An automatic ash-cleaning multi-stage combustion reaction chamber device

Abstract

An automatic ash-cleaning multi-stage combustion reaction chamber device includes a pyrolysis chamber, a combustion chamber, and a reaction chamber support connected sequentially from top to bottom. The pyrolysis chamber is externally connected to an air inlet pipe. The combustion chamber has a cooling nozzle at its bottom and a flare mounting port at its top. This automatic ash-cleaning multi-stage combustion reaction chamber device, through two-stage gas distribution and segmented combustion, as well as a water curtain formed on the inner wall of the combustion chamber by swirling water, can suppress pressure fluctuations within the reaction chamber when treating large volumes of waste gas. Furthermore, a cylinder-driven scraper periodically moves up and down to clean the deposits on the inner wall of the pyrolysis chamber, extending the maintenance cycle of the reaction chamber.

Description

Technical Field

[0001] This utility model relates to the technical field of semiconductor waste gas treatment devices, and in particular to an automatic ash-cleaning multi-stage combustion reaction chamber device. Background Technology

[0002] In the production processes of the semiconductor industry (semiconductors, panels, solar energy, LEDs), fluorides, chlorides, hydrides, silicides, as well as flammable, explosive, and general harmful gases are generated. These special gases are generally treated by using plasma torches, combustion guns, or electric heating rods to provide heat sources for pyrolysis or combustion. Some waste gases can also be removed by hydrolysis when they come into contact with water.

[0003] For these special gases that can be removed through pyrolysis and combustion, pyrolysis and combustion must be carried out within a reaction chamber. The removal efficiency is closely related to the design of the reaction chamber. During the treatment of special gases within the reaction chamber, the inner wall of the chamber is prone to blockage due to dust generated during combustion, leading to short maintenance cycles. An unreasonable distribution ratio and location of compressed air within the reaction chamber results in low waste gas treatment efficiency and the generation of large amounts of NOx. When the volume of waste gas treated within the reaction chamber fluctuates significantly, the treatment efficiency is low and the large internal pressure fluctuations affect the main upstream equipment, especially when there is no vacuum equipment at the front end. In severe cases, this can damage the main upstream equipment and cause production shutdowns. Utility Model Content

[0004] The technical problem to be solved by this utility model is: in order to solve the problems of low waste gas treatment efficiency and short maintenance cycle in the prior art, this utility model provides an automatic ash removal multi-stage combustion reaction chamber device.

[0005] The technical solution adopted by this utility model to solve its technical problem is: an automatic ash-cleaning multi-stage combustion reaction chamber device, including a pyrolysis chamber, a combustion chamber and a reaction chamber support connected sequentially from top to bottom; the pyrolysis chamber is externally connected to a pyrolysis chamber air inlet pipe, the bottom of the combustion chamber is provided with a combustion chamber cooling nozzle, and the top of the pyrolysis chamber is provided with a torch mounting port.

[0006] Furthermore, the outer wall of the pyrolysis chamber is provided with a water-cooled wall, and the pyrolysis chamber is provided with a pneumatic scraper for scraping off the dust adhering to the inner wall of the pyrolysis chamber. By periodically switching the pneumatic scraper on and off, the dust adhering to the inner wall of the pyrolysis chamber generated by pyrolysis is scraped off, thereby increasing the maintenance cycle of the reaction chamber to more than 60 days.

[0007] Furthermore, the pneumatic scraper includes a scraper body and a scraper cylinder connected to the scraper body, wherein the scraper body is driven by the scraper cylinder to move up and down along the pyrolysis chamber.

[0008] Furthermore, the upper part of the combustion chamber is provided with a primary combustion chamber air distribution nozzle, the middle part is provided with a secondary combustion chamber air distribution nozzle, the outer wall of the combustion chamber is provided with a combustion chamber water-cooled wall, and the combustion chamber is provided with a combustion chamber swirling water jacket for cleaning the inner wall of the combustion chamber. The water-cooled wall can control the outer wall temperature of the combustion chamber to be below 35°C.

[0009] Furthermore, the bottom side of the combustion chamber is provided with a water inlet. Circulating water enters through the water inlet and forms a swirling water film on the inner wall of the combustion chamber through the swirling water jacket. This swirling water film washes over the inner wall of the combustion chamber, which can both clean the dust attached to it and suppress pressure fluctuations in the reaction chamber.

