Substrate surface foreign matter detection device

Abstract

The utility model provides a substrate surface foreign matter detection device, which belongs to the technical field of substrate detection devices, and comprises a cooling platform and a cooling plate for placing a substrate, the cooling plate is arranged on the cooling platform, and the cooling plate comprises a light beam interruption type sensor, a slide rail positioning sheet, a gap sensor and a transfer assembly, the light beam blocking type sensor comprises an infrared transmitter and an infrared receiver, the infrared transmitter and the infrared receiver are arranged on the two sides of the cooling plate respectively, and transferring assemblies for moving the infrared transmitter and the infrared receiver are arranged on the two sides of the cooling platform respectively. According to the substrate surface foreign matter detection device, through the light beam interruption type inductor and the sliding assembly, efficiency detection of the substrate surface foreign matter can be achieved, the accuracy of the substrate surface foreign matter can be greatly improved, missing detection can be effectively reduced, and the number of defective products in the production process can be reduced to a large extent.

Description

Technical Field

[0001] This utility model relates to a foreign object detection device on a substrate surface, belonging to the technical field of substrate detection devices. Background Technology

[0002] PMOLED (Passive Matrix OLED) is a passive matrix organic light-emitting display, and its applications are becoming increasingly widespread. In the photolithography manufacturing process, a photomask is typically placed over a glass surface coated with photoresist. Ultraviolet light is then selectively irradiated, causing a chemical reaction in the photoresist at the illuminated areas, altering the solubility of that portion of the photoresist film in the developer. After development, the photoresist reveals a pattern corresponding to the photomask.

[0003] When creating metal or ITO patterns, a positive transition photoresist is required. First, after exposure and development, the substrate is left with the photoresist of the desired shape for that process. Then, after baking and etching, the metal or ITO layer becomes the pattern protected by the photoresist. The photoresist is then removed using an alkaline agent. Finally, the patterned substrate is baked again, followed by etching and photoresist removal, completing all steps of the current process.

[0004] In photolithography (PMLOED) processes, if large foreign objects remain on the substrate surface after resist coating, homogenization, and pre-baking, gaps will appear in the pattern at the corresponding locations after development, leading to pattern defects or side etching during etching. Furthermore, foreign objects may adhere to the photomask during exposure. In PMLOED processes, product defects caused by foreign objects adhering to the photoresist film surface after resist coating include broken metal traces, side etching of metal traces, ITO adhesion, and black spots in the in-plane pixel area. Regular cleaning of all equipment from the cleaning machine to the pre-exposure stage, and cleaning of the resist coating head before resist coating, cannot completely prevent these abnormalities from occurring.

[0005] Currently, the usual method is to visually inspect the substrate coating surface for foreign matter under strong light before development. However, in large-scale continuous production, this is inefficient and it is easy to miss substrates with foreign matter on the coating surface. Utility Model Content

[0006] The purpose of this invention is to provide a substrate surface foreign object detection device to solve the problems of low efficiency and easy omission in the detection of foreign objects on the substrate surface in the prior art.

[0007] The technical solution of this utility model is:

[0008] A foreign object detection device for a substrate surface includes a cooling platform and a cooling plate for placing the substrate. The cooling plate is disposed on the cooling platform and includes a beam interruption sensor, a slide rail positioning plate, a gap sensor, and a transfer assembly. The beam interruption sensor includes an infrared emitter and an infrared receiver, which are respectively disposed on both sides of the cooling plate. Transfer assemblies for moving the infrared emitter and the infrared receiver are respectively disposed on both sides of the cooling platform. Slide rail positioning plates are respectively disposed at both ends of the transfer assembly, and the slide rail positioning plates are disposed above the substrate. The gap sensor is disposed above the slide rail positioning plates.

[0009] Furthermore, the slide rail positioning plate is made of a smooth, light-transmitting glass sheet.

[0010] Furthermore, the infrared rays emitted by the infrared transmitter, the infrared rays received by the infrared receiver, and the bottom surface of the slide rail positioning plate are at the same height.

