Test seat mechanism

Abstract

The utility model discloses a test seat mechanism, and relates to the technical field of semiconductor test equipment, and the test seat mechanism comprises a seat body assembly which comprises a first part and a second part; the locking assembly is mounted on the seat body assembly and has a locking state and an unlocking state, the first part and the second part can be fixed in the locking state, and the second part can be separated from the first part in the unlocking state; the first driving assembly is installed on the base assembly and can drive one of the first part and the second part to move to a first preset position in the Z-axis direction and enable the first part and the second part to turn over around the first axis from the first preset position to a second preset position, so that the base assembly is uncovered. According to the technical scheme provided by the utility model, the problem that the abrasion of chip pins is increased in the existing test seat mechanism can be solved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing equipment technology, and in particular to a test seat mechanism. Background Technology

[0002] The chip test socket includes an upper socket and a lower socket. The lower socket is used to place the chip, and the upper socket is equipped with test probes. The upper and lower sockets are hinged together. The upper socket can be rotated around the hinge and closed with the lower socket. At the same time, the test probes contact the chip and perform the test.

[0003] However, when using existing chip test sockets, the upper cover is flipped around the hinge to close with the lower socket. This causes the movement trajectory of the test probe to be arc-shaped. When the moving probe comes into contact with the chip, there will be a certain displacement friction. This displacement will increase the wear of the chip pins. Utility Model Content

[0004] The main purpose of this invention is to propose a test socket mechanism that aims to solve the problem of increased chip pin wear caused by existing test socket mechanisms.

[0005] To achieve the above objectives, the test seat mechanism proposed in this utility model includes:

[0006] The base assembly includes a first part and a second part;

[0007] A locking component is installed on the base assembly and has a locked state and an unlocked state. In the locked state, the first part and the second part can be fixed, and in the unlocked state, the second part can be separated from the first part.

[0008] The first part is provided with a placement position for placing materials. The placement position is provided with a negative pressure hole and a first electrical connection part. The negative pressure hole can adsorb the materials placed in the placement position, and the first electrical connection part can be electrically connected to the materials. The second part is provided with a second electrical connection part. When the first part and the second part are fixed, the first part can be electrically connected to the second part, and the second electrical connection part can be electrically connected to the materials.

[0009] A first drive assembly, installed on the base assembly, is capable of driving one of the first part and the second part to move along the Z-axis to a first preset position, and to rotate it around a first axis from the first preset position to a second preset position, so as to open the cover of the base assembly.

[0010] In one embodiment, the first driving component includes a connecting part, a first driving member, and a second driving member. The connecting part is slidably mounted on the first part, and the first driving member can drive the connecting part to move along the Z-axis. The second part is rotatably mounted on the connecting part, and the second driving member can drive the second part to rotate around the first axis.

[0011] In one embodiment, the first drive member is configured as an elastic telescopic member.

[0012] In one embodiment, the first part includes an installation part and a testing part, the connecting part is installed on the installation part by a first driving member, and the placement position is located on the testing part.

[0013] In one embodiment, the second drive element is configured as a torsion spring.

[0014] In one embodiment, the locking component includes a latch and a latch, one of which is located in the first part and the other in the second part. When the latch and the latch are engaged, the locking component is in a locked state, and when the latch and the latch are disengaged, the locking component is in an unlocked state.

[0015] In one embodiment, the buckle is located in the first part, and the fastening position is located in the second part.

[0016] In one embodiment, the test seat mechanism further includes a sealing ring, the first part is provided with a mounting position for installing the sealing ring, the mounting position forms a test area, and the placement position is located in the test area.

[0017] In one embodiment, the test seat mechanism further includes a positioning component fixedly disposed relative to the seat assembly, the positioning component being capable of positioning the first or second part that flips around the first axis at a second preset position.

