Spraying and defoaming device of electroplating equipment and electroplating equipment
By designing guide plates, guide pipes, and defoaming tanks in electroplating equipment, and combining them with defoaming components, the problem of air bubbles and foam during the chemical solution reflux process is solved, enabling the chemical solution to be reused multiple times and improving the substrate processing quality, while reducing usage costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- KUNSHAN DONGWEI MACHINERY CO LTD
- Filing Date
- 2025-06-04
- Publication Date
- 2026-05-12
AI Technical Summary
During the reflux process of the electroplating solution, bubbles and foam are easily generated, which reduces the service life of the solution and affects the processing quality of the substrate.
A spray defoaming device for electroplating equipment was designed, including a spray immersion tank and a storage tank. By utilizing structures such as guide plates, guide pipes, and defoaming components, the design of the guide and defoaming tank reduces bubbles and foam during the return flow of the chemical solution. Defoaming components such as spiral rods are used to break the bubble liquid film, enabling the chemical solution to be reused multiple times.
It significantly reduces bubbles and foam from the backflow of the solution into the storage tank, extends the service life of the solution, ensures the quality of substrate processing, has a simple structure, and reduces the cost of use.
Smart Images
Figure CN224227260U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of electroplating equipment technology, specifically to an electroplating equipment spray defoaming device and electroplating equipment. Background Technology
[0002] Currently, electroplating equipment typically uses a transmission mechanism to guide the substrate into a spray immersion tank for spray immersion. Specifically, the spraying mechanism uses a water pump to draw chemical solution from a storage tank and sprays it onto the substrate, filling the spray immersion tank, where the substrate is then immersed. To reduce operating costs, the chemical solution in the spray immersion tank needs to be recycled back to a storage tank for reuse. The storage tank is located at the bottom of the spray immersion tank, utilizing the weight of the chemical solution for reflux.
[0003] Because of the height difference between the spray soaking tank and the storage tank, the surface of the liquid is easily impacted during the process of the liquid flowing back to the storage tank, and air is drawn into the liquid to break it down, resulting in a large number of bubbles and foam. This causes the effective components in the liquid to decrease and become mixed with bubbles and foam before being sprayed onto the substrate, reducing the service life of the liquid and even causing hole breakage, thus affecting the processing quality of the substrate. Utility Model Content
[0004] In view of this, the present invention provides a spray defoaming device and electroplating equipment for electroplating equipment, so as to solve the problem that bubbles and foam are easily generated during the chemical solution reflux process, resulting in a low service life of the chemical solution and even affecting the substrate processing quality.
[0005] In a first aspect, this utility model provides a spray defoaming device for electroplating equipment, comprising:
[0006] A spray soaking tank includes a surrounding plate and a first bottom plate. The surrounding plate and the first bottom plate form a return trough. A spray soaking tank for placing a substrate is provided in the return trough. The spray soaking tank has a pair of first side plates arranged opposite each other along a first direction, a pair of second side plates arranged opposite each other along a second direction perpendicular to the first direction, and a second bottom plate. Inclined guide plates are provided on the outer sides of the pair of first side plates. The bottom of the guide plates is left with a gap from the first bottom plate. Defoaming tanks are provided on the pair of second side plates. Multiple guide pipes are spaced apart along the first direction at the bottom of the defoaming tanks. Each guide pipe is provided with a defoaming component. The bottom of each guide pipe is left with a gap from the first bottom plate. A gap is left between the second bottom plate and the first bottom plate.
[0007] The liquid storage tank is connected to the bottom of the return tank and located below the spray soaking tank. The first bottom plate is inclined downward toward the liquid storage tank along the first direction.
[0008] Beneficial Effects: The electroplating equipment spray defoaming device of this utility model continuously sprays and immerses the substrate in the spray immersion tank. The chemical solution overflows from the top of the first side plate, is buffered by the guide plate, and then flows along the first bottom plate into the storage tank, effectively reducing impact bubbles. In addition, the chemical solution also overflows from the top of the second side plate and enters the defoaming tank for storage. It then flows through the guide pipe to the first bottom plate and into the storage tank. The defoaming components in the guide pipe eliminate the foam collected in the defoaming tank, while slowing down the flow rate of the chemical solution. This significantly reduces the amount of bubbles and foam that flow back into the storage tank, facilitating the reuse of the chemical solution, thereby extending its service life and ensuring the processing quality of the substrate.
