Gas distribution device

Abstract

The utility model discloses a kind of gas distribution devices, it is characterized by, including: cover, is equipped with air inlet part;Spray part, movably set in the cover, and including several spray holes;The diffusion cavity formed between the spray part and the cover, the diffusion cavity is communicated with the air inlet part;Isolation device, detachably set in the diffusion cavity, including the first isolation part and the second isolation part of different height and mutually nested;Driving device, set in the cover, with the spray part bottom contact, to drive the spray part movement by control the driving device, so that the first isolation part and the second isolation part will the diffusion cavity separation formed air chamber quantity adjustable.The utility model can improve air flow adjustment flexibility, improve equipment compatibility.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a gas distribution device. Background Technology

[0002] The gas distribution unit is a critical component in semiconductor device fabrication equipment. It supplies the substrate with reactive gases capable of forming compound semiconductors. These reactive gases decompose or undergo chemical deposition reactions on the substrate to form compound semiconductor thin films. The structure of the gas distribution unit largely determines the flow and distribution of the reactive gases. It requires precise gas transport and fluid dynamics design, achieved through structural design such as the size and arrangement of spray nozzles, to match the chamber pressure and gas flow rate, thereby depositing thin films of high quality on the substrate.

[0003] In existing technologies, thin film growth on large-size substrates (6 inches and above), especially epitaxial growth, typically requires zoned coupling of a gas distribution device to adjust the airflow and improve growth uniformity and film quality. However, because existing technologies use fixed partitions for zoned coupling, the zones and corresponding spray areas are fixed, limiting the flexibility of airflow adjustment. Furthermore, using fixed partitions also restricts the compatibility of the gas distribution device. For example, a 250 mm gas distribution device's spray surface is suitable for deposition on a 12-inch diameter substrate; if replaced with a 6-inch or smaller diameter substrate, it results in wasted reaction gas and negatively impacts film uniformity. Adapting the same gas injection device to grow substrates of different sizes requires repeated process adjustments, leading to poor equipment compatibility and high costs.

[0004] Therefore, it is necessary to provide a new gas distribution device to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0005] The purpose of this invention is to provide a gas distribution device that can improve the flexibility of airflow adjustment and enhance equipment compatibility.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows:

[0007] A gas distribution device, characterized in that it comprises:

[0008] The cover is equipped with an air intake.

[0009] A spray element is movably disposed on the cover and includes a plurality of spray holes; a diffusion cavity is formed between the spray element and the cover, and the diffusion cavity is connected to the air inlet;

[0010] The isolation device is detachably disposed within the diffusion cavity and includes a first isolation part and a second isolation part of different heights that are nested together.

[0011] A driving device is provided on the cover and contacts the bottom of the spray element, so that by controlling the driving device, the spray element can be moved, and the number of air chambers formed by the first isolation part and the second isolation part separating the diffusion cavity can be adjusted.

[0012] By adopting the above technical solution, since the isolation device is detachably installed in the diffusion cavity, including a first isolation part and a second isolation part of different heights and nested together, and the driving device is located on the cover and in contact with the bottom of the spraying component, the number of gas chambers formed by the first isolation part and the second isolation part separating the diffusion cavity can be adjusted by controlling the driving device to drive the spraying component. The first isolation part or the second isolation part can be removed without opening the cavity, which can flexibly match the growth of substrates of different sizes and improve the utilization rate of the equipment.

[0013] Optionally, the first isolation part is higher than the second isolation part and surrounds the second isolation part, the cover is movably connected to the first isolation part, and the first isolation part is disposed on the spray component.

[0014] Optionally, the cover has a receiving groove, which is provided to accommodate the first isolation part.

[0015] Optionally, the second isolation portion is disposed on the spray element or the cover.

[0016] Optionally, the first isolation portion is provided in the receiving groove in a dynamic sealing manner.

[0017] Optionally, the spray component is provided with a first isolation groove, and the first isolation part is detachably disposed in the first isolation groove;

[0018] The spray component has a second isolation groove, and the second isolation part is detachably disposed in the second isolation groove.

