Film coating apparatus

Abstract

This utility model discloses a laminating device, comprising: a platform with a roller groove extending through it; a first roller fixed in the roller groove, the first roller being used to press and coat a film material; a second roller fixed to one side of the platform and located beside the first roller, the second roller being used to fix the film material; and a third roller fixed to one side of the platform and located beside the second roller, the outer surface of the third roller being a continuous arc-shaped transition surface, and the radial dimension of the third roller gradually decreasing from its axial center to both ends. This utility model, by setting the radial dimension of the third roller to gradually decrease from its axial center to both ends, accommodates film material wrinkles without causing the film material to tighten or undergo other deformations, thereby effectively driving away air bubbles during the laminating process.

Description

Technical Field

[0001] This invention belongs to the field of nanoimprint technology, specifically relating to a coating device. Background Technology

[0002] In nanoimprint lithography (NIL), it is usually necessary to coat the nanoimprint template with a film, such as a UVIPS film or a PC film. During the coating process, if a conventional flat roller is used, when wrinkles appear in the film, the wrinkles cannot be unfolded, and the gas inside the wrinkles will be trapped between the nanoimprint template and the film.

[0003] Therefore, in order to address the aforementioned technical problems, it is necessary to provide a coating device. Utility Model Content

[0004] The purpose of this invention is to provide a film coating device that can solve the problems of wrinkles and air bubbles generated during the upward film coating process.

[0005] To achieve the above objectives, the technical solution provided by a specific embodiment of this utility model is as follows:

[0006] A coating device, comprising:

[0007] The platform is equipped with a roller groove running through it;

[0008] The first roller is fixed in the roller groove and is used to press the film material;

[0009] The second roller is fixed to one side of the platform and located next to the first roller. The second roller is used to fix the film material.

[0010] The third roller is fixed to one side of the platform and located next to the second roller. The outer surface of the third roller is a continuous arc transition surface, and the radial dimension of the third roller gradually decreases from the axial center of the third roller to both ends of the third roller.

[0011] In one or more embodiments of this utility model, the first roller is a flat roller, and the radial dimension of the first roller is greater than the depth of the roller groove.

[0012] In one or more embodiments of this utility model, the ratio between the maximum radial dimension of the third roller and the minimum radial dimension of the third roller is 1.2 to 1.5.

[0013] In one or more embodiments of the present invention, the second roller includes a main body and a protrusion. The main body is a flat roller, and the protrusion is a hollow columnar structure. The protrusion is fixedly sleeved on the outside of the main body.

[0014] In one or more embodiments of the present invention, the second roller includes two spaced protrusions, and the two protrusions are respectively fixedly sleeved on both ends of the main body; and / or, the outer surface of the protrusion is a continuous arc-shaped transition surface, and the radial dimension of the protrusion gradually decreases from the axial center of the protrusion to both ends of the protrusion.

[0015] In one or more embodiments of the present invention, the radial dimension of the main body is smaller than the radial dimension of the first roller; and / or, the maximum radial dimension of the protrusion is greater than or equal to the radial dimension of the first roller.

[0016] In one or more embodiments of the present invention, the difference between the maximum radial dimension of the protrusion and the radial dimension of the main body is a first difference, the difference between the maximum radial dimension of the third roller and the minimum radial dimension of the third roller is a second difference, the first difference is greater than the second difference; and / or, the main body and the third roller are spaced apart.

[0017] In one or more embodiments of this utility model, the first roller, the second roller, and the third roller extend in the same direction; and / or,

[0018] The platform includes a first surface and a second surface arranged opposite to each other. The first roller and the second roller are arranged at intervals along a direction perpendicular to the first surface, and the second roller and the third roller are arranged at intervals along a direction parallel to the first surface.

[0019] In one or more embodiments of the present invention, the platform includes a first surface and a second surface disposed opposite to each other, the roller groove passes through the first surface and the second surface, the first surface is fixedly provided with a first fixing component and a second fixing component, the second roller is rotatably connected to the first fixing component, and the third roller is rotatably connected to the second fixing component.

[0020] In one or more embodiments of this utility model, two sets of third fixing components are provided in the roller groove. The third fixing components are respectively arranged on both sides of the roller groove along the axial direction of the first roller, and the two ends of the first roller are respectively rotatably connected to the third fixing components.

[0021] In one or more embodiments of the present invention, the coating device further includes a driving component for driving the stage to move along a first direction, the first direction being perpendicular to the axial direction of the first roller.