[0009] In one alternative embodiment, the defoaming component is a spiral rod.
[0010] Beneficial effects: Defoaming is achieved by using a spiral rod. After the liquid enters the guide tube, it flows along the spiral rod in a rotating motion. The shearing force generated by the rotation can directly destroy the liquid film of the bubbles, accelerating the splitting of the bubbles. In addition, the structure is simple and easy to clean and use.
[0011] In one alternative implementation, the length of each of the guide tubes gradually increases along the first direction and is arranged corresponding to the first base plate.
[0012] Beneficial effect: By gradually increasing the length of the guide tube along the first direction, it can be ensured that the gap between each guide tube and the first base plate remains consistent, thereby achieving uniform defoaming.
[0013] In one alternative implementation, a plurality of overflow ports are spaced apart on the top of the first side plate.
[0014] Beneficial effect: The medicine flows through the overflow outlet and guide plate, which can guide the medicine to flow accurately through the guide plate.
[0015] In one alternative embodiment, the first side plate is connected to the guide plate via a connecting plate, the guide plate being located in the gap between the return tank and the spray soaking tank.
[0016] Beneficial effects: The deflector plate is installed on the first side plate via a connecting plate, which is simple in structure and easy to install and use.
[0017] In one alternative implementation, the bottom height of the overflow port is not lower than the top of the second side plate.
[0018] Beneficial effects: The bottom height of the overflow port is not lower than the top of the second side plate. The bubbles and foam formed in the spray soaking tank first enter the defoaming tank for rapid defoaming treatment, and the remaining liquid flows through the overflow port to the guide plate, which can further improve the defoaming effect.
[0019] In one optional embodiment, the wall of the defoaming tank is provided with a plurality of through holes spaced apart along the first direction, and the defoaming tank is connected to the spray soaking tank through the plurality of through holes.
[0020] Beneficial effects: By setting multiple through holes in the wall of the defoaming tank, the bubbles and foam in the spray soaking tank can be guided into the defoaming tank, further improving the defoaming effect.
[0021] In one optional embodiment, a spraying mechanism is also included, which is located at the top of the spraying soaking tank and connected to the liquid storage tank via a drive pump, and is adapted to spray the liquid towards the substrate.
[0022] Beneficial effects: The spraying mechanism uses a drive pump to extract the liquid from the storage tank and spray it onto the substrate in the spray soaking tank, thereby processing the substrate.
[0023] In one optional embodiment, the liquid storage tank has a top plate and a third side plate arranged along a first direction. The lower side of the first bottom plate is connected to the top of the third side plate. An outlet is provided between the lower side of the first bottom plate and the adjacent first side plate. The outlet communicates with the liquid storage tank. The top plate is connected to the outer side of the first side plate forming the outlet.
[0024] Beneficial effects: After defoaming, the liquid flows down the first bottom plate into the storage tank for storage. No other power structure is required, the structure is simple, and it helps to reduce the cost of use.
[0025] In one optional embodiment, at least one filter plate is also connected to the inner side of the third side plate, and the filter plate is provided with a plurality of spaced-apart defoaming holes.
[0026] Beneficial effects: After the medicine leaves the first bottom plate, it first passes through the filter plate, where multiple defoaming holes on the filter plate squeeze and shear, further eliminating air bubbles before entering the storage tank for storage. At the same time, it can also reduce the flow rate of the medicine and prevent the medicine from entering the storage tank and forming impact bubbles.
[0027] In one alternative embodiment, a baffle is further connected between the filter plate and the top plate.
[0028] Beneficial effects: The baffle between the filter plate and the top plate can buffer the impact of the liquid medicine and ensure that the liquid medicine flows from multiple defoaming holes into the storage tank.
[0029] In one optional embodiment, the enclosure is provided with an inlet and an outlet on opposite sides along the second direction, and a transmission mechanism is provided between a pair of first side plates.
[0030] Beneficial effects: The substrate enters the spray immersion tank from the feed port through the transmission mechanism, and is then output from the discharge port after the spray immersion is completed. The operation is simple and easy to use.
[0031] Secondly, this utility model also provides an electroplating device, including: the above-mentioned electroplating device spray defoaming device.
