Wafer packaging structure

Abstract

The utility model discloses a wafer packaging structure, which comprises an aluminum disc main body and a sealing ring, the top end surface of the aluminum disc main body is recessed downwards to form a sealing ring groove, the sealing ring is embedded in the sealing ring groove in an interference fit manner, and the sealing ring groove comprises a first groove body and a second groove body which are communicated with each other. According to the design scheme provided by the utility model, the sealing ring groove is designed into two opposite trapezoidal groove structures, when the sealing ring is assembled, the sealing ring is firstly embedded into the first groove body, and the sealing ring can be pushed into the second groove body by slight force under the influence of the shape of the first groove body; under the abutting action of the narrow and wide surfaces of the second groove body and the first groove body on the sealing ring and the elastic action of the sealing ring, the assembly firmness after the sealing ring is installed can be guaranteed, the sealing ring is not prone to falling off after being placed in the aluminum plate and turned over, and great convenience is brought to installation and later cleaning of operators.

Description

Technical Field

[0001] This utility model belongs to the field of wafer packaging technology, specifically a wafer packaging structure. Background Technology

[0002] A wafer, specifically a sapphire substrate, is grown using a dry etching mask. The mask is patterned using standard photolithography, and the sapphire is etched using ICP etching technology. The mask is then removed, and GaN material is grown on top, transforming the longitudinal epitaxy of the GaN material into lateral epitaxy. Currently, during PSS etching, the sapphire substrate is transported to the dry etching machine via an aluminum disk for patterning.

[0003] Currently, sealing rings are fitted on the outer edge of sapphire substrates packaged in aluminum discs to ensure overall sealing. The sealing ring mounting grooves in aluminum discs on the market are all circular structures. During the installation of the sealing ring, the elastic deformation of the sealing ring is mainly relied on to achieve a tight connection with the sealing ring mounting groove. However, in actual use, it has been found that the sealing ring may fall off due to vibration or other factors, which can easily affect the overall sealing effect.

[0004] In view of this, a wafer packaging structure is proposed. Utility Model Content

[0005] The purpose of this invention is to provide a wafer packaging structure in order to solve the problems mentioned above.

[0006] The technical solution adopted by this utility model is as follows: a wafer packaging structure includes an aluminum disk body and a sealing ring. The top surface of the aluminum disk body is recessed downward to form a sealing ring groove. The sealing ring is interference-fitted into the sealing ring groove. The sealing ring groove includes a first groove and a second groove that are connected. The first groove has an overall trapezoidal structure that is wider at the top and narrower at the bottom. The second groove has an overall trapezoidal structure that is narrower at the top and wider at the bottom. The narrowest width of the first groove and the second groove is less than the diameter of the sealing ring, and the widest width of the first groove and the second groove is greater than the diameter of the sealing ring.

[0007] In a preferred embodiment, the narrowest width of the first groove and the second groove is 0.85 to 0.9 times the diameter of the sealing ring.

[0008] In a preferred embodiment, an arc-shaped transition surface is provided at the connection between the first tank and the second tank.

[0009] In a preferred embodiment, the bottom surface of the aluminum disc body is provided with a plurality of drainage holes that are connected to the sealing ring groove at intervals along the circumferential direction.

[0010] In a preferred embodiment, a sealing cap is detachably installed at the bottom of the drain hole.

[0011] In a preferred embodiment, the sealing ring has an O-shaped cross-section and is made of fluororubber.

[0012] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0013] 1. In this utility model, the sealing ring groove is designed as two trapezoidal groove structures arranged opposite each other. When assembling the sealing ring, the sealing ring is first embedded into the first groove. Due to the influence of the shape of the first groove, it can be pushed into the second groove with a little force. Due to the contact effect of the narrower and wider surfaces of the second and first grooves on the sealing ring, as well as the elasticity of the sealing ring itself, the assembly firmness of the sealing ring after installation can be guaranteed. It is not easy to fall off even after the sealing ring is placed in the aluminum plate and turned over. This brings great convenience to the operator for installation and subsequent cleaning.

[0014] 2. In this utility model, a drain hole connected to the sealing ring groove is also provided on the aluminum disc body. After cleaning, the added drain hole can drain the water accumulated in the sealing ring groove during the cleaning process, which can shorten the drying time of the aluminum disc after cleaning and improve the overall efficiency of use. Attached Figure Description

[0015] Figure 1 This is a simplified schematic diagram of a portion of the internal structure of the sealing ring assembled in the aluminum disc body in this utility model;

[0016] Figure 2 This is a simplified schematic diagram of a portion of the internal structure of the aluminum disc body in this utility model;

[0017] Figure 3 This is a schematic diagram of the planar structure of the sealing ring in this utility model.

