Multifunctional target distance-adjustable rotating stand for magnetron sputtering equipment

Abstract

The utility model relates to the technical field of vacuum coating equipment, in particular to a multifunctional adjustable target distance rotating stand for magnetron sputtering equipment, which comprises a target distance rotating stand and a target distance adjusting mechanism arranged on the target distance rotating stand, and the target distance adjusting mechanism comprises a transmission gear set and a plurality of target distance telescopic pieces. The transmission gear set comprises a control gear and a power gear which are meshed with each other, each target distance telescopic piece is in transmission connection with the control gear and used for clamping a part to be coated, the power gear is driven by a motor, and when the power gear drives the control gear to rotate, the target distance telescopic pieces are close to or away from the target distance rotating frame. According to the utility model, the target distance can be accurately adjusted in the coating process, so that the coating uniformity, the process flexibility and the film layer quality are improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a multifunctional adjustable target distance rotating frame for magnetron sputtering equipment. Background Technology

[0002] Magnetron sputtering technology is widely used in optical thin films, functional coatings, and semiconductor thin films due to its advantages such as uniform film formation, strong adhesion, and good process controllability. In actual film deposition processes, the distance between the target and the substrate (target distance) is one of the key parameters affecting film uniformity, deposition rate, and film quality. In traditional magnetron sputtering equipment, the target distance is mostly fixed or manually adjustable, making dynamic and precise control difficult, especially in the preparation of multilayer composite films or gradient films, where it cannot flexibly adapt to changing process requirements.

[0003] Furthermore, to improve coating uniformity, rotating substrate holders or rotating targets are often used. However, existing rotating structures are multifunctional and limited in scope, unable to simultaneously achieve dynamic adjustment of the target distance, resulting in insufficient equipment flexibility and poor process adaptability. Therefore, developing a multifunctional target holder with adjustable target distance is of great significance for improving the flexibility and coating quality of magnetron sputtering processes. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings and deficiencies of the existing technology and to provide a multifunctional adjustable target distance rotating frame for magnetron sputtering equipment, so as to achieve precise adjustment of the target distance during the coating process, thereby improving the coating uniformity, process flexibility and film quality.

[0005] The technical solution adopted by this utility model is as follows: A multifunctional adjustable target distance frame for magnetron sputtering equipment includes a target distance frame and a target distance adjustment mechanism disposed on the target distance frame. The target distance adjustment mechanism includes a transmission gear set and several target distance telescopic components. The transmission gear set includes a control gear and a power gear that mesh with each other. Each target distance telescopic component is connected to the control gear in a transmission manner, and the target distance telescopic component is used to clamp the part to be coated. The power gear is driven by a motor. When the power gear drives the control gear to rotate, the target distance telescopic component moves closer to or away from the target distance frame.

[0006] The transmission gear set also includes a gear bracket fixed on the target distance rotating frame. The gear bracket has a plurality of sliding grooves evenly distributed on it, which slide in cooperation with the target distance telescopic component. The plurality of sliding grooves extend radially along the target distance rotating frame. The target distance telescopic component moves closer to or away from the target distance rotating frame along the sliding grooves. The control gear is provided with a plurality of guide arc grooves, which are evenly distributed around the axis of the control gear. Each target distance telescopic component slides in cooperation with the corresponding guide arc groove through a pin.

[0007] When the pin slides to the end of the guide arc groove near the axis of the control gear, the target distance telescopic component slides along the slide groove to the side of the target distance rotating frame. When the pin slides to the end of the guide arc groove away from the axis of the control gear, the target distance telescopic component slides along the slide groove to the side of the target distance rotating frame.

[0008] It also includes a self-rotating drive gear that meshes with each other and several self-rotating gears. The several self-rotating gears are distributed around the self-rotating drive gear. Several target distance rotating frames are also provided. The several target distance rotating frames are connected to the several self-rotating gears one by one. The self-rotating drive gears are also driven by a motor.

[0009] It also includes a revolving gear and a revolving drive gear that mesh with each other. Each of the target distance frames is rotatably connected to the revolving gear through a corresponding rotating gear. The revolving drive gear is also driven by a motor.

