Electronic grade trichlorosilane storage tank

Abstract

The utility model belongs to trichlorosilane storage equipment technical field, specifically disclose a kind of electronic grade trichlorosilane storage tank, including stainless steel tank body, tank cover, hydrops vortex, first angle valve, first pipeline, 90 elbow, first check valve, second angle valve, second pipeline, second check valve, 90 elbow between another end of second check valve and second angle valve is used to fill nitrogen gas.In comparison with prior art, the utility model sets up first angle valve and second angle valve, by second angle valve into trichlorosilane in stainless steel tank body, and then by first check valve and second check valve realize sealing to prevent moisture in air into stainless steel tank body, also can effectively reduce trichlorosilane leakage;In addition, when releasing trichlorosilane outward by first angle valve, since the bottom of first pipeline is directly inserted into hydrops vortex, it can completely release trichlorosilane liquid in stainless steel tank body.

Description

Technical Field

[0001] This utility model relates to the technical field of trichlorosilane storage equipment, and in particular to an electronic-grade trichlorosilane storage tank. Background Technology

[0002] Our main products include electronic-grade high-purity dichlorosilane, high-purity trichlorosilane, and high-purity tetrachlorosilane. Taking trichlorosilane (SiHCl3) as an example, it is a colorless, transparent liquid at room temperature with a vapor pressure of 9.75 psi (20°C) and a flash point of only 7°F. It decomposes violently upon contact with water. The main difference between industrial-grade and electronic-grade products lies in the purity standard; electronic-grade products are primarily used in the manufacture of semiconductor devices and solar cells. Trichlorosilane is a colorless, transparent liquid with a strong, pungent odor and is classified as a Class 1 flammable and explosive substance in contact with water. This compound has a melting point of -127°C and a boiling point of 32-34°C. For ease of storage and transportation, trichlorosilane is liquefied and stored in steel cylinders, then stored in a cool, well-ventilated warehouse specifically for toxic gases. The storage warehouse must be kept cool, dry, and well-ventilated, with a recommended temperature not exceeding 25°C (32°C in some standards) and a relative humidity not exceeding 75%. High temperatures or humid environments will exacerbate its hydrolysis reaction, releasing corrosive hydrogen chloride gas. Therefore, it is necessary to effectively seal the gas cylinder storage tank to reduce trichlorosilane leakage and prevent moisture in the air from entering the gas cylinder storage tank.

[0003] In addition, when liquid trichlorosilane needs to be directly transported from storage tanks via pipelines, nitrogen pressurization is typically used to force the liquid material out of the tanks. At this time, the system pressure is usually slightly higher than atmospheric pressure (e.g., 0.05~0.1 MPa), but the temperature is maintained below the boiling point (below 31.8℃) to ensure the liquid state is preserved. However, existing storage tanks, due to their rounded bottoms, retain residual solution during trichlorosilane release, preventing complete release. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies and provide an electronic-grade trichlorosilane storage tank.

[0005] To achieve the above objectives, this utility model is implemented according to the following technical solution:

[0006] An electronic-grade trichlorosilane storage tank includes a stainless steel tank body with a tank cover installed at the top. A liquid accumulation vortex is located at the center of the bottom of the stainless steel tank body. A first angle valve is fixed to the tank cover, one end of which is connected to a first pipe. The end of the first pipe extends through the tank cover to the bottom of the liquid accumulation vortex at the bottom of the stainless steel tank body. The other end of the first angle valve is connected via a 90° elbow to a first one-way valve that only allows outward venting. A second angle valve is fixed to the tank cover, one end of which is connected to a second pipe. The end of the second pipe extends through the tank cover to the lower end face of the tank cover. The other end of the second angle valve is connected via a 90° elbow to a second one-way valve that only allows inward venting. The 90° elbow between the second one-way valve and the other end of the second angle valve is used for filling with nitrogen gas.

[0007] Furthermore, the inner diameter of the first pipe is larger than the inner diameter of the second pipe.

[0008] Furthermore, lifting lugs are fixed on both sides of the upper part of the stainless steel tank.

[0009] Furthermore, a retaining ring is provided on the outer periphery of the can lid, and the top surfaces of the first angle valve and the second angle valve are both lower than the upper surface of the retaining ring.

[0010] Furthermore, the stainless steel tank body is provided with a square base at the bottom.

[0011] Compared with the prior art, this utility model is equipped with a first angle valve and a second angle valve. Trichlorosilane is introduced into the stainless steel tank through the second angle valve, and then sealed by the first and second check valves to prevent moisture in the air from entering the stainless steel tank, which can also effectively reduce trichlorosilane leakage. In addition, when trichlorosilane is released outward through the first angle valve, the bottom of the first pipe extends directly into the liquid vortex, which can completely release the trichlorosilane liquid in the stainless steel tank. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of this utility model.