[0018] In one embodiment, the test seat mechanism further includes a second drive component, which is capable of driving the seat assembly to move along the X, Y, and Z directions;

[0019] And / or, the positioning component includes a magnet capable of attracting a first or second part that is flipped about a first axis.

[0020] The technical solution of this utility model employs a first driving component to first drive it to rotate around a first axis to a preset position, and then drive it to move along the Z-axis direction and abut against another component, so that the base assembly closes. This ensures that the path of the second electrical connection part when it abuts against the electrical connection position of the material is a straight path. Under the action of the straight path, the displacement of the second electrical connection part when it comes into contact with the material can be reduced, thereby reducing the possibility of chip pin wear and solving the technical problems existing in the prior art. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of a test seat mechanism according to an embodiment of the present invention, wherein the second part is in a first preset position;

[0023] Figure 2 for Figure 1 Another state diagram of the testing facility, in which the second part is in the second preset position;

[0024] Figure 3 for Figure 2 A schematic diagram from another perspective;

[0025] Figure 4 for Figure 3 Enlarged diagram of the placement position;

[0026] Figure 5 A schematic diagram of the structure of an embodiment of the test seat mechanism provided by this utility model in cooperation with the drive arm;

[0027] Figure 6 This is a schematic diagram of the structure of a test seat mechanism provided by this utility model in cooperation with a cylinder gripper assembly.

[0028] Explanation of icon numbers:

[0029] 100. Base assembly; 110. First part; 111. First surface; 112. Mounting part; 113. Testing part; 120. Second part; 121. Second surface; 130. Placement position; 140. Negative pressure hole; 150. First electrical connection part; 160. Second electrical connection part; 170. Mounting position; 180. Fourth electrical connection part; 190. Third electrical connection part; 10. Inlet pipe; 12. Exhaust pipe; 13. Vacuum tube;

[0030] 200. Locking component; 210. Buckle; 220. Snap-fit ​​position;

[0031] 300, First drive assembly; 310, Connecting part; 320, First drive component; 330, Second drive component;

[0032] 400. Sealing ring;

[0033] 500. Positioning component; 510. Magnet; 520. Mounting base;

[0034] 600. Second drive component; 610. Movable plate; 620. Fourth drive component;

[0035] 700, drive arm;

[0036] 800, Cylinder gripper assembly.

[0037] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0038] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0039] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0040] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0041] The chip test socket includes an upper socket and a lower socket. The lower socket is used to place the chip, and the upper socket is equipped with test probes. The upper and lower sockets are hinged together. The upper socket can be rotated around the hinge and closed with the lower socket. At the same time, the test probes contact the chip and perform the test.

[0042] However, when using existing chip test sockets, the upper cover is flipped around the hinge to close with the lower socket. This causes the movement trajectory of the test probe to be arc-shaped. When the moving probe comes into contact with the chip, there will be a certain displacement friction. This displacement will increase the wear of the chip pins.

[0043] This utility model proposes a test seat mechanism.

[0044] Please see Figure 1 , Figure 2 , Figure 3 In one embodiment of this utility model, the test seat mechanism includes: a seat assembly 100, a locking assembly 200, and a first drive assembly 300. Further, the seat assembly 100 includes a first part 110 and a second part 120. It should be noted that in this application, the first part 110 and the second part 120 are arranged vertically, with the second part 120 positioned above the first part 110. However, this design is not limited to this; in some embodiments, the first part 110 and the second part 120 can be distributed horizontally. Further, the locking assembly 200 is installed on the seat assembly 100 and has a locked state and an unlocked state. In the locked state, the first part 110 and the second part 120 can be fixed. When the first part 110 and the second part 120 are fixed, the seat assembly 100 is in a closed state, and the test seat mechanism can then perform the test. In the unlocked state, the second part 120 can be separated from the first part 110, and the seat assembly 100 is in an open state. It should be noted that in the open state, materials can enter and exit the seat assembly 100.

