Multi-mode touch sensor and dexterous hand
By integrating shear force, pressure, and temperature sensors into a multimodal tactile sensor, the problems of limited functionality and poor flexibility of traditional tactile sensors are solved. This enables the detection of multiple signals and adaptation to complex-shaped contact surfaces, making it suitable for tactile perception by dexterous hands.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU LEANSTAR ELECTRONICS TECH
- Filing Date
- 2025-05-09
- Publication Date
- 2026-05-19
AI Technical Summary
Existing tactile sensors have limited functionality, primarily detecting normal forces and lacking research on tangential forces. Furthermore, traditional silicon-based tactile sensors have poor flexibility, making it difficult to detect complex-shaped contact surfaces.
Design a multimodal tactile sensor that integrates shear force, pressure, and temperature sensors. It is fabricated using flexible materials and integrated on a flexible polyimide circuit board, enabling it to detect multiple signals simultaneously and adapt to irregular contact surfaces.
It enables the detection of multiple signals such as shear force, pressure and temperature. The sensor has good overall flexibility, can adapt to complex shaped contact surfaces, and has a simple manufacturing process that is easy to mass-produce.
Smart Images
Figure CN224255399U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of flexible sensing technology, specifically to a multimodal tactile sensor and a dexterous hand. Background Technology
[0002] As a crucial source of tactile information, a robot's fingers should be capable of detecting various tactile signals. However, existing tactile sensors have limited sensing capabilities; most sensors used in robotic dexterity fingers can only detect force, focusing primarily on normal force and lacking research on tangential force. This limits the received tactile information and restricts the application of tactile sensors.
[0003] In addition to sensor functionality, tactile sensors must also possess excellent flexibility. Traditional silicon-based tactile sensors use rigid materials that cannot be bent freely, making them unsuitable for detecting tactile signals on complex shaped contact surfaces. Utility Model Content
[0004] The technical problem solved by this utility model is to provide a multimodal tactile sensor that integrates three detection functions: shear force, pressure and temperature, as well as a dexterous hand that integrates the multimodal tactile sensor.
[0005] The technical solution adopted by this utility model to solve its technical problem is:
[0006] A multimodal tactile sensor includes a shear force sensor, a pressure sensor, and a temperature sensor; the shear force sensor is a flexible capacitive sensor used to sense and identify the surface material and hardness of the object in contact with the glove; the pressure sensor is a flexible pressure sensor used to sense the magnitude and distribution of pressure required when the glove is gripped; and the temperature sensor is a flexible temperature sensor used to measure the temperature of the object in contact with the glove.
[0007] The shear force sensor, the pressure sensor, and the temperature sensor are regularly integrated on a first flexible substrate and a second flexible substrate, which are bonded together to form the multimodal tactile sensor.
[0008] Furthermore, the shear force sensor includes a lower electrode layer, an intermediate spacer layer, and an upper electrode layer. The lower electrode layer is regularly disposed on the upper surface of the first flexible substrate, the intermediate spacer layer is regularly disposed on the upper end of the lower electrode layer, and the upper electrode layer is regularly disposed on the upper end of the intermediate spacer layer.
[0009] Furthermore, a first flexible cover film is also bonded to the upper surface of the first flexible substrate through a first adhesive layer. The first adhesive layer surrounds the capacitive sensing area composed of the lower electrode layer, the intermediate spacer layer, and the upper electrode layer. The first flexible cover film covers and seals the capacitive sensing area through the first adhesive layer. The electrode leads of the lower electrode layer and the upper electrode layer are led out from the first flexible cover film.
[0010] Furthermore, the pressure sensor includes a pressure electrode layer and a piezoresistive sensitive layer, wherein the pressure electrode layer is regularly disposed on the lower surface of the second flexible substrate; and the piezoresistive sensitive layer is regularly disposed on the upper end of the pressure electrode layer.
[0011] Furthermore, the temperature sensor includes a temperature electrode layer and a temperature sensitive layer, wherein the temperature electrode layer is regularly disposed on the upper surface of the second flexible substrate; and the temperature sensitive layer is regularly disposed on the upper end of the temperature electrode layer.
[0012] Furthermore, a second flexible cover film is bonded to the lower surface of the second flexible substrate through a second adhesive layer. The second adhesive layer surrounds the pressure sensing area composed of the pressure electrode layer and the piezoresistive sensitive layer. The second flexible cover film covers and seals the pressure sensing area through the second adhesive layer. The electrode leads of the pressure electrode layer extend out of the second flexible cover film.