[0011] Furthermore, the transfer assembly includes a horizontal transfer assembly, a vertical transfer assembly, and a sliding assembly. The two ends of the sliding assembly are respectively disposed on the vertical transfer assembly, and the vertical transfer assembly is vertically disposed on the horizontal transfer assembly.

[0012] Furthermore, the sliding assembly includes a sliding motor, a ball screw, a slide table, and a housing. The housing has slide rail positioning plates at both ends. The ball screw is located inside the housing and its two ends are movably connected to the housing. The ball screw is driven by the sliding motor. The slide table is located on the nut of the ball screw. The housing has an opening for the movement of the slide table. The slide table is equipped with an infrared transmitter or an infrared receiver.

[0013] Furthermore, the cooling platform is provided with a moving component for moving the gap sensor. The moving component includes a vertical moving component and a horizontal moving component, with the horizontal moving component disposed on the vertical moving component.

[0014] Furthermore, the horizontal transfer assembly, vertical transfer assembly, vertical movement assembly, and horizontal movement assembly all employ linear drive mechanisms.

[0015] Furthermore, the gap sensor is connected to the input of the controller, and the output of the controller is connected to the beam interruption sensor, the transfer component, and the moving component, respectively.

[0016] The beneficial effects of this invention are as follows: This substrate surface foreign object detection device, through a beam-blocking sensor and a transfer assembly, can achieve highly efficient detection of foreign objects on the substrate surface, greatly increasing the accuracy of foreign object detection, effectively reducing missed detections, and significantly reducing the number of defective products in the production process. Furthermore, it eliminates the need for manual inspection of the film surface after exposure and before development, reducing workload. Attached Figure Description

[0017] Figure 1This is a schematic diagram of the structure of the foreign object detection device on the substrate surface according to an embodiment of the present invention;

[0018] Figure 2 yes Figure 1 A schematic diagram of the AA-direction cross-sectional structure;

[0019] Figure 3 This is a schematic diagram illustrating the sliding assembly, the slide rail positioning plate, and the infrared emitter in the embodiment;

[0020] Wherein: 1-cooling platform, 2-cooling plate, 3-slide rail positioning piece, 4-gap sensor, 5-infrared transmitter, 6-infrared receiver, 7-transfer assembly, 8-vertical movement assembly, 9-horizontal movement assembly, 10-substrate, 11-foreign object;

[0021] 71-Horizontal transfer assembly, 72-Vertical transfer assembly, 73-Sliding assembly;

[0022] 731-Sliding motor, 732-Ball screw, 733-Slide table, 734-Housing. Detailed Implementation

[0023] The preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings.

[0024] An embodiment provides a foreign object detection device for a substrate surface, such as Figure 1 The system includes a cooling platform 1 and a cooling plate 2 for placing a substrate 10. The cooling plate 2 is disposed on the cooling platform 1 and includes a beam interruption sensor, a slide rail positioning plate 3, a gap sensor 4, and a transfer assembly 7. The beam interruption sensor includes an infrared emitter 5 and an infrared receiver 6, which are respectively disposed on both sides of the cooling plate 2. The cooling platform 1 is provided with a transfer assembly 7 for moving the infrared emitter 5 and the infrared receiver 6 on both sides. The transfer assembly 7 is provided with slide rail positioning plates 3 at both ends, and the slide rail positioning plates 3 are disposed above the substrate 10. The gap sensor 4 is disposed above the slide rail positioning plates 3.

[0025] This substrate surface foreign object detection device, through a beam-blocking sensor and a sliding assembly, can achieve highly efficient detection of foreign objects 11 on the surface of the substrate 10, greatly increasing the accuracy of foreign object detection and effectively reducing missed detections, thus significantly reducing the number of defective products in the production process. It also eliminates the need for manual inspection of the film surface after exposure and before development, reducing workload.

[0026] In this type of substrate surface foreign object detection device, the slide rail positioning plate 3 is made of a transparent glass sheet with smooth top and bottom surfaces. The infrared emitted by the infrared emitter 5, the infrared received by the infrared receiver 6, and the bottom surface of the slide rail positioning plate 3 are at the same height, ensuring that the infrared emitter 5 and the infrared receiver 6 maintain a stable gap with the surface of the substrate 10 during sliding. The distance between the bottom surface of the slide rail positioning plate 3 and the substrate 10 is detected through the slide rail positioning plate 3 and the gap sensor 4. Furthermore, when the slide rail positioning plate 3 is at the same height as the beam interruption sensor, the distance between the beam interruption sensor and the substrate 10 can be detected.

