A high-power excimer laser light-out shutter protection device

Abstract

The utility model discloses a kind of high-power excimer laser light exit optical shutter protection devices, laser entrance and first laser exit and second laser exit are equipped on shell, reflector assembly is movably connected in shell, the position that reflector assembly can stay includes first position and second position, when reflector assembly is in second position, reflector assembly deviates first laser exit to make laser emit from first laser exit, when reflector assembly is in first position, reflector assembly deviates second laser exit to make laser emit from second laser exit, shell is also equipped with the driving assembly that can drive reflector assembly switching between first position and second position. The utility model can realize laser system seamless switching mode of operation, always keep high-power output state, reduce the time waste caused by the need to reheat due to shutdown, to improve production efficiency.

Description

[Technical Field]

[0001] This utility model relates to the field of light output protection shutter technology for high-power excimer lasers, and more specifically to a light output shutter protection device for high-power excimer lasers. [Background Technology]

[0002] Excimer lasers are the highest-power pulsed ultraviolet laser devices, excited by discharge electrodes to emit excimer laser light. With breakthroughs in advanced materials processing, optical system integration, and high-voltage pulse technology, the power level of excimer lasers has exceeded the 300W threshold. Due to their high-power output characteristics in the ultraviolet band, these light sources have found wide application in photolithography processes in semiconductor manufacturing, cutting-edge scientific research experiments, medical and aesthetic equipment, and the production of new display panels.

[0003] High-power excimer lasers require a lengthy preheating phase before achieving peak performance output. This phase involves gradually increasing the output power by adjusting the excitation voltage and pulse frequency parameters in stages. A thorough preheating process effectively reduces the workload of core components, thereby extending equipment lifespan and ensuring the stability of laser energy output. Therefore, in industrial production, ideally, the laser should operate continuously at high power without interruption to maintain high output. However, industrial production involves the use of laser beams in phases, not continuous 24 / 7, and external optical systems also require maintenance. Therefore, during non-laser processing periods and for maintenance, shutdown is necessary, requiring a lengthy preheating period before the next production run, leading to low production efficiency. This invention addresses these problems. [Utility Model Content]

[0004] The purpose of this invention is to overcome the shortcomings of existing technologies and provide a simple-structured optical shutter protection device for high-power excimer lasers. This protection device enables seamless switching of the laser system's operating modes, maintaining a consistently high-power output state, reducing downtime and the wasted time required for reheating, thereby improving production efficiency.

[0005] This utility model is achieved through the following technical solution:

[0006] A high-power excimer laser output shutter protection device includes a housing. The housing has a laser inlet and a first laser outlet and a second laser outlet communicating with the laser inlet. A reflector assembly capable of changing the laser transmission direction is movably connected inside the housing. The reflector assembly can be positioned in two positions: a first position and a second position. When the reflector assembly is in the second position, it is offset from the first laser outlet so that the laser light entering from the laser inlet exits from the first laser outlet. When the reflector assembly is in the first position, it is offset from the second laser outlet so that the laser light entering from the laser inlet is reflected by the reflector assembly and exits from the second laser outlet. The housing also has a drive assembly capable of switching the reflector assembly between the first and second positions. Lenses are provided at both the laser inlet and the first laser outlet.

[0007] The reflector assembly includes a rotating shaft passing through the housing, a rotating plate fixedly connected to the rotating shaft and capable of rotating with it, and a reflector lens provided on the rotating plate.

[0008] The housing includes a left shell and a right shell, which are sealed together to form a closed inner cavity for accommodating the reflector assembly, and the closed inner cavity is filled with nitrogen gas.

[0009] The right shell is provided with an installation cavity isolated from the closed inner cavity. The drive assembly includes a rotating electromagnet located in the installation cavity. The spindle of the rotating electromagnet extends out of the outer side of the shell and is provided with a transmission component between it and the rotating shaft, which can drive the rotating shaft to rotate.

[0010] The transmission assembly includes a first crank fixedly connected to the spindle and a second crank fixedly connected to the rotating shaft. A connecting rod is provided between the first crank and the second crank, which is hinged to both and can drive the rotating shaft to rotate when the spindle is driven to rotate by a rotating electromagnet.

[0011] The housing is provided with a first inductive switch and a second inductive switch, and a first sensor baffle that can cooperate with the first inductive switch and a second sensor baffle that can cooperate with the second inductive switch are fixedly connected to the first crank.

