Optical detection device for lens coating thickness

Abstract

The utility model relates to the technical field of lens optical detection, in particular to a lens coating thickness optical detection device which comprises a fixing seat, a laser, a front sight adjusting seat, an L-shaped support, an X-axis micro motor, a Y-axis micro motor and a motor reflector. The front sight adjusting seat is arranged in the middle of the side, opposite to the laser, of the L-shaped support, and the X-axis micro motor is slidably connected to the inner side of the L-shaped support. According to the optical detection device for the lens coating thickness, non-contact optical detection is adopted, that is, a laser interference method is adopted, damage to a film layer is avoided, an optical path is corrected in real time through a front sight adjusting base and a double-shaft micro motor reflector, and the optical detection device adapts to lenses of different angles; the first electric telescopic rod is matched with the connecting rod and the hinged lug plate to achieve pitching fine adjustment of the reflector, and when the lens deflects, the system automatically adjusts the angle of the reflector through front sight beam feedback, so that a measurement beam always keeps vertical incidence, and errors are reduced.

Description

Technical Field

[0001] This application relates to the field of lens optical inspection technology, and in particular to an optical inspection device for lens coating thickness. Background Technology

[0002] Optical measuring devices for lens coating thickness are key equipment in optical manufacturing and precision machining. Lens coating can significantly change the transmittance, reflectance, and damage resistance of optical components, and is widely used in camera lenses, eyeglasses, lasers, semiconductor lithography, and other fields. Early coating thickness measurement mainly relied on mechanical stylus method, i.e., contact measurement, which is prone to scratching the film layer, has low accuracy, and is not suitable for soft films.

[0003] A search revealed that CN218787833U discloses an optical lens coating layer detection device. First, the optical lens is placed between a first clamping seat and a second clamping seat. Then, a cylinder is controlled to move the first clamping seat closer to the second clamping seat, thus clamping the optical lens. The optical lens is then inspected by a detection mechanism. When a reversible inspection of the optical lens is required, a first motor is activated to rotate an incomplete gear. When the incomplete gear meshes with a transmission gear, the transmission gear drives a second rotating shaft to rotate, causing the first clamping seat to move towards the second clamping seat and flip the optical lens, thereby enabling reversible inspection of the optical lens and improving the inspection effect.

[0004] Regarding the aforementioned technologies, the inventors believe that the following technical defects exist and need to be improved: the aforementioned device only achieves a single clamping effect, and it is easy to leave scratches on the surface of the nanoscale film layer by using a probe or stepper, which will cause reverse damage to the soft coating. It does not achieve optical detection effect by calibrating the angle between the center of the relevant focused spot and the penetrating positioning crosshair beam, and cannot detect the detection flexibility and reliability of the lens. Utility Model Content

[0005] This application provides an optical detection device for lens coating thickness to improve the following technical problems: the above-mentioned device only plays a single clamping role, and it is easy to leave scratches on the nanoscale film surface by using a probe or profilometer, which will cause reverse damage to the soft coating. It does not achieve optical detection effect by calibrating the angle between the center of the relevant focused spot and the penetrating positioning crosshair beam, and cannot detect the detection flexibility and reliability of the lens.

[0006] This application provides an optical detection device for lens coating thickness, employing the following technical solution: An optical detection device for lens coating thickness includes a fixed base, a laser, a collimator adjustment base, an L-shaped bracket, an X-axis micro motor, a Y-axis micro motor, and a motor reflector. The laser is threadedly connected to one side of the fixed base. The collimator adjustment base is located in the middle of the opposite side of the L-shaped bracket and the laser. The surface of the L-shaped bracket is threadedly connected to one side of the Y-axis micro motor. The X-axis micro motor is slidably connected to the inner side of the L-shaped bracket. Two sets of motor reflectors are provided, and one end of each set of motor reflectors is fixedly connected to the motor shafts of the X-axis micro motor and the Y-axis micro motor respectively via couplings.

[0007] In one feasible technical solution of this application, the interior of the sight adjustment seat is further provided with a second reflector, an electric telescopic rod, a connecting rod and a hinged ear plate. The bottom of the second reflector is fixedly connected to one side of the hinged ear plate, the output end of the electric telescopic rod is fixedly connected to the bottom of the connecting rod, and the top of the connecting rod is hinged to the middle of the hinged ear plate.

[0008] In one feasible technical solution of this application, the second reflector is also hinged to an elastic support rod on the side near the electric telescopic rod.

[0009] In one feasible technical solution of this application, a positioning sight is provided through the opposite sides of the sight adjustment seat and the L-shaped bracket.