[0019] Optionally, the bottom of the first isolation part and / or the second isolation part is provided with a positioning post, which passes through the spray hole so that the first isolation part and / or the second isolation part can be detachably provided on the spray component.

[0020] Optionally, both the first isolation portion and the second isolation portion are annular or polygonal annular;

[0021] Alternatively, one of the first isolation portion and the second isolation portion may be annular, and the other may be polygonal annular;

[0022] When the first isolation part or the second isolation part is annular, the positioning posts are evenly distributed at the bottom of the first isolation part or the bottom of the second isolation part.

[0023] When either the first isolation part or the second isolation part is a polygonal ring, the positioning post is located at the corner of the polygonal ring.

[0024] Optionally, the driving device includes:

[0025] A lifting ring, located below the spray element, surrounds the inner wall of the cover to support the spray element;

[0026] The base is located on the inner wall of the cover and forms an air storage cavity with the lifting ring and the cover. The lifting ring, the base, and the cover are dynamically sealed together.

[0027] An air passage extends through the side wall of the cover and communicates with the air storage chamber, allowing gas to enter the air storage chamber via the air passage and pushing the lifting ring to move the spray component closer to or away from the cover.

[0028] Optionally, the base includes:

[0029] An air flotation guide ring is disposed on the inner wall of the cover to form an annular groove with the lifting ring and the cover. The annular groove is used to accommodate the lifting ring, so that the lifting ring, the air flotation guide ring and the cover are dynamically sealed and adapted together.

[0030] An air flotation chamber is located at the bottom of the annular trough;

[0031] The air passage penetrates the side wall of the cover and communicates with the air flotation chamber, allowing gas to enter the air flotation chamber through the air passage, thereby driving the lifting ring to move within the annular groove. Attached Figure Description

[0032] Figure 1 A cross-sectional view of a gas distribution device according to an embodiment of the present utility model, wherein the first isolation part and the second isolation part are both disposed on the spray member and are spaced apart from the top plate;

[0033] Figure 2 This is a schematic diagram of the structure of a spray component in which a first isolation part is sleeved on a second isolation part according to an embodiment of the present utility model;

[0034] Figure 3 An exploded view showing the positions of the first isolation part and the second isolation part relative to the spraying component when the first isolation groove and the second isolation groove are formed on a spraying component according to an embodiment of the present utility model.

[0035] Figure 4 This is a cross-sectional view of the structure of a first isolation part and a second isolation part connected to a spray component via a positioning post, according to an embodiment of the present utility model.

[0036] Figure 5This is a cross-sectional view of the structure of a gas distribution device according to an embodiment of the present invention, in which the first isolation part and the second isolation part divide the diffusion cavity into two gas chambers;

[0037] Figure 6 This is a cross-sectional view of the structure of a gas distribution device according to an embodiment of the present invention, in which the first isolation part and the second isolation part divide the diffusion cavity into three gas chambers;

[0038] Figure 7 for Figure 1 Enlarged view of section A.

[0039] Figure label:

[0040] 100. Cover; 110. Top plate; 111. Receiving groove; 120. Side plate; 200. Spray component; 210. Spray hole; 220. First isolation groove; 230. Second isolation groove; 300. Diffusion chamber; 310. Central air chamber; 320. Middle air chamber; 330. Edge air chamber; 410. First isolation part; 420. Second isolation part; 430. Positioning post; 610. Lifting ring; 620. Base; 621. Air flotation guide ring; 622. Annular groove; 623. Air flotation chamber; 624. Air passage. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0042] The following is in conjunction with the appendix Figure 1-7 The specific embodiments of this utility model will be further described in detail below.

[0043] Embodiments of the present invention provide a gas distribution device for use in semiconductor devices, including but not limited to chemical vapor deposition (CVD) devices and physical vapor deposition (PVD) devices. The chemical vapor deposition device may be a plasma-enhanced chemical vapor deposition (PECVD) device, a metal-organic chemical vapor deposition (MOCVD) device, etc. This embodiment uses an MOCVD device as an example for illustration. It should be understood that this device is merely exemplary, and the present invention is not limited to this type of device.

[0044] Reference Figure 1 The gas distribution device includes:

[0045] The cover is 100mm and is equipped with an air intake.