[0012] The outer side of the housing is also provided with a manual baffle that can move relative to it to block or open the first laser emission outlet, and the housing is also connected with a detection switch that can detect the position of the manual baffle.

[0013] The housing is provided with an outwardly extending protruding shaft, and the detection switch is located at the outer end of the protruding shaft.

[0014] When the manual baffle is blocking the first laser emission outlet, the reflector assembly is in the first position.

[0015] The control module of the high-power excimer laser output shutter protection device ensures that the reflector assembly can only move to the second position after the manual baffle leaves the first laser output outlet.

[0016] Compared with the prior art, the present invention has the following advantages:

[0017] 1. The reflector assembly of this invention can switch between a first position and a second position. When the reflector assembly is in the second position, it is offset from the first laser exit point so that the laser light entering the laser inlet exits from the first laser exit point, and the laser is in working condition. When the reflector assembly is in the first position, it is offset from the second laser exit point so that the laser light entering the laser inlet is reflected by the reflector assembly and exits from the second laser exit point. The laser light exiting the second laser exit point can be absorbed by an external laser absorption device. During non-laser processing periods and for maintenance of the laser optical path system at the front end of the first laser exit point, there is no need to shut down the machine; that is, there is no need to turn off the laser and gas path systems. When switching laser processing periods or after maintenance is completed, the reflector assembly can be switched to the second position. Therefore, this invention can maintain full-power operation even during non-working modes such as maintenance to maintain a high-efficiency production rhythm, reducing the preheating downtime caused by traditional maintenance, thereby improving production efficiency.

[0018] 2. The outer side of the housing of this utility model is also provided with a manual baffle that can move relative to it to block or open the first laser emission outlet. The housing is also connected to a detection switch that can detect the position of the manual baffle. When the reflector assembly is switched to the first position, the manual baffle moves to the position of blocking the first laser emission outlet and is detected by the detection switch. At this time, if the manual baffle is not removed, the reflector assembly cannot move from the first position to the second position. Therefore, the manual baffle acts as a double lock to prevent the reflector assembly from accidentally moving to the second position and causing the laser to be emitted from the first laser emission outlet, thereby avoiding laser damage to the maintenance personnel and ensuring safety. [Attached Image Description]

[0019] Figure 1 This is one of the perspective views of this utility model;

[0020] Figure 2 This is the second perspective view of this utility model;

[0021] Figure 3 This is a top view of the present invention after removing the first sensor baffle and the second sensor baffle;

[0022] Figure 4 This is an exploded view of the present invention;

[0023] Figure 5 This is a perspective view of a component of this utility model;

[0024] Figure 6 This is a partial cross-sectional view of the reflector assembly of this utility model when it is in the first position;

[0025] Figure 7 This is a partial cross-sectional view of the reflector assembly of this utility model when it is in the second position.

Detailed Implementation Methods

[0026] The present invention will be further described below with reference to the accompanying drawings:

[0027] like Figures 1 to 7 As shown, a high-power excimer laser output shutter protection device includes a housing 1. The housing 1 is provided with a laser inlet 13 and a first laser outlet 11 and a second laser outlet 12 communicating with the laser inlet 13. Both the laser inlet 13 and the first laser outlet 11 are provided with lenses (not shown in the figure). A reflector assembly 2 capable of changing the laser transmission direction is movably connected inside the housing 1. The reflector assembly 2 can be positioned in two positions: a first position and a second position. When the reflector assembly 2 is in the second position, it is offset from the first laser outlet 11 so that the laser light entering from the laser inlet 13 exits from the first laser outlet 11. When the reflector assembly 2 is in the first position, it is offset from the second laser outlet 12 so that the laser light entering from the laser inlet 13 is reflected by the reflector assembly 2 and exits from the second laser outlet 12. The housing 1 is also provided with a drive assembly 3 capable of driving the reflector assembly 2 to switch between the first position and the second position. When the reflector assembly 2 is in the second position, the laser enters the housing 1 from the laser inlet 13 and exits through the first laser outlet 11 to the external optical path system for processing the workpiece. When maintenance of the external optical path system is required, the reflector assembly 2 is moved to the first position via the drive assembly 3. At this time, the laser entering through the laser inlet 13 is reflected on the reflector assembly 2 and enters through the second laser outlet 12, where it is absorbed by the light absorption device outside the housing 1. The laser cannot exit through the first laser outlet 11, allowing maintenance of the external optical path system at the front end of the first laser outlet 11 to be performed safely. Furthermore, maintenance of the external optical path system does not require shutting down the entire system; once maintenance is complete, the reflector assembly 2 can be switched back to the second position. This reduces the excessive downtime caused by traditional working modes, thereby improving production efficiency.