[0045] Furthermore, the first part 110 is provided with a placement position 130, which is used for placing materials. That is, the materials enter the seat assembly 100 and are placed on the placement position 130 in the seat assembly 100. It should be noted that the first part 110 is provided with a first surface 111, and the placement position 130 is located on the first surface 111. The placement position 130 is provided with a negative pressure hole 140 and a first electrical connection part 150 (see reference). Figure 4 The negative pressure hole 140 can adsorb the material placed in the placement position 130. It should be noted that the seat assembly 100 is provided with a negative pressure pipeline, which is located in the first part 110 and connected to the negative pressure hole 140. The negative pressure device can make the negative pressure hole 140 have an adsorption force through the negative pressure pipeline, so that when the material is placed in the placement position 130, the negative pressure hole 140 can adsorb the material placed in the placement position 130. The first electrical connection portion 150 is capable of electrical connection with the material. The first electrical connection portion 150 may employ a probe structure. When the material is placed at the preset installation position 130, the first electrical connection portion 150 can contact the material's electrical connection position, thereby achieving electrical connection between the first electrical connection portion 150 and the material. The second part 120 is provided with a second electrical connection portion 160. Further, the second part 120 is provided with a second surface 121, and the second electrical connection portion 160 is disposed on the second surface 121. When the first part 110 and the second part 120 are fixed, the base assembly 100 is in a closed state, at which time the first surface 111 and the second surface 121 are parallel. The second electrical connection portion 160 is electrically connected to the material. The second electrical connection portion 160 employs a probe structure. When the first part 110 and the second part 120 are fixed, the second electrical connection portion 160 can contact the electrical connection position on the material, thereby achieving electrical connection between the second electrical connection portion 160 and the material. Furthermore, the first part 110 is electrically connected to the second part 120. It should be noted that the first part 110 is provided with a third electrical connection portion 190, and the second part 120 is provided with a fourth connection portion 180. When the first part 110 and the second part 120 are fixed, the third electrical connection portion 190 and the fourth electrical connection portion 180 are electrically connected. Furthermore, the first electrical connection portion 150 and the third electrical connection portion 190 on the first part 110 can be electrically connected to external devices, thereby feeding back the test results to the external devices.

[0046] The first driving component 300 is installed on the seat assembly 100. In the unlocked state, the first driving component 300 can drive one of the first part 110 and the second part 120 to move along the Z-axis to a first preset position, and to rotate it around the first axis from the first preset position to a second preset position, so that the seat assembly 100 can open. It should be noted that when one of the first part 110 and the second part 120 moves to the first preset position, the first surface 111 and the second surface 121 are arranged in parallel. When one of the first part 110 and the second part 120 rotates from the first preset position to the second preset position, the first surface 111 and the second surface 121 are arranged in perpendicular position. Furthermore, in some embodiments, when one of the first part 110 and the second part 120 rotates from the first preset position to the second preset position, the first surface 111 and the second surface 121 can also be set at other angles, as long as it is convenient for materials to be taken out from the placement position 130.

[0047] When the seat assembly 100 needs to be closed, it can be done in the reverse direction. First, flip one of the first part 110 and the second part 120 located in the second preset position to the first preset position. At this time, the first surface 111 and the second surface 121 change from being arranged vertically to being arranged horizontally. Then, bring the first part 110 and the second part 120 closer together until the locking assembly 200 fixes the first part 110 and the second part 120, and the closure of the seat assembly 100 can be completed.

[0048] Specifically, in this embodiment, the first driving component 300 is installed on the first part 110 and can drive the second part 120. However, this design is not limited to this. In some embodiments, the first driving component 300 can be installed on the second part 120 and drive the first part 110.