[0046] A spray element 200 is movably disposed on the cover 100 and includes a plurality of spray holes 210; a diffusion cavity 300 is formed between the spray element 200 and the cover 100, and the diffusion cavity 300 is connected to the air inlet.

[0047] The isolation device is detachably disposed within the diffusion cavity 300 and includes a first isolation part 410 and a second isolation part 420 of different heights that are nested together.

[0048] A drive device is provided on the cover 100 and contacts the bottom of the spray component 200. By controlling the drive device, the spray component 200 is moved so that the number of air chambers formed by the first isolation part 410 and the second isolation part 420 separating the diffusion cavity 300 can be adjusted.

[0049] In some embodiments, refer to Figure 1The top of the cover 100 is provided with multiple air inlets, which are evenly distributed on the cover 100. These air inlets are connected to an external gas supply device, which provides process gas. The process gas enters different positions in the process chamber through different air inlets. More specifically, the cover 100 is connected to the process chamber of the semiconductor device. To evenly disperse the process gas, a spray element 200 is also provided inside the cover 100. The spray element 200 is plate-shaped and has multiple spray holes 210 evenly distributed on it. The spray holes 210 penetrate the spray element 200 along its thickness direction. There is a gap between the end face of the spray element 200 and the cover 100, forming a diffusion cavity 300 between the spray element 200 and the cover 100. The spray holes 210 communicate with the diffusion cavity 300. The process gas from the air inlets enters the diffusion cavity 300, then flows through the spray holes 210 and enters the process chamber.

[0050] In some embodiments, both the first isolation portion 410 and the second isolation portion 420 are annular.

[0051] In some embodiments, the first isolation section 410 is disposed on the second isolation section 420.

[0052] In some embodiments, the second isolation section 420 is disposed on the first isolation section 410.

[0053] In some embodiments, the driving device can drive the spray member 200 to move, thereby causing the first isolation part 410 or the second isolation part 420 to abut against the cover 100, dividing the diffusion cavity 300 into multiple air chambers, so as to adjust the diffusion cavity 300 to different numbers of air chambers.

[0054] The first isolation section 410 is higher than the second isolation section 420 and surrounds the second isolation section 420. The cover 100 is movably connected to the first isolation section 410, and the first isolation section 410 is located on the spray component 200.

[0055] In some specific embodiments, refer to Figure 1 and Figure 2 The first isolation section 410 is higher than the second isolation section 420. Specifically, during the process of the driving device driving the spray component 200 to move, because the first isolation section 410 is higher, when one end of the first isolation section 410 abuts against the end face of the spray component 200 and the other end abuts against the cover 100, there is a gap between the second isolation section 420 and the cover 100, or a gap between the second isolation section 420 and the spray component 200, so that the diffusion cavity 300 is divided into two air chambers.

[0056] To facilitate the continued movement of the first isolation part 410 when it abuts against the cover 100, a receiving groove 111 is provided on the cover 100. The receiving groove 111 is provided to accommodate the first isolation part 410. When the two ends of the second isolation part 420 abut against the spray member 200 and the cover 100 respectively, the first isolation part 410 passes through the receiving groove 111, so that the diffusion chamber 300 is divided into three air chambers. In some specific embodiments, the first isolation part 410 is provided in the receiving groove 111 in a dynamic sealing manner.

[0057] In some embodiments, refer to Figure 1 In order to divide the diffusion cavity 300 into more air chambers, a receiving groove 111 is also provided on the cover 100. The shape and position of the receiving groove 111 correspond to the first isolation part 410. The first isolation part 410 can be inserted into the receiving groove 111 and can continue to move vertically within the receiving groove 111. When one end of the second isolation part 420 abuts against the end face of the spray member 200 and the other end abuts against the cover 100, a part of the first isolation part 410 is placed inside the receiving groove 111 and the other part is placed outside the receiving groove 111. That is, at this time, the diffusion cavity 300 is divided from the inside to the outside into a central air chamber 310, a middle air chamber 320 and an edge air chamber 330. In other words, the diffusion cavity 300 is divided into three air chambers. In some more specific embodiments, the inner diameter of the central air chamber 310 is 8-16 cm, and a 4-6 inch substrate can be placed below it; the middle diameter of the middle air chamber 320 is 12-21 cm, and an 8-inch substrate can be placed below it; the outer diameter of the edge air chambers 330 is 18-31 cm, and a 12-inch substrate can be placed below it. The substrate described in this embodiment can be a silicon substrate, a silicon carbide substrate, etc.

