A vibration damping system
By using a dual-layer vibration reduction structure and a combined active and passive vibration reduction system, the problems of low-frequency isolation and mid-to-high-frequency shock resistance of traditional vibration reduction systems have been solved, achieving efficient attenuation and cost optimization of vibration across the entire frequency band.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUHAN GLORY ROAD PRECISION TECH CO LTD
- Filing Date
- 2025-08-21
- Publication Date
- 2026-06-05
AI Technical Summary
Traditional single-stage vibration reduction systems are difficult to isolate the equipment's own low-frequency vibrations from external vibrations, and single-stage active vibration reduction systems are susceptible to instability due to ground impacts. Existing technologies lack a solution that can synergistically address low-frequency isolation and mid-to-high-frequency impact resistance.
A dual-stage vibration reduction structure is adopted, including a low-stiffness first vibration reduction unit and a medium-high stiffness second vibration reduction unit, which are used to isolate low-frequency vibrations of 0.1-20Hz and medium-high frequency vibrations of 10-100Hz, respectively. Inter-stage resonance is avoided through differentiated natural frequency design, and active and passive vibration reduction devices are combined to optimize vibration isolation performance.
It achieves efficient attenuation of vibration across the entire frequency band, reduces system complexity and cost, and ensures the vibration isolation performance and stability of precision equipment.
Smart Images
Figure CN224326617U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of precision vibration reduction technology, specifically to a vibration reduction system. Background Technology
[0002] With the development of precision manufacturing and testing technologies, the requirements for vibration isolation performance of equipment such as precision air-bearing motion stages and scanning electron microscopes are becoming increasingly stringent.
[0003] Traditional single-stage vibration damping systems have inherent limitations: passive dampers typically have a natural frequency >5Hz, making it difficult to isolate low-frequency vibrations (0.1-5Hz) generated by the equipment's own motion. While single-stage active damping systems can suppress low-frequency disturbances, their low stiffness makes them susceptible to instability from ground impacts. Especially in scenarios where equipment motion (such as rapid displacement of an air-floating platform) and external vibrations (such as those transmitted through building structures) are superimposed, a single-stiffness damper cannot meet the requirements for low-frequency isolation and impact resistance. If two stages of dampers with the same stiffness are used, because their natural frequencies are similar (e.g., both 3-5Hz), vibration energy will repeatedly transfer between the two stages, creating interstage resonance and amplifying the vibration amplitude. Current technologies lack a solution that can synergistically resolve the contradiction between low-frequency isolation and mid-to-high-frequency impact resistance.
[0004] This utility model addresses the shortcomings of existing technologies by disclosing a vibration reduction system to solve the aforementioned problems. Utility Model Content
[0005] This invention addresses the technical problems existing in the prior art by providing a vibration reduction system that employs a dual-level vibration reduction structure, capable of synergistically handling low-frequency vibrations and medium-to-high-frequency impacts.
[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A vibration reduction system, comprising:
[0007] Rigid platforms are used to support precision equipment that requires vibration damping.
[0008] The first base is disposed at a distance from the rigid platform along a first direction;
[0009] The second base is disposed at a distance from the first base along the first direction;
[0010] Multiple first vibration damping units, each unit extending along the first direction, with its two ends respectively fixedly connected to the rigid platform and the first base;
[0011] Multiple second vibration damping units, each unit extending along the first direction, with its two ends respectively fixedly connected to the first base and the second base;
[0012] The stiffness of the first damping unit is less than that of the second damping unit.
[0013] Based on the above technical solution, the present invention can be further improved as follows.
[0014] Furthermore, the stiffness of the first damping unit is in the low stiffness range, and its natural frequency is 2-3Hz.
[0015] The second vibration damping unit has a medium-high stiffness range and a natural frequency of 5-10Hz.
[0016] Furthermore, the total equivalent mass of the first vibration damping unit support is less than the total equivalent mass of the second vibration damping unit support.
[0017] Furthermore, the first vibration damping unit is an active vibration damping device configured to isolate low-frequency vibrations of 0.1-20Hz;
[0018] The second vibration damping unit is a passive vibration damping device, configured to isolate medium- and high-frequency vibrations of 10-100Hz.