[0032] Beneficial effects: Since the electroplating equipment includes an electroplating equipment spray defoaming device, it has the same effect as the electroplating equipment spray defoaming device, so it will not be elaborated here. Attached Figure Description
[0033] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0034] Figure 1 This is a schematic diagram of the structure of a spray defoaming device for an electroplating equipment according to an embodiment of the present utility model;
[0035] Figure 2 This is a partial structural schematic diagram of a spray defoaming device for an electroplating equipment according to an embodiment of the present utility model;
[0036] Figure 3 for Figure 2 A magnified view of part A in the diagram;
[0037] Figure 4 This is another partial structural schematic diagram of a spray defoaming device for an electroplating equipment according to an embodiment of the present utility model;
[0038] Figure 5 for Figure 4 A magnified view of part B in the diagram;
[0039] Figure 6 for Figure 4 The main view;
[0040] Figure 7 for Figure 4 Top view;
[0041] Figure 8 This is a partial structural schematic diagram of the second side plate of a spray defoaming device for an electroplating equipment according to an embodiment of the present utility model;
[0042] Figure 9 This is a schematic diagram of the second side plate and defoaming component of a spray defoaming device for an electroplating equipment according to an embodiment of the present invention.
[0043] Explanation of reference numerals in the attached figures:
[0044] 1. Spray soaking tank; 101. Enclosure; 102. First bottom plate; 103. Return tank; 104. Liquid outlet; 105. Feed inlet; 106. Discharge outlet; 2. Spray soaking tank; 201. First side plate; 2011. Overflow port; 202. Second side plate; 203. Second bottom plate; 204. Guide plate; 205. Defoaming tank; 2051. Through hole; 206. Guide pipe; 207. Defoaming component; 208. Connecting plate; 3. Liquid storage tank; 301. Top plate; 302. Third side plate; 303. Filter plate; 304. Defoaming hole; 305. Baffle. Detailed Implementation
[0045] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0046] The following is combined Figures 1 to 9 The following describes embodiments of the present invention.
[0047] According to embodiments of the present invention, on the one hand, such as Figure 1 As shown, a spray defoaming device for electroplating equipment is provided, mainly comprising: a spray immersion tank 1 and a storage tank 3. The spray immersion tank 1 includes a surrounding plate 101 and a first bottom plate 102, the surrounding plate 101 and the first bottom plate 102 forming an upward-opening return channel 103, and a spray immersion tank 2 for placing a substrate is provided in the return channel 103. The spray immersion tank 2 has a pair of first side plates 201 arranged opposite each other along a first direction, a pair of second side plates 202 arranged opposite each other along a second direction perpendicular to the first direction, and a second bottom plate 203. Inclined guide plates 204 are respectively provided on the outer sides of the pair of first side plates 201, and the bottom of the guide plates 204 is left with a gap from the first bottom plate 102. Defoaming tanks 205 are respectively provided on the pair of second side plates 202, and a plurality of guide pipes 206 are spaced apart along the first direction at the bottom of the defoaming tanks 205. Each guide pipe 206 is equipped with a defoaming component 207, and there is a gap between the bottom of each guide pipe 206 and the first base plate 102, and a gap between the second base plate 203 and the first base plate 102. The liquid storage tank 3 is connected to the bottom of the return tank 103 and is located on the lower side of the spray soaking tank 1, and the first base plate 102 is inclined downward toward the liquid storage tank 3 in the first direction.
[0048] Therefore, the electroplating equipment spray defoaming device provided in this embodiment of the present invention continuously sprays and soaks the substrate in the spray immersion tank 2. The solution overflows from the top of the first side plate 201, is buffered by the guide plate 204, and then flows along the first bottom plate 102 into the storage tank 3, effectively reducing impact bubbles. In addition, the solution also overflows from the top of the second side plate 202 and enters the defoaming tank 205 for storage. It then flows through the guide pipe 206 to the first bottom plate 102 and into the storage tank 3. The defoaming component 207 in the guide pipe 206 eliminates the foam collected in the defoaming tank 205, while slowing down the flow rate of the solution. This significantly reduces the bubbles and foam that flow back into the storage tank 3, facilitating the reuse of the solution and extending its service life, while ensuring the processing quality of the substrate. Moreover, the overall structure of this embodiment of the present invention is simple and has low operating costs.