[0058] The second isolation section 420 is provided on the spray unit 200 or the cover 100.

[0059] In some specific embodiments, both the first isolation part 410 and the second isolation part 420 are provided on the spray member 200.

[0060] In some specific embodiments, the first isolation part 410 is provided on the spray member 200, and the second isolation part 420 is provided on the cover 100.

[0061] When the first isolation section 410 is spaced from the cover 100, the diffusion cavity 300 has an air chamber;

[0062] The driving device controls the movement of the spray component 200, causing the first isolation part 410 to pass through the receiving groove 111. The second isolation part 420 is spaced apart from the spray component 200 or the cover 100, so that the diffusion cavity 300 is divided into two air chambers.

[0063] The driving device controls the spray component 200 to move, causing the first isolation part 410 to pass through the receiving groove 111, and the two ends of the second isolation part 420 to abut against the spray component 200 and the cover 100 respectively, so that the diffusion cavity 300 is divided into three air chambers.

[0064] Specifically, refer to Figure 1 , Figure 5 and Figure 6 Since the first isolation part 410 is provided on the spray member 200, when the drive device drives the spray member 200 to move, it can drive the first isolation part 410 to move synchronously with the spray member 200. Taking the first isolation part 410 being sleeved on the second isolation part 420 as an example.

[0065] In some embodiments, when the first isolation portion 410 is spaced from the cover 100, since the first isolation portion 410 is higher than the second isolation portion 420, if the second isolation portion 420 is provided on the spray member 200, then there is a gap between the top of the second isolation portion 420 and the cover 100; if the second isolation portion 420 is provided on the cover 100, then there is a gap between the bottom of the second isolation portion 420 and the spray member 200; thus, the diffusion cavity 300 forms a complete air chamber, that is, at this time the central air chamber 310, the middle air chamber 320 and the edge air chamber 330 together form an air chamber.

[0066] In some embodiments, based on the foregoing, the driving device drives the spray member 200 to move, causing the spray member 200 to move toward the cover 100 until the end of the first isolation part 410 passes through the receiving groove 111 on the cover 100; at this time, if the second isolation part 420 is provided on the spray member 200, there is a gap between the top of the second isolation part 420 and the cover 100; if the second isolation part 420 is provided on the cover 100, there is a gap between the bottom of the second isolation part 420 and the spray member 200; thus the diffusion cavity 300 is divided into two air chambers, that is, at this time the central air chamber 310 and the middle air chamber 320 together form one air chamber, and the edge air chamber 330 independently forms one air chamber.

[0067] In some embodiments, based on the foregoing, the driving device continues to drive the spray member 200 to move, causing the spray member 200 to move toward the cover 100 until the two ends of the second isolation part 420 abut against the spray member 200 and the cover 100 respectively. At this time, the first isolation part 410 remains inserted in the receiving groove 111, so that the diffusion cavity 300 is divided into three air chambers, that is, at this time the central air chamber 310 independently forms an air chamber, the middle air chamber 320 independently forms an air chamber, and the edge air chamber 330 independently forms an air chamber.

[0068] When the first isolation part 410 and the second isolation part 420 are both detachably provided on the spray member 200, the spray member 200 is provided with a first isolation groove 220, which is used to pass through the first isolation part 410 so that the first isolation part 410 is detachably provided on the spray member 200.

[0069] The spray component 200 is provided with a second isolation groove 230, which is used to pass through the second isolation part 420 so that the second isolation part 420 is detachably provided on the spray component 200.

[0070] In some embodiments, refer to Figure 3 The spray element 200 has a first isolation groove 220 and a second isolation groove 230 on its end face. The first isolation groove 220 is adapted to the first isolation part 410 and is used to pass through the first isolation part 410, thereby engaging the first isolation part 410 with the end face of the spray element 200, so that the first isolation part 410 is detachably mounted on the spray element 200. The second isolation groove 230 is adapted to the second isolation part 420 and is used to pass through the second isolation part 420, thereby engaging the second isolation part 420 with the end face of the spray element 200, so that the second isolation part 420 is detachably mounted on the spray element 200.