[0019] Furthermore, the central axes of the rigid platform, the first base, and the second base are collinear along the first direction.
[0020] Furthermore, multiple first vibration damping units are symmetrically distributed in the outer peripheral region of the first base; multiple second vibration damping units are symmetrically distributed in the outer peripheral region of the second base.
[0021] Furthermore, the first vibration damping unit includes:
[0022] The primary top plate is fixedly connected to the lower surface of the rigid platform;
[0023] A primary base plate is fixedly connected to the upper surface of the first base.
[0024] The primary vibration damping component is located between the primary top plate and the primary bottom plate.
[0025] Furthermore, the second vibration damping unit includes:
[0026] The secondary top plate is fixedly connected to the lower surface of the rigid platform;
[0027] The secondary base plate is fixedly connected to the upper surface of the first base;
[0028] The secondary vibration damping component is located between the secondary top plate and the secondary bottom plate.
[0029] Furthermore, the second base is connected to the foundation via several anchoring components;
[0030] The anchoring assembly includes:
[0031] An anchor, with its two ends fixedly connected to the foundation and the second base respectively;
[0032] The leveling shims are placed between the second base and the foundation to adjust the elevation and levelness of the second base.
[0033] The beneficial effects of this utility model are:
[0034] This embodiment employs a two-layer architecture: an upper low-stiffness first vibration damping unit (natural frequency 2-3Hz) and a lower medium-high stiffness second vibration damping unit (natural frequency 5-10Hz). The lower medium-high stiffness unit resists ground impacts and maintains system stability, while the upper low-stiffness unit isolates the equipment's own low-frequency vibrations. The difference in natural frequencies between the two layers avoids inter-stage resonance, achieving efficient vibration attenuation across the entire frequency band. Simultaneously, it supports a hybrid configuration of upper-layer active control and lower-layer passive vibration damping, reducing system costs while ensuring the vibration isolation performance of ultra-precision equipment. Attached Figure Description
[0035] Figure 1 This is a schematic diagram of the vibration reduction system described in an embodiment of the present invention;
[0036] Figure 2 This is a front view of the vibration reduction system described in an embodiment of the present invention.
[0037] The attached diagram lists the components represented by each number as follows:
[0038] 1. Marble base; 2. First base; 3. Second base; 4. First vibration damping unit; 5. Second vibration damping unit; 6. Precision air-bearing motion platform; 7. Anchor bolts; 8. Leveling pad assembly. Detailed Implementation
[0039] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0040] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.
[0041] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.
[0042] Example
[0043] A vibration reduction system, such as Figure 1 and Figure 2 As shown, it includes:
[0044] Rigid platforms are used to support precision motion mechanisms;
[0045] The first base 2 is disposed at a distance from the rigid platform along the first direction;
[0046] The second base 3 is disposed at a distance from the first base 2 along the first direction;
[0047] Multiple first vibration damping units 4, each unit extending along the first direction, with its two ends respectively fixedly connected to the rigid platform and the first base 2;
[0048] Multiple second vibration damping units 5, each unit extending along the first direction, with its two ends respectively fixedly connected to the first base 2 and the second base 3;
[0049] The stiffness of the first vibration damping unit 4 is less than that of the second vibration damping unit 5.
[0050] In this embodiment, the first direction is vertical and perpendicular to the horizontal plane. The rigid platform uses a natural marble base 1, which has high-density inertial mass and can absorb external vibration energy through its own mass. The precision air-bearing motion stage 6, used to support the precision equipment requiring vibration damping, is mounted on the marble base 1 using multiple screws. The vibration damping system provided in this embodiment is not limited to the precision air-bearing motion stage 6, but is also applicable to scanning electron microscopes (SEM), atomic force microscopes (AFM), or other precision optical inspection equipment.
[0051] In a preferred embodiment, the first damping unit 4 has a low stiffness range and a natural frequency of 2-3 Hz; the second damping unit 5 has a medium-high stiffness range and a natural frequency of 5-10 Hz. The total equivalent mass supported by the first damping unit 4 is less than the total equivalent mass supported by the second damping unit 5.
