equipment. Furthermore, the area of ​​the second window is larger than the cross-sectional area of ​​the sample 12, ensuring that the sample 12 will not collide with the window edge during transmission and measurement, protecting the sample 12 and the equipment. It also provides sufficient space for the illumination of the detection light 29, which is beneficial for improving the measurement accuracy and applicability of the magnetic measurement equipment.

[0121] Optionally, the robotic arm 40 includes an adsorption head 48. The adsorption head 48 is disposed at the end of the end link for adsorbing the sample 12.

[0122] In this embodiment of the disclosure, the adsorption head 48 can be a vacuum suction cup or a magnetic adsorption head 48, used to adsorb the sample 12.

[0123] In this way, by using the adsorption head 48 to grasp the sample 12, it is possible to avoid contamination or damage to the surface of the sample 12, thus protecting the integrity of the sample 12 and the measurement accuracy.

[0124] Optionally, the transmission device further includes a drive unit. The drive unit is connected to the pick-and-place shaft 32 and is used to drive the pick-and-place shaft 32 to rotate.

[0125] In this way, by setting up a drive unit and connecting it to the pick-and-place shaft 32, the rotation of the pick-and-place shaft 32 is realized, allowing the sample 12 fixed on the pick-and-place shaft 32 to rotate within the detection area. This expands the irradiation range of the detection light 29 on the sample 12 and improves the detection capability and measurement efficiency of the magnetic measuring device for different areas of the sample 12.

[0126] Optionally, the sample delivery device includes a delivery shaft 32 and a first displacement device. The delivery shaft 32 includes a support section 321 and a sample fixing section 323 connected to the support section 321. The sample fixing section 323 can fix the sample 12 through the inner wall of the fixing hole 56 of the sample 12. The first displacement device is connected to the support section 321 and can drive the delivery shaft 32 to move, so that the sample 12 fixed to the delivery shaft 32 enters the detection area.

[0127] In this embodiment of the present disclosure, an expansion wall 50 may be provided on the sample fixing section 323. The sample fixing section 323 fixes the sample 12 through the inner wall of the fixing hole 56 of the sample 12. Specifically, the sample 12 can be fixed by expanding and tightening the inner wall of the fixing hole 56, or by clamping the inner wall of the fixing hole 56 through a clamping structure, etc.

[0128] Using the sample delivery device provided in this embodiment, the sample 12 is fixed to the delivery shaft 32 through the inner wall of the fixing hole 56 of the sample 12. The sample 12 can be delivered into the detection area through the delivery shaft 32, and the sample 12 can rotate as the delivery shaft 32 rotates.

[0129] Optionally, the support section 321 is fixedly connected to the sample fixing section 323.

[0130] In this embodiment, the support section 321 is fixedly connected to the sample fixing section 323, and no rotating section 322 is provided between the support section 321 and the sample fixing section 323, so that the pick-and-place shaft 32 will rotate as a whole with the transmission shaft 31.

[0131] In this way, the support section 321 is fixedly connected to the sample fixing section 323, and the stability and integrity between the two are ensured by the rigid connection, so that the pick-and-place shaft 32 can rotate as a whole.

[0132] Optionally, the drive unit includes a fifth drive motor. The fifth drive motor is connected to the support section 321 and is used to drive the support section 321 to rotate.

[0133] In this way, the drive unit uses a fifth drive motor connected to the support section 321, achieving direct drive of the support section 321. This drives the sample fixing section 323 and the fixed sample 12 to rotate stably and accurately, meeting the need for multi-angle measurement of the sample 12 within the detection area. Furthermore, by directly driving the entire pick-and-place shaft 32 with the fifth drive motor, intermediate transmission links are reduced, lowering the risk of mechanical failure and improving the reliability of the equipment.

[0134] Optionally, the sample fixing section 323 may also include a positioning section. The positioning section is located on the side of the sample fixing section 323 away from the transmission surface 15 of the pick-and-place shaft 32, and a positioning boss is provided on the outer surface in a circumferential direction for positioning the sample 12.

[0135] In this way, the sample fixing section 323 is equipped with a positioning section, which is located on the side of the sample fixing section 323 away from the transmission surface 15 of the pick-up and delivery shaft 32. The outer surface is provided with a positioning boss in the circumferential direction to position the sample 12, which ensures the accuracy and stability of the sample 12 during installation, avoids the sample 12 from shifting or shaking during pick-up and delivery and rotation, and improves the reliability and accuracy of measurement.

[0136] Optionally, the first displacement device includes a first base 14. The first movable component includes a first movable element 36 disposed on the first base 14, a second drive motor 39 for driving the displacement of the first movable element 36, and at least one fixing bracket disposed on the first movable element 36 for mounting the pick-and-place shaft 32.