[0022] Compared with the prior art, the coating device of this utility model, by setting the radial dimension of the third roller to gradually decrease from the axial center of the third roller to both ends of the third roller, can accommodate the wrinkles of the film material without causing the film material to tighten or undergo other deformations, thereby effectively driving away air bubbles in the coating process.

[0023] By setting a second roller to fix the membrane material, the membrane material that has been de-wrinkled is stably transferred to the surface of the first roller, thus preventing the membrane material from wrinkling again during the movement process;

[0024] By providing protrusions and a main body in the second roller, damage to the embossed pattern or adhesive on the membrane material is avoided during the membrane material movement process. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the coating device in one embodiment of the present invention;

[0027] Figure 2 This is another structural schematic diagram of the coating device in one embodiment of the present invention;

[0028] Figure 3 This is a top view of the coating device in one embodiment of the present invention;

[0029] Figure 4 This is a bottom view of the coating device in one embodiment of the present invention;

[0030] Figure 5 This is a side view of the coating device (including the target platform and the membrane material) in one embodiment of the present invention.

[0031] Explanation of key figure labels:

[0032] 10. First roller; 20. Second roller; 21. Main body; 22. Protrusion; 30. Third roller; 40. Platform; 41. Roller groove; 42. First fixing component; 43. Second fixing component; 43. Third fixing component; 50. Membrane material; 60. Target platform. Detailed Implementation

[0033] To enable those skilled in the art to better understand the technical solutions in the present utility model, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0034] Unless otherwise clearly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "having" etc. will be understood to include the stated elements or components, without excluding other elements or other components.

[0035] In the detailed description of the specification, reference is made to the accompanying drawings that form a part of it, in which the same reference numerals always denote the same components, and which are shown by way of exemplary embodiments that can be implemented. It should be understood that other embodiments can be utilized and structural or logical changes can be made without departing from the scope of the present application. Therefore, the following detailed description should not be construed as having a limiting meaning.

[0036] As shown Figures 1-5 The present invention discloses a film laminating device, which includes a carrier table 40, a first roller 10, a second roller 20 and a third roller 30.

[0037] Specifically, the carrier table 40 includes a first surface and a second surface arranged opposite to each other, and a roller groove 41 runs through the first surface and the second surface.

[0038] The first roller 10 is fixed in the roller groove 41, and the first roller 10 is used for pressing the film material.

[0039] The second roller 20 is fixed on one side of the carrier table 40 and is located beside the first roller 10. The second roller 20 is used for fixing the film material.

[0040] The third roller 30 is fixed on one side of the carrier table 40 and is located beside the second roller 20. The outer surface of the third roller 30 is a continuous arc-shaped transition surface, and the radial dimension of the third roller 30 gradually decreases from the axial center of the third roller 30 to both ends of the third roller 30.

[0041] As shown Figure 5As shown, during the upward lamination process, the lamination device is positioned below the target platform 60 to be laminationd, i.e., the second surface of the platform 40 faces the target platform 60. Part of the film material 50 covers the side of the first roller 10 away from the second roller 20, part of the film material 50 is sandwiched between the first roller 10 and the second roller 20, and part of the film material 50 is sandwiched between the second roller 20 and the third roller 30. During the movement of the lamination device along the first direction (x direction shown in the figure), the first roller 10, the first roller 10, and the third roller 30 all rotate based on the friction between their film materials 50 and the target platform 60. The first roller 10 presses the film material 50 onto the bottom of the target platform 60 above.

[0042] It is understandable that wrinkles and air bubbles are prone to form in the middle part of the membrane material. The third roller 30 in this invention is close to a "spindle shape". Therefore, during the rotation of the third roller 30, the middle part of the membrane material 50 unfolds from the axial center of the third roller 30 to both ends of the third roller 30 under the tension of the third roller 30, so as to avoid wrinkles in the middle of the membrane material and thus avoid air bubbles between the membrane material and the target platform after the first roller 10 presses the membrane material onto the target platform.

[0043] Furthermore, the first roller 10 is a flat roller, meaning that the radial dimensions of the first roller 10 are equal. The radial dimension of the first roller 10 is greater than the depth of the roller groove 41, meaning that part of the first roller 10 protrudes out of the roller groove 41.