[0071] It is worth noting that the first isolation groove 220 and the second isolation groove 230 can both be formed on the end face of the spray member 200, or they can be selectively formed depending on whether the first isolation part 410 or the second isolation part 420 is installed on the spray member 200. There are no restrictions here, as long as the first isolation part 410 and the second isolation part 420 can separate the gas chambers within the diffusion cavity 300.

[0072] In some specific embodiments, the first isolation groove 220 and the second isolation groove 230 are both semi-through grooves, that is, neither the first isolation groove 220 nor the second isolation groove 230 penetrates the spray member 200.

[0073] The bottom of the first isolation part 410 and / or the second isolation part 420 is provided with a positioning post 430, which passes through the spray hole 210 so that the first isolation part 410 and / or the second isolation part 420 are detachably provided on the spray member 200.

[0074] In some embodiments, refer to Figure 4In addition to having a first isolation groove 220 and a second isolation groove 230, a positioning post 430 can also be fixedly provided at the bottom of the first isolation part 410 or the second isolation part 420, so that the first isolation part 410 or the second isolation part 420 can be detachably provided to the spray member 200. The positioning post 430 can be fixed by bolts or integrally formed, etc., without limitation, as long as the positioning post 430 and the first isolation part 410 or the second isolation part 420 do not separate. Specifically, the positioning post 430 is used to pass through the spray hole 210, thereby detachably connecting the first isolation part 410 or the second isolation part 420 to the spray member 200. More specifically, multiple positioning posts 430 are provided, and the multiple positioning posts 430 are evenly distributed at the bottom of the first isolation part 410 or the second isolation part 420.

[0075] In some embodiments, only the bottom of the first isolation section 410 is provided with a positioning post 430.

[0076] In some embodiments, only the bottom of the second isolation section 420 is provided with a positioning post 430.

[0077] In some embodiments, positioning posts 430 are provided at the bottom of both the first isolation portion 410 and the second isolation portion 420.

[0078] In some specific embodiments, both the first isolation portion 410 and the second isolation portion 420 are annular.

[0079] In some specific embodiments, both the first isolation portion 410 and the second isolation portion 420 are polygonal rings.

[0080] In some specific embodiments, one of the first isolation portion 410 and the second isolation portion 420 is annular, and the other is polygonal annular.

[0081] To facilitate the placement of the positioning posts 430, when the first isolation portion 410 or the second isolation portion 420 is annular, the positioning posts 430 are evenly distributed at the bottom of the first isolation portion 410 and the bottom of the second isolation portion 420, so as to facilitate the connection between the first isolation portion 410 or the second isolation portion 420 and the spray element 200. When both the first isolation portion 410 and the second isolation portion 420 are polygonal annular, the positioning posts 430 are located at the corners of the polygonal annular shapes.

[0082] In some embodiments, after the positioning post 430 is detachably disposed on the spray hole 210, the exposed surfaces of the first isolation portion 410 or the second isolation portion 420 facing the spray member 200, excluding the positioning post 430, are in contact with the spray member 200 to ensure airtightness. The detachable arrangement between the positioning post 430 and the spray hole 210 needs to ensure airtightness between them, for example, the outer diameter of the positioning post 430 is adapted to the diameter of the spray hole 210.

[0083] In some specific embodiments, the positioning post 430 is detachably disposed in the corresponding spray hole 210 and its bottom is housed in the spray hole 210, that is, the positioning post 430 does not extend into the process cavity, so as to reduce the interference to the airflow passing through the spray hole 210.

[0084] In some embodiments, refer to Figure 1 and Figure 7 In order for the drive device to drive the spray element 200 to move, the drive device includes:

[0085] The lifting ring 610 is located below the spray component 200 and is arranged around the inner side wall of the cover 100 to support the spray component 200.

[0086] The base 620 is located on the inner wall of the cover 100 and forms an air storage cavity with the lifting ring 610 and the cover 100. The lifting ring 610, the base 620, and the cover 100 are dynamically sealed and adapted together.