[0028] like Figures 4 to 7As shown, the reflector assembly 2 includes a rotating shaft 21 passing through the housing 1. A rotating plate 22, which rotates with the rotating shaft 21, is fixedly connected to the rotating shaft 21. A reflective mirror 23 is provided on the rotating plate 22, and the reflective mirror 23 can be a high-reflectivity mirror (HR>99.8%). When the rotating shaft 21 is driven to rotate, the rotating shaft 21 drives the rotating plate 22 to swing, and the rotating plate 22 moves the reflective mirror 23 on it, thereby switching the entire reflector assembly 2 between a first position and a second position.

[0029] like Figures 5 to 7 As shown, the housing 1 includes a left housing 101 and a right housing 102, which are sealed together to form a closed inner cavity 103 for accommodating the reflector assembly 2. The closed inner cavity 103 is filled with nitrogen gas. The closed inner cavity 103 is completely isolated from the outside, and the nitrogen gas filling inside can protect each lens.

[0030] like Figures 1 to 5 As shown, the right shell 102 is provided with a mounting cavity 14 isolated from the enclosed inner cavity 103. The drive assembly 3 includes a rotating electromagnet 31 disposed in the mounting cavity 14. The spindle 311 of the rotating electromagnet 31 extends out of the outer side of the shell 1 and is connected to the rotating shaft 21 by a transmission component 32 that can drive the rotating shaft 21 to rotate. The mounting cavity 14 is isolated from the enclosed inner cavity 103, and electrical components can be installed in the mounting cavity 14. When it is necessary to adjust the position of the reflector assembly 2, the rotating electromagnet 31 is energized, which drives the spindle 311 to rotate. The spindle 311 then drives the rotating shaft 21 to rotate through the transmission component 32, thereby moving the rotating plate 22 and the reflector 23 to the required position. The rotating electromagnet 31 is a conventionally available component, and its specific structure will not be described in detail.

[0031] like Figure 5 As shown, the transmission assembly 32 includes a first crank 321 fixedly connected to the spindle 311 and a second crank 322 fixedly connected to the rotating shaft 21. A connecting rod 323 is provided between the first crank 321 and the second crank 322, hinged to both and capable of driving the rotating shaft 21 to rotate when the rotating electromagnet 31 drives the spindle 311 to rotate. When the spindle 311 rotates, it drives the first crank 321 to rotate, which in turn pulls or pushes the connecting rod 323. The connecting rod 323 then pulls or pushes the second crank 322, causing the rotating shaft 21 to rotate, thereby driving the reflector assembly 2 to switch between a first position and a second position. The connecting rod 323 cleverly converts the rotational motion of the spindle 311 into the oscillating motion of the reflector assembly 2 when there is a certain distance between the rotating electromagnet 31 and the reflector assembly 2.

[0032] like Figure 1 and Figure 2 As shown, the housing 1 is provided with a first sensor switch 41 and a second sensor switch 42. A first sensor baffle 51 that can cooperate with the first sensor switch 41 and a second sensor baffle 52 that can cooperate with the second sensor switch 42 are fixedly connected to the first crank 321. When the spindle 311 rotates, the first crank 321 rotates. When the first sensor baffle 51 on it cooperates with the first sensor switch 41, the reflector assembly 2 is detected to be in the second position. When the first crank 321 rotates with the spindle 311, causing the second sensor baffle 52 to cooperate with the second sensor switch 42, the reflector assembly 2 is detected to be in the first position.

[0033] To further ensure safety, the outer side of the housing 1 is also equipped with a manual baffle (not shown in the figure) that can be moved relative to it to block or open the first laser emission outlet 11. A detection switch 15 is also connected to the housing 1 to detect the position of the manual baffle. When the manual baffle is blocking the first laser emission outlet 11, the reflector assembly 2 is in the first position. When the external optical system requires maintenance, the reflector assembly 2 is first switched to the first position, and then the manual baffle is manually closed and detected by the detection switch 15. The detection switch 15 sends a signal to the control module, which then issues a signal prohibiting movement of the reflector assembly 2. This ensures that the laser light, after being reflected by the reflector lens 23, is absorbed before exiting the second laser emission outlet 12, thereby protecting the lives and property of personnel. In this embodiment, the control module of the high-power excimer laser output shutter protection device can ensure that the reflector assembly 2 can only be moved to the second position after the manual baffle leaves the first laser emission outlet 11. Therefore, the manual baffle acts as a double lock to prevent the reflector assembly 2 from being accidentally moved to the second position and causing the laser to be emitted from the first laser emission outlet 11. This enables maintenance without stopping the machine and avoids accidental movement of the reflector assembly 2 to the second position, thereby protecting the safety of external maintenance personnel and equipment.

