A precursor source bottle

Abstract

This utility model relates to the field of semiconductor processing technology and discloses a precursor source bottle. The precursor source bottle includes a connector, a cap, or a bottle body. The connector is used to connect to a pipeline; the connector is sealed to the cap; the cap is detachably and sealed to the bottle body, which is transparent and has a receiving cavity. The pipeline connects to the receiving cavity through the connector. Because the connector and cap are sealed together, the receiving cavity is sealed, meeting the sealing requirements for preserving the precursor solution. The pipeline, connected to the receiving cavity through the connector, allows the vaporized precursor solution to be discharged through the pipeline for use in experiments or semiconductor manufacturing. In this utility model, because the bottle body is transparent, the operator can directly observe the state of the precursor solution and detect any deterioration. Simultaneously, the operator can also directly observe the liquid level of the precursor solution to determine whether replenishment is necessary.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a precursor source bottle. Background Technology

[0002] In many precision technology fields such as semiconductor manufacturing and chemical vapor deposition, the storage of precursor solutions is a key step, and precursor source bottles play an important role as storage containers.

[0003] Currently, most precursor source bottles are made entirely of stainless steel. However, this all-stainless steel precursor source bottle has a significant drawback. Due to its opaque material, operators cannot directly observe the state and level of the precursor solution inside during actual use. The precursor solution may deteriorate during storage due to various factors such as temperature changes, impurity contamination, and chemical reactions, but operators cannot detect this deterioration in a timely manner. This may lead to the use of deteriorated precursor solutions in subsequent production processes, thereby affecting product quality and performance, resulting in production waste and increased costs.

[0004] Therefore, there is an urgent need for a precursor source bottle to solve the aforementioned problems. Utility Model Content

[0005] Based on the above, the purpose of this utility model is to provide a precursor source bottle in which the operator can directly observe the state of the precursor solution, detect the deterioration of the precursor solution, and then determine whether to continue using the precursor solution, thereby improving the processing quality of the product. At the same time, the operator can also directly observe the liquid level of the precursor solution and then determine whether to replenish the precursor solution.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A precursor source bottle, comprising:

[0008] Connector, the connector being used to connect pipelines;

[0009] The connector is sealed to the bottle cap;

[0010] The bottle body has a detachable and sealing cap that is connected to it. The bottle body is transparent and has a receiving cavity. The pipeline is connected to the receiving cavity through the connector.

[0011] As a preferred technical solution for a precursor source bottle, the bottle cap is made of stainless steel, and the connector is welded to the bottle cap.

[0012] As a preferred technical solution for a precursor source bottle, there are two connectors: one connector is used to connect to the inlet pipe, and the other connector is used to connect to the outlet pipe.

[0013] As a preferred technical solution for a precursor source bottle, the bottle body has a threaded hole at one open end, the bottle cap has an external thread, the external thread is threaded into the threaded hole, and a first sealing ring is provided between the bottle cap and the inner wall of the bottle body.

[0014] As a preferred technical solution for a precursor source bottle, the inner wall of the bottle body is provided with an annular conical surface, the annular conical surface is located at one end of the threaded hole near the receiving cavity, and the first sealing ring is provided between the conical surface and the bottle cap.

[0015] As a preferred technical solution for a precursor source bottle, the bottle cap is provided with an annular groove at one end near the bottle body, and the first sealing ring is partially embedded in the annular groove.

[0016] As a preferred technical solution for a precursor source bottle, the bottle body is conical.

[0017] As a preferred technical solution for a precursor source bottle, the side wall of the bottle is provided with scale markings extending in the vertical direction.

[0018] As a preferred technical solution for a precursor source bottle, the bottle body is made of transparent glass or transparent plastic.

[0019] As a preferred technical solution for a precursor source bottle, the bottle cap and the bottle body are detachably and sealed together by a sealing flange, which is a CF flange, KF flange, or ISO flange.

