A drive bearing mechanism

Abstract

The utility model relates to technical field of semiconductor equipment especially is a kind of drive bearing mechanism, including mounting bracket, sliding member that slides up and down is connected in mounting bracket, first drive unit is installed in sliding member, second drive unit is installed in sliding member, with the first rotation axis of first drive unit drive connection and with the second rotation axis of second drive unit drive connection, the second rotation axis coaxially is arranged in first rotation axis, the first drive unit is located above second drive unit, the first drive unit drives first rotation axis rotation, the second drive unit drives second rotation axis rotation;The utility model can eliminate the axial deviation between first rotation axis and second rotation axis, prevent manipulator end effector vibration or shaking, facilitate stable wafer to grab, improve process yield.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a drive support mechanism. Background Technology

[0002] In semiconductor manufacturing, the outer and inner axes of a robotic arm are the core components of the wafer transport system. Their collaborative work enables high-precision and high-efficiency wafer transport in complex production environments. In a vacuum clean environment, the outer and inner axes move simultaneously. Through unlubricated bearings and low-gas release materials, the dual-axis design can operate stably in vacuum or ultra-high cleanliness environments, effectively shortening the wafer transport cycle and meeting wafer transport requirements.

[0003] However, due to the axial offset between the outer and inner axes, the end effector of the robot vibrates or shakes, resulting in uneven force during wafer gripping and affecting process yield. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a drive-bearing mechanism that can eliminate axial misalignment between the first and second rotating shafts, prevent vibration or shaking of the robot's end effector, facilitate stable wafer gripping, and improve process yield.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a drive bearing mechanism, including a mounting frame, a sliding member slidably connected to the mounting frame, a first drive unit mounted on the sliding member, a second drive unit mounted on the sliding member, a first rotating shaft drivenly connected to the first drive unit, and a second rotating shaft drivenly connected to the second drive unit. The second rotating shaft is coaxially inserted through the first rotating shaft. The first drive unit is located above the second drive unit. The first drive unit drives the first rotating shaft to rotate, and the second drive unit drives the second rotating shaft to rotate.

[0007] When the sliding component slides up and down along the mounting bracket, it drives the first drive unit and the second drive unit to slide synchronously, thereby eliminating the axial offset between the first rotating shaft and the second rotating shaft.

[0008] The output of the first drive unit is connected to a calibration component, which is connected to the first rotating shaft.

[0009] When the first rotating shaft needs to be rotated, the first driving unit drives the calibration component to rotate, and the calibration component causes the first rotating shaft to rotate around the axis of the second rotating shaft so that the first rotating shaft and the second rotating shaft are coaxially aligned.

[0010] The second rotating shaft passes through the first driving unit. The sliding component includes a sliding frame that slides up and down on the mounting frame, an upper support frame and a lower support frame connected to the sliding frame. The upper support frame and the lower support frame are connected. The first driving unit is installed on the upper support frame, and the second driving unit is installed on the lower support frame.

[0011] The upper support frame is provided with a first limiting part, the lower support frame is provided with a second limiting part, and the sliding frame is provided with a limiting cavity. The first limiting part and the second limiting part are spliced ​​together, and the first limiting part and the second limiting part are inserted into the limiting cavity as a whole.

[0012] The mounting bracket is equipped with a slide rail, and a first slider and a second slider are respectively installed at the upper and lower ends of the slide bracket. The first slider and the second slider slide up and down on the slide rail, and the first limiting part and the second limiting part are both located between the first slider and the second slider.

[0013] The upper support frame is provided with a first wiring port, and the lower support frame is provided with a second wiring port. The opening ends of the first wiring port and the second wiring port face the same side of the mounting frame.

[0014] The calibration assembly includes a calibration sleeve and several elastic members connected to the calibration sleeve. The elastic members are circumferentially distributed on the outside of the calibration sleeve. The calibration sleeve is connected to a first rotating shaft, and the elastic members are driven by a first driving unit.