[0013] Furthermore, the lower surface of the first flexible substrate and the upper surface of the second flexible substrate are disposed opposite to each other and are bonded together by a third adhesive layer to form an integrated flexible multimodal tactile sensor.
[0014] Furthermore, the third adhesive layer surrounds the temperature sensing area formed by the temperature electrode layer and the temperature sensor layer, and the third adhesive layer seals the temperature sensing area between the first flexible substrate and the second flexible substrate; the electrode leads of the temperature electrode layer are led out from the third adhesive layer to the first flexible substrate and the second flexible substrate.
[0015] Furthermore, the capacitance sensing area, the pressure sensing area, and the temperature sensing area are staggered.
[0016] A dexterous hand includes the aforementioned multimodal tactile sensor, which is regularly integrated into the dexterous hand to realize the tactile sensing function of the dexterous hand.
[0017] This novel multimodal tactile sensor integrates a shear force sensor, a pressure sensor, and a temperature sensor, thus providing three detection functions: shear force, pressure, and temperature. It can simultaneously detect multiple signals and offers high reliability. The entire device is mounted on two flexible polyimide circuit boards, allowing it to be fixed to flexible curved surfaces and detect irregular contact surfaces. The sensor uses coating and printing processes to prepare the sensitive material, resulting in stable performance, simple manufacturing processes, and ease of mass production. This invention solves the problems of existing multimodal tactile sensors, such as complex manufacturing processes, difficulty in mass production, limited detection functions, and poor flexibility.
[0018] All materials used in this invention are flexible materials. All sensors are integrated on two flexible polyimide circuit boards. The entire device is flexible, thin, and lightweight, and can be fixed to a flexible contact surface to accurately detect signals on flexible curved surfaces. This can meet the increasingly diverse application needs of dexterous hands. Attached Figure Description
[0019] Figure 1 This is an exploded view of the present invention;
[0020] Figure 2 This is a diagram illustrating the application scenario of this utility model;
[0021] Figure 3 for Figure 2 Top view;
[0022] The diagram is marked as follows:
[0023] 1. Sensor; 2. Glove; 3. Controller;
[0024] 11. First flexible substrate; 111. Lower electrode layer; 112. Intermediate spacer layer; 113. Upper electrode layer; 114. First adhesive layer; 115. Second flexible cover film.
[0025] 12. Second flexible substrate; 121. Temperature electrode layer; 122. Temperature sensitive layer; 123. Pressure electrode layer; 124. Piezoresistive sensitive layer; 125. Second adhesive layer; 126. Second flexible cover film.
[0026] 13. Third adhesive layer. Detailed Implementation
[0027] To make the above-mentioned contents, objectives, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.
[0028] It should be noted that, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0029] like Figure 1 As shown, this utility model provides a multimodal tactile sensor, including an integrated shear force sensor, a pressure sensor, and a temperature sensor. The shear force sensor is a flexible capacitive sensor used to sense and identify signals such as the surface material and hardness of the object being contacted. The pressure sensor is a flexible pressure sensor used to sense signals such as the magnitude and distribution of pressure required when grasping the object. The temperature sensor is a flexible temperature sensor used to measure the temperature of the object being contacted. By integrating the shear force sensor (flexible capacitive sensor), the pressure sensor (flexible pressure sensor), and the temperature sensor, multiple signals can be detected simultaneously.
[0030] Furthermore, in this invention, the shear force sensor, pressure sensor, and temperature sensor in the multimodal tactile sensor 1 are regularly integrated on two flexible substrates. The two flexible substrates are then bonded together to assemble the integrated flexible multimodal tactile sensor 1. The three sensors are integrated on two flexible circuit boards, facilitating fixation on flexible curved surfaces and detection of irregular contact surfaces.
[0031] Furthermore, a shear force sensor is disposed on the first flexible substrate 11, including a lower electrode layer 111, an intermediate spacer layer 112, and an upper electrode layer 113. The lower electrode layer 111 is made of conductive ink (preferably micro / nano metallic material) and is prepared on the upper surface (front side) of the first flexible substrate 11 using coating, printing, or other processes. The intermediate spacer layer 112 is made of a high-dielectric material (preferably a micro / nano structured polymer) and is prepared on the upper end of the lower electrode layer 111 using coating, printing, or other processes. The upper electrode layer 113 is prepared on the upper end of the intermediate spacer layer 112 using the same material and process as the lower electrode layer 111.