[0010] The target distance telescopic component is also elastically connected to a clamping plate via a tension spring, and the clamping plate and the target distance telescopic component form a clamping part for clamping the part to be coated.

[0011] It also includes an intermediate cavity for mounting the target distance rotating frame. Both sides of the intermediate cavity are rotatably connected by movable hinges to movable doors for closing the intermediate cavity. The inner sidewalls of the two movable doors are provided with at least one target material. It also includes a power supply set on the movable doors for providing sputtering power to the target material. The movable doors are also provided with observation windows. The inner wall of the intermediate cavity is also provided with heating copper pipes.

[0012] The beneficial effects of this utility model are as follows: By setting a target distance adjustment mechanism consisting of a transmission gear set and a target distance telescopic component, and using a motor to drive the power gear to rotate the control gear, the target distance telescopic component can be moved closer or further away. This structure breaks through the limitations of traditional fixed or manual target distance adjustment, and can adjust the distance between the substrate and the target material in real time and continuously during the coating process, achieving dynamic and precise target distance adjustment. This allows for flexible adaptation to the differentiated process requirements of different film layers for deposition rate, film uniformity, and film density, significantly expanding the process window of magnetron sputtering equipment. The structure is compact, the installation is flexible, and it is compatible with various magnetron sputtering equipment. The intermeshing control gear and power gear are used as the transmission core, combined with motor drive. The gear transmission has advantages such as precise transmission ratio, small backlash, and strong load-bearing capacity, ensuring that the target distance telescopic component maintains high-precision synchronous movement during the adjustment process. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, obtaining other drawings based on these drawings without creative effort still falls within the scope of this utility model.

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the target-distance rotating frame in this utility model;

[0016] Figure 3 This is a schematic diagram of the target distance adjustment mechanism in this utility model;

[0017] Figure 4 This is an exploded view of the target distance adjustment mechanism in this utility model;

[0018] Figure 5 This is a structural schematic diagram from another perspective of the present invention;

[0019] In the diagram, 1-target distance rotating frame, 2-target distance telescopic component, 3-control gear, 4-power gear, 5-gear bracket, 6-slide groove, 7-guide arc groove, 8-pin, 9-rotation drive gear, 10-rotation gear, 11-revolutionary gear, 12-revolutionary drive gear, 13-tension spring, 14-clamping plate, 15-clamping part, 16-intermediate cavity, 17-movable hinge, 18-movable door, 19-target material, 20-power supply, 21-observation window, 22-heating copper pipe. Detailed Implementation

[0020] To make the objectives, technical solutions and advantages of this utility model clearer, the utility model will be described in further detail below with reference to the accompanying drawings.

[0021] It should be noted that all uses of "first" and "second" in the embodiments of this utility model are for the purpose of distinguishing two entities or parameters with the same name but different names. It is clear that "first" and "second" are only for the convenience of expression and should not be construed as limiting the embodiments of this utility model. Subsequent embodiments will not explain this in detail.

[0022] The directional and positional terms used in this utility model, such as "up," "down," "front," "back," "left," "right," "inner," "outer," "top," "bottom," and "side," are merely for reference to the accompanying drawings. Therefore, the directional and positional terms used are for the purpose of explaining and understanding this utility model, and not for limiting the scope of protection of this utility model.

[0023] like Figures 1 to 5 As shown, this is an embodiment of the present invention: a multifunctional adjustable target distance frame for a magnetron sputtering equipment, comprising a target distance frame 1 and a target distance adjustment mechanism disposed on the target distance frame 1. The target distance adjustment mechanism includes a transmission gear set and several target distance telescopic components 2. The transmission gear set includes a control gear 3 and a power gear 4 that mesh with each other. Each target distance telescopic component 2 is connected to the control gear 3 in a transmission manner, and the target distance telescopic component 2 is used to clamp the part to be coated. The power gear 4 is driven by a motor. When the power gear 4 drives the control gear 3 to rotate, the target distance telescopic component 2 moves closer to or away from the target distance frame 1.