[0087] The air passage 624 penetrates the side wall of the cover 100 and communicates with the air storage chamber, allowing gas to enter the air storage chamber through the air passage 624 and push the lifting ring 610 to move the spray component 200 closer to or away from the cover 100.

[0088] The outer wall of the lifting ring 610 can contact the side wall of the cover 100, or there can be a gap between them; this is not limited, as long as the lifting ring 610 can drive the spray component 200 to move. In addition, the lifting ring 610 also provides support for the spray component 200.

[0089] More specifically, the base 620 supports the lifting ring 610 and simultaneously drives its movement. An air storage chamber is formed around the base 620, the lifting ring 610, and the cover 100. This chamber can hold gas, and a dynamic seal is used between the lifting ring 610, the base 620, and the cover 100 to prevent gas leakage from the air storage chamber from affecting the processing. The dynamic sealing method is existing technology and will not be described in detail here.

[0090] During the process of controlling the movement of the lifting ring 610, gas is first introduced into the air passage 624 through an external air supply device. Since the air passage 624 penetrates the side wall of the cover 100 and is connected to the air storage chamber, the gas can enter the air storage chamber through the air passage 624. At the same time, since the lifting ring 610, the base 620 and the cover 100 are dynamically sealed, when the volume of gas in the air storage chamber increases, it will push the lifting ring 610 to move, thereby driving the spray component 200 to move.

[0091] In some embodiments, the base 620 includes:

[0092] An air flotation guide ring 621 is provided on the inner wall of the cover 100 to form an annular groove 622 with the lifting ring 610 and the cover 100. The annular groove 622 is used to accommodate the lifting ring 610, so that the lifting ring 610, the air flotation guide ring 621 and the cover 100 are dynamically sealed and adapted.

[0093] The air flotation chamber 623 is located at the bottom of the annular groove 622;

[0094] The air passage 624 penetrates the side wall of the cover 100 and is connected to the air flotation chamber 623, so that the gas enters the air flotation chamber 623 after passing through the air passage 624, thereby driving the lifting ring 610 to move in the annular groove 622.

[0095] In some specific embodiments, the annular groove 622 may be formed on the upper end face of the air flotation guide ring 621, or it may be formed around the side wall of the lifting ring 610 and the cover 100. The lifting ring 610 passes through the annular groove 622 and can move vertically within the annular groove 622 to drive the spray component 200 to move. An air flotation chamber 623 is also provided at the bottom of the annular groove 622. Gas is introduced into the air flotation chamber 623. After the gas enters the base 620, it is first pressurized in the air flotation chamber 623, and then pushes the lifting ring 610 up and down to drive the spray component 200 to move.

[0096] In some more specific embodiments, an air passage 624 is provided through the side wall of the cover 100, and the air passage 624 is connected to the air flotation chamber 623, so that external gas can enter the air flotation chamber 623 through the air passage 624, so as to drive the lifting ring 610 to move, thereby driving the spray component 200 to move closer to or away from the cover 100.

[0097] In some embodiments, the air passage 624 is provided with a pipe that is connected to the air flotation chamber 623 so that external gas can enter the air flotation chamber 623.

[0098] In some embodiments, the top of the air flotation chamber 623 is provided with a plurality of through holes so that the interior of the air flotation chamber 623 is connected to the annular groove 622. After gas is introduced into the air flotation chamber 623, the gas enters the annular groove 622 through the through holes and forms an air cushion at the bottom of the lifting ring 610, so as to drive the lifting ring 610 to move closer to or away from the spray member 200 in the vertical direction.

[0099] The implementation principle of the gas distribution device in this application embodiment is as follows: Since both the first isolation part 410 and the second isolation part 420 are detachably disposed within the diffusion cavity 300, the size of the corresponding gas chamber can be adjusted by disassembling or installing the first isolation part 410 and the second isolation part 420, thereby achieving multi-zone coupling, suitable for epitaxial growth of large-size substrates of 6 inches and above. Furthermore, this configuration allows for the epitaxial growth of multiple substrates of different sizes using the same spray head, resulting in high compatibility. In addition, by driving the device and controlling the movement of the spray element 200, the first isolation part 410, and the second isolation part 420, the gas chamber can be flexibly changed to one, two, or three. The first isolation part 410 or the second isolation part 420 can be flexibly matched to the growth of substrates of different sizes without opening the cavity, thus improving equipment utilization.