[0052] This embodiment achieves full-frequency vibration isolation by using a differentiated combination of a low-stiffness first vibration damping unit 4 with a natural frequency of 2Hz~3Hz on the upper layer and a medium-high stiffness second vibration damping unit 5 with a natural frequency of 5Hz~10Hz on the lower layer: the medium-high stiffness unit on the lower layer blocks ground impacts and maintains system stability, while the low-stiffness unit on the upper layer effectively suppresses the low-frequency micro-vibrations of the equipment itself. The design of using different natural frequencies for the two levels eliminates the risk of inter-level resonance.
[0053] In this embodiment, the total equivalent mass supported by the first vibration damping unit 4 is less than the total equivalent mass supported by the second vibration damping unit 5. The selection of the first vibration damping unit 4 and the second vibration damping unit 5 must meet the constraint conditions of their own bearing capacity on the upper limit of mass, and the upper layer mass is less than the lower layer mass.
[0054] In a preferred embodiment, the first vibration damping unit 4 is an active vibration damping device configured to isolate low-frequency vibrations of 0.1-20Hz;
[0055] The second vibration damping unit 5 is a passive vibration damping device, configured to isolate medium- and high-frequency vibrations of 10-100Hz.
[0056] To optimize costs while meeting performance requirements, this embodiment preferably adopts an "upper-layer active + lower-layer passive" configuration, namely, an active first vibration damping unit 4 and a passive second vibration damping unit 5. The active unit effectively suppresses low-frequency vibrations (typically the most difficult to isolate and having the greatest impact on precision equipment), while the passive unit efficiently and cost-effectively isolates mid-to-high-frequency vibrations. Compared to a "dual-active" scheme, this hybrid scheme significantly reduces system complexity and cost while maintaining good low-frequency performance, offering higher cost-effectiveness. This scheme is the preferred implementation method under conditions of excellent foundation.
[0057] For precision equipment or experimental environments with extremely high vibration reduction requirements, it is preferable to configure both the first vibration reduction unit 4 and the second vibration reduction unit 5 as active vibration reduction devices. This scheme can provide the widest frequency band (covering ultra-low frequencies to mid-high frequencies) and the best vibration isolation performance, but it has the highest system complexity and cost.
[0058] In scenarios where vibration reduction performance requirements are relatively low or the budget is extremely limited, and environmental vibration interference is mainly concentrated in the mid-to-high frequency range, and where performance requirements permit and cost is the main constraint, both the first vibration reduction unit 4 and the second vibration reduction unit 5 can be configured as passive vibration reduction devices. This solution has the lowest cost, but it is mainly effective for mid-to-high frequency vibrations and has limited isolation capability for ultra-low frequency vibrations.
[0059] In a preferred embodiment, the central axes of the rigid platform, the first base 2, and the second base 3 are collinear along the first direction.
[0060] In a preferred embodiment, a plurality of first damping units 4 are symmetrically distributed in the outer peripheral region of the first base 2; a plurality of second damping units 5 are symmetrically distributed in the outer peripheral region of the second base 3.
[0061] In this embodiment, four first vibration damping units 4 are symmetrically distributed at the four corners of the first base 2; four second vibration damping units 5 are symmetrically distributed at the four corners of the second base 3.
[0062] In a preferred embodiment, the first vibration damping unit 4 includes:
[0063] The primary top plate is fixedly connected to the lower surface of the rigid platform;
[0064] A primary base plate is fixedly connected to the upper surface of the first base 2;
[0065] The primary vibration damping component is located between the primary top plate and the primary bottom plate.
[0066] The second vibration damping unit 5 includes:
[0067] The secondary top plate is fixedly connected to the lower surface of the rigid platform;
[0068] The secondary base plate is fixedly connected to the upper surface of the first base 2;
[0069] The secondary vibration damping component is located between the secondary top plate and the secondary bottom plate.