[0032] Furthermore, such as Figure 1As shown, a first flexible cover film 115 is also bonded to the front (upper end) of the first flexible substrate 11 via a first adhesive layer 114. The first adhesive layer 114 surrounds the capacitive sensing area composed of the lower electrode layer 111, the intermediate spacer layer 12, and the upper electrode layer 113, while the first flexible cover film 115 seals the capacitive sensing area through the first adhesive layer 114. Electrode leads from the lower electrode layer 111 and the upper electrode layer 112 extend out of the first flexible cover film 115 for subsequent wiring to the controller 3.
[0033] Furthermore, the pressure sensor is a piezoresistive pressure sensor, disposed on the second flexible substrate 12, including a pressure electrode layer 123 and a piezoresistive sensitive layer 124. The pressure electrode layer 123 is prepared on the lower surface (front side) of the second flexible substrate 12 using conductive ink (preferably micro / nano metallic materials) and processes such as coating and printing. The piezoresistive sensitive layer 124 is prepared on the upper end of the pressure electrode layer 123 using a composite material containing nano-conductive materials and polymers. The use of a composite material of nano-conductive materials and polymers can accommodate the flexible substrate, solving the problem of poor flexibility in traditional sensors.
[0034] Furthermore, the nano-conductive material of the piezoresistive sensitive layer 124 includes one or more of nano-metallic materials, carbon nanomaterials, and conductive polymer materials. The polymer is one or more of epoxy resin, polyurethane, and polydimethylsiloxane.
[0035] Furthermore, the temperature sensor is a flexible temperature sensor, fabricated on the upper surface (back side) of the second flexible substrate 12, including a temperature electrode layer 121 and a temperature-sensitive layer 122. The temperature electrode layer 121 is fabricated on the upper surface (back side) of the second flexible substrate 12 using conductive ink (preferably micro / nano metallic materials) and processes such as coating and printing. The temperature-sensitive layer 122 is fabricated on the upper end of the temperature electrode layer 121 using a composite material of nano-conductive materials (one or more of nano-metallic materials, nano-carbon materials, and nano-semiconductor materials) and polymers (optionally one or more of epoxy resin, polyurethane, and polydimethylsiloxane).
[0036] Furthermore, such as Figure 1 As shown, a second flexible cover film 126 is bonded to the lower surface (front side) of the second flexible substrate 12 via a second adhesive layer 125. The second adhesive layer 125 surrounds the pressure sensing area formed by the pressure electrode layer 123 and the piezoresistive sensitive layer 124, while the second flexible cover film 126 seals the pressure sensing area through the second adhesive layer 125. Electrode leads of the pressure electrode layer 123 extend out of the second flexible cover film 126 for subsequent wiring to the controller 3.
[0037] Furthermore, the lower surface of the first flexible substrate 11 and the upper surface of the second flexible substrate 12 are arranged opposite to each other, i.e., the first flexible substrate and the second flexible substrate are arranged back to back, and are assembled together by bonding through the third adhesive layer 13 to form the flexible multimodal tactile sensor of this utility model. The third adhesive layer 13 surrounds the temperature sensing area composed of the temperature electrode layer 121 and the temperature sensitive layer 122, thereby sealing the temperature sensing area between the first flexible substrate 11 and the second flexible substrate 12 through the third adhesive layer 13. Correspondingly, the electrode leads of the temperature electrode layer 121 are led out from the third adhesive layer 13 for subsequent wiring and connection to the controller 3.
[0038] Preferably, the capacitance sensing area, pressure sensing area, and temperature sensing area are staggered. Of course, in other embodiments, the three sensing areas may also be overlapped.
[0039] Preferably, both the first flexible substrate 11 and the second flexible substrate 12 are flexible polyimide circuit boards. The first flexible cover film 114 and the second flexible cover film 126 are flexible films such as polydimethylsiloxane (PDMS), polyimide (PI), polyethylene terephthalate (PET), polyurethane (PU), and polyethylene (PE).
[0040] like Figure 2 and Figure 3 The diagram illustrates an application scenario of this invention. By integrating the sensor 1 and controller 3 of this invention into the glove 2, the glove achieves its sensing function. Several multimodal tactile sensors 1 are regularly arranged on the front of the palm, fingertips, and fingertips of the glove 2, thereby acquiring signals such as pressure and temperature during gripping, as well as signals identifying the surface material and hardness of the object being touched. The controller 3 is located on the back of the palm of the glove 2 and is electrically connected to the several multimodal tactile sensors 2 via data cables. It is used for sensor data acquisition, data processing and analysis, data transmission, and functional control.