[0100] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A gas distribution device, characterized in that, include: The cover (100) is provided with an air intake; A spray element (200) is movably disposed on the cover (100) and includes a plurality of spray holes (210); a diffusion cavity (300) is formed between the spray element (200) and the cover (100), and the diffusion cavity (300) is connected to the air inlet; The isolation device is detachably disposed in the diffusion cavity (300) and includes a first isolation part (410) and a second isolation part (420) of different heights and nested together. A driving device is provided on the cover (100) and contacts the bottom of the spray member (200) so that the spray member (200) can be moved by controlling the driving device, so that the number of air chambers formed by the first isolation part (410) and the second isolation part (420) separating the diffusion cavity (300) can be adjusted.

2. The gas distribution device according to claim 1, characterized in that, The first isolation part (410) is higher than the second isolation part (420) and surrounds the second isolation part (420). The cover (100) is movably connected to the first isolation part (410). The first isolation part (410) is located on the spray member (200).

3. The gas distribution device according to claim 2, characterized in that, The cover (100) has a receiving groove (111), which is provided to accommodate the first isolation part (410).

4. The gas distribution device according to claim 2, characterized in that, The second isolation part (420) is provided on the spray member (200) or the cover (100).

5. The gas distribution device according to claim 3, characterized in that, The first isolation part (410) is provided in the receiving groove (111) in a dynamic sealing manner.

6. The gas distribution device according to claim 1, characterized in that, The spray component (200) is provided with a first isolation groove (220), and the first isolation part (410) is detachably provided in the first isolation groove (220); The spray component (200) is provided with a second isolation groove (230), and the second isolation part (420) is detachably provided in the second isolation groove (230).

7. The gas distribution device according to claim 1, characterized in that, The bottom of the first isolation part (410) and / or the second isolation part (420) is provided with a positioning post (430), which passes through the spray hole (210) so that the first isolation part (410) and / or the second isolation part (420) are detachably provided on the spray member (200).

8. The gas distribution device according to claim 7, characterized in that, Both the first isolation portion (410) and the second isolation portion (420) are annular or polygonal annular; Alternatively, one of the first isolation portion (410) and the second isolation portion (420) may be annular, and the other may be polygonal annular; When the first isolation part (410) or the second isolation part (420) is annular, the positioning posts (430) are evenly distributed at the bottom of the first isolation part (410) or the bottom of the second isolation part (420); When the first isolation part (410) or the second isolation part (420) is a polygonal ring, the positioning post (430) is located at the corner of the polygonal ring.

9. The gas distribution device according to claim 1, characterized in that, The driving device includes: A lifting ring (610) is located below the spray element (200) and surrounds the inner side wall of the cover (100) to support the spray element (200); The base (620) is located on the inner wall of the cover (100) and forms an air storage cavity with the lifting ring (610) and the cover (100). The lifting ring (610), the base (620) and the cover (100) are dynamically sealed and adapted together. An air passage (624) penetrates the side wall of the cover (100) and communicates with the air storage chamber, allowing gas to enter the air storage chamber through the air passage (624) and push the lifting ring (610) to move the spray element (200) closer to or away from the cover (100).

10. The gas distribution device according to claim 9, characterized in that, The base (620) includes: An air flotation guide ring (621) is disposed on the inner wall of the cover (100) to form an annular groove (622) with the lifting ring (610) and the cover (100). The annular groove (622) is used to accommodate the lifting ring (610) so that the lifting ring (610), the air flotation guide ring (621), and the cover (100) are dynamically sealed and adapted together. An air flotation chamber (623) is located at the bottom of the annular groove (622); The air passage (624) penetrates the side wall of the cover (100) and communicates with the air flotation chamber (623), so that gas enters the air flotation chamber (623) after passing through the air passage (624) to push the lifting ring (610) to move in the annular groove (622).

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