A liquid cold block air tightness testing device

Abstract

This utility model discloses a liquid-cooled block airtightness testing device, comprising: a test chamber block having a cavity, an exhaust pipe connected to the test chamber block, and a leak detector connected to the exhaust pipe; the bottom of the test chamber block is provided with a mating interface for docking and installation with the liquid-cooled block under test, the mating interface communicating with the cavity, and the exhaust pipe communicating with the cavity; a first sealing ring is also provided between the mating interface and the first detection surface of the liquid-cooled block under test, and the liquid-cooled block under test is aligned and connected to the mating interface. This utility model's liquid-cooled block airtightness testing device adopts an offline testing method, which can quickly and conveniently test the sealing performance of the liquid-cooled block and the heating block mounting base, and its operation is simple, convenient, time-saving, and labor-saving.

Description

Technical Field

[0001] This utility model relates to the field of thin film deposition equipment technology, and in particular to a liquid-cooled block airtightness testing device for thin film deposition equipment. Background Technology

[0002] Liquid cooling blocks are one of the main components of atomic layer deposition equipment. Their sealing performance has a significant impact on the deposition process and directly affects the stability of the coating.

[0003] Traditional liquid coolant block sealing tests can only be performed on-machine, which is difficult, time-consuming, labor-intensive, and involves cumbersome procedures. Furthermore, the sealing test of the heating block mounting base connected to the liquid coolant block also requires on-machine installation, which is cumbersome, time-consuming, and labor-intensive, making troubleshooting complex and tedious, severely impacting efficiency. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a liquid-cooled block airtightness testing device to solve the technical problems of complex, time-consuming and labor-intensive existing liquid-cooled block airtightness testing process.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An embodiment of this utility model provides a liquid-cooled block airtightness testing device, which includes: a test chamber block having a cavity, an exhaust pipe connected to the test chamber block, and a leak detector connected to the exhaust pipe;

[0007] The bottom of the test chamber block is provided with a docking interface for the liquid cooling block under test to be installed. The docking interface is connected to the chamber, and the exhaust pipe is connected to the chamber.

[0008] A first sealing ring is also provided between the interface and the first detection surface of the liquid cooler block under test, and the liquid cooler block under test is aligned and connected to the interface.

[0009] The liquid-cooled block airtightness testing device further includes a first sealing block, and the liquid-cooled block under test is provided with an opening, and the first sealing block is sealed to the opening.

[0010] The liquid cooler block under test is further provided with a second detection surface, and the first sealing ring is provided between the second detection surface and the interface. When the second detection surface is in contact with the interface, it is used to perform airtightness testing on the internal weld seam of the liquid cooler block under test.

[0011] A second sealing ring is also provided between the first sealing block and the edge of the opening.

[0012] The mating surface is further provided with a first annular groove, and the first sealing ring is disposed in the first annular groove.

[0013] The liquid cooling block under test is provided with an opening, and a heating block mounting seat is provided inside the opening. A third sealing ring is provided between the heating block mounting seat and the liquid cooling block under test, and the third sealing ring seals the mating surface between the heating block mounting seat and the opening.

[0014] The tested liquid cooling block is further provided with a second annular groove, and the third sealing ring is disposed in the second annular groove.

[0015] The liquid-cooled block airtightness testing device further includes a second sealing block, which is sealed and connected to the heating block mounting base.

[0016] A sealing element is provided between the mating surface of the second sealing block and the heating block mounting base.

[0017] The tested liquid cooling block is a water-cooled block.

[0018] The liquid-cooled block airtightness testing device of this utility model adopts an offline testing method, which can quickly and conveniently test the sealing performance of the liquid-cooled block and the heating block mounting base. It is simple and convenient to operate, saving time and effort.

[0019] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model, it can be implemented according to the contents of the specification. In order to make the above and other objects, features and advantages of this utility model more obvious and easy to understand, the following are preferred embodiments, which are described in detail below. Attached Figure Description

[0020] Figure 1 This is an isometric view of the liquid-cooled block airtightness testing device according to an embodiment of the present invention.

[0021] Figure 2 This is a top view of the liquid-cooled block airtightness testing device according to an embodiment of the present invention.

[0022] Figure 3 This is a side view of the liquid-cooled block airtightness testing device according to an embodiment of the present invention.