[0049] Furthermore, in some embodiments (not shown), the first drive assembly 300 includes a first linear drive cylinder assembly and a tilting motor assembly, wherein the first linear drive cylinder assembly is mounted on the first part 110 and is used for mounting the tilting motor assembly, the tilting motor assembly can drive the second part 120 to tilt, further, the output shaft in the tilting motor assembly is connected to the second part 120 and can drive the second part 120 to tilt, it is understood that in this embodiment, the first axis is the axis of the output shaft in the tilting motor assembly; further, the first linear drive cylinder assembly can drive the tilting motor assembly and the second part 120 to move along the Z-axis direction, the tilting motor assembly can drive the second part 120 to tilt around the first axis.

[0050] It should be noted that when the seat assembly 100 of this utility model is closed, the first drive assembly 300 first drives the second part 120 to rotate to a preset position. Further, when the second part 120 is in the preset position, the opposing surfaces of the second part 120 and the first part 110 are parallel, and there is a preset gap between them. In this state, the second electrical connection part 160 on the second part 120 can be positioned above the material. The design of the material placement position 130 and the arrangement of the second electrical connection part 160 allows the second electrical connection part 160 to be positioned above the material. When the material is above the material, the second electrical connection part 160 can correspond to the electrical connection position of the material; then the second part 120 is driven to move along the Z-axis direction, so that the second part 120 abuts against the first part 110. At this time, the second electrical connection part 160 on the second part 120 can move towards the material and abut against the electrical connection position on the material, thereby realizing the electrical connection between the second electrical connection part 160 and the material. At the same time, when the second part 120 abuts against the first part 110, the third electrical connection part 190 can abut against the fourth electrical connection part 180 and make an electrical connection; finally, the locking component 200 fixes the abutting first part 110 and the second part 120, at which time the seat assembly 100 completes the closing.

[0051] It should be further explained that the technical solution of this utility model adopts a first driving component 300 to first drive it to rotate around the first axis to a preset position, and then drive it to move along the Z-axis and abut against the other, so that the seat component 100 closes. In this way, the path of the second electrical connection part 160 when it abuts against the electrical connection position of the material is a straight path. Under the action of the straight path, the displacement of the second electrical connection part 160 when it comes into contact with the material can be reduced, thereby reducing the possibility of chip pin wear, thus solving the technical problems existing in the prior art.

[0052] Understandably, when the seat assembly 100 needs to be opened, the locking assembly 200 is first in the unlocked state, and then the first drive assembly 300 drives the second part 120 to move a preset distance along the Z-axis, so that the second part 120 reaches the preset position and separates from the first part 110. Then the first drive assembly 300 drives the second part 120 to flip, and at this time the seat assembly 100 is in the open state.

[0053] In one embodiment, unlike the first driving component 300 in the above embodiments, this embodiment (refer to...) Figure 3The first driving assembly 300 includes a connecting portion 310, a first driving member 320, and a second driving member 330. The connecting portion 310 is slidably mounted on the first portion 110. It should be noted that the connecting portion 310 can slide along the Z-axis direction on the first portion 110. A limiting structure is provided between the connecting portion 310 and the first portion 110 to prevent the connecting portion 310 from detaching from the first portion 110 during sliding. Furthermore, the first driving member 320 can drive the connecting portion 310 to move along the Z-axis direction. In some embodiments, the first drive member 320 may be an electric telescopic rod; the second part 120 is rotatably mounted on the connected part 310, wherein the second part 120 is mounted on the connected part 310 via a rotating shaft, and further, the first axis is configured as the axis of the rotating shaft; the second drive member 330 is capable of driving the second part 120 to rotate around the first axis, wherein the second drive member 330 may also be a rotating motor, the output end of the rotating motor is connected to the rotating shaft, and the rotating motor drives the second part 120 to rotate by controlling the rotation of the rotating shaft.

[0054] In one embodiment, reference Figure 3 The first driving member 320 is configured as an elastic telescopic member, wherein the first driving member 320 may be a compression spring. It should be noted that when the first driving member 320 is configured as an elastic telescopic member, the opening and closing actions of the seat assembly 100 require the assistance of an external device. Furthermore, it should be noted that the external device includes a driving arm 700 that can rotate and move along the Z-axis. In this application, there are no restrictions on how the driving arm 700 is driven to rotate and move along the Z-axis.

