A kind of convenient butt joint seamless tube for semiconductor

Abstract

The utility model relates to the technical field of seamless tube, especially to a butt joint convenient seamless tube for semiconductor. Its technical scheme includes seamless tube body and butt joint pipe, the butt joint pipe outer surface is close to both end position place and has the support ring of movable sleeve joint, the butt joint pipe outer surface is equidistant and is divided into a plurality of welding window with annular array, the welding window is located between two support rings, the seamless tube body end part is located in the butt joint pipe inside, two the support ring outer surfaces all are fixedly connected with adjustable telescopic column. The utility model is convenient for the butt joint of seamless tube welding time, to avoid the emergence welding misplacement, thereby improving the sealing property and strength of weld, avoid the emergence leakage phenomenon, also be favorable to the stability of pipeline internal flow.

Description

Technical Field

[0001] This utility model relates to the field of seamless tube technology, specifically to a seamless tube for semiconductors that is easy to connect. Background Technology

[0002] Seamless tubes for semiconductors are seamless tubular components made from high-purity metallic materials (such as stainless steel and nickel-based alloys) through special processes. They feature smooth inner walls, high dimensional accuracy (tolerances are typically controlled within ±0.05mm), and strong corrosion resistance. They can effectively prevent the adhesion of impurity particles and gas leakage. They can be used as gas transmission pipelines and reaction chamber components in key processes such as deposition, etching, and cleaning in semiconductor manufacturing. The purity of the materials and the processing precision directly affect the yield and performance of semiconductor devices, making them an indispensable core component in the process of localization of semiconductor equipment.

[0003] Currently, seamless tubes for semiconductors are typically connected using welding methods that offer high connection strength and good sealing. However, during the welding process, misalignment can easily occur, leading to weld seal failure. This can cause leaks of high-purity gases and chemicals, polluting the production environment and affecting chip yield. Furthermore, steps can form inside the tube, increasing fluid resistance, generating turbulence, causing unstable flow, and resulting in stress concentration in the weld, reducing weld strength, and making it prone to cracking under pressure fluctuations. Therefore, we propose a seamless tube for semiconductors that allows for easy connection. Utility Model Content

[0004] The purpose of this invention is to provide a seamless tube for semiconductors that facilitates easy docking during welding, thereby avoiding welding misalignment, improving the sealing and strength of the weld, preventing leakage, and also contributing to the stability of the flow rate inside the pipe. This invention solves the problem that current seamless tubes for semiconductors are usually connected using welding methods that have high connection strength and good sealing performance, but misalignment is prone to occur during the welding process, leading to weld seal failure, easy leakage of high-purity gases and chemicals, pollution of the production environment and affecting chip yield. At the same time, it can also form steps inside the pipe, increasing fluid resistance, generating turbulence, causing unstable flow, and causing stress concentration in the weld, reducing welding strength, and making it prone to cracking under pressure fluctuations.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a seamless semiconductor tube with convenient docking, comprising a seamless tube body and a connecting tube, wherein a support ring is movably sleeved on the outer surface of the connecting tube near both ends, and a plurality of welding windows are equally spaced in a ring array on the outer surface of the connecting tube, wherein the welding windows are located between two support rings, the end of the seamless tube body is located inside the connecting tube, and an adjustable telescopic column is fixedly connected to the outer surface of both support rings.

[0006] Preferably, a number of fixing nuts are fixedly installed in a ring array at equal intervals on the outer surfaces of the two support rings. Each fixing nut has a locking screw inserted inside, and the locking screw passes through the support ring and the connecting pipe. Tightening the locking screw so that its end contacts the outer surface of the seamless pipe body will fix the seamless pipe body.

[0007] Preferably, each of the locking screws is fixedly connected to a friction block at its end. The friction block increases the friction between the screw and the outer surface of the seamless tube body, thereby improving the firmness of the seamless tube body.

[0008] Preferably, the outer surface of the connecting pipe is provided with annular grooves near both ends, and the inner walls of the two support rings are provided with annular protrusions, which are located inside the annular grooves. When the annular protrusions are inserted into the annular grooves, the connecting pipe is limited, so that the connecting pipe can only rotate and cannot move along the axial direction, thereby preventing the connecting pipe from slipping out of the support rings.