[0024] The beneficial effects of this design are as follows: By setting up a target distance adjustment mechanism consisting of a transmission gear set and a target distance telescopic component, and using a motor-driven power gear to rotate the control gear, the target distance telescopic component can be moved closer or further away. This structure breaks through the limitations of traditional fixed or manual target distance adjustment, enabling real-time and continuous adjustment of the distance between the substrate and the target during the coating process. This achieves dynamic and precise target distance adjustment, flexibly adapting to the differentiated process requirements of different film layers for deposition rate, film uniformity, and film density. It significantly expands the process window of magnetron sputtering equipment. The structure is compact, flexible in installation, and compatible with various magnetron sputtering devices. Using meshing control gears and power gears as the transmission core, coupled with motor drive, gear transmission has advantages such as precise transmission ratio, small backlash, and strong load-bearing capacity, ensuring that the target distance telescopic component maintains high-precision synchronous movement during adjustment. Any existing motor capable of driving gears can be used, and the installation direction should be coaxial with the corresponding gear.

[0025] Further, the transmission gear set also includes a gear bracket 5 fixed on the target distance rotating frame 1. The gear bracket 5 has a plurality of sliding grooves 6 evenly distributed on it, which slide in cooperation with the target distance telescopic member 2. The plurality of sliding grooves 6 extend radially along the target distance rotating frame 1. The target distance telescopic member 2 moves closer to or further away from the target distance rotating frame 1 along the sliding grooves 6. The control gear 3 is provided with a plurality of guide arc grooves 7. The plurality of guide arc grooves 7 are evenly distributed around the axis of the control gear 3. Each target distance telescopic member 2 slides in cooperation with the corresponding guide arc groove 7 through a pin 8.

[0026] The beneficial effects of this design are as follows: Through the sliding engagement of the guide arc groove and the pin, the rotational motion of the control gear is precisely converted into the linear motion of the target distance telescopic component along the radial slide groove. The structure is simple and has no additional transmission clearance, ensuring continuous and stable target distance adjustment with high displacement resolution. This meets the requirements of high-precision coating processes for repeatable target distance positioning. The guide arc groove is evenly distributed around the axis of the control gear, corresponding one-to-one with each target distance telescopic component. All telescopic components move synchronously when the control gear rotates, ensuring consistent target distance changes at each station from a mechanical structure perspective. This eliminates asynchronous errors and significantly improves the uniformity of film thickness and yield rate in batch coating. The trajectory curve of the guide arc groove can be flexibly designed according to process requirements, achieving linear changes in target distance with rotation angle. This provides customized dynamic target distance adjustment solutions for complex coating processes such as gradient films and multilayer films, broadening the application range of the equipment.

[0027] Further configuration: when the pin 8 slides to the end of the guide arc groove 7 near the axis of the control gear 3, the target distance telescopic member 2 slides along the slide groove 6 to the end near the target distance rotating frame 1; when the pin 8 slides to the end of the guide arc groove 7 away from the axis of the control gear 3, the target distance telescopic member 2 slides along the slide groove 6 to the end away from the target distance rotating frame 1.

[0028] The beneficial effects of this setup are as follows: By matching the positions of the two ends of the guide arc groove with the radial limit positions of the target distance telescopic component, the angular displacement of the control gear is directly converted into the linear stroke of the target distance. The control logic is clear and intuitive, and open-loop precise positioning can be achieved without additional sensors, reducing system complexity and control costs. The two ends of the guide arc groove naturally constitute the physical limit positions for target distance adjustment. When the pin reaches the end of the arc groove, the telescopic component automatically stops moving, achieving precise and repeatable positioning of the minimum and maximum target distances while avoiding mechanical jamming or overload damage caused by motor over-rotation, thus improving equipment operating safety. When the pin is at the end of the arc groove, the radial component of the force on the control gear intersects the direction of movement at a large angle, forming a self-locking effect without active driving force, keeping the target distance stable during the coating process, avoiding target distance drift caused by vibration or gravity disturbance, and ensuring film thickness consistency.

[0029] Further configuration includes a self-rotating drive gear 9 that meshes with each other and several self-rotating gears 10. The several self-rotating gears 10 are distributed around the self-rotating drive gear 9. Several target distance rotating frames 1 are also provided. The several target distance rotating frames 1 are connected one by one to the several self-rotating gears 10. The self-rotating drive gear 9 is also driven by a motor.