[0049] Specifically, the surrounding panel 101 surrounds the first base plate 102 and is fixedly connected to it. The fixing method can be conventional, such as screw connection or adhesive bonding. A pair of first side panels 201 and a pair of second side panels 202 are sequentially connected and surround the second base plate 203. The substrate can be a PCB (Printed Circuit Board). The height of the surrounding panel 101 is higher than that of the first side panels 201 and the second side panels 202.
[0050] It should be noted that the first direction is as follows: Figure 7 As shown by arrow L in the diagram, the second direction is as follows: Figure 7 As indicated by the arrow W in the diagram.
[0051] It should be noted that the present invention does not limit the specific structure of the defoaming component 207, and any existing structure can be selected as needed.
[0052] In one embodiment, such as Figure 9 As shown, the defoaming component 207 is a spiral rod. A limiting part is provided at the top of the spiral rod, which is directly disposed within the guide tube 206 and limited by the limiting part. Defoaming is achieved using a spiral rod. After the liquid enters the guide tube 206, it flows along the rotating spiral rod. The shearing force generated by the rotation can directly break the liquid film of the bubbles, accelerating bubble splitting. Furthermore, the structure is simple, easy to clean, and convenient to use.
[0053] In other embodiments, the defoaming component 207 can also be a cotton or linen mesh, an impeller, etc.
[0054] It should be noted that the present invention does not limit the number of guide tubes 206; two, three, or more may be selected.
[0055] In one embodiment, such as Figure 4 , Figure 6 and Figure 8As shown, the length of each guide tube 206 gradually increases along the first direction and is correspondingly arranged with the first base plate 102. In order to facilitate the processing of the substrate, the first side plate 201 and the second side plate 202 are generally arranged horizontally. Therefore, the bottom of the defoaming tank 205 is also horizontal. Since the first base plate 102 is inclined, gradually increasing the length of the guide tube 206 along the first direction can ensure that the gap between each guide tube 206 and the first base plate 102 remains consistent, thereby achieving uniform defoaming.
[0056] In one embodiment, such as Figure 3 As shown, multiple overflow ports 2011 are spaced apart on the top of the first side plate 201. The liquid medicine flows through the overflow ports 2011 to the guide plate 204, which can guide the liquid medicine to flow accurately to the guide plate 204.
[0057] In one embodiment, such as Figure 2 and Figure 3 As shown, the first side plate 201 is connected to the guide plate 204 via a connecting plate 208. The guide plate 204 is located in the gap between the return tank 103 and the spray soaking tank 2. The guide plate 204 is mounted on the first side plate 201 via the connecting plate 208. The structure is simple and easy to install and use.
[0058] Furthermore, in one embodiment, the bottom height of the overflow port 2011 is not lower than the top height of the second side plate 202. Because the bottom height of the overflow port 2011 is not lower than the top height of the second side plate 202, the bubbles and foam formed in the spray soaking tank 2 first enter the defoaming tank 205 for rapid defoaming treatment, and the remaining liquid then flows through the overflow port 2011 to the guide plate 204, which can further improve the defoaming effect.
[0059] In one embodiment, such as Figure 3 As shown, the defoaming tank 205 has multiple through holes 2051 spaced apart along the first direction on its tank wall, and the defoaming tank 205 is connected to the spray soaking tank 2 through the multiple through holes 2051. The multiple through holes 2051 on the tank wall of the defoaming tank 205 can guide the bubbles and foam in the spray soaking tank 2 into the defoaming tank 205, further improving the defoaming effect.
[0060] In one embodiment, the electroplating equipment spray defoaming device further includes a spraying mechanism (not shown in the figure). The spraying mechanism is located at the top of the spray immersion tank 2 and is connected to the storage tank 3 via a drive pump, and is adapted to spray the chemical solution toward the substrate. The spraying mechanism draws out the chemical solution from the storage tank 3 and sprays it onto the substrate in the spray immersion tank 2 via the drive pump, thereby realizing the processing of the substrate.
[0061] It should be noted that the spraying mechanism of this utility model embodiment can be selected from any existing structure as needed, such as water jet, spray pipe, etc. The specific settings can be selected according to actual needs. In this regard, this utility model embodiment does not impose too many restrictions.