[0009] Preferably, both adjustable telescopic columns are fixedly connected to a base plate at their bottom ends. The upper surface of both base plates is provided with a number of fixing holes arranged in a circular array at equal intervals. After the bolts pass through the fixing holes, the base plates are fixed at the usage position.

[0010] Preferably, several triangular reinforcing plates are fixedly installed in a circular array at equal intervals on the outer surface of both adjustable telescopic columns near the lower surface, and the lower surface of the triangular reinforcing plates is fixedly connected to the upper surface of the fixed base plate. The triangular reinforcing plates enhance the structural strength between the adjustable telescopic columns and the fixed base plate.

[0011] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0012] 1. This utility model, by setting up a seamless pipe body, a connecting pipe, a welding window, a support ring, and an adjustable telescopic column, achieves the effect of facilitating the connection of seamless pipes during welding, avoiding welding misalignment, thereby improving the sealing and strength of the weld, preventing leakage, and also contributing to the stability of the flow rate inside the pipeline. When welding two seamless pipe bodies, the ends of the two seamless pipe bodies are inserted into the connecting pipe from both ends, and the junction of the two is located at the welding window position, thus completing the connection of the ends of the two seamless pipe bodies. Due to the limiting effect of the connecting pipe, there will be no misalignment. Adjusting the length of the adjustable telescopic column provides support for the seamless pipe body, support ring, and connecting pipe, and the two seamless pipe bodies are welded together through the welding window.

[0013] 2. This utility model achieves the effect of facilitating the fixation of the seamless tube body by setting a fixing nut, a locking screw and a friction block. Tightening the locking screw causes its end to drive the friction block to contact the outer surface of the seamless tube body, thus fixing the seamless tube body.

[0014] 3. By setting an annular groove and an annular protrusion, this utility model achieves the effect of limiting the connection of the connecting pipe. When the annular protrusion is inserted into the annular groove, it limits the connection of the connecting pipe, so that the connecting pipe can only rotate and cannot move along the axial direction, thereby preventing the connecting pipe from slipping out of the support ring. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a schematic diagram of the main structure of this utility model;

[0017] Figure 3 This is a partial main cross-sectional view of the butt joint pipe of this utility model;

[0018] Figure 4 This utility model Figure 3 A magnified structural diagram of A in the middle;

[0019] Figure 5 This utility model Figure 3 A magnified structural diagram of B in the diagram.

[0020] Reference numerals in the attached drawings: 1. Seamless tube body; 2. Connecting tube; 3. Support ring; 4. Adjustable telescopic column; 5. Fixed base plate; 6. Triangular reinforcing plate; 7. Fixing hole; 8. Welding window; 9. Locking screw; 10. Fixing nut; 11. Friction block; 12. Annular groove; 13. Annular protrusion. Detailed Implementation

[0021] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0022] Example 1

[0023] like Figure 1 , Figure 2 , Figure 3 and Figure 5As shown, this utility model proposes a seamless semiconductor tube with convenient docking, comprising a seamless tube body 1 and a connecting tube 2. Support rings 3 are movably fitted onto the outer surface of the connecting tube 2 near both ends. Annular grooves 12 are provided on the outer surface of the connecting tube 2 near both ends. Annular protrusions 13 are provided on the inner walls of both support rings 3, and the annular protrusions 13 are located inside the annular grooves 12, thus limiting the connecting tube 2 and preventing it from moving along the axial direction, thereby preventing the connecting tube 2 from slipping out of the support rings 3. A plurality of welding windows 8 are evenly spaced in a circular array on the outer surface of the connecting tube 2. The welding windows 8 are located at two... Between the support rings 3, the end of the seamless tube body 1 is located inside the connecting tube 2. Adjustable telescopic columns 4 are fixedly connected to the outer surfaces of the two support rings 3. Fixed base plates 5 are fixedly connected to the bottom ends of the two adjustable telescopic columns 4. Several fixing holes 7 are evenly spaced in a ring array on the upper surface of the two fixed base plates 5. Bolts can pass through the fixing holes 7 to fix the fixed base plates 5 in the position of use. Several triangular reinforcing plates 6 are fixedly installed in a ring array at equal intervals near the lower surface of the two adjustable telescopic columns 4. The lower surface of the triangular reinforcing plates 6 is fixedly connected to the upper surface of the fixed base plates 5. The triangular reinforcing plates 6 enhance the structural strength between the adjustable telescopic columns 4 and the fixed base plates 5.