[0044] In one specific embodiment, the ratio of the maximum radial dimension to the minimum radial dimension of the third roller 30 is 1.2 to 1.5, that is, the ratio of the radial dimension at the axial center of the third roller 30 to the radial dimensions at both ends of the third roller 30 is 1.2 to 1.5. Experimental verification shows that when the dimensions of the third roller 30 meet the above ratio, it is just sufficient to accommodate wrinkles in the membrane material, but without causing tension or other deformation of the membrane material.

[0045] The second roller 20 includes a main body 21 and a protrusion 22, wherein the main body 21 is a flat roller and the protrusion 22 is a hollow columnar structure, and the protrusion 22 is fixedly sleeved on the outside of the main body 21. Preferably, the second roller 20 includes two spaced-apart protrusions 22, and the two protrusions 22 are respectively fixedly sleeved on both ends of the main body 21.

[0046] Understandably, during the operation of the coating device, the film 50 directly contacts the protrusions 22 and the third roller 30, but does not contact the main body 21. The distance between the two protrusions 22 is greater than or equal to the width of the target imprinted pattern on the film, so as to avoid the protrusions 22 damaging the target imprinted pattern.

[0047] In one specific embodiment, the outer surface of the protrusion 22 is a continuous arc-shaped transition surface, and the radial dimension of the protrusion 22 gradually decreases from the axial center of the protrusion 22 to both ends of the protrusion 22.

[0048] In other alternative embodiments, the radial dimensions of the protrusions 22 are equal at all locations.

[0049] Furthermore, the radial dimension of the main body 21 is smaller than the radial dimension of the first roller 10, and the maximum radial dimension of the protrusion 22 is greater than or equal to the radial dimension of the first roller 10.

[0050] It is understandable that one side of the film material used in the nanoimprinting process will have an adhesive or nanoimprinting pattern, and the side of the film material with the adhesive or nanoimprinting pattern (hereinafter referred to as the third surface) needs to be pressed onto the bottom of the target platform. Therefore, during the operation of the coating device, it is necessary to consider how to minimize damage to the third surface, especially the part of the third surface with the adhesive or nanoimprinting pattern.

[0051] In this embodiment, the radial dimension of the main body 21 is smaller than that of the first roller 10, and the protrusion 22 protrudes from the main body 21. Therefore, the two sides of the film are sandwiched between the protrusion 22 and the first roller 10, and the main body 21 will not contact the middle part of the film, thus avoiding damage to the third surface by the second roller 20.

[0052] Furthermore, the difference between the maximum radial dimension of the protrusion 22 and the radial dimension of the main body 21 is the first difference, and the difference between the maximum radial dimension of the third roller 30 and the minimum radial dimension of the third roller 30 is the second difference. The first difference is greater than the second difference. It can also be understood that the main body 21 and the third roller 30 are spaced apart. Since the third roller 30 is nearly spindle-shaped and its third surface does not face the main body 21, but the third roller 30 faces the main body 21, this design avoids the main body 21 from contacting the portion of the third roller near its axial center during the operation of the coating device, thereby preventing the main body 21 from contacting the third surface of the film material.

[0053] In addition, the protrusion 22 in this embodiment serves to fix the membrane material. The protrusion 22 ensures that the membrane material, which has been de-wrinkled, is stably transferred to the surface of the first roller, and avoids the membrane material from wrinkling again during the movement process.

[0054] Furthermore, the first roller 10, the second roller 20, and the third roller 30 are arranged to extend in the same direction to further reduce the generation of membrane wrinkles.

[0055] Combination Figure 5As shown, the first roller 10 and the second roller 20 are arranged at intervals along a direction perpendicular to the first surface, and the second roller 20 and the third roller 30 are arranged at intervals along a direction parallel to the first surface. That is, the second roller 20 is located directly below the first roller 10, and the third roller 30 is located to the side of the second roller 20.

[0056] Furthermore, a first fixing component 42 and a second fixing component 43 are fixedly disposed on the first surface of the stage, a second roller 20 is rotatably connected to the first fixing component 42, and a third roller 30 is rotatably connected to the second fixing component 43.

[0057] Furthermore, two sets of third fixing components 44 are provided in the roller groove 41. The third fixing components 44 are respectively arranged on both sides of the roller groove 41 along the axial direction of the first roller 10, and the two ends of the first roller 10 are rotatably connected to the third fixing components 44 respectively.

[0058] The first fixing component 42, the second fixing component 43, and the third fixing component 44 include components such as bearing seats and flanges. It is understood that the components for rotating the fixing roller are well known in the prior art and therefore will not be described in detail here. Any known or unknown fixing components may be used without restriction.