[0137] In this embodiment, the first movable element 36 can be a first slider. A first groove is provided on the first base 14, and the first slider is slidably connected to the first groove. The second drive motor 39 is used to drive the first slider to slide on the first groove.

[0138] Thus, the first displacement device includes a first base 14, providing a stable support foundation for the entire device and ensuring the smoothness of the pick-and-place shaft 32 during movement. The first movable component includes a first movable element 36 disposed on the first base 14 and a second drive motor 39 for driving its displacement. The second drive motor 39 drives the first movable component to move the pick-and-place shaft 32, enabling the sample 12 to be accurately delivered into the detection area. At least one fixing bracket is provided on the first movable element 36 to mount the pick-and-place shaft 32, ensuring that the pick-and-place shaft 32 remains stable during movement, avoiding shaking and deviation, and improving the reliability of the measurement.

[0139] Optionally, the optical measuring device includes an excitation coil 10, at least one detection device, and a displacement assembly. A detection chamber 11 is formed inside the excitation coil 10, and the sample 12 is rotatably disposed within the detection chamber 11. The detection device includes a reflector 27, and detection light 29 reflected by the reflector 27 can enter the sample 12 from the entrance of the detection chamber 11. The detection device is used to detect the magnetism of the sample 12 by means of the detection light 29. The displacement assembly is connected to the reflector 27 and is used to drive the reflector 27 to move, changing the incident position of the detection light 29 on the sample 12.

[0140] Using the measuring device provided in this embodiment, there is no need to move the overall structure of the optical path system. The movement of the optical path can be controlled simply by moving the reflector 27, thereby changing the irradiation position of the detection light 29 on the sample 12. At the same time, there is no need to control the displacement of the sample 12. Only the rotation of the sample 12 in conjunction with the movement of the reflector 27 needs to be controlled. This further reduces the range of movement required for the reflector 27, reduces the limitations imposed by the mounting structure on the movement of the optical path system and the sample 12, increases the detectable range of the sample 12, and makes it easier to achieve magnetic measurement of the entire area of ​​the sample 12.

[0141] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, an analyzer 25, a detector 26, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27 before entering the sample 12. After being reflected by the sample 12, it returns to the reflector 27 and then passes through the beam splitter 24 and the analyzer 25 before reaching the detector 26.

[0142] In this embodiment, the relative positions of the light source 22, polarizer 23, beam splitter 24, analyzer 25, and detector 26 are fixed, and the reflector 27 can be displaced along the optical axis of the detection light 29 emitted from the beam splitter 24. During the displacement, the incident angle of the detection light 29 emitted from the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 reflected by the reflector 27 is perpendicularly incident on the sample 12. Since the incident angle of the detection light 29 emitted from the beam splitter 24 on the reflector 27 remains unchanged, and the detection light 29 is perpendicularly incident on the sample 12, the detection light 29 reflected by the sample 12 can return to the reflector 27 and beam splitter 24 along the original path. Therefore, by simply controlling the displacement of the reflector 27 along the optical axis of the detection light 29 emitted from the beam splitter 24, the detection light 29 can be used to illuminate different positions on the sample 12.

[0143] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then guided by the beam splitter 24 and the reflector 27 to be incident on the surface of the sample 12. The detection light 29 reflected by the sample 12 returns along the original path, passes through the reflector 27 and the beam splitter 24 again, and finally passes through the analyzer 25 to reach the detector 26. By simply adjusting the reflector 27, the illumination position of the detection light 29 on the sample 12 can be adjusted, realizing the detection of different positions on different surfaces of the sample 12. Furthermore, the detection of different positions of the sample 12 can be achieved by moving the reflector 27, without having to move the overall structure of the optical path system or the sample 12 itself. This reduces the limitations imposed by the installation structure on the movement of the optical path system and the sample 12, increases the detectable range of the sample 12, and makes it easier to achieve magnetic measurement of the entire area of ​​the sample 12.

[0144] Optionally, the detection device includes a light source 22, a polarizer 23, a beam splitter 24, a Wollaston prism 28, a first detector 261, a first detector 262, and a reflector 27. The detection light 29 emitted by the light source 22 passes through the polarizer 23, the beam splitter 24, and the reflector 27 before entering the sample 12. After being reflected by the sample 12, it returns to the reflector 27 and then passes through the beam splitter 24 and the Wollaston prism 28 to reach the first detectors 261 and 262.