[0020] The beneficial effects of this utility model are as follows:

[0021] This invention provides a precursor source bottle. When a precursor solution needs to be stored, the cap is removed from the bottle body, the precursor solution is stored inside the bottle, and then the cap is detachably and sealingly connected to the bottle body. Because the connector is sealed to the cap, the containing cavity is sealed, meeting the sealing requirements for preserving the precursor solution. A pipeline connects to the containing cavity through the connector, allowing the vaporized precursor solution to be discharged through the pipeline for use in experiments or semiconductor manufacturing. Because the bottle body is transparent, operators can directly observe the state of the precursor solution, detect any deterioration, and determine whether to continue using the solution, thus improving product processing quality. Simultaneously, operators can also directly observe the liquid level of the precursor solution to determine if replenishment is necessary. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the precursor source bottle provided in a specific embodiment of the present invention;

[0024] Figure 2 This is a cross-sectional view of the precursor source bottle provided in a specific embodiment of this utility model;

[0025] Figure 3 This is an exploded view of the precursor source bottle provided in a specific embodiment of this utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the bottle cap and bottle body connected by a CF flange according to a specific embodiment of this utility model.

[0027] The markings in the image are as follows:

[0028] 1. Connector; 2. Bottle cap; 21. External thread; 22. Annular groove; 23. First flange; 3. Bottle body; 31. Receiving cavity; 32. Threaded hole; 33. Annular conical surface; 34. Second flange; 4. First sealing ring; 5. Second sealing ring. Detailed Implementation

[0029] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0030] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this embodiment, the terms "upper," "lower," "left," and "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0033] like Figures 1-3 As shown, this embodiment provides a precursor source bottle, which includes a connector 1 and a cap 2 or a bottle body 3. The connector 1 is used to connect to a pipeline; the connector 1 is sealed to the cap 2; the cap 2 is detachably and sealed to the bottle body 3, which is a transparent bottle body 3. The bottle body 3 is provided with a receiving cavity 31, and the pipeline is connected to the receiving cavity 31 through the connector 1. When it is necessary to store the precursor solution, the cap 2 is removed from the bottle body 3, the precursor solution is stored in the bottle body 3, and then the cap 2 is detachably and sealed to the bottle body 3. Since the connector 1 is sealed to the cap 2, the receiving cavity 31 is sealed, which meets the sealing requirements for storing the precursor solution. The pipeline is connected to the receiving cavity 31 through the connector 1, so that the vaporized precursor solution can be discharged through the pipeline for use in experiments or semiconductor manufacturing. In this embodiment, since bottle 3 is a transparent bottle, the operator can directly observe the state of the precursor solution, detect the deterioration of the precursor solution, and then determine whether to continue using the precursor solution, thereby improving the processing quality of the product. At the same time, the operator can also directly observe the liquid level of the precursor solution and then determine whether to replenish the precursor solution.

[0034] In this embodiment, the bottle cap 2 is made of stainless steel, and the connector 1 is welded to the bottle cap 2. On the one hand, the connector 1 is fixed to the bottle cap 2, and on the other hand, the sealing between the connector 1 and the bottle cap 2 is guaranteed.

[0035] In this embodiment, there are two connectors 1: one connector 1 is used to connect to the inlet pipe, and the other connector 1 is used to connect to the outlet pipe. The inlet pipe extends into the precursor solution within the receiving cavity 31 via connector 1. During operation, the inlet pipe supplies inert gas, which, upon entering the precursor solution, carries the gaseous precursor solution out through the outlet pipe. In other embodiments, when the precursor solution is easily vaporized, there can be only one connector 1, allowing the precursor solution to directly vaporize and be discharged through connector 1 and the pipeline.

[0036] Furthermore, a threaded hole 32 is provided at the opening end of the bottle body 3, and an external thread 21 is provided on the bottle cap 2. The external thread 21 is threadedly connected to the threaded hole 32, and a first sealing ring 4 is provided between the bottle cap 2 and the inner wall of the bottle body 3. During assembly, the external thread 21 of the bottle cap 2 is threadedly connected to the threaded hole 32 of the bottle body 3, realizing a detachable connection between the two. As the screwing depth of the bottle cap 2 gradually increases, the first sealing ring 4 is clamped between the bottle cap 2 and the inner wall of the bottle body 3, realizing a sealed connection between the bottle cap 2 and the bottle body 3.

[0037] Preferably, the outer periphery of the bottle cap 2 is provided with anti-slip texture, which makes it easy to twist the bottle cap 2 and improves the ease of assembly between the bottle cap 2 and the bottle body 3.