[0059] In another specific embodiment, the coating apparatus further includes a driving assembly for driving the stage 40 along a first direction (i.e., Figure 5 The movement is in the x-direction shown, with the first direction perpendicular to the axial direction of the first roller 10. Optionally, the drive assembly includes a motor and a sliding mechanism. It is understood that the drive assembly is well known in the prior art and therefore will not be described in detail herein. Any known or unknown drive assembly may be used without limitation.

[0060] Furthermore, the film-coating device provided by this utility model is also used to realize the film-peeling operation. The driving component drives the stage 40 to move in the opposite direction to the first direction so as to peel the film 50 off the bottom of the target platform 60.

[0061] As can be seen from the above technical solutions, this utility model has the following beneficial effects:

[0062] By setting the radial dimension of the third roller to gradually decrease from the axial center of the third roller to both ends, it can accommodate membrane wrinkles without causing the membrane to tighten or undergo other deformations, thereby effectively driving away air bubbles during the coating process.

[0063] By setting a second roller to fix the membrane material, the membrane material that has been de-wrinkled is stably transferred to the surface of the first roller, thus preventing the membrane material from wrinkling again during the movement process;

[0064] By providing protrusions and a main body in the second roller, damage to the embossed pattern or adhesive on the membrane material is avoided during the membrane material movement process.

[0065] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0066] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A coating device, characterized in that, include: The platform is equipped with a roller groove running through it; The first roller is fixed in the roller groove and is used to press the film material; The second roller is fixed to one side of the platform and located next to the first roller. The second roller is used to fix the film material. The third roller is fixed to one side of the platform and located next to the second roller. The outer surface of the third roller is a continuous arc transition surface, and the radial dimension of the third roller gradually decreases from the axial center of the third roller to both ends of the third roller.

2. The coating apparatus according to claim 1, characterized in that, The first roller is a flat roller, and the radial dimension of the first roller is greater than the depth of the roller groove.

3. The coating apparatus according to claim 1, characterized in that, The ratio between the maximum radial dimension of the third roller and the minimum radial dimension of the third roller is 1.2 to 1.

5.

4. The coating apparatus according to claim 1, characterized in that, The second roller includes a main body and a protrusion. The main body is a flat roller, and the protrusion is a hollow columnar structure. The protrusion is fixedly sleeved on the outside of the main body.

5. The coating apparatus according to claim 4, characterized in that, The second roller includes two spaced-apart protrusions, and the two protrusions are respectively fixedly sleeved on both ends of the main body; and / or, The outer surface of the protrusion is a continuous arc-shaped transition surface, and the radial dimension of the protrusion gradually decreases from the axial center of the protrusion to both ends of the protrusion.

6. The coating apparatus according to claim 4, characterized in that, The radial dimension of the main body is smaller than the radial dimension of the first roller; and / or, The maximum radial dimension of the protrusion is greater than or equal to the radial dimension of the first roller.

7. The coating apparatus according to claim 4, characterized in that, The difference between the maximum radial dimension of the protrusion and the radial dimension of the main body is a first difference, and the difference between the maximum radial dimension of the third roller and the minimum radial dimension of the third roller is a second difference, wherein the first difference is greater than the second difference; and / or, The main body and the third roller are spaced apart.

8. The coating apparatus according to claim 1, characterized in that, The first roller, the second roller, and the third roller extend in the same direction; and / or, The platform includes a first surface and a second surface arranged opposite to each other. The first roller and the second roller are arranged at intervals along a direction perpendicular to the first surface, and the second roller and the third roller are arranged at intervals along a direction parallel to the first surface.

9. The coating apparatus according to claim 1, characterized in that, The platform includes a first surface and a second surface arranged opposite to each other. A roller groove passes through the first surface and the second surface. A first fixing component and a second fixing component are fixedly disposed on the first surface. The second roller is rotatably connected to the first fixing component, and a third roller is rotatably connected to the second fixing component; and / or... Two sets of third fixing components are provided in the roller groove. The third fixing components are respectively arranged on both sides of the roller groove along the axial direction of the first roller, and the two ends of the first roller are respectively rotatably connected to the third fixing components.

10. The coating apparatus according to claim 1, characterized in that, The coating apparatus further includes a drive assembly for driving the stage to move along a first direction, which is perpendicular to the axial direction of the first roller.

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