[0023] Figure 4 and Figure 5 Cross-sectional views of the liquid coolant block airtightness testing device of this utility model with the liquid coolant block under test in both upright and reverse mounting states.

[0024] Figure 6 This is a schematic diagram of the structure of the test heating block mounting base of the liquid-cooled block airtightness testing device according to an embodiment of the present invention.

[0025] Figure 7 for Figure 6 The sectional view shown is along line AA.

[0026] Explanation of reference numerals in the attached figures:

[0027] Test chamber block 1, exhaust pipe 2, first sealing block 3, first sealing ring 4, second sealing ring 5, second sealing block 6, third sealing ring 7, sealing element 8, liquid cooling block 10, chamber 11, mating interface 13, heating block mounting base 20, opening mouth 101, lower liquid cooling block 102, upper liquid cooling block 103, welding seam 104, second annular groove 105, first detection surface 106, second detection surface 107, opening end face 131, first annular groove 132. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0030] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0032] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral molding; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0034] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. The illustrative expressions of the above terms in this specification should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0035] In semiconductor equipment, liquid cooling blocks are one of the main components of atomic layer deposition equipment. The quality of their sealing has a significant impact on the deposition process and directly affects the stability of the coating.

[0036] Traditional liquid-cooled block valve sealing performance testing can only be performed on-machine, which is difficult, time-consuming, labor-intensive, and involves cumbersome procedures. Furthermore, the sealing performance testing of the heating block mounting base connected to the liquid-cooled block also requires on-machine installation, which is cumbersome, time-consuming, and labor-intensive, making troubleshooting complex and time-consuming. To solve these problems, this embodiment discloses a liquid-cooled block airtightness testing device. This device is used for airtightness testing of liquid-cooled blocks and other liquid-cooling mechanisms.

[0037] Please see Figures 1 to 7This liquid-cooled block airtightness testing device is used to test a liquid-cooled block 10, which is used to cool the heating block of a thin-film deposition equipment. The liquid-cooled block 10 under test is actually assembled onto the process chamber and needs to maintain a sealed connection with it. Since the process chamber is in a vacuum state during the process, the sealing requirements for the connection are extremely high. Leakage would lead to the leakage of specific process gases, causing incalculable losses. In existing technologies, airtightness testing of liquid-cooled blocks typically involves assembling the liquid-cooled block into the process chamber and then running the equipment for testing. This assembly process is complex and difficult, and it is also difficult to pinpoint the exact location of the leak during testing, ultimately resulting in time-consuming and labor-intensive testing, affecting testing efficiency.

[0038] When the liquid cooling block 10 is assembled in the process chamber, a heating block is also provided inside the liquid cooling block 10. The heating block is connected to the liquid cooling block 10 through the heating block mounting seat 20. Therefore, it is also necessary to simultaneously perform a sealing test on the assembly surface between the heating block mounting seat 20 and the liquid cooling block 10.

[0039] Furthermore, the liquid cooler 10 has a fine network of liquid channels inside. To facilitate manufacturing, the liquid cooler 10 generally adopts a combined structure design of an upper liquid cooler 103 and a lower liquid cooler 102. Each of the two has a semi-circular groove on its mating surface, forming a circular liquid channel after mating. The upper liquid cooler 103 and the lower liquid cooler 102 are generally fixed by welding. In practical applications, it has been found that the weld seam also poses a risk of leakage. Therefore, the airtightness testing device for the liquid cooler in this embodiment is also used to test the airtightness of the weld seam 104 inside the liquid cooler 10.

[0040] The liquid-cooled block airtightness testing device includes: a test chamber block 1 with a cavity 11, an exhaust pipe 2 connected to the test chamber block 1, and a leak detector (not shown in the figure) connected to the exhaust pipe 2; in this embodiment, the leak detector is a helium detector.

[0041] The bottom of the test chamber block 1 is provided with a docking interface 13 that is installed with the liquid cooling block 10 under test. The docking interface 13 is connected to the chamber 11, and the exhaust pipe 2 is connected to the chamber 11.

[0042] A first sealing ring 4 is also provided between the interface 13 and the first detection surface 106 of the liquid cooling block 10 under test. The liquid cooling block 10 under test is aligned and connected to the interface 13 so as to perform a sealing test on the first detection surface 106.