[0027] This substrate surface foreign object detection device includes a transfer assembly 7 comprising a horizontal transfer assembly 71, a vertical transfer assembly 72, and a sliding assembly. The two ends of the sliding assembly are respectively mounted on the vertical transfer assembly 72, which is vertically mounted on the horizontal transfer assembly 71. The horizontal transfer assembly 71 and the vertical transfer assembly 72 respectively enable the sliding assembly to move in the horizontal and vertical directions.

[0028] This type of substrate surface foreign object detection device, such as Figure 3 The sliding assembly includes a sliding motor 731, a ball screw 732, a slide table 733, and a housing 734. Slide rail positioning plates 3 are provided at both ends of the housing 734. The ball screw 732 is located inside the housing 734, and its two ends are movably connected to the housing 734. The ball screw 732 is driven by the sliding motor 731. The slide table 733 is located on the nut of the ball screw 732. The housing 734 has an opening for the movement of the slide table 733. The slide table 733 is equipped with an infrared transmitter 5 or an infrared receiver 6. The movement of the infrared transmitter 5 or the infrared receiver 6 is achieved through the sliding assembly.

[0029] In this type of substrate surface foreign object detection device, the cooling platform 1 is equipped with a moving component for moving the gap sensor 4. The moving component includes a vertical moving component 8 and a horizontal moving component 9, with the horizontal moving component 9 mounted on the vertical moving component 8. The vertical moving component 8 enables vertical movement of the horizontal moving component 9, and the horizontal moving component 9 enables horizontal movement of the gap sensor 4.

[0030] This substrate surface foreign object detection device employs linear drive mechanisms in its horizontal transfer assembly, vertical transfer assembly, vertical movement assembly, and horizontal movement assembly. The linear drive mechanism includes a housing, a transfer ball screw, a transfer slide, and a transfer motor. The transfer ball screw is driven by the transfer motor and is housed within the housing with both ends movably connected to it. The transfer slide is mounted on the nut of the transfer ball screw. The top of the housing has a slot for the movement of the transfer slide. The transfer slide of the horizontal transfer assembly 71 is connected to the end of the vertical transfer assembly 72, and the transfer slide of the vertical transfer assembly 72 is connected to a sliding assembly. The transfer slide of the vertical movement assembly 8 is connected to the transfer slide of the horizontal movement assembly 9, and a gap sensor 4 is provided at the end of the horizontal movement assembly 8.

[0031] This substrate surface foreign object detection device adds a foreign object detection device to the cooling plate 2 before the substrate 10 enters the exposure machine. Using this device, each substrate 10 is scanned at a distance of 5µm (with an allowable error of ±3µm) from its surface before exposure. If no foreign object 11 is detected, the substrate proceeds to exposure. When a protruding foreign object 11 is present on the surface of the substrate 10, the light scanned by the proximity-type beam interruption sensor is blocked, triggering an alarm. This device enables efficient and accurate detection of foreign objects 11 on the surface of the substrate 10. The gap sensor 4 is connected to the input of the controller, and the output of the controller is connected to the beam interruption sensor, the transfer assembly 7, and the moving assembly, respectively.

[0032] like Figure 2 The implementation process of this substrate surface foreign object detection device is as follows:

[0033] 1) Place the substrate 10 on the cooling plate 2. Move the gap sensors 4 at the four ends of the cooling platform 1 toward the substrate 10 by the horizontal moving component 9 of the moving component until the edge of the substrate 10 is reached. The horizontal transfer component 71 drives the slide rail positioning piece 3 and the infrared emitter 5 to move toward the substrate 10 until the edge of the substrate 10 is reached.