[0145] In this way, the detection light 29 emitted by the light source 22 is converted into polarized light by the polarizer 23, and then guided by the beam splitter 24 and the reflector 27 to be incident on the surface of the sample 12. The detection light 29 reflected by the sample 12 returns along the original path, and after passing through the beam splitter 24 and the Wollaston prism 28, it reaches the first detector 261 and the first detector 262 respectively. The Wollaston prism 28 has birefringence characteristics, which can split the detection light 29 reflected back from the sample 12 into two beams of light with mutually perpendicular polarization directions. These two beams of light are received by the first detector 261 and the first detector 262 respectively. By analyzing the polarization state of the two beams of light, the polarization state of the detection light 29 reflected back from the sample 12 can be obtained, thereby realizing the magnetic measurement of the sample 12. Furthermore, the detection of different positions of the sample 12 can be achieved by moving the reflector 27, without moving the overall structure of the optical path system or the sample 12 itself. This reduces the restrictions imposed by the installation structure on the movement of the optical path system and the sample 12, increases the detectable range of the sample 12, and makes it easier to realize the magnetic measurement of the entire area of ​​the sample 12.

[0146] Optionally, at least one detection device includes a first detection device 20 and a second detection device 21. The first detection device 20 is disposed on a first side of the detection chamber 11 and is used to generate a first detection light. The second detection device 21 is disposed on a second side of the detection chamber 11 and is used to generate a second detection light. The first detection light and the second detection light can respectively enter the first and second surfaces of the sample 12 from different entrances of the detection chamber 11.

[0147] In this way, by setting the first detection device 20 and the second detection device 21 on both sides of the detection chamber 11, the first detection light and the second detection light can be incident on the first and second surfaces of the sample 12 from different entrances. This dual-sided detection configuration enables simultaneous detection of different surfaces of the sample 12, effectively expanding the detection range, avoiding blind spots that may occur with single-sided detection, and improving the comprehensiveness and accuracy of the detection. Simultaneously, it eliminates the need to move the overall structure of the optical path system or the sample 12 itself, reducing the limitations imposed by the installation structure on the movement of the optical path system and the sample 12, further improving detection efficiency and convenience.

[0148] Optionally, the measuring device further includes a pick-and-place shaft 32. The pick-and-place shaft 32 is connected to the first displacement device, and the sample 12 can be fixed on the sample fixing section 323 of the pick-and-place shaft 32. The first displacement device can drive the pick-and-place shaft 32 to extend into the detection chamber 11; the drive unit, connected to the pick-and-place shaft 32, is used to drive the sample fixing section 323 of the pick-and-place shaft 32 to rotate.

[0149] In this way, by setting up the pick-and-place shaft 32 and the drive unit, the sample 12 can be fixed on the sample fixing section 323 of the pick-and-place shaft 32. The first displacement device drives the pick-and-place shaft 32 to extend into the detection chamber 11, which simplifies the loading process of the sample 12 and improves the convenience of operation. The drive unit is connected to the pick-and-place shaft 32 and can drive the sample fixing section 323 of the pick-and-place shaft 32 to rotate. In conjunction with the movement of the reflector 27, the limitations of the installation structure on the optical path system and the movement of the sample 12 are further reduced, and the detectable range of the sample 12 is increased.

[0150] Optionally, the drive unit includes a fifth drive motor. The fifth drive motor is mounted on the first displacement device and is used to drive the sample fixing section 323 of the pick-and-place shaft 32 to rotate.

[0151] In this way, by setting a fifth drive motor on the first displacement device, direct driving of the sample fixing section 323 of the pick-and-place shaft 32 is achieved. The fifth drive motor is installed on the first displacement device, which does not occupy too much extra space and can provide stable power output, ensuring that the sample fixing section 323 rotates smoothly and accurately.

[0152] Optionally, the reflector 27 moves within at least a preset range; wherein, when the reflector 27 moves within the preset range, the light path from the detection light 29 to the surface of the sample 12 is unobstructed.

[0153] In this embodiment, the maximum distance between the surface of the drive shaft 31 and / or the pick-and-place shaft 32 and the axis is less than the distance between the position closest to the axis within the displacement range of the detection light 29 and the axis. Thus, since the height of any obstacles on the surface of the drive shaft 31 and / or the pick-and-place shaft 32 is less than the displacement range of the detection light 29, the optical path from the detection light 29 to the surface of the sample 12 is unobstructed. Alternatively, even if there are structures on the drive shaft 31 and / or the pick-and-place shaft 32 that are too high and located within the displacement range of the detection light 29, a light-transmitting hole can be provided in the structure to allow the detection light 29 to pass through, ensuring that the optical path from the detection light 29 to the surface of the sample 12 is unobstructed.