[0055] Further, refer to Figure 3 , Figure 5 When the first driving member 320 is configured as an elastic telescopic member, during the closing process, after the second part 120 flips from the second preset position to the first preset position, the driving arm 700 moves along the Z-axis, driving the second part 120 towards the first part 110. At this time, the elastic telescopic member is compressed, and the second surface 121 approaches the first surface 111 until the locking component 200 fixes the first part 110 and the second part 120. During the opening process, the locking component 200 is in the unlocked state. At this time, the driving arm 700 first moves along the Z-axis, and the elastic telescopic member restores its deformation, thereby pushing the second part 120 to move along the Z-axis to the first preset position. Then, the first driving component 300 drives the second part 120 to flip around the first axis, from the first preset position to the second preset position.

[0056] In one embodiment, the first part 110 includes a mounting part 112 and a testing part 113. The connecting part 310 is mounted on the mounting part 112 via a first driving member 320. The placement position 130 is located on the testing part 113. Further, the first surface 111 is located on the testing part 113. It should be noted that the testing part 113 is fixed to the mounting part 112, wherein the testing part 113 and the mounting part 112 are fixed together by screws. The placement position 130 is located on the testing part 113, which also means that the negative pressure hole 140 and the first electrical connection part 150 are also located on the testing part 113. Further, in some embodiments, the elastic telescopic member can be a compression spring or an elastic pin. It should be noted that the mounting part 112 is provided with a guide hole that extends along the Z-axis direction.

[0057] In one embodiment, reference Figure 3 The second driving member 330 is configured as a torsion spring. When the second driving member 330 is configured as a torsion spring, the driving arm 700 has a rotation function. Simultaneously, when the first driving member 320 is configured as an elastic telescopic member, the driving arm 700 has the functions of rotation and movement along the Z-axis. During the closing process, the driving arm 700 rotates and swings, abutting against the second part 120, thereby driving the second part 120 to flip from a second preset position to a first preset position. At this time, the torsion spring undergoes elastic deformation. Then, the swing arm moves along the Z-axis, causing the first part 110 and the second part 120 to approach each other until the locking assembly 200 fixes the first part 110 and the second part 120. During this process, the elastic telescopic member deforms. Further, in some embodiments, during the opening process, the locking assembly 200 is in an unlocked state. At this time, the elastic telescopic member returns to its original deformation, the torsion spring returns to its original deformation, thereby causing the seat assembly 100 to open.

[0058] In one embodiment, reference Figure 3 , Figure 6The locking component 200 includes a latch 210 and a latch 220. One of the latch 210 and the latch 220 is located in the first part, and the other is located in the second part. When the latch 210 and the latch 220 are engaged, the locking component 200 is in a locked state. When the latch 210 and the latch 220 are disengaged, the locking component 200 is in an unlocked state. Furthermore, in this embodiment, when the first part 110 and the second part 120 are fixed together, the latch 210 can engage with the latch 220, and the locking component 200 is in a locked state. For the unlocked state, an external device is required to drive the latch 210 to release the latch 220, thereby changing the locking component 200 from the locked state to the unlocked state. Further, in one embodiment, the latch 210 is disposed in the first part 110, specifically, the latch 210 is installed in the mounting part 112 of the first part 110, and the latch position 220 is disposed in the second part 120, specifically, the latch 210 is hinged to the first part 110, and the latch 210 has a locked position and an unlocked position. Further, a spring is provided between the latch 210 and the first part 110, the spring enabling the latch 210 to always be in the locked position. When the first part 110 and the second part 120 approach each other, the latch position 220 can abut against and push the latch 210, causing the spring to deform. When the latch 210 and the latch position 220 are aligned, the latch position 220 no longer pushes against the latch 210, and the spring returns to its original deformation, thereby driving the latch 210 to fasten the latch 210 and the latch position 220 together. During unlocking, an external device drives the latch 210, causing the spring to deform and releasing the latch 210 from the latch position 220. At this time, the test part 113 and the second part 120 in the first part 110 can separate. The external device driving the latch 210 can be a cylinder gripper assembly 800 or other structures, without specific limitations. It should be noted that when the cylinder gripper assembly 800 is used to open the cover, the cylinder gripper assembly 800 and the drive arm 700 are positioned in different locations. This allows the seat assembly 100 to have a closed position relative to the drive arm 700 and an open position relative to the cylinder gripper assembly 800.

