Wafer rack automatic liquid immersion device

Abstract

This utility model relates to an automatic wafer rack immersion device. The upper part of the frame is equipped with a hoisting mechanism and its track. The hoisting mechanism can move the basket rack between the liquid tank and the rack changing tray. A pair of mounting seats are provided in the middle of the basket rack frame, each with a mounting groove. The upper part of the basket rack has a hook rod, and the lower part has a base rod. The rack changing tray includes a liquid storage box and a support plate. The support plate has a slot, and the liquid storage box has a sensor hole at the corresponding position of the slot. The hoisting mechanism includes a hook, a lifting cylinder, and a translation rack. The hook is mounted on the lifting cylinder, and a translation rack is provided on one side of the lifting cylinder. This utility model enables automatic immersion of wafers. During use, the assembled wafer rack basket rack is placed into the liquid storage box manually or by machine. The hoisting device automatically hooks the basket rack, moves it, and places it into the liquid tank for immersion. After completion, the liquid is drained, and the basket rack is returned to the liquid storage box. This method is convenient and significantly saves costs.

Description

Technical Field

[0001] This utility model relates to the field of diode manufacturing technology, and in particular to an automatic wafer rack immersion device. Background Technology

[0002] A wafer refers to a silicon wafer used in the fabrication of silicon semiconductor integrated circuits. Because of its circular shape, it is called a wafer. During wafer production, it needs to be immersed in developing solution for development. First, the wafer is placed on a wafer rack, then the wafer rack containing the wafer is placed into a basket rack. Finally, the worker manually hangs it on a hook on the developing machine. The hook continuously raises and lowers, causing the basket rack to enter and leave the developing solution tank. Existing basket rack structures include... Figure 1 , 2 As shown, it is very simple, but it requires manual hanging on the hook, which results in high labor costs and low processing efficiency. Utility Model Content

[0003] To address the aforementioned problems, the purpose of this invention is to provide an automatic wafer immersion device that can automatically immerse diodes in liquid, is easy to use, and greatly saves costs.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: an automatic wafer rack immersion device, comprising a frame, a hoisting mechanism and its track on the upper part of the frame, and multiple liquid pools and a rack changing tray located below the hoisting mechanism on the frame worktable. The hoisting mechanism can move the wafer rack between the liquid pools and the rack changing tray.

[0005] The flower basket frame has a pair of mounting bases in the middle of its frame, each mounting base having a mounting groove. The upper part of the flower basket frame has a hook rod, and the lower part has a base rod.

[0006] The changing tray includes a liquid storage box and a support plate. The support plate is provided with a slot, and the liquid storage box is provided with a sensing hole at the corresponding position of the slot.

[0007] The hoisting mechanism includes a hook, a lifting cylinder, and a translation rack. The hook is mounted on the lifting cylinder, and a translation rack is provided on one side of the lifting cylinder.

[0008] In the above technical solution, a positioning sensor is installed at the sensing hole, and a sensing point is provided at the end of the bottom rod.

[0009] In the above technical solution, a pair of hook rods are provided on the upper part of both sides of the flower basket frame, and a pair of bottom rods are provided on the lower part of both sides of the flower basket frame.

[0010] In the above technical solution, a pair of mounting seats are provided in the middle of both sides of the flower basket frame.

[0011] In the above technical solution, each of the mounting bases is provided with two mounting slots.

[0012] In the above technical solution, the end of the hook rod is provided with a limiting boss, and the end of the bottom rod is provided with a limiting cone.

[0013] In the above technical solution, the upper part of the hoisting mechanism is mounted on the track, and the track is driven by a motor.

[0014] In summary, the advantages of this utility model over traditional methods are as follows: This utility model enables automatic immersion of wafers in liquid. During use, the assembled wafer rack basket is placed into the liquid storage box by manual labor or machine. The hoisting device can automatically hook the basket basket, move it, and place it into the liquid pool for immersion. After completion, the liquid is drained and the wafer is returned to the liquid storage box. This method is convenient to use, has higher processing efficiency, requires no manual operation, and greatly saves costs. Attached Figure Description

[0015] The foregoing and other objects, features and advantages of this invention will become apparent from the following detailed description taken in conjunction with the accompanying drawings.

[0016] Figure 1 This is a three-dimensional structural diagram of the flower basket frame in the prior art of this utility model;

[0017] Figure 2 This is a schematic diagram of the flower basket frame with the wafer rack attached in the prior art of this utility model;

[0018] Figure 3 This is a schematic diagram of the flower basket frame in this utility model with the wafer rack attached.

[0019] Figure 4 This is a schematic diagram of the flower basket frame at the frame changing plate in this utility model;

[0020] Figure 5 This is a schematic diagram of the usage state of this utility model;

[0021] Figure 6 This is a front view schematic diagram of the wafer rack;

[0022] Figure 7 This is a side view of the wafer rack;

[0023] Figure 8 This is a schematic diagram of a wafer;

[0024] The following are the labels: 100, frame; 200, hoisting mechanism; 210, track; 220, hook; 300, liquid tank; 400, rack changing plate; 410, liquid storage box; 411, sensor hole; 420, support plate; 421, slot; 500, basket rack; 510, mounting base; 511, mounting groove; 520, hook rod; 530, base rod; 540, limiting boss; 550, limiting cone; 600, wafer rack; 700, wafer rack; 710, mounting boss. Detailed Implementation

[0025] Based on the preferred embodiments of this utility model, and through the following description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

[0026] The present invention will be further described with reference to the following figures:

[0027] like Figures 3-5 As shown, an automatic wafer rack immersion device includes a frame 100. A hoisting mechanism 200 and its track 210 are provided on the upper part of the frame 100. Multiple liquid tanks 300 and a wafer changing tray 400 are located on the worktable of the frame 100 below the hoisting mechanism 200. The hoisting mechanism 200 can move a wafer rack 500 between the liquid tanks 300 and the wafer changing tray 400.