[0015] When the elastic member is subjected to an instantaneous impact, the flexible deformation of the elastic member allows the first drive unit to undergo a small displacement, avoiding the rigid collision between the first drive unit and the first rotating shaft, which would cause permanent displacement of the first rotating shaft. This facilitates the first drive unit to stably drive the first rotating shaft to rotate around the axis of the second rotating shaft.

[0016] The beneficial effects of this utility model are:

[0017] In practical applications, the sliding component slides up and down along the mounting bracket, driving the first drive unit and the second drive unit to slide synchronously, thereby eliminating the axial offset between the first and second rotating shafts, preventing vibration or shaking of the robot's end effector, facilitating stable wafer gripping, and improving process yield. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the drive bearing mechanism.

[0019] Figure 2 This is a structural cross-sectional view of the drive bearing mechanism.

[0020] Figure 3 Explosion of the drive bearing mechanism Figure 1 .

[0021] Figure 4 Explosion of the drive bearing mechanism Figure 2 .

[0022] Figure 5 Exploded view of the installation structure for the calibration components.

[0023] 1. Mounting bracket; 11. Slide rail; 2. Sliding component;

[0024] 21. Sliding frame; 211. Limiting cavity; 212. First slider; 213. Second slider;

[0025] 22. Upper support frame; 221. First limiting part; 222. First wiring port;

[0026] 23. Lower support frame; 231. Second limiting part; 232. Second wiring port;

[0027] 3. First drive unit; 4. Second drive unit;

[0028] 5. First rotating shaft; 6. Second rotating shaft;

[0029] 7. Calibration components; 71. Calibration sleeve; 72. Elastic member. Detailed Implementation

[0030] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0031] refer to Figures 1 to 5 As shown, this utility model provides a drive bearing mechanism, including a mounting frame 1, a sliding member 2 slidably connected to the mounting frame 1, a first drive unit 3 mounted on the sliding member 2, a second drive unit 4 mounted on the sliding member 2, a first rotating shaft 5 drivenly connected to the first drive unit 3, and a second rotating shaft 6 drivenly connected to the second drive unit 4. The second rotating shaft 6 is coaxially inserted through the first rotating shaft 5. The first drive unit 3 is located above the second drive unit 4. The first drive unit 3 drives the first rotating shaft 5 to rotate, and the second drive unit 4 drives the second rotating shaft 6 to rotate.

[0032] refer to Figure 1 , 2As shown, in practical applications, the first rotating shaft 5 and the second rotating shaft 6 are respectively connected to the corresponding robotic arms to ensure normal operation of the robotic arms. The first drive unit 3 uses a hollow harmonic servo motor, and the second drive unit 4 uses a harmonic motor. A lifting mechanism, such as a cylinder, hydraulic cylinder, or lead screw motor module, is installed at the bottom of the mounting frame 1. The lifting mechanism is connected to the sliding component 2 to satisfy the up-and-down movement of the sliding component 2 and accurately position the movement. In order to accurately detect the movement position, corresponding photoelectric switches, such as slotted photoelectric switches, can be installed at both ends of the stroke of the mounting frame 1 or at important positions to facilitate accurate monitoring of the movement position of the sliding component 2. The first drive unit 3 and the second drive unit 4 drive the first rotating shaft 5 and the second rotating shaft 6 to rotate, thus smoothly satisfying the rotation requirements of the first rotating shaft 5 and the second rotating shaft 6. When the sliding component 2 slides up and down along the mounting frame 1, it drives the first drive unit 3 and the second drive unit 4 to slide synchronously, thereby eliminating the axial offset between the first rotating shaft 5 and the second rotating shaft 6, preventing vibration or shaking of the robotic arm end effector, facilitating stable wafer gripping, and improving process yield.