[0010] Furthermore, both the primary and secondary gas distribution nozzles in the combustion chamber are fan-shaped gas distribution nozzles; the fan-shaped gas distribution nozzles can evenly cover the cross-section, with each layer covering up to 200%, enabling thorough mixing with the exhaust gas and ensuring high removal efficiency.

[0011] Furthermore, the pyrolysis chamber and combustion chamber are both made of stainless steel with a high-temperature HF-resistant coating or C276 material.

[0012] The beneficial effects of this utility model are:

[0013] The automatic ash-cleaning multi-stage combustion reaction chamber device described in this utility model can suppress pressure fluctuations in the reaction chamber when treating large volumes of waste gas by using two-stage gas distribution and segmented combustion, as well as a water curtain formed by swirling water on the inner wall of the combustion chamber. Furthermore, the cylinder drives the scraper to move up and down periodically to clean the deposits on the inner wall of the pyrolysis chamber, thus extending the maintenance cycle of the reaction chamber. Attached Figure Description

[0014] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0015] Figure 1 This is a schematic diagram of the automatic ash-removing multi-stage combustion reaction chamber device according to a preferred embodiment of the present invention;

[0016] Figure 2 This is a schematic diagram of the structure of the automatic ash-removing multi-stage combustion reaction chamber according to a preferred embodiment of the present invention;

[0017] Figure 3 This is a schematic diagram of the pyrolysis chamber according to a preferred embodiment of the present invention;

[0018] Figure 4 This is a schematic diagram of the combustion chamber according to a preferred embodiment of the present invention;

[0019] In the diagram, 1. Pyrolysis chamber, 2. Combustion chamber, 3. Reaction chamber support, 4. Pyrolysis chamber air inlet pipe, 5. Combustion chamber cooling nozzle, 6. Flame mounting port, 7. Pyrolysis chamber water-cooled wall, 8. Pneumatic scraper, 81. Scraper body, 82. Scraper cylinder, 9. Combustion chamber primary air distribution nozzle, 10. Combustion chamber secondary air distribution nozzle, 11. Combustion chamber water-cooled wall, 12. Combustion chamber swirling water jacket, 13. Water inlet. Detailed Implementation

[0020] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0021] In the description of this utility model, it should be understood that the terms "upper", "lower", "horizontal", "top", "inner", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the present invention.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] like Figure 1-4 As shown, an automatic ash-cleaning multi-stage combustion reaction chamber device includes a pyrolysis chamber 1, a combustion chamber 2, and a reaction chamber support 3 connected sequentially from top to bottom. The pyrolysis chamber 1 is externally connected to a pyrolysis chamber inlet pipe 4. The bottom of the combustion chamber 2 is provided with a combustion chamber cooling nozzle 5, and the top of the pyrolysis chamber 1 is provided with a torch mounting port 6. The torch mounting port 6 is located at the top of the pyrolysis chamber 1, which can pyrolyze easily pyrolyzed waste gas before it enters the combustion chamber 2 for combustion, thereby improving the treatment efficiency.

[0024] The pyrolysis chamber 1 is equipped with a water-cooled wall 7 on its outer wall. A pneumatic scraper 8 is installed inside the pyrolysis chamber 1 to scrape away dust adhering to its inner wall. By periodically switching the pneumatic scraper 8 on and off, the dust generated during pyrolysis and adhering to the inner wall of the pyrolysis chamber 1 is scraped away, increasing the maintenance cycle of the reaction chamber to over 60 days. The pneumatic scraper 8 includes a scraper body 81 and a scraper cylinder 82 connected to the scraper body 81. The scraper body 81 is driven by the scraper cylinder 82 to move up and down along the pyrolysis chamber 1.

[0025] The combustion chamber 2 is equipped with a primary air distribution nozzle 9 at its upper part and a secondary air distribution nozzle 10 in its middle part. A water-cooled wall 11 is installed inside the outer wall of the combustion chamber 2, and a swirling water jacket 12 is provided inside the combustion chamber 2 for cleaning the inner wall. The water-cooled wall helps control the temperature of the outer wall of the combustion chamber 2 to be below 35°C. A water inlet 13 is located at the bottom of the combustion chamber 2. Circulating water enters through the water inlet 13 and passes through the swirling water jacket 12, forming a swirling water film on the inner wall to flush the inner wall of the combustion chamber 2. This swirling water film flushes the inner wall of the combustion chamber 2, cleaning dust adhering to it and suppressing pressure fluctuations within the reaction chamber.