[0034] The present invention has been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the invention.

Claims

1. A protection device for the output shutter of a high-power excimer laser, characterized in that: The system includes a housing (1), on which a laser inlet (13) and a first laser outlet (11) and a second laser outlet (12) communicating with the laser inlet (13) are provided. A reflector assembly (2) capable of changing the laser transmission direction is movably connected inside the housing (1). The reflector assembly (2) can be positioned in two positions: a first position and a second position. When the reflector assembly (2) is in the second position, it deviates from the first laser outlet (11) to allow the laser inlet (13) to be positioned. The laser beam is emitted from the first laser emission outlet (11). When the reflector assembly (2) is in the first position, the reflector assembly (2) is deviated from the second laser emission outlet (12) so that the laser beam emitted from the laser emission inlet (13) is reflected by the reflector assembly (2) and emitted from the second laser emission outlet (12). The housing (1) is also provided with a drive assembly (3) that can drive the reflector assembly (2) to switch between the first position and the second position. Lenses are provided at both the laser emission inlet (13) and the first laser emission outlet (11).

2. The high-power excimer laser output shutter protection device according to claim 1, characterized in that: The reflector assembly (2) includes a rotating shaft (21) passing through the housing (1), and a rotating plate (22) that can rotate with it is fixedly connected to the rotating shaft (21). The rotating plate (22) is provided with a reflector mirror (23).

3. The high-power excimer laser output shutter protection device according to claim 2, characterized in that: The housing (1) includes a left shell (101) and a right shell (102), which are sealed together to form a closed inner cavity (103) for accommodating the reflector assembly (2), and the closed inner cavity (103) is filled with nitrogen.

4. The high-power excimer laser output shutter protection device according to claim 3, characterized in that: The right shell (102) is provided with an installation cavity (14) that is isolated from the closed inner cavity (103). The drive assembly (3) includes a rotating electromagnet (31) provided in the installation cavity (14). The spindle (311) of the rotating electromagnet (31) extends out of the outer side of the shell (1) and is provided with a transmission component (32) between it and the rotating shaft (21) that can drive the rotating shaft (21) to rotate.

5. The high-power excimer laser output shutter protection device according to claim 3, characterized in that: The transmission assembly (32) includes a first crank (321) fixedly connected to the spindle (311) and a second crank (322) fixedly connected to the rotating shaft (21). A connecting rod (323) is provided between the first crank (321) and the second crank (322) and is hinged to both of them and can drive the rotating shaft (21) to rotate when the rotating electromagnet (31) drives the spindle (311) to rotate.

6. The high-power excimer laser output shutter protection device according to claim 4, characterized in that: The housing (1) is provided with a first inductive switch (41) and a second inductive switch (42). The first crank (321) is fixedly connected with a first sensor baffle (51) that can cooperate with the first inductive switch (41) and a second sensor baffle (52) that can cooperate with the second inductive switch (42).

7. The high-power excimer laser output shutter protection device according to any one of claims 1 to 6, characterized in that: The outer side of the housing (1) is also provided with a manual baffle that can move relative to it to block or open the first laser emission outlet (11), and the housing (1) is also connected with a detection switch that can detect the position of the manual baffle.

8. The high-power excimer laser output shutter protection device according to claim 7, characterized in that: The housing (1) is provided with an outwardly extending protruding shaft (15), and the detection switch is located at the outer end of the protruding shaft (15).

9. The high-power excimer laser output shutter protection device according to claim 7, characterized in that: When the manual baffle is blocking the first laser emission outlet (11), the reflector assembly (2) is in the first position.

10. The high-power excimer laser output shutter protection device according to claim 7, characterized in that: The control module of the high-power excimer laser output shutter protection device ensures that the reflector assembly (2) can only move to the second position after the manual baffle leaves the first laser output outlet (11).

Images