[0062] In one embodiment, such as Figure 4 and Figure 5 As shown, the storage tank 3 has a top plate 301 and a third side plate 302 arranged along a first direction. The lower side of the first bottom plate 102 is connected to the top of the third side plate 302. An outlet 104 is provided between the lower side of the first bottom plate 102 and the adjacent first side plate 201, and the outlet 104 communicates with the storage tank 3. The top plate 301 is connected to the outer side of the first side plate 201 forming the outlet 104. After defoaming treatment, the medicine flows downward along the first bottom plate 102 into the storage tank 3 for storage. No other power structure is required, the structure is simple, and it helps to reduce the cost of use.
[0063] Specifically, a gap is left between the lower side of the first base plate 102 and the bottom of the adjacent first side plate 201, which serves as the liquid outlet 104.
[0064] Furthermore, in one embodiment, such as Figure 5 and Figure 6 As shown, at least one filter plate 303 is also connected to the inner side of the third side plate 302. The filter plate 303 is provided with a plurality of spaced defoaming holes 304. After the medicine leaves the first bottom plate 102, it first passes through the filter plate 303. The multiple defoaming holes 304 on the filter plate 303 squeeze and shear the medicine to further eliminate bubbles before it enters the storage tank 3 for storage. At the same time, it can also reduce the flow rate of the medicine and prevent the medicine from entering the storage tank 3 and forming impact bubbles.
[0065] Furthermore, in one embodiment, such as Figure 5 and Figure 6 As shown, a baffle 305 is also connected between the filter plate 303 and the top plate 301. The baffle 305 between the filter plate 303 and the top plate 301 can buffer the impact of the liquid medicine and ensure that the liquid medicine flows from the multiple defoaming holes 304 into the storage tank 3.
[0066] Specifically, the filter plate 303 has support plates on its opposite sides, and the opposite ends of the support plates are fixedly connected to the baffle 305 and the third side plate 302, respectively. The top of the baffle 305 is fixed to the inner side of the top plate 301.
[0067] In one embodiment, such as Figure 1 As shown, the enclosure 101 has an inlet 105 and an outlet 106 on opposite sides along the second direction, and a transmission mechanism (not shown in the figure) is also provided between a pair of first side plates 201. The substrate enters the spray soaking tank 2 from the inlet 105 through the transmission mechanism, and after spray soaking is completed, it is output from the outlet 106. The operation is simple and easy to use.
[0068] In addition, the opposite sides of the first side plate 201 can extend to the surrounding plate 101 and be fixedly connected to the surrounding plate 101 to improve the structural strength and load-bearing capacity of the first side plate 201.
[0069] The working principle of this utility model embodiment is as follows:
[0070] The substrate enters the spray soaking tank 2 through the feed inlet 105 via a transmission mechanism. The liquid in the storage tank 3 is drawn out by a drive pump and sprayed onto the substrate in the spray soaking tank 2 through a spraying mechanism. The liquid is continuously stored in the spray soaking tank 2, and the liquid level continuously rises, causing bubbles and foam to float on the surface of the liquid.
[0071] The liquid medicine rises to the through hole 2051 of the second side plate 202. Bubbles and foam enter the defoaming tank 205 through the through hole 2051 and are stored there. They are then eliminated by the defoaming component 207 in the guide pipe 206. After the bubbles and foam are eliminated, the liquid medicine flows to the first bottom plate 102 and enters the opening of the storage tank 3. The liquid medicine continues to rise to the overflow port 2011. It flows through the overflow port 2011 to the guide plate 204, and after being buffered by the guide plate 204, it flows to the first bottom plate 102 and enters the opening of the storage tank 3.
[0072] The liquid medicine leaves the first bottom plate 102 and enters the opening of the storage tank 3. It first passes through the filter plate 303, and the multiple defoaming holes 304 on the filter plate 303 further eliminate the bubbles before entering the storage tank 3 for storage. At the same time, some of the liquid medicine will impact the baffle 305 and enter the defoaming holes 304 of the filter plate 303 after being buffered by the baffle 305.
[0073] After the substrate is processed, it leaves the spray immersion tank 2 from the discharge port 106 via a transmission mechanism.