[0059] In one embodiment, reference Figure 3The test seat mechanism also includes a sealing ring 400. The first part 110 is provided with a mounting position 170 for mounting the sealing ring 400. The mounting position 170 is located on the first surface 111. The mounting position 170 forms a test area inside the sealing ring 400. The placement position 130 is located in the test area. The test area is also provided with an air inlet. The first part 110 is equipped with an air inlet pipe 10, which communicates with the air inlet. It should be noted that when the first part 110 and the second part 120 are fixed, that is, when the seat assembly 100 is in the closed state, the first part 110 and the second part 120 can squeeze the sealing ring 400. At this time, the test area can be in a sealed state. Furthermore, the air inlet pipe 10 is used to allow external gas (nitrogen) to be injected into the test area. It should be noted that the purpose of injecting nitrogen into the test area is to meet the environmental requirements during material testing. Furthermore, the nitrogen enters through the air inlet pipe 10 and is discharged into the test area through the air inlet. Furthermore, in some embodiments, an exhaust port is also provided in the test area, and an exhaust pipe is also installed in the corresponding first part 110. The exhaust port is connected to the exhaust pipe 12. After the test is completed, the nitrogen gas in the test area can be discharged outward through the exhaust port and then through the exhaust pipe 12. Furthermore, in some embodiments, the test seat mechanism also includes a vacuum tube 13, which is installed in the first part 110. The vacuum tube 13 is used to evacuate the sealed test area. Specifically, when the first part 110 and the second part 120 are closed, the test area is in a sealed state, and at this time, the test area can be evacuated through the vacuum tube.

[0060] In one embodiment, the test seat mechanism further includes a positioning component 500 fixedly disposed relative to the seat assembly 100. The positioning component 500 is capable of positioning the first part 110 or the second part 120, which rotates around the first axis, at a second preset position. Further, in this embodiment, the positioning component 500 is capable of positioning the second part 120 at the second preset position, meaning the second part 120 can rotate around the first axis. It should be noted that in one application scenario, the test seat mechanism is mounted on a test disk, which can rotate. At this time, the test seat mechanism can rotate around the rotation axis of the test disk. During this process, the seat assembly 100 will be in an open state. To prevent the second part 120 from rotating from the second preset position to the first preset position while the cover is open, the positioning component 500 can position the second part 120 at the second preset position. It should be noted that when the test seat mechanism rotates, it generates centrifugal force. If the centrifugal force is too high (greater than the elastic force of the torsion spring), the second part 120 may rotate from the second preset position to the first preset position.

[0061] In one embodiment, reference Figure 5The positioning component 500 includes a magnet 510, which can attract the first part 110 or the second part 120 that flips around the first axis. It can be understood that the magnet 510 is fixedly set. When the second part 120 flips to the second preset position, the magnet 510 can attract the second part 120 and fix it. In this way, the second part 120 can be prevented from flipping under the action of the magnet 510 during the rotation of the test seat mechanism. In order to improve the attraction effect of the positioning component 500, in some embodiments, the magnet 510 can be set to multiple magnets.