[0034] 2) The slide rail positioning piece 3 is a smooth, light-transmitting glass sheet with no differences in appearance or size among the four pieces. For gap detection, by adjusting the horizontal position as described above, the gap sensor 4 emits electromagnetic waves that penetrate the slide rail positioning piece 3 to the surface of the substrate 10. The electromagnetic waves are reflected back from the bottom surface of the slide rail positioning piece 3 and the surface of the substrate 10, respectively, and are received by the gap sensor 4. This allows for the determination of the distance between the bottom surface of the slide rail positioning piece 3 and the surface of the substrate 10. After setting the gap value of 5µm for the four gap sensors 4, the vertical transfer assembly 72 adjusts the gap between the bottom surface of the slide rail positioning piece 3 and the surface of the substrate 10 to 5µm, with an acceptable error range of ±3µm.

[0035] 3) The infrared transmitter 5 emits infrared light, the infrared receiver 6 receives infrared light, and the bottom surface of the slide rail positioning piece 3 are at the same height, ensuring that the infrared transmitter 5 and infrared receiver 6 maintain a 5µm gap with the surface of the substrate 10 during sliding. The infrared transmitter 5 is activated to emit infrared light, and the infrared receiver 6 receives it. Then, the sliding components on both sides of the substrate 10 are synchronously driven, causing the infrared transmitter 5 and infrared receiver 6 to move from one end of the substrate 10 to the other, scanning at a uniform speed of 1m / min. If a foreign object 11 (typically 20µm in diameter) adheres to the surface of the substrate 10, the light will be blocked, triggering an alarm.

[0036] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any transformations or substitutions that can be conceived by a person skilled in the art within the technical scope disclosed in this utility model should be included within the scope of this utility model. Therefore, the protection scope of this utility model should be the protection scope of the claims.

Claims

1. A foreign object detection device for a substrate surface, comprising a cooling platform and a cooling plate for placing the substrate, the cooling plate being disposed on the cooling platform, characterized in that: The device includes a beam interruption sensor, a slide rail positioning plate, a gap sensor, and a transfer assembly. The beam interruption sensor includes an infrared transmitter and an infrared receiver, which are respectively located on both sides of a cooling plate. Transfer assemblies for moving the infrared transmitter and receiver are respectively located on both sides of the cooling platform. Slide rail positioning plates are located at both ends of the transfer assembly, and the slide rail positioning plates are located above the substrate. The gap sensor is located above the slide rail positioning plates.

2. The substrate surface foreign object detection device as described in claim 1, characterized in that: The slide rail positioning plate is made of a smooth, light-transmitting glass sheet.

3. The substrate surface foreign object detection device as described in claim 1, characterized in that: The infrared transmitter emits infrared light, the infrared receiver receives infrared light, and the bottom surface of the slide rail positioning plate is at the same height.

4. The substrate surface foreign object detection device according to any one of claims 1-3, characterized in that: The transfer assembly includes a horizontal transfer assembly, a vertical transfer assembly, and a sliding assembly. The two ends of the sliding assembly are respectively disposed on the vertical transfer assembly, and the vertical transfer assembly is vertically disposed on the horizontal transfer assembly.

5. The substrate surface foreign object detection device as described in claim 4, characterized in that: The sliding assembly includes a sliding motor, a ball screw, a slide table, and a housing. The housing has slide rail positioning plates at both ends. The ball screw is located inside the housing and its two ends are movably connected to the housing. The ball screw is driven by the sliding motor. The slide table is located on the nut of the ball screw. The housing has an opening for the movement of the slide table. The slide table is equipped with an infrared transmitter or an infrared receiver.

6. The substrate surface foreign object detection device as described in claim 4, characterized in that: The cooling platform is equipped with a moving component for moving the gap sensor. The moving component includes a vertical moving component and a horizontal moving component, with the horizontal moving component mounted on the vertical moving component.

7. The substrate surface foreign object detection device as described in claim 6, characterized in that: The horizontal transfer assembly, vertical transfer assembly, vertical movement assembly, and horizontal movement assembly all employ linear drive mechanisms.

8. The substrate surface foreign object detection device as described in claim 6, characterized in that: The gap sensor is connected to the input of the controller, and the output of the controller is connected to the beam interruption sensor, the transfer component, and the moving component, respectively.

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