[0030] The beneficial effects of this setup are as follows: through the meshing transmission of the self-rotating drive gear and multiple self-rotating gears, each target distance frame can achieve independent self-rotation. The substrate exhibits a three-dimensional tumbling motion trajectory within the sputtering zone, effectively eliminating the deposition shadow effect and significantly improving film thickness uniformity, step coverage, and film structure consistency. The self-rotating drive chain and the target distance adjustment mechanism are independent and spatially separated, with complete kinematic decoupling between the two. During the coating process, dynamic adjustment of the target distance and independent online control of the substrate rotation speed can be achieved, providing multi-dimensional degrees of freedom for complex processes such as multilayer films and co-sputtering, greatly enhancing the flexibility of process development.

[0031] Further configuration includes a revolving gear 11 and a revolving drive gear 12 that mesh with each other. Each of the target distance rotating frames 1 passes through a corresponding rotating gear 10 and is rotatably connected to the revolving gear 11. The revolving drive gear 12 is also driven by a motor.

[0032] The beneficial effects of this setup are as follows: through the meshing of the revolution gear and the revolution drive gear, each target distance rotating frame is superimposed with a revolution motion around the center of the equipment on top of its own rotation. The substrate passes through the sputtering zone in a planetary trajectory. The revolution motion forces each station to alternately enter the high deposition rate zone and the compensation zone, completely eliminating the film thickness difference between stations caused by uneven etching of the target material and edge effects of the magnetic field, achieving ultimate uniformity of the entire batch of coating. The revolution, rotation, and target distance adjustment are all driven by independent motors, and the kinematics are completely decoupled. Users can independently set the revolution speed, rotation speed, and target distance dynamic curve in real time according to process requirements, providing unprecedented multidimensional control capabilities for high-end coating processes such as multilayer heterogeneous films, continuous gradient films, and nano-multilayer films. After passing through the rotation gear, the target distance rotating frame is rotatably connected to the revolution gear. The revolution transmission chain and the rotation transmission chain are arranged in parallel in space and do not interfere with each other. A single planetary gear system simultaneously realizes the superposition of revolution drive and rotation drive functions, avoiding the complex support structure caused by multi-axis stacking, and significantly reducing the axial height and rotational inertia of the rotating frame system.

[0033] Furthermore, the target distance telescopic member 2 is also elastically connected to a clamping piece 14 via a tension spring 13, and a clamping part 15 for clamping the part to be coated is formed between the clamping piece 14 and the target distance telescopic member 2.

[0034] The beneficial effects of this design are as follows: the clamping plate is elastically connected to the target distance telescopic component by a tension spring, and the opening size of the clamping part can be automatically adjusted according to the actual thickness of the part to be coated. There is no need to manually adjust or replace the clamp, so it can be compatible with substrates of different thicknesses and slight size differences. This significantly improves the equipment's ability to quickly switch between products of different specifications. It is suitable for round parts with diameters from 50mm to 150mm, and can also be adapted to square, rectangular and other irregularly shaped parts by changing the clamping components.

[0035] Further, it also includes an intermediate cavity 16 for mounting the target distance rotating frame 1. Both sides of the intermediate cavity 16 are rotatably connected by movable doors 18 for closing the intermediate cavity 16 via movable hinges 17. The inner sidewalls of the two movable doors 18 are provided with at least one target material 19. It also includes a power supply 20 provided on the movable doors 18 for providing sputtering power to the target material 19. The movable doors 18 are also provided with an observation window 21. The inner wall of the intermediate cavity 16 is also provided with a heating copper tube 22.

[0036] The beneficial effects of this design are as follows: the target-mounted rotating frame is installed inside the central cavity, and the door is opened and closed via a hinge, facilitating operation and maintenance. The target material is mounted on the movable door, positioned directly opposite the part to be coated inside the central cavity. The power supply provides sputtering power to the target material, a heating copper tube is used to regulate the cavity temperature, and an observation window allows for real-time monitoring during the process. The rotating frame is compatible with various magnetron sputtering power supplies, supports multiple sputtering modes such as DC, intermediate frequency, and radio frequency, and is suitable for coating processes on various target materials including metals, alloys, and ceramics. This invention not only improves the uniformity and controllability of magnetron sputtering coating but also enhances the equipment's process adaptability and operational convenience, possessing high practical value and promising prospects for widespread application.