[0070] In this embodiment, the primary top plate is fixedly connected to the lower surface of the rigid platform by screws, and the primary bottom plate is fixedly connected to the upper surface of the first base 2 by screws; the secondary top plate is fixedly connected to the lower surface of the primary bottom plate by screws, and the secondary bottom plate is fixedly connected to the upper surface of the second base 3 by screws.
[0071] In a preferred embodiment, such as Figure 2 As shown, the second base 3 is connected to the foundation through several anchoring components;
[0072] The anchoring assembly includes:
[0073] Anchors are fixedly connected at both ends to the foundation and the second base 3, respectively.
[0074] The leveling pad group 8 is located between the second base 3 and the foundation and is used to adjust the elevation and levelness of the second base 3.
[0075] In this embodiment, the anchor is a foundation bolt 7 pre-embedded in the foundation, with its threaded part extending upward through the mounting hole of the second base 3 and fixed to it by a lock nut; the leveling shim set 8 is fitted on the foundation bolt 7 and is located between the second base 3 and the foundation platform surface, and is used to adjust the elevation and levelness of the second base 3.
[0076] While embodiments or examples of this disclosure have been described with reference to the accompanying drawings, it should be understood that the methods, systems, and devices described above are merely exemplary embodiments or examples, and the scope of this utility model is not limited by these embodiments or examples, but only by the granted claims and their equivalents. Various elements in the embodiments or examples may be omitted or replaced by their equivalents. Furthermore, the steps may be performed in a different order than that described in this disclosure. Further, various elements in the embodiments or examples may be combined in various ways. Importantly, as technology evolves, many elements described herein can be replaced by equivalents that appear after this disclosure.
Claims
1. A vibration reduction system, characterized in that, include: Rigid platforms are used to support precision equipment that requires vibration damping. The first base is disposed at a distance from the rigid platform along a first direction; The second base is disposed at a distance from the first base along the first direction; Multiple first vibration damping units, each unit extending along the first direction, with its two ends respectively fixedly connected to the rigid platform and the first base; Multiple second vibration damping units, each unit extending along the first direction, with its two ends respectively fixedly connected to the first base and the second base; The stiffness of the first damping unit is less than that of the second damping unit.
2. The vibration reduction system according to claim 1, characterized in that: The stiffness of the first vibration damping unit is in the low stiffness range, and its natural frequency is 2-3Hz; The second vibration damping unit has a medium-high stiffness range and a natural frequency of 5-10Hz.
3. The vibration reduction system according to claim 1 or 2, characterized in that: The total equivalent mass of the first vibration damping unit support is less than the total equivalent mass of the second vibration damping unit support.
4. The vibration reduction system according to claim 1 or 2, characterized in that: The first vibration damping unit is an active vibration damping device, configured to isolate low-frequency vibrations of 0.1-20Hz; The second vibration damping unit is a passive vibration damping device, configured to isolate medium- and high-frequency vibrations of 10-100Hz.
5. The vibration reduction system according to claim 1, characterized in that: The central axes of the rigid platform, the first base, and the second base are collinear along the first direction.
6. The vibration reduction system according to claim 4, characterized in that: Multiple first vibration damping units are symmetrically distributed in the outer peripheral area of the first base; multiple second vibration damping units are symmetrically distributed in the outer peripheral area of the second base.
7. The vibration reduction system according to claim 1, characterized in that: The first vibration damping unit includes: The primary top plate is fixedly connected to the lower surface of the rigid platform; A primary base plate is fixedly connected to the upper surface of the first base. The primary vibration damping component is located between the primary top plate and the primary bottom plate.
8. The vibration reduction system according to claim 1, characterized in that: The second vibration damping unit includes: The secondary top plate is fixedly connected to the lower surface of the rigid platform; The secondary base plate is fixedly connected to the upper surface of the first base; The secondary vibration damping component is located between the secondary top plate and the secondary bottom plate.
9. The vibration reduction system according to claim 1, characterized in that: The second base is connected to the foundation via several anchoring components; The anchoring assembly includes: An anchor, with its two ends fixedly connected to the foundation and the second base respectively; The leveling shims are placed between the second base and the foundation to adjust the elevation and levelness of the second base.