[0010] In one feasible technical solution of this application, the outer side of the L-shaped bracket is further provided with a fixed frame, an electric telescopic rod II, a push rod and a slider. The fixed frame is fixedly connected to the surface of the L-shaped bracket. The output end of the electric telescopic rod II is fixedly connected to one end of the push rod. The outer side of the push rod is fixedly connected to the surface of the slider. The inner side of the slider is screwed to one side of the X-axis micro motor.

[0011] In one feasible technical solution of this application, the L-shaped bracket is further provided with a limiting groove with a size larger than that of the slider.

[0012] In summary, this application includes at least one of the following beneficial technical effects:

[0013] This device is a non-contact optical inspection system, employing laser interferometry to avoid damage to the film. The optical path is corrected in real time via a crosshair adjustment mount and a dual-axis micro-motor reflector to adapt to lenses at different angles. An electric telescopic rod, in conjunction with a connecting rod and hinged lugs, enables fine-tuning of the reflector's pitch. When the lens wobbles, the system automatically adjusts the reflector angle based on feedback from the crosshair beam, ensuring the measurement beam remains perpendicular and minimizing errors. The system calculates the lens wobble angle in real time and performs dynamic compensation by calibrating the angle between the focused spot center and the crosshair beam. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 This is a schematic diagram of the structure of the optical detection device for lens coating thickness according to an embodiment of this application.

[0016] Figure 2 This is an enlarged view of the inner side of the L-shaped bracket in the embodiment of this application.

[0017] Figure 3 This is a perspective view of the flexible detection mechanism in the embodiments of this application.

[0018] Figure 4 This is a cross-sectional view of the sight adjustment mount in an embodiment of this application.

[0019] Figure 5 This is a diagram showing the tilt effect of the second reflector in an embodiment of this application.

[0020] Explanation of reference numerals in the attached figures:

[0021] 11. Fixed base; 12. Laser; 13. Crosshair adjustment base; 14. L-shaped bracket; 15. X-axis micro motor; 16. Y-axis micro motor; 17. Motor reflector; 2. Second reflector; 3. Electric telescopic rod one; 4. Connecting rod; 5. Hinge ear plate; 6. Elastic support rod; 7. Positioning crosshair; 8. Fixed frame; 9. Electric telescopic rod two; 10. Push rod; 20. Slider; 21. Limiting slot. Detailed Implementation

[0022] To make the technical problems, technical solutions, and beneficial effects to be solved by this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and are not intended to limit the scope of this application.

[0023] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0024] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0026] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0027] This application discloses an optical detection device for measuring the thickness of a lens coating. (Refer to...) Figures 1 to 5 The optical detection device for lens coating thickness includes a fixed base 11, a laser 12, a crosshair adjustment base 13, an L-shaped bracket 14, an X-axis micro motor 15, a Y-axis micro motor 16, and a motor reflector 17. The laser 12 is threadedly connected to one side of the fixed base 11. The crosshair adjustment base 13 is located in the middle of the opposite side of the L-shaped bracket 14 and the laser 12. The surface of the L-shaped bracket 14 is threadedly connected to one side of the Y-axis micro motor 16. The X-axis micro motor 15 is slidably connected to the inner side of the L-shaped bracket 14. Two sets of motor reflectors 17 are provided, and one end of each set of motor reflectors 17 is fixedly connected to the motor shafts of the X-axis micro motor 15 and the Y-axis micro motor 16 respectively through a coupling.

[0028] The interior of the sight adjustment base 13 is also equipped with a second reflector 2, an electric telescopic rod 3, a connecting rod 4, and a hinged ear plate 5. The bottom of the second reflector 2 is fixedly connected to one side of the hinged ear plate 5, the output end of the electric telescopic rod 3 is fixedly connected to the bottom of the connecting rod 4, and the top of the connecting rod 4 is hinged to the middle of the hinged ear plate 5.

[0029] The second reflector 2 is also hinged to an elastic support rod 6 on the side near the electric telescopic rod 3.

[0030] A positioning sight 7 is provided through the opposite sides of the sight adjustment seat 13 and the L-shaped bracket 14.

[0031] The L-shaped bracket 14 is also provided with a fixed frame 8, an electric telescopic rod 9, a push rod 10 and a slider 20. The fixed frame 8 is fixedly connected to the surface of the L-shaped bracket 14. The output end of the electric telescopic rod 9 is fixedly connected to one end of the push rod 10. The outer side of the push rod 10 is fixedly connected to the surface of the slider 20. The inner side of the slider 20 is screwed to one side of the X-axis micro motor 15.

[0032] The L-shaped bracket 14 also has a limiting slot 21 with a size larger than that of the slider 20 inside.