[0041] Glove 1 is made of skin-friendly materials, including flexible fabrics, leather, and imitation leather, making it easy to wear and ensuring comfort.
[0042] Furthermore, glove 1 adopts a double-layer structure, with sensor 1 and controller 3 regularly arranged and installed between the two layers of glove 1, i.e., in the inner layer of the glove. Correspondingly, zippers or Velcro closures are regularly provided on the sides of the glove, allowing for quick opening of the double-layer structure and facilitating the installation and removal of sensor 1 and controller 3. When the glove becomes dirty after prolonged use, sensor 1 and controller 3 can be removed by unzipping the side closure or Velcro closure, allowing glove 1 to be cleaned, thus facilitating multiple uses of the glove.
[0043] Furthermore, the aforementioned multimodal tactile sensor 1 and controller 3 can also be directly integrated into the robotic hand to form a dexterous hand, thereby realizing the robotic hand's functions of tactile perception, temperature perception, and pressure perception.
[0044] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A multimodal tactile sensor, characterized in that: It includes a shear force sensor, a pressure sensor, and a temperature sensor; the shear force sensor is a flexible capacitive sensor used to sense and identify the surface material and hardness of the object in contact with the glove; the pressure sensor is a flexible pressure sensor used to sense the magnitude and distribution of pressure required when the glove is gripped; the temperature sensor is a flexible temperature sensor used to measure the temperature of the object in contact with the glove. The shear force sensor, the pressure sensor, and the temperature sensor are regularly integrated on a first flexible substrate and a second flexible substrate, which are bonded together to form the multimodal tactile sensor.
2. The multimodal tactile sensor according to claim 1, characterized in that: The shear force sensor includes a lower electrode layer, an intermediate spacer layer, and an upper electrode layer. The lower electrode layer is regularly disposed on the upper surface of the first flexible substrate, the intermediate spacer layer is regularly disposed on the upper end of the lower electrode layer, and the upper electrode layer is regularly disposed on the upper end of the intermediate spacer layer.
3. A multimodal tactile sensor according to claim 2, characterized in that: A first flexible cover film is also bonded to the upper surface of the first flexible substrate by a first adhesive layer. The first adhesive layer surrounds the capacitive sensing area composed of the lower electrode layer, the intermediate spacer layer and the upper electrode layer. The first flexible cover film covers and seals the capacitive sensing area by the first adhesive layer. The electrode leads of the lower electrode layer and the upper electrode layer are led out from the first flexible cover film.
4. A multimodal tactile sensor according to claim 3, characterized in that: The pressure sensor includes a pressure electrode layer and a piezoresistive sensitive layer. The pressure electrode layer is regularly disposed on the lower surface of the second flexible substrate, and the piezoresistive sensitive layer is regularly disposed on the upper end of the pressure electrode layer.
5. A multimodal tactile sensor according to claim 4, characterized in that: The temperature sensor includes a temperature electrode layer and a temperature sensitive layer. The temperature electrode layer is regularly disposed on the upper surface of the second flexible substrate, and the temperature sensitive layer is regularly disposed on the upper end of the temperature electrode layer.
6. A multimodal tactile sensor according to claim 5, characterized in that: The lower surface of the second flexible substrate is bonded with a second flexible cover film through a second adhesive layer. The second adhesive layer surrounds the pressure sensing area composed of the pressure electrode layer and the piezoresistive sensitive layer. The second flexible cover film covers and seals the pressure sensing area through the second adhesive layer. The electrode leads of the pressure electrode layer are led out of the second flexible cover film.
7. A multimodal tactile sensor according to claim 6, characterized in that: The lower surface of the first flexible substrate and the upper surface of the second flexible substrate are disposed opposite to each other and are bonded together by a third adhesive layer to form an integrated flexible multimodal tactile sensor.
8. A multimodal tactile sensor according to claim 7, characterized in that: The third adhesive layer surrounds the temperature sensing area formed by the temperature electrode layer and the temperature sensor layer, and seals the temperature sensing area between the first flexible substrate and the second flexible substrate; the electrode leads of the temperature electrode layer are led out from the third adhesive layer to the first flexible substrate and the second flexible substrate.
9. A multimodal tactile sensor according to claim 8, characterized in that: The capacitance sensing area, the pressure sensing area, and the temperature sensing area are staggered.
10. A dexterous hand, characterized in that: Includes a multimodal tactile sensor as described in any one of claims 1-9, wherein the multimodal tactile sensor is regularly integrated and disposed on a dexterous hand to realize the tactile sensing function of the dexterous hand.