[0024] In this embodiment, when welding the two seamless tube bodies 1, the ends of the two seamless tube bodies 1 are inserted into the inside of the connecting pipe 2 from both ends, and the junction of the two is located at the welding window 8. Then the ends of the two seamless tube bodies 1 are connected. Since the limiting of the connecting pipe 2, there will be no misalignment. Adjusting the length of the adjustable telescopic column 4, the bolt passes through the fixing hole 7 to fix the fixing base plate 5 at the use position, so as to support the seamless tube body 1, the support ring 3 and the connecting pipe 2. The ends of the two seamless tube bodies 1 are welded together through the welding window 8.

[0025] Example 2

[0026] like Figures 1-4 As shown, the present invention proposes a seamless semiconductor tube with convenient docking. Compared with Embodiment 1, this embodiment further includes two support rings 3 with a number of fixing nuts 10 fixedly installed in a ring array at equal intervals on their outer surfaces. Each fixing nut 10 has a locking screw 9 movably inserted inside, and the locking screw 9 passes through the support ring 3 and the connecting tube 2. The outer surface of the connecting tube 2 near both ends and the outer surfaces of the two support rings 3 are provided with a number of through holes that correspond one-to-one with the fixing nuts 10 in a ring array. Each locking screw 9 has a friction block 11 fixedly connected to its end.

[0027] In this embodiment, after the seamless tube body 1 is welded and connected, the locking screw 9 is turned so that its end drives the friction block 11 to contact the outer surface of the seamless tube body 1, thus fixing the seamless tube body 1.

[0028] The above specific embodiments are merely several preferred embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A seamless semiconductor tube with convenient docking, comprising a seamless tube body (1) and a docking tube (2), characterized in that: Support rings (3) are movably sleeved on the outer surface of the connecting pipe (2) near both ends. Several welding windows (8) are evenly spaced in a ring array on the outer surface of the connecting pipe (2). The welding windows (8) are located between the two support rings (3). The end of the seamless pipe body (1) is located inside the connecting pipe (2). Adjustable telescopic columns (4) are fixedly connected to the outer surfaces of the two support rings (3).

2. The seamless semiconductor tube with convenient docking as described in claim 1, characterized in that: The outer surfaces of the two support rings (3) are each fixedly mounted with a number of fixing nuts (10) in a ring array at equal intervals. Each fixing nut (10) has a locking screw (9) movably inserted inside, and the locking screw (9) passes through the support ring (3) and the connecting pipe (2).

3. The seamless semiconductor tube with convenient docking according to claim 2, characterized in that: Each of the locking screws (9) is fixedly connected to a friction block (11) at its end.

4. The seamless semiconductor tube with convenient docking according to claim 1, characterized in that: The outer surface of the connecting pipe (2) is provided with annular grooves (12) near both ends, and the inner walls of the two support rings (3) are provided with annular protrusions (13), and the annular protrusions (13) are located inside the annular grooves (12).

5. A seamless semiconductor tube with convenient docking according to claim 1, characterized in that: The bottom ends of the two adjustable telescopic columns (4) are fixedly connected to a fixed base plate (5), and the upper surfaces of the two fixed base plates (5) are provided with a number of fixed holes (7) in a ring array at equal intervals.

6. A seamless semiconductor tube with convenient docking as described in claim 5, characterized in that: Several triangular reinforcing plates (6) are fixedly installed in a ring array at equal intervals on the outer surface of the two adjustable telescopic columns (4) near the lower surface, and the lower surface of the triangular reinforcing plates (6) and the upper surface of the fixed base plate (5) are fixedly connected.

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