[0154] In this embodiment of the present disclosure, the sample 12 is rotatably disposed in the detection chamber 11, and the preset range includes at least any one radius of the sample 12, that is, the reflector 27 moves at least along any one radius of the sample 12.

[0155] In this way, by limiting the movement of the reflector 27 within a preset range and ensuring that the optical path from the detection light 29 to the surface of the sample 12 is unobstructed during movement, it is ensured that the detection light 29 can accurately and stably illuminate different positions of the sample 12. This avoids optical path obstruction caused by the movement of the reflector 27, thus guaranteeing the continuity and reliability of the detection process. Simultaneously, limiting the movement range of the reflector 27 to a preset range allows for detection of different positions of the sample 12 without affecting the stability and lifespan of the device due to excessive movement.

[0156] Optionally, the detection light 29 moves at least radially in the sample 12.

[0157] In this way, by moving the detection light 29 at least radially along the sample 12, and coordinating this radial movement with the rotation of the sample 12, different areas of the sample 12 surface can be covered. This eliminates the need to move the overall structure of the optical path system or the sample 12 itself, reducing the limitations imposed by the mounting structure on the movement of the optical path system and the sample 12. This increases the detectable range of the sample 12, making magnetic measurements of the entire sample 12 easier, and also improves the comprehensiveness and efficiency of the detection.

[0158] Optionally, the excitation coil 10 generates a magnetic field along the axial direction of the excitation coil 10 within the detection chamber 11.

[0159] In this way, the excitation coil 10 generates an axial magnetic field in the detection chamber 11, so that the sample 12 located inside the excitation coil 10 can be in the magnetic field generated by the excitation coil 10, providing a stable magnetization environment for the sample 12.

[0160] The foregoing description and accompanying drawings fully illustrate embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural and other changes. The embodiments represent only possible variations. Individual components and functions are optional unless explicitly required, and the order of operation may vary. Parts and features of some embodiments may be included or substituted for parts and features of other embodiments. Embodiments of the present disclosure are not limited to the structures described above and shown in the accompanying drawings, and various modifications and changes may be made without departing from its scope. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A driving device, characterized in that, include: Detection area; The drive unit includes a first drive motor and a transmission shaft that extends into the detection area, and the transmission shaft is connected to the first drive motor. The picking and feeding unit includes a first displacement device and a picking and feeding shaft connected to the first displacement device. The first displacement device can drive the picking and feeding shaft to extend into the detection area and drive the transmission shaft. The sample can be fixed on the picking and feeding shaft.

2. The apparatus according to claim 1, characterized in that, The drive unit also includes: Base plate; The support assembly includes at least one support unit disposed on the base plate, and the drive shaft is mounted on the support unit. The support units are all located between the first end and the second end of the drive shaft. The first end is the connection end between the drive shaft and the first drive motor, and the second end is the transmission end between the drive shaft and the pick-and-place shaft.

3. The apparatus according to claim 2, characterized in that, The support assembly includes: A transmission support is provided at the second end of the transmission shaft; At least one intermediate support is disposed between the transmission support and the first end.

4. The apparatus according to claim 1, characterized in that, The pick-and-place axis includes: The support section is connected to the first displacement device; The rotating section is rotatably connected to the support section. The sample fixing section is connected to the rotating section at one end and the transmission surface at the other end.

5. The apparatus according to claim 1, characterized in that, The first displacement device can drive the pick-and-place shaft to extend axially into the detection area.

6. The apparatus according to claim 1, characterized in that, The first displacement device includes: First movable element; At least one fixed frame is disposed on the first movable element, and the pick-and-place shaft is mounted on the fixed frame.

7. The device according to claim 6, characterized in that the fixing frame include: The first fixed frame is disposed at the first end of the first movable element; The second fixing bracket is disposed on the second end of the first movable element, which is opposite to the first end.

8. The apparatus according to any one of claims 1 to 7, characterized in that, Also includes: The detection chamber includes a first window and a second window. The first window is located on the side where the drive shaft extends, and the second window is located on the side where the pick-and-place shaft extends. The detection area is located inside the detection chamber, and both the first window and the second window communicate with the interior and exterior of the detection chamber.

9. The apparatus according to claim 8, characterized in that, The drive shaft and the pick-and-place shaft are coaxial, and the first window and the second window are arranged on opposite sides of the detection chamber along the axial direction of the drive shaft and the pick-and-place shaft.

10. A magnetic measuring device, characterized in that, include: A magnetic field generating unit includes a support, an excitation coil fixed to the support, and a detection chamber located inside the excitation coil; wherein the excitation coil generates a magnetic field along the axial direction of the excitation coil within the detection area; and, The drive device as described in any one of claims 1 to 9.

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