[0026] Both the primary gas distribution nozzle 9 and the secondary gas distribution nozzle 10 in the combustion chamber are fan-shaped nozzles. These fan-shaped nozzles can evenly cover the cross-section, with each layer achieving a coverage area of ​​200%, ensuring thorough mixing with the exhaust gas and guaranteeing high removal efficiency. The pyrolysis chamber 1 and combustion chamber 2 are both made of stainless steel with a high-temperature HF-resistant coating or C276 material. The combustion aid injected by the primary gas distribution nozzle 9 is located far from the center of the flare flame, and the combustion aid injected by the primary and secondary gas distribution nozzles 10 is 50% and 60% of the required amount, respectively. Between the primary and secondary gas distribution nozzles 9 and 10, the exhaust gas is in an oxygen-deficient combustion state. Simultaneously, the swirling circulating water in the swirling water jacket 12 of the combustion chamber absorbs the heat generated by combustion, controlling the temperature of the aerobic section within the reaction chamber below 850℃, effectively suppressing NO. X The generation of NO X Emissions are controlled at 200 mg / Nm³. 3 Within.

[0027] In operation, the exhaust gas enters the pyrolysis chamber 1 through the pyrolysis chamber inlet pipe 4. It is heated by a torch or combustion gun installed at the torch mounting port 6, pyrolyzing the easily pyrolyzable parts of the exhaust gas. The pyrolyzed exhaust gas then enters the combustion chamber 2. Combustion aids are injected proportionally through the primary combustion chamber nozzle 9 and the secondary combustion chamber nozzle 10 installed on the combustion chamber 2. The pyrolyzed high-temperature exhaust gas and combustion aids are thoroughly mixed and ignited by the torch flame, achieving complete combustion to the required level. The gas is then cooled by the combustion chamber cooling nozzle 5 before entering the next stage of the treatment process. Both the pyrolysis chamber 1 and the combustion chamber 2 are cooled by water-cooled walls, maintaining the outer wall temperature below 35°C.

[0028] In this specification, the illustrative expressions of the terms do not necessarily refer to the same embodiments. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments.

[0029] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. An automatic soot cleaning multi-stage combustion reaction chamber device, characterized by, It includes a pyrolysis chamber (1), a combustion chamber (2) and a reaction chamber support (3) connected from top to bottom; the pyrolysis chamber (1) is connected to the outside of the pyrolysis chamber (4), the bottom of the combustion chamber (2) is provided with a combustion chamber cooling nozzle (5), and the top of the pyrolysis chamber (1) is provided with a torch mounting port (6).

2. The automatic ash-cleaning multi-stage combustion reaction chamber device according to claim 1, characterized in that, The pyrolysis chamber (1) is provided with a water-cooled wall (7) inside the outer wall, and a pneumatic scraper (8) is provided inside the pyrolysis chamber (1) to scrape off the dust attached to the inner wall of the pyrolysis chamber (1).

3. The automatic ash-cleaning multi-stage combustion reaction chamber device according to claim 2, characterized in that, The pneumatic scraper (8) includes a scraper body (81) and a scraper cylinder (82) connected to the scraper body (81). The scraper body (81) is driven by the scraper cylinder (82) to move up and down along the pyrolysis chamber (1).

4. The automatic ash-cleaning multi-stage combustion reaction chamber device according to claim 1, characterized in that, The upper part of the combustion chamber (2) is provided with a primary gas distribution nozzle (9) and the middle part is provided with a secondary gas distribution nozzle (10). The outer wall of the combustion chamber (2) is provided with a water-cooled wall (11) and the combustion chamber (2) is provided with a swirling water jacket (12) for cleaning the inner wall of the combustion chamber (2).

5. The automatic ash-cleaning multi-stage combustion reaction chamber device according to claim 4, characterized in that, The combustion chamber (2) is provided with a water inlet (13) on the bottom side. Circulating water enters through the water inlet (13) and forms a swirling water film on the inner wall of the combustion chamber (2) through the swirling water jacket (12) to flush the inner wall of the combustion chamber (2).

6. The automatic ash-cleaning multi-stage combustion reaction chamber device according to claim 4, characterized in that, Both the primary gas distribution nozzle (9) and the secondary gas distribution nozzle (10) of the combustion chamber are fan-shaped gas distribution nozzles.

7. The automatic ash-cleaning multi-stage combustion reaction chamber device according to claim 1, characterized in that, The pyrolysis chamber (1) and combustion chamber (2) are both made of stainless steel with a high-temperature HF-resistant coating or C276 material.

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