[0033] refer to Figure 2 , 5 As shown, in this embodiment, the output end of the first drive unit 3 is connected to a calibration component 7, which is connected to the first rotating shaft 5. In actual application, when the first rotating shaft 5 needs to be rotated, the first drive unit 3 drives the calibration component 7 to rotate. The calibration component 7 causes the first rotating shaft 5 to rotate around the axis of the second rotating shaft 6, so that the first rotating shaft 5 and the second rotating shaft 6 are coaxially corresponding, ensuring the repeatability of the robot's positioning accuracy and facilitating the precise transfer of the wafer.

[0034] refer to Figure 2 , 3 As shown, in this embodiment, the second rotating shaft 6 passes through the first drive unit 3. The sliding component 2 includes a sliding frame 21 that slides vertically on the mounting frame 1, an upper support frame 22 and a lower support frame 23 connected to the sliding frame 21. The upper support frame 22 and the lower support frame 23 are connected. The first drive unit 3 is installed on the upper support frame 22, and the second drive unit 4 is installed on the lower support frame 23. The installation positions of the first drive unit 3 and the second drive unit 4 are arranged longitudinally, saving lateral space and resulting in a compact structure. The upper support frame 22 and the lower support frame 23 are bolted together, facilitating quick installation or removal of the upper support frame 22 and the lower support frame 23. The first drive unit 3 and the second drive unit 4 are installed on the sliding frame 21 in a relatively fixed manner, eliminating axial offset between the first rotating shaft 5 and the second rotating shaft 6 and preventing vibration or shaking of the robot arm.

[0035] refer to Figure 2 , 4As shown, in this embodiment, the upper support frame 22 is provided with a first limiting part 221, the lower support frame 23 is provided with a second limiting part 231, and the sliding frame 21 is provided with a limiting cavity 211. The first limiting part 221 and the second limiting part 231 are spliced ​​together, and the first limiting part 221 and the second limiting part 231 are inserted into the limiting cavity 211 in an overall fit, so as to accurately position the upper support frame 22 and the lower support frame 23 and facilitate the elimination of the axial gap between the upper support frame 22 and the lower support frame 23.

[0036] refer to Figure 3 , 4 As shown, in this embodiment, the mounting bracket 1 is equipped with a slide rail 11, and the upper and lower ends of the sliding bracket 21 are respectively equipped with a first slider 212 and a second slider 213. The first slider 212 and the second slider 213 slide up and down on the slide rail 11. The first limiting part 221 and the second limiting part 231 are both located between the first slider 212 and the second slider 213. The structure is compact and saves space. In actual application, the sliding bracket 21 slides up and down along the slide rail 11 through the first slider 212 and the second slider 213, which facilitates the smooth movement of the sliding bracket 21.

[0037] refer to Figure 3 As shown, in this embodiment, the upper support frame 22 is provided with a first wiring port 222, and the lower support frame 23 is provided with a second wiring port 232. The opening ends of the first wiring port 222 and the second wiring port 232 face the same side of the mounting frame 1. In actual application, the relevant cables for the installation of the first drive unit 3 and the second drive unit 4 are passed through the first wiring port 222 and the second wiring port 232 respectively. The wiring path is scientifically planned to maximize the space utilization. Electromagnetic interference is effectively avoided through physical isolation. Through modular structural design, while ensuring the stability of signal transmission, an expandable maintenance window is reserved for subsequent equipment maintenance, which is in line with the intelligent wiring standard of industrial-grade drive systems.

[0038] refer to Figure 2 , 5As shown, in this embodiment, the calibration component 7 includes a calibration sleeve 71 and several elastic members 72 connected to the calibration sleeve 71. The elastic members 72 are circumferentially distributed on the outside of the calibration sleeve 71. The calibration sleeve 71 is connected to the first rotating shaft 5, and the elastic members 72 are driven by the first driving unit 3. In practical applications, when the elastic member 72 is subjected to an instantaneous impact, the flexible deformation of the elastic member 72 allows the first driving unit 3 to undergo a small displacement, avoiding the rigid collision between the first driving unit 3 and the first rotating shaft 5, which would cause permanent displacement of the first rotating shaft 5. This facilitates the first driving unit 3 to stably drive the first rotating shaft 5 to rotate around the axis of the second rotating shaft 6. While maintaining transmission accuracy, it provides the first rotating shaft 5 with adaptive deflection space, effectively preventing structural damage and ensuring the nanometer-level synchronization accuracy of the dual-axis system under dynamic loads.