[0033] The usage process of the optical detection device for lens coating thickness in this application embodiment is roughly as follows:

[0034] The device consists of a laser 12, a crosshair adjustment seat 13, and an L-shaped bracket 14, all horizontally distributed on a fixed base 11. The laser beam of the laser 12 overlaps with the central axis of the positioning crosshair 7. During the detection process, the laser beam passes through the positioning crosshair 7 to the Y-axis micro motor 16. The Y-axis micro motor 16, through a speed regulator, causes its motor shaft to rotate slightly, driving the motor reflector 17. The motor reflector 17 reflects the laser beam to the motor reflector 17 outside the X-axis micro motor 15. The angle between the center of the focused spot of the laser beam and the beam penetrating the positioning crosshair 7 is the yaw angle. This angle, combined with the crosshair adjustment seat 13, controls the error, thus enabling flexible detection of the micro motor. The electric telescopic rod 3 can be activated automatically. Its output end pushes the connecting rod 4. The connecting rod 4 pushes the second reflector 2 upward along the hinged ear plate 5. With the cooperation of the elastic support rod 6, the tilt angle of the second reflector 2 is finely adjusted. At the same time, according to the deflection angle of the beam incident along the X-axis, the electric telescopic rod 9 on the inner side of the fixing frame 8 can be used to complete the secondary focusing. That is, the electric telescopic rod 9 pushes the outer slider 20 through the push rod 10. The slider 20 slides horizontally along the limiting slot 21, thereby driving the inner X-axis micro motor 15 and the motor reflector 17 at its outer end to slowly finely adjust along its vertical direction, thereby finding the eccentric angle, improving the detection accuracy of this device, and reducing the error.

[0035] The beneficial technical effects of the optical detection device for lens coating thickness according to the embodiments of this application are roughly as follows:

[0036] This device is a non-contact optical inspection device, which uses laser interferometry to avoid damage to the film. The optical path is corrected in real time through the crosshair adjustment seat 13 and the dual-axis micro motor reflector 17 to adapt to lenses of different angles. The electric telescopic rod 3, together with the connecting rod 4 and the hinged ear plate 5, realizes the pitch fine adjustment of the reflector. When the lens is skewed, the system automatically adjusts the reflector angle through the feedback of the crosshair beam to keep the measurement beam always perpendicular to the incident point and reduce errors. The lens skew angle is calculated in real time and dynamic compensation is completed by calibrating the angle between the center of the focused spot and the crosshair beam.

[0037] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An optical detection device for lens coating thickness, characterized in that, The device includes a fixed base (11), a laser (12), a crosshair adjustment base (13), an L-shaped bracket (14), an X-axis micro motor (15), a Y-axis micro motor (16), and a motor reflector (17). The laser (12) is threaded to one side of the fixed base (11). The crosshair adjustment base (13) is located in the middle of the opposite side of the L-shaped bracket (14) and the laser (12). The surface of the L-shaped bracket (14) is threaded to one side of the Y-axis micro motor (16). The X-axis micro motor (15) is slidably connected to the inner side of the L-shaped bracket (14). There are two sets of motor reflectors (17), and one end of each set of motor reflectors (17) is fixedly connected to the motor shafts of the X-axis micro motor (15) and the Y-axis micro motor (16) respectively via couplings.

2. The optical detection device for lens coating thickness according to claim 1, characterized in that: The interior of the sight adjustment seat (13) is also provided with a second reflector (2), an electric telescopic rod (3), a connecting rod (4) and a hinged ear plate (5). The bottom of the second reflector (2) is fixedly connected to one side of the hinged ear plate (5). The output end of the electric telescopic rod (3) is fixedly connected to the bottom of the connecting rod (4). The top of the connecting rod (4) is hinged to the middle of the hinged ear plate (5).

3. The optical detection device for lens coating thickness according to claim 2, characterized in that: The second reflector (2) is also hinged to an elastic support rod (6) on the side near the electric telescopic rod (3).

4. The optical detection device for lens coating thickness according to claim 1, characterized in that: A positioning sight (7) is provided through the opposite sides of the sight adjustment seat (13) and the L-shaped bracket (14).

5. The optical detection device for lens coating thickness according to claim 4, characterized in that: The L-shaped bracket (14) is also provided with a fixed frame (8), an electric telescopic rod (9), a push rod (10) and a slider (20). The fixed frame (8) is fixedly connected to the surface of the L-shaped bracket (14). The output end of the electric telescopic rod (9) is fixedly connected to one end of the push rod (10). The outer side of the push rod (10) is fixedly connected to the surface of the slider (20). The inner side of the slider (20) is screwed to one side of the X-axis micro motor (15).

6. The optical detection device for lens coating thickness according to claim 5, characterized in that: The L-shaped bracket (14) also has a limiting slot (21) with a size larger than that of the slider (20) inside.

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