[0018] Marked in the image:

[0019] 100-Sealing ring,

[0020] 200 - Aluminum disc body, 210 - Sealing ring groove, 220 - Drain hole;

[0021] 211 - Arc-shaped transition surface, 212 - First groove, 213 - Second groove;

[0022] 300 - Sealing cap. Detailed Implementation

[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0024] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0026] Reference Figure 1-3 A wafer packaging structure includes an aluminum disk body 200 and a sealing ring 100. The top surface of the aluminum disk body 200 is recessed downwards to form a sealing ring groove 210. The sealing ring 100 is interference-fitted into the sealing ring groove 210. The sealing ring groove 210 includes a first groove 212 and a second groove 213 that are connected. The first groove 212 has a trapezoidal structure that is wider at the top and narrower at the bottom, and the second groove 213 has a trapezoidal structure that is narrower at the top and wider at the bottom. The narrowest width of the first groove 212 and the second groove 213 is less than the diameter of the sealing ring 100, and the widest width of the first groove 212 and the second groove 213 is greater than the diameter of the sealing ring 100. The sealing ring groove 210 is designed... The structure consists of two opposing trapezoidal grooves. When assembling the sealing ring 100, the sealing ring 100 is first embedded in the first groove 212. Due to the shape of the first groove 212, the first groove 212 can initially position the installation position of the sealing ring 100. Then, with a little force, it can be pushed into the second groove 213. Due to the contact action of the narrower and wider surfaces of the second groove 213 and the first groove 212 on the sealing ring 100, as well as the elasticity of the sealing ring 100 itself, the assembly firmness of the sealing ring 100 after installation can be guaranteed. It is not easy to fall off even after the sealing ring is placed in the aluminum plate and turned over. This brings great convenience to the operator for installation and subsequent cleaning.

[0027] Furthermore, the narrowest width of the first groove 212 and the second groove 213 is 0.85 to 0.9 times the diameter of the sealing ring 100. The narrowest width of the groove is slightly smaller than the diameter of the sealing ring 100, so that the sealing ring 100 can be installed into the sealing ring groove 210 under a certain external force. Moreover, when the sealing ring 100 is not subjected to external force, it will not fall out of the sealing ring groove 210 due to the restriction of the opening, which can greatly improve the installation success rate of the sealing ring 100.

[0028] In this implementation, refer to Figure 2 As shown, an arc-shaped transition surface 211 is provided at the connection between the first groove 212 and the second groove 213. The advantages of the arc-shaped transition surface 211 are that it is easier to install the sealing ring 100 and it prevents the sealing ring 100 from being cut during installation.

[0029] Furthermore, the bottom surface of the aluminum disc body 200 is provided with a plurality of drainage holes 220 that are connected to the sealing ring grooves 210 at intervals along the circumference. The aluminum disc body 200 also has drainage holes 220 that are connected to the sealing ring grooves 210. After the aluminum disc body 200 is cleaned (the aluminum disc is placed in a cavity containing acidic gas for a long time, so it needs to be cleaned regularly), the additional drainage holes 220 can drain the water accumulated in the sealing ring grooves 210 during the cleaning process, which can shorten the drying time after cleaning the aluminum disc and improve the overall efficiency. Preferably, there are 6 to 8 drainage holes 220.

[0030] Furthermore, a sealing cover 300 can be detachably installed at the bottom of the drain hole 220, wherein the sealing cover 300 can be combined with the drain hole 220 by means of thread, snap or other connection.

[0031] Furthermore, the sealing ring 100 has an O-shaped cross-section and is made of fluororubber. Fluororubber has excellent high temperature resistance and acid and alkali resistance. Since the aluminum disc is placed in a cavity with acidic gas for a long time, it can ensure the overall service life of the sealing ring 100, thereby ensuring a longer sealing effect.

[0032] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A wafer packaging structure, characterized in that, The device includes an aluminum disc body and a sealing ring. The top surface of the aluminum disc body is recessed downwards to form a sealing ring groove. The sealing ring is interference-fitted into the sealing ring groove. The sealing ring groove includes a first groove and a second groove that are connected. The first groove is generally trapezoidal in shape, wider at the top and narrower at the bottom. The second groove is generally trapezoidal in shape, narrower at the top and wider at the bottom. The narrowest width of the first groove and the second groove is less than the diameter of the sealing ring, and the widest width of the first groove and the second groove is greater than the diameter of the sealing ring. The narrowest width of the first groove and the second groove is 0.85 to 0.9 times the diameter of the sealing ring. An arc-shaped transition surface is provided at the connection between the first groove and the second groove. The bottom surface of the aluminum disc body has multiple drainage holes that are circumferentially spaced and connected to the sealing ring groove. A sealing cap is detachably installed at the bottom of each drainage hole. The sealing ring has an O-shaped cross-section and is made of fluororubber material.

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