[0039] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A drive-bearing mechanism, characterized in that, It includes a mounting bracket (1), a sliding member (2) slidably connected to the mounting bracket (1), a first drive unit (3) mounted on the sliding member (2), a second drive unit (4) mounted on the sliding member (2), a first rotating shaft (5) driven by the first drive unit (3), and a second rotating shaft (6) driven by the second drive unit (4). The second rotating shaft (6) is coaxially inserted through the first rotating shaft (5). The first drive unit (3) is located above the second drive unit (4). The first drive unit (3) drives the first rotating shaft (5) to rotate, and the second drive unit (4) drives the second rotating shaft (6) to rotate. When the sliding member (2) slides up and down along the mounting bracket (1), it drives the first drive unit (3) and the second drive unit (4) to slide synchronously, thereby eliminating the axial offset between the first rotating shaft (5) and the second rotating shaft (6).

2. The drive bearing mechanism according to claim 1, characterized in that, The output end of the first drive unit (3) is connected to a calibration component (7), which is connected to the first rotating shaft (5); When the first rotating shaft (5) needs to be rotated, the first driving unit (3) drives the calibration component (7) to rotate. The calibration component (7) causes the first rotating shaft (5) to rotate around the axis of the second rotating shaft (6) so that the first rotating shaft (5) and the second rotating shaft (6) are coaxially corresponding.

3. The drive bearing mechanism according to claim 1, characterized in that, The second rotating shaft (6) passes through the first driving unit (3). The sliding component (2) includes a sliding frame (21) that slides up and down on the mounting frame (1), an upper support frame (22) and a lower support frame (23) connected to the sliding frame (21). The upper support frame (22) and the lower support frame (23) are connected. The first driving unit (3) is installed on the upper support frame (22), and the second driving unit (4) is installed on the lower support frame (23).

4. The drive bearing mechanism according to claim 3, characterized in that, The upper support frame (22) is provided with a first limiting part (221), the lower support frame (23) is provided with a second limiting part (231), and the sliding frame (21) is provided with a limiting cavity (211). The first limiting part (221) and the second limiting part (231) are spliced ​​together, and the first limiting part (221) and the second limiting part (231) are inserted into the limiting cavity (211) as a whole.

5. The drive bearing mechanism according to claim 4, characterized in that, The mounting bracket (1) is equipped with a slide rail (11). The upper and lower ends of the slide bracket (21) are respectively equipped with a first slider (212) and a second slider (213). The first slider (212) and the second slider (213) slide up and down on the slide rail (11). The first limiting part (221) and the second limiting part (231) are both located between the first slider (212) and the second slider (213).

6. The drive bearing mechanism according to claim 3, characterized in that, The upper support frame (22) is provided with a first wiring port (222), and the lower support frame (23) is provided with a second wiring port (232). The opening ends of the first wiring port (222) and the second wiring port (232) face the same side of the mounting frame (1).

7. The drive bearing mechanism according to claim 2, characterized in that, The calibration component (7) includes a calibration sleeve (71) and a plurality of elastic members (72) connected to the calibration sleeve (71). The elastic members (72) are circumferentially distributed on the outside of the calibration sleeve (71). The calibration sleeve (71) is connected to the first rotating shaft (5). The elastic members (72) are driven to the first driving unit (3). When the elastic member (72) is subjected to an instantaneous impact, the flexible deformation of the elastic member (72) allows the first driving unit (3) to undergo a small displacement, avoiding the rigid collision between the first driving unit (3) and the first rotating shaft (5) which would cause permanent displacement of the first rotating shaft (5), and facilitating the first driving unit (3) to stably drive the first rotating shaft (5) to rotate around the axis of the second rotating shaft (6).

Images