[0062] In one embodiment, reference Figure 5 The test seat mechanism further includes a second drive assembly 600, which can drive the seat assembly 100 to move along the X, Y, and Z axes. It should be noted that in some embodiments, the positioning assembly 500 is mounted on the second drive assembly 600. Further, in some embodiments, the second drive assembly 600 includes a movable plate 610, a third drive member, and a fourth drive member 620. The fourth drive member 620 is used for mounting the seat assembly 100, the movable plate 610 is used for mounting the fourth drive member 620, the third drive member can drive the movable plate 610 to move along the X and Y axes, and the fourth drive member 620 can drive the seat assembly 100 to move along the Z axis. The fourth drive member 620 can be a linear cylinder structure, and the third drive member can be formed by combining two linear drive structures.

[0063] Furthermore, in some embodiments, reference is made to... Figure 5 Magnet 510 is mounted on movable plate 610 in second drive assembly 600. Positioning assembly 500 also includes mounting base 520, which is fixed to movable plate 610 and magnet 510 is disposed on mounting base 520.

[0064] The above description is merely an exemplary embodiment of the present utility model and does not limit the patent scope of the present utility model. Any equivalent structural transformations made based on the technical concept of the present utility model and the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A test seat mechanism, characterized in that, include: The base assembly includes a first part and a second part; A locking component is installed on the base assembly and has a locked state and an unlocked state. In the locked state, the first part and the second part can be fixed, and in the unlocked state, the second part can be separated from the first part. The first part is provided with a placement position for placing materials. The placement position is provided with a negative pressure hole and a first electrical connection part. The negative pressure hole can adsorb the materials placed in the placement position, and the first electrical connection part can be electrically connected to the materials. The second part is provided with a second electrical connection part. When the first part and the second part are fixed, the first part can be electrically connected to the second part, and the second electrical connection part can be electrically connected to the materials. A first drive assembly, installed on the base assembly, is capable of driving one of the first part and the second part to move along the Z-axis to a first preset position, and to rotate it around a first axis from the first preset position to a second preset position, so as to open the cover of the base assembly.

2. The test seat mechanism as described in claim 1, characterized in that, The first driving component includes a connecting part, a first driving member, and a second driving member. The connecting part is slidably mounted on the first part, and the first driving member can drive the connecting part to move along the Z-axis. The second part is rotatably mounted on the connecting part, and the second driving member can drive the second part to rotate around the first axis.

3. The test seat mechanism as described in claim 2, characterized in that, The first driving component is configured as an elastic telescopic component.

4. The test seat mechanism as described in claim 3, characterized in that, The first part includes an installation part and a testing part. The connecting part is installed on the installation part via a first driving component, and the placement position is located on the testing part.

5. The test seat mechanism as described in claim 2, characterized in that, The second driving element is configured as a torsion spring.

6. The test seat mechanism as described in claim 1, characterized in that, The locking component includes a latch and a latch, one of which is located in the first part and the other in the second part. When the latch and the latch are engaged, the locking component is in a locked state. When the latch and the latch are disengaged, the locking component is in an unlocked state.

7. The test seat mechanism as described in claim 6, characterized in that, The buckle is located in the first part, and the buckle position is located in the second part.

8. The test seat mechanism as described in claim 1, characterized in that, The test seat mechanism also includes a sealing ring. The first part is provided with a mounting position for installing the sealing ring. A test area is formed inside the mounting position, and the placement position is located in the test area.

9. The test seat mechanism as described in any one of claims 1 to 8, characterized in that, The test seat mechanism also includes a positioning component fixedly disposed relative to the seat assembly, the positioning component being able to position the first part or the second part that flips around the first axis at a second preset position.

10. The test seat mechanism as described in claim 9, characterized in that, The test seat mechanism further includes a second drive component, which is capable of driving the seat assembly to move along the X, Y, and Z directions; And / or, the positioning component includes a magnet capable of attracting a first or second part that is flipped about a first axis.

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