[0013] Figure 2 This is a top view of the present invention. Detailed Implementation

[0014] To make the objectives, technical solutions, and advantages of this utility model clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. The specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the utility model.

[0015] like Figure 1 , Figure 2As shown in the figure, this embodiment exemplarily demonstrates an electronic-grade trichlorosilane storage tank, including a stainless steel tank body 1, with a tank cover 2 installed at the top of the stainless steel tank body 1; a liquid accumulation vortex 12 is provided at the center of the bottom of the stainless steel tank body 1; a first angle valve 3 is fixed on the tank cover 2; one end of the first angle valve 3 is connected to a first pipe 4; the end of the first pipe 4 extends through the tank cover 2 to the bottom of the liquid accumulation vortex 12 at the bottom of the stainless steel tank body 1; the other end of the first angle valve 3 is connected to a first one-way valve 5 that can only exhaust gas outwards via a 90° elbow 9; a second angle valve 6 is fixed on the tank cover 2; one end of the second angle valve 6 is connected to a second pipe 7; the end of the second pipe 7 extends through the tank cover 2 to the lower end face of the tank cover 2; the inner diameter of the first pipe 4 is larger than the inner diameter of the second pipe 7; the other end of the second angle valve 6 is connected to a second one-way valve 8 that can only allow gas to enter inwards via a 90° elbow 9; the 90° elbow between the second one-way valve 8 and the other end of the second angle valve 6 is used to fill nitrogen gas.

[0016] When filling electronic-grade trichlorosilane into the stainless steel tank 1, do not install the second one-way valve 8 first. Close the first angle valve 3 and open the second angle valve 6 simultaneously. After the electronic-grade trichlorosilane is fed into the stainless steel tank 1, immediately close the second angle valve 6. Then install the second one-way valve 6. Then use the nitrogen purging system to fill the 90° elbow between the second one-way valve 8 and the other end of the second angle valve 6 through the second one-way valve 6 to isolate air. In actual use, in order to facilitate the hoisting of the stainless steel tank 1, lifting lugs 11 are fixed on both sides of the upper part of the stainless steel tank 1. When it is necessary to release the electronic-grade trichlorosilane, first open the second angle valve 6 to introduce nitrogen into the stainless steel tank 1 to pressurize the inside of the stainless steel tank 1 and keep the system pressure slightly higher than the atmospheric pressure (0.05~0.1MPa). Open the first angle valve 3 to pressurize the trichlorosilane from the stainless steel tank 1 to the target container (such as a reactor or distillation column).

[0017] To prevent the first angle valve 3 and the second angle valve 6 from being accidentally damaged during transportation, a retaining ring 10 is provided on the outer periphery of the can cover 2, and the top surfaces of the first angle valve 3 and the second angle valve 6 are both lower than the upper surface of the retaining ring 10.

[0018] In actual use, because the stainless steel tank 1 is prone to rolling, a square base 13 is provided at the bottom of the stainless steel tank 1.

[0019] The technical solution of this utility model is not limited to the specific embodiments described above. All technical modifications made based on the technical solution of this utility model shall fall within the protection scope of this utility model.

Claims

1. An electronic-grade trichlorosilane storage tank, comprising a stainless steel tank body, with a tank cover installed at the top of the stainless steel tank body; characterized in that: The stainless steel tank has a liquid accumulation vortex at the center of its bottom. A first angle valve is fixed on the tank cover. One end of the first angle valve is connected to a first pipe. The end of the first pipe extends through the tank cover to the bottom of the liquid accumulation vortex at the bottom of the stainless steel tank. The other end of the first angle valve is connected to a first one-way valve that can only exhaust gas outwards via a 90° elbow. A second angle valve is fixed on the tank cover. One end of the second angle valve is connected to a second pipe. The end of the second pipe extends through the tank cover to the lower end face of the tank cover. The other end of the second angle valve is connected to a second one-way valve that can only allow air inwards via a 90° elbow. The 90° elbow between the other end of the second one-way valve and the second angle valve is used to fill nitrogen gas.

2. The electronic-grade trichlorosilane storage tank according to claim 1, characterized in that: The inner diameter of the first pipe is larger than the inner diameter of the second pipe.

3. The electronic-grade trichlorosilane storage tank according to claim 1, characterized in that: The stainless steel tank is fixed with lifting lugs on both sides of the upper part.

4. The electronic-grade trichlorosilane storage tank according to claim 1, characterized in that: The can lid is provided with a retaining ring on its outer periphery, and the top surfaces of the first angle valve and the second angle valve are both lower than the upper surface of the retaining ring.

5. The electronic-grade trichlorosilane storage tank according to claim 1, characterized in that: The stainless steel tank has a square base at the bottom.

Images