[0038] Furthermore, the inner wall of the bottle body 3 is provided with an annular conical surface 33, which is located at the end of the threaded hole 32 near the receiving cavity 31. A first sealing ring 4 is provided between the conical surface and the bottle cap 2. As the screwing depth of the bottle cap 2 gradually increases, the end of the bottle cap 2 extending into the bottle body 3 gradually presses the first sealing ring 4 onto the annular conical surface 33. In this embodiment, a helium leak test shows that the sealing performance of the precursor source bottle is less than or equal to 10e-10 Pa·m. 3 / s, meeting the sealing requirements for storing precursor solutions.

[0039] Preferably, an annular groove 22 is provided at one end of the bottle cap 2 near the bottle body 3, and the first sealing ring 4 is partially embedded in the annular groove 22, which realizes the connection between the first sealing ring 4 and the bottle cap 2, making assembly convenient, improving assembly efficiency and assembly accuracy. The annular groove 22 can press the first sealing ring 4 tightly onto the annular conical surface 33.

[0040] Preferably, the bottle body 3 is conical. During production or experimentation, there are certain requirements for the liquid level of the precursor solution. When the liquid level of the precursor solution is the same, the conical bottle body 3 requires a smaller volume of precursor solution, thus using a smaller amount of precursor solution to raise the liquid level and reducing waste of precursor solution.

[0041] More preferably, the side wall of the bottle 3 is provided with a scale marking extending vertically. This scale marking allows the operator to obtain information on the liquid level of the precursor solution, and also allows the operator to promptly observe the remaining amount of precursor solution. If the precursor solution is too low, it can be replenished in a timely manner to ensure sufficient precursor solution is available during production or experimentation.

[0042] In this embodiment, the bottle body 3 is made of transparent glass or transparent plastic, which has the effects of transparency and corrosion resistance.

[0043] In other embodiments, the bottle cap 2 and the bottle body 3 are detachably sealed together by a sealing flange, which is a CF (Conflat, hybrid) flange, a KF (Klein Flansch, small flange) flange, or an ISO (standard) flange. Figure 4 As shown, taking the CF flange connection as an example, the bottle cap 2 is provided with a first flange 23, and the bottle body 3 is provided with a second flange 34. A second sealing ring 5 is provided between the first flange 23 and the second flange 34. The first flange 23 and the second flange 34 are connected by multiple screws, clamping the second sealing ring 5, thereby achieving a detachable and sealed connection between the bottle cap 2 and the bottle body 3. The connection methods of KF flanges and ISO flanges are existing technologies and will not be described in detail here.

[0044] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A precursor source bottle, characterized in that, include: Connector (1), the connector (1) is used to connect pipelines; Bottle cap (2), the connector (1) is sealed to the bottle cap (2); Bottle body (3), the bottle cap (2) is detachably and sealed to the bottle body (3), the bottle body (3) is a transparent bottle body (3), the bottle body (3) is provided with a receiving cavity (31), and the pipeline is connected to the receiving cavity (31) through the connector (1).

2. The precursor source bottle according to claim 1, characterized in that, The bottle cap (2) is made of stainless steel, and the connector (1) is welded to the bottle cap (2).

3. The precursor source bottle according to claim 1, characterized in that, There are two connectors (1), one of which is used to connect to the air inlet pipe and the other of which is used to connect to the air outlet pipe.

4. The precursor source bottle according to claim 1, characterized in that, The bottle body (3) has a threaded hole (32) at one end of its opening, and the bottle cap (2) has an external thread (21). The external thread (21) is threaded into the threaded hole (32), and a first sealing ring (4) is provided between the bottle cap (2) and the inner wall of the bottle body (3).

5. The precursor source bottle according to claim 4, characterized in that, The inner wall of the bottle body (3) is provided with an annular conical surface (33), which is located at one end of the threaded hole (32) near the receiving cavity (31). The first sealing ring (4) is provided between the conical surface and the bottle cap (2).

6. The precursor source bottle according to claim 5, characterized in that, The bottle cap (2) has an annular groove (22) at one end near the bottle body (3), and the first sealing ring (4) is partially embedded in the annular groove (22).

7. The precursor source bottle according to claim 1, characterized in that, The bottle body (3) is conical.

8. The precursor source bottle according to claim 1, characterized in that, The side wall of the bottle (3) is provided with scale markings extending in the vertical direction.

9. The precursor source bottle according to claim 1, characterized in that, The bottle body (3) is made of transparent glass or transparent plastic.

10. The precursor source bottle according to claim 1, characterized in that, The bottle cap (2) and the bottle body (3) are detachably sealed together by a sealing flange, which is a CF flange, KF flange or ISO flange.

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