[0028] like Figure 3 , 4 As shown, the flower basket frame 500 has a pair of mounting seats 510 in the middle of the frame body, and the mounting seats 510 are provided with mounting grooves 511. The upper part of the flower basket frame 500 is provided with a hook rod 520, and the lower part is provided with a bottom rod 530.

[0029] like Figure 4 As shown, the rack changing tray 400 includes a liquid storage box 410 and a support plate 420. The support plate 420 is provided with a slot 421. The liquid storage box 410 is provided with a sensing hole 411 at the corresponding position of the slot 421. After the immersion is completed, the hoisting mechanism 200 will shake off the liquid remaining on the basket rack 500 and the wafer rack 600 by lifting and lowering it several times. However, this can only ensure that the liquid pool 300 will not drip during the process of moving to the liquid storage box 410. In fact, there will still be residual liquid. The liquid storage box 410 is used to collect the residual liquid.

[0030] The sensor hole 411 is not flush with the bottom surface of the liquid storage box 410, but has a certain height. Since there is not much residual liquid, the setting of the sensor hole 411 does not affect the collection of liquid.

[0031] like Figure 4 , 5 As shown, the hoisting mechanism 200 includes a hook 220, a lifting cylinder, and a translation rack. The hook 220 is mounted on the lifting cylinder, and a translation rack is provided on one side of the lifting cylinder. The lifting cylinder can control the lifting and lowering of the hook 220, while the translation rack can control the translation of the hook 220. After the hook 220 is lowered and translated, it can extend to the lower part of the hook rod 520, and then rise to hook the hook rod 520.

[0032] A positioning sensor is installed at the sensing hole 411. The positioning sensor can detect whether there is a flower basket rack 500 in the rack changing tray 400, so as to prevent the hoisting mechanism 200 from going over to retrieve the flower basket rack 500 before it is properly placed.

[0033] The flower basket frame 500 has a pair of hook rods 520 on the upper part of both sides and a pair of bottom rods 530 on the lower part of both sides. A total of four hook rods 520 and four bottom rods 530 are provided on both sides of the flower basket frame 500. The hook rods 520 correspond to the four hooks 220 on the top, and the four bottom rods 530 correspond to the four mounting slots 511 on the two mounting seats 510.

[0034] The basket rack 500 has a pair of mounting seats 510 on both sides of the center. The mounting boss 710 at one end of the wafer rack 700 can be fitted into the mounting slot 511. Each mounting seat 510 has two mounting slots 511, which are used to accommodate two common wafer racks 700 (common sizes are 3-inch and 4-inch), thus saving costs.

[0035] Furthermore, the mounting base 510 is fixed to the basket frame 500 with bolts, and different mounting bases 510 can be replaced when necessary.

[0036] like Figure 3 , 4 As shown in Figure 5, the end of the hook rod 520 is provided with a limiting boss 540, and the end of the bottom rod 530 is provided with a limiting cone 550. The limiting boss 540 on the hook rod 520 can prevent the hook 220 from slipping off, while the limiting cone 550 at the end of the bottom rod 530 is used for better positioning so that the bottom rod 530 is engaged in the slot 421.

[0037] like Figure 5 As shown, the upper part of the hoisting mechanism 200 is mounted on the track 210, which is driven by a motor and has multiple hoisting mechanisms 200 on it.

[0038] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An automatic wafer rack immersion device, characterized in that: The machine has a frame, with a hoisting mechanism and its track on the upper part of the frame. Below the hoisting mechanism, the machine's worktable has multiple liquid tanks and a rack-changing tray. The hoisting mechanism can move the basket rack between the liquid tanks and the rack-changing tray. The flower basket frame has a pair of mounting bases in the middle of its frame, each mounting base having a mounting groove. The upper part of the flower basket frame has a hook rod, and the lower part has a base rod. The changing tray includes a liquid storage box and a support plate. The support plate is provided with a slot, and the liquid storage box is provided with a sensing hole at the corresponding position of the slot. The hoisting mechanism includes a hook, a lifting cylinder, and a translation rack. The hook is mounted on the lifting cylinder, and a translation rack is provided on one side of the lifting cylinder.

2. The automatic wafer rack immersion apparatus according to claim 1, characterized in that: A positioning sensor is installed at the sensing hole, and a sensing point is provided at the end of the bottom rod.

3. The automatic wafer rack immersion apparatus according to claim 1, characterized in that: The flower basket frame has a pair of hook rods on the upper part of both sides and a pair of bottom rods on the lower part of both sides.

4. The automatic wafer rack immersion apparatus according to claim 1, characterized in that: The flower basket frame has a pair of mounting bases on the middle of both sides.

5. The automatic wafer rack immersion apparatus according to claim 2, characterized in that: Each of the mounting bases has two mounting slots.

6. The automatic wafer rack immersion apparatus according to claim 1, characterized in that: The end of the hook rod is provided with a limiting boss, and the end of the bottom rod is provided with a limiting cone.

7. The automatic wafer rack immersion apparatus according to claim 1, characterized in that: The upper part of the hoisting mechanism is mounted on the track, which is driven by a motor.

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