[0037] The above-disclosed embodiments are merely preferred embodiments of the present utility model and should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the claims of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A multifunctional adjustable target distance rotating frame for magnetron sputtering equipment, characterized in that: The device includes a target distance rotating frame (1) and a target distance adjustment mechanism set on the target distance rotating frame (1). The target distance adjustment mechanism includes a transmission gear set and several target distance telescopic components (2). The transmission gear set includes a control gear (3) and a power gear (4) that mesh with each other. Each target distance telescopic component (2) is connected to the control gear (3) in a transmission manner. The target distance telescopic component (2) is used to clamp the part to be coated. The power gear (4) is driven by a motor. When the power gear (4) drives the control gear (3) to rotate, the target distance telescopic component (2) moves closer to or away from the target distance rotating frame (1).

2. The multifunctional adjustable target distance rotating frame for magnetron sputtering equipment according to claim 1, characterized in that: The transmission gear set also includes a gear bracket (5) fixed on the target distance rotating frame (1). The gear bracket (5) has a number of sliding grooves (6) that slide with the target distance telescopic member (2) evenly distributed on it. The sliding grooves (6) extend radially along the target distance rotating frame (1). The target distance telescopic member (2) moves closer to or further away from the target distance rotating frame (1) along the sliding grooves (6). The control gear (3) is provided with a number of guide arc grooves (7). The guide arc grooves (7) are evenly distributed around the axis of the control gear (3). Each target distance telescopic member (2) slides with the corresponding guide arc groove (7) through a pin (8).

3. A multifunctional adjustable target distance rotating frame for magnetron sputtering equipment according to claim 2, characterized in that: When the pin (8) slides to one end of the guide arc groove (7) near the axis of the control gear (3), the target distance telescopic member (2) slides along the slide groove (6) to near the target distance rotating frame (1). When the pin (8) slides to one end of the guide arc groove (7) away from the axis of the control gear (3), the target distance telescopic member (2) slides along the slide groove (6) away from the target distance rotating frame (1).

4. A multifunctional adjustable target distance rotating frame for a magnetron sputtering equipment according to claim 1, characterized in that: It also includes a self-rotating drive gear (9) that meshes with each other and a number of self-rotating gears (10). The number of self-rotating gears (10) are distributed around the self-rotating drive gear (9). The target distance frame (1) is also provided with a number of them. The number of target distance frames (1) are connected to the number of self-rotating gears (10) one by one. The self-rotating drive gear (9) is also driven by a motor.

5. A multifunctional adjustable target distance rotating frame for a magnetron sputtering equipment according to claim 4, characterized in that: It also includes a revolving gear (11) and a revolving drive gear (12) that mesh with each other. Each of the target distance frames (1) is rotatably connected to the revolving gear (11) through the corresponding rotating gear (10). The revolving drive gear (12) is also driven by a motor.

6. A multifunctional adjustable target distance rotating frame for a magnetron sputtering equipment according to claim 1, characterized in that: The target distance telescopic member (2) is also elastically connected to a clamping piece (14) via a tension spring (13), and a clamping part (15) for clamping the part to be coated is formed between the clamping piece (14) and the target distance telescopic member (2).

7. A multifunctional adjustable target distance rotating frame for a magnetron sputtering equipment according to claim 1, characterized in that: It also includes an intermediate cavity (16) for mounting the target distance rotating frame (1). Both sides of the intermediate cavity (16) are rotatably connected by movable doors (18) for closing the intermediate cavity (16) via movable hinges (17). The inner walls of the two movable doors (18) are provided with at least one target material (19). It also includes a power supply (20) provided on the movable doors (18) for providing sputtering power to the target material (19). The movable doors (18) are also provided with an observation window (21). The inner wall of the intermediate cavity (16) is also provided with a heating copper tube (22).

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