[0043] like Figure 4As shown, in this state, the liquid cooling block 10 and the test chamber block 1 are in a positive mounting position, with its first detection surface 106 mating with the open end face 131 of the interface 13 of the test chamber block 1. A first sealing ring 4 is also provided between the open end face 131 of the interface 13 of the test chamber block 1 and the first detection surface 106 of the liquid cooling block 10. The interface 13 is the size of the docking and installation port of the actual equipment's process chamber, and the first sealing ring 4 is the sealing element when actually installed in the process chamber.

[0044] In this embodiment, the only mating point between the liquid cooling block 10 and the test chamber block 1 is the interface 13 and the first detection surface 106. That is, only the airtightness of the sealing structure formed by the first detection surface 106 and the first sealing ring 4 needs to be tested. The testing process is as follows: After the liquid cooling block 10 under test is aligned and assembled with the test chamber block 1, the chamber 11 is evacuated, and then helium gas is blown into the liquid cooling block 10 from the outside. Since the inside is a vacuum environment, if a leak occurs at the first detection surface 106, the helium gas will enter the chamber 11. The helium gas flows to the leak detector through the exhaust pipe 2 and is captured and detected by the leak detector. This indicates that the sealing performance of the first detection surface 106 and its first sealing ring 4 is unqualified.

[0045] In another embodiment, the liquid-cooled block airtightness testing device further includes a first sealing block 3. The liquid-cooled block 10 under test is provided with an opening 101, and the first sealing block 3 is sealed to the opening 101. That is, in this embodiment, the liquid-cooled block 10 may have other locations where leakage may occur with the external structure. In this case, it is necessary to pre-seal them with the first sealing block 3 to avoid affecting the test results.

[0046] A second sealing ring 5 is also provided between the first sealing block 3 and the edge of the opening 101. When testing the sealing performance of the first detection surface 106, it is necessary to keep the mating surface where the second sealing ring 5 is located in a sealed state.

[0047] Please refer to it again. Figure 4 and Figure 5 The liquid coolant block 10 under test is further provided with a second detection surface 107. A first sealing ring 4 is provided between the second detection surface 107 and the mating interface 13. When the second detection surface 107 is mated with the mating interface 13, it is used to perform an airtightness test on the internal weld seam 104 of the liquid coolant block 10 under test. The weld seam 104 is tested after the first detection surface 106 has been tested for airtightness. During the airtightness test of the weld seam 104, it is necessary to ensure that the first detection surface 106 and its first sealing ring 4 are in a qualified sealing condition. Figure 5As shown, the liquid cooling block 10 and the test chamber block 1 are in a reverse-mounted state, with the second detection surface 107 of the liquid cooling block 10 aligned and assembled with the interface 13. It should be noted that the detection of the first detection surface 106 and the second detection surface 107 is performed step by step, with different surfaces of the liquid cooling block 10 and the test chamber block 1 aligned and assembled during the detection.

[0048] The mating end face 131 is also provided with a first annular groove 132, and the first sealing ring 4 is disposed in the first annular groove 132.

[0049] In actual use, the first sealing ring 4 and the process chamber (i.e., the simulated object of the test chamber block 1 in this embodiment) are provided by different suppliers. Whether the elastic seal of the first sealing ring 4 will deform under external pressure in a vacuum environment, leading to gas leakage, is also unpredictable. Therefore, the airtightness testing device of the liquid cooling block in this embodiment can further confirm the compatibility between the first sealing ring 4 and the first annular groove 132 by positive and negative mounting. If the airtightness is good during positive mounting test, but leaks during negative mounting test, it indicates that the first sealing ring 4 and the first annular groove 132 are not compatible. The first sealing ring 4 expands outward under the action of air pressure, causing it to deform under the pressure between the first test surface 106 and the open end face 131, resulting in leakage. This indicates that the size of the first annular groove 132 is slightly large, causing the first sealing ring 4 to expand outward when air pressure is applied. At this time, the radius of the first annular groove 132 should be reduced to maintain an interference fit with the first sealing ring 4, so as to avoid leakage caused by air pressure during use.