[0074] To achieve the basic function of the spray defoaming device for electroplating equipment, the spray defoaming device for electroplating equipment in this embodiment may also include other necessary modules or components, such as a control system and switching valves. It should be noted that any suitable existing structure can be selected from the other necessary modules or components included in the spray defoaming device for electroplating equipment. To clearly and concisely illustrate the technical solution provided in this embodiment, the above-mentioned parts will not be repeated here, and the accompanying drawings have also been simplified accordingly. However, it should be understood that the scope of this utility model is not limited thereto.
[0075] According to an embodiment of the present invention, another aspect provides an electroplating device, including: an electroplating device spray defoaming device.
[0076] Since electroplating equipment includes an electroplating equipment spray defoaming device, which has the same effect as the electroplating equipment spray defoaming device, it will not be elaborated here.
[0077] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.
Claims
1. A spray defoaming device for electroplating equipment, characterized in that, include: A spray soaking tank (1) includes a surrounding plate (101) and a first bottom plate (102). The surrounding plate (101) and the first bottom plate (102) form a return trough (103). A spray soaking tank (2) for placing a substrate is provided in the return trough (103). The spray soaking tank (2) has a pair of first side plates (201) arranged opposite each other along a first direction, a pair of second side plates (202) arranged opposite each other along a second direction perpendicular to the first direction, and a second bottom plate (203). The outer sides of the pair of first side plates (201) are respectively provided with inclined... A guide plate (204) is provided, the bottom of which is separated from the first base plate (102). A pair of second side plates (202) are provided with defoaming grooves (205). The bottom of the defoaming grooves (205) is provided with a plurality of guide tubes (206) spaced apart along the first direction. Each guide tube (206) is provided with a defoaming component (207). The bottom of each guide tube (206) is separated from the first base plate (102). A gap is left between the second base plate (203) and the first base plate (102). The liquid storage tank (3) is connected to the bottom of the return tank (103) and located on the lower side of the spray soaking tank (1). The first bottom plate (102) is inclined downward toward the liquid storage tank (3) in a first direction.
2. The electroplating equipment spray defoaming device according to claim 1, characterized in that, The defoaming component (207) is a spiral rod; And / or, the length of each of the guide tubes (206) gradually increases along the first direction and is correspondingly arranged with the first base plate (102).
3. The electroplating equipment spray defoaming device according to claim 1, characterized in that, The top of the first side plate (201) has multiple overflow ports (2011) spaced apart; And / or, the first side plate (201) is connected to the guide plate (204) via a connecting plate (208), the guide plate (204) being located in the gap between the return tank (103) and the spray soaking tank (2).
4. The electroplating equipment spray defoaming device according to claim 3, characterized in that, The bottom height of the overflow port (2011) is not lower than the top of the second side plate (202); And / or, the defoaming tank (205) has a plurality of through holes (2051) spaced apart along the first direction, and the defoaming tank (205) is connected to the spray soaking tank (2) through the plurality of through holes (2051).
5. The electroplating equipment spray defoaming device according to claim 1, characterized in that, It also includes a spraying mechanism, which is located at the top of the spraying soaking tank (2) and connected to the liquid storage tank (3) via a drive pump, and is adapted to spray the liquid towards the substrate.
6. The electroplating equipment spray defoaming device according to any one of claims 1 to 5, characterized in that, The liquid storage tank (3) has a top plate (301) and a third side plate (302) arranged along a first direction. The lower side of the first bottom plate (102) is connected to the top of the third side plate (302). An outlet (104) is provided between the lower side of the first bottom plate (102) and the adjacent first side plate (201). The outlet (104) is connected to the liquid storage tank (3). The top plate (301) is connected to the outer side of the first side plate (201) that forms the outlet (104).
7. The electroplating equipment spray defoaming device according to claim 6, characterized in that, The inner side of the third side plate (302) is also connected to at least one filter plate (303), and the filter plate (303) is provided with a plurality of spaced defoaming holes (304).
8. The electroplating equipment spray defoaming device according to claim 7, characterized in that, A baffle (305) is also connected between the filter plate (303) and the top plate (301).
9. The electroplating equipment spray defoaming device according to any one of claims 1 to 5, characterized in that, The enclosure (101) has an inlet (105) and an outlet (106) on opposite sides along the second direction, and a transmission mechanism is provided between a pair of first side plates (201).
10. An electroplating device, characterized in that, include: The electroplating equipment spray defoaming device according to any one of claims 1 to 9.