[0050] Please refer to it again. Figure 6 and Figure 7 The liquid cooling block 10 under test is further provided with an opening 101, and a heating block mounting seat 20 is further provided in the opening 101. A third sealing ring 7 is provided between the heating block mounting seat 20 and the liquid cooling block 10 under test, and the third sealing ring 7 seals the mating surface between the heating block mounting seat 20 and the opening 101.

[0051] The liquid cooling block 10 under test is also provided with a second annular groove 105, and the third sealing ring 7 is disposed in the second annular groove 105.

[0052] Furthermore, the liquid-cooled block airtightness testing device also includes a second sealing block 6, which is sealed to the heating block mounting base 20 to seal the mounting cavity on the heating block mounting base 20 for mounting the heating block.

[0053] A sealing element 8 is provided between the mating surface of the second sealing block 6 and the heating block mounting base 20. Figure 6 and Figure 7This is used to test the airtightness of the assembly mating surface between the heating block mounting base 20 and the liquid cooling block 10. At this time, the liquid cooling block 10 and the test chamber block 1 are in the correct mounting state, and the second sealing block 6 is used to seal the internal cavity of the heating block mounting base 20.

[0054] When testing the airtightness between the heating block mounting base 20 and the liquid cooling block 10, it is necessary to test the sealing of the first test surface 106 and the weld seam 104 in advance. After ensuring that the first test surface 106, the weld seam 104 and its sealing ring are qualified, the sealing status of the third sealing ring 7 and its mating surface is then tested.

[0055] In this embodiment, the liquid cooling block 10 being tested is a water-cooled block. It is understood that in other embodiments, the liquid cooling block 10 may include, but is not limited to, a water-cooled block, or other functional or structural components with similar structures for airtightness testing.

[0056] The liquid coolant block airtightness testing device of this embodiment adopts an offline testing method, which can quickly and conveniently test the sealing performance of the liquid coolant block and the heating block mounting base. It is simple and convenient to operate, saving time and effort.

[0057] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A device for testing the airtightness of a liquid-cooled block, characterized in that, include: A test chamber block having a cavity, an exhaust pipe connected to the test chamber block, and a leak detector connected to the exhaust pipe; The bottom of the test chamber block is provided with a docking interface for the liquid cooling block under test to be installed. The docking interface is connected to the chamber, and the exhaust pipe is connected to the chamber. A first sealing ring is also provided between the interface and the first detection surface of the liquid cooler block under test, and the liquid cooler block under test is aligned and connected to the open end face of the interface.

2. The liquid-cooled block airtightness testing device according to claim 1, characterized in that, The liquid-cooled block airtightness testing device also includes a first sealing block, and the liquid-cooled block under test is provided with an opening, and the first sealing block is sealed to the opening.

3. The liquid-cooled block airtightness testing device according to claim 2, characterized in that, The liquid cooler block under test is also provided with a second detection surface, and the first sealing ring is provided between the second detection surface and the interface. When the second detection surface is in contact with the interface, it is used to perform airtightness testing on the internal weld seam of the liquid cooler block under test.

4. The liquid-cooled block airtightness testing device according to claim 2 or 3, characterized in that, A second sealing ring is also provided between the first sealing block and the edge of the opening.

5. The liquid-cooled block airtightness testing device according to claim 1, characterized in that, The opening end face is also provided with a first annular groove, and the first sealing ring is disposed in the first annular groove.

6. The liquid-cooled block airtightness testing device according to claim 1, characterized in that, The liquid cooling block under test is further provided with an opening, and a heating block mounting seat is provided inside the opening. A third sealing ring is provided between the heating block mounting seat and the liquid cooling block under test, and the third sealing ring seals the mating surface between the heating block mounting seat and the opening.

7. The liquid-cooled block airtightness testing device according to claim 6, characterized in that, The tested liquid cooling block is also provided with a second annular groove, and the third sealing ring is disposed in the second annular groove.

8. The liquid-cooled block airtightness testing device according to claim 7, characterized in that, The liquid-cooled block airtightness testing device also includes a second sealing block, which is sealed to the heating block mounting base.

9. The liquid-cooled block airtightness testing device according to claim 8, characterized in that, A sealing element is provided between the mating surface of the second sealing block and the heating block mounting base.

10. The liquid-cooled block airtightness testing device according to claim 9, characterized in that, The liquid-cooled block under test is a water-cooled block.

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