A multi-wire saw
By introducing a sliding translation mechanism into the multi-wire cutting machine to adjust the spindle spacing, the problem of traditional cutting machines being unable to adapt to different silicon wafer specifications is solved, achieving high production adaptability and equipment utilization.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI SUNSHINE PRECISION MASCH CO LTD
- Filing Date
- 2025-07-17
- Publication Date
- 2026-06-12
AI Technical Summary
Traditional multi-wire cutting machines have a fixed spindle spacing, which is difficult to adjust flexibly. This results in the need to replace devices or modify equipment when producing silicon wafers of different specifications, increasing costs and reducing efficiency.
The spindle is slidably fixed on the frame using first and second translation mechanisms. The spindle spacing is changed by adjusting the slide plate spacing to adapt to the cutting requirements of different silicon wafer widths.
It reduced equipment modification costs, improved production efficiency, simplified equipment adjustment processes, shortened downtime, and increased equipment utilization.
Smart Images
Figure CN224348093U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of cutting machine smoke technology, and more specifically, to a multi-wire cutting machine. Background Technology
[0002] Traditional multi-wire silicon wafer dicing equipment typically has a fixed spindle spacing, making it difficult to flexibly adjust the dicing width according to different process requirements. Because of this inability to flexibly change the dicing width, the equipment has poor adaptability to processing different wafer sizes. When producing wafers of various widths, it is often necessary to replace the entire dicing unit or perform complex equipment modifications, which not only increases production costs but also significantly reduces production efficiency.
[0003] The above-mentioned problems urgently need to be solved, so this utility model provides a multi-wire cutting machine. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a multi-wire cutting machine, in which the spindle is slidably fixed on the frame by a first translation mechanism and a second translation mechanism, which facilitates the adjustment of the spindle spacing, adapts to the cutting of silicon wafers of different widths, reduces modification costs, and improves production efficiency.
[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: a multi-wire cutting machine is provided, including a frame, a first translation mechanism disposed on one side of the frame, a second translation mechanism disposed on the other side of the frame, and a cutting spindle mechanism. The first translation mechanism includes a first fixed plate fixed on the frame, a first slide plate and a second slide plate slidably fixed on the first fixed plate. The second translation mechanism includes a second fixed plate fixed on the frame, a slide plate one and a slide plate two slidably fixed on the second fixed plate. The cutting spindle mechanism includes a first spindle and a second spindle. The two ends of the first spindle are fitted into the first slide plate and the slide plate one, and the two ends of the second spindle are fixed into the second slide plate and the slide plate two.
[0006] In this embodiment, it is further configured such that: the first fixing plate has a first through hole and a second through hole, the first sliding plate has a third through hole, the second sliding plate has a fourth through hole, the second fixing plate has a first through hole and a second through hole, the first sliding plate has a third through hole, and the second sliding plate has a fourth through hole.
[0007] In this embodiment, it is further configured that: the diameters of the first through hole and the second through hole are equal, the diameters of the third through hole and the fourth through hole are equal, the diameters of the first through hole and the second through hole are equal, the diameters of the third through hole and the fourth through hole are equal, and the diameters of the third through hole and the fourth through hole are greater than the diameters of the first through hole and the second through hole.
[0008] In this embodiment, it is further configured such that: both ends of the first spindle are engaged in the third through hole and the third through hole, and both ends of the second spindle are engaged in the fourth through hole and the fourth through hole.
[0009] In this embodiment, the first translation mechanism is further configured as follows: the first translation mechanism includes a first fixed rail, a first upper slide rail, and a first lower slide rail. The first fixed plate is provided with two first fixed rails, two first upper slide rails, and two first lower slide rails. The lower part of the first upper slide rail has a wedge-shaped structure, and the upper part of the first lower slide rail has a wedge-shaped structure. The first sliding plate is fitted between the first upper slide rail and the first lower slide rail on one side of the first fixed plate, and the second sliding plate is fitted between the first upper slide rail and the first lower slide rail on the other side of the first fixed rail.
[0010] In this embodiment, the second translation mechanism is further configured as follows: a fixed rail, an upper slide rail, and a lower slide rail. The second fixed plate is provided with two fixed rails, two upper slide rails, and two lower slide rails. The lower part of the upper slide rail has a wedge-shaped structure, and the upper part of the lower slide rail has a wedge-shaped structure. The sliding plate is fitted between the upper slide rail and the lower slide rail on one side of the second fixed plate, and the sliding plate is fitted between the upper slide rail and the lower slide rail on the other side of the fixed rail.
[0011] In this embodiment, the first spindle is further configured to include a first shaft body, a first fixed rotating shaft disposed at both ends of the first shaft body, and a first spindle fixing plate.
[0012] In this embodiment, the second spindle is further configured to include a second shaft body, a second fixed rotating shaft disposed at both ends of the second shaft body, and a second spindle fixing plate.
[0013] In this embodiment, the cutting spindle mechanism is further configured to include a third spindle located at the lower ends of the first spindle and the second spindle, the third spindle including a third shaft body, a third fixed rotating shaft located at both ends of the third shaft body, and a third spindle fixing plate.
[0014] In this embodiment, the multi-wire cutting machine is further configured to include a drive motor, which includes a first motor, a second motor, and a third motor. The first motor drives the first spindle to rotate, the second motor drives the second spindle to rotate, and the third motor drives the third spindle to rotate.
[0015] The beneficial effects of this utility model are as follows: The multi-wire cutting machine of this utility model sets the first translation mechanism and the second translation mechanism on both sides of the machine frame, and fixes the first spindle and the second spindle on the first slide plate and the second slide plate of the first translation mechanism and the second translation mechanism respectively. When it is necessary to adjust the spindle spacing to adapt to the cutting of different silicon wafers, only the spacing between the first slide plate and the second slide plate needs to be adjusted, which reduces the modification cost and improves the production efficiency. Attached Figure Description
[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0017] In the picture: Figure 1 This is a schematic diagram of the structure of the multi-wire cutting machine of this utility model;
[0018] Figure 2 for Figure 1 Front view of a multi-wire cutting machine;
[0019] Figure 3 for Figure 1 Exploded view of a multi-wire cutting machine;
[0020] Figure 4 for Figure 3 Exploded view of the first translation mechanism in the middle;
[0021] Figure 5 for Figure 3 Exploded view of the second translation mechanism;
[0022] Figure 6 for Figure 3 Exploded view of the cutting spindle mechanism.
[0023] 100. Multi-wire cutting machine; 10. Frame; 20. First translation mechanism; 21. First fixed plate; 211. First through hole; 212. Second through hole; 22. First fixed rail; 23. First upper slide rail; 24. First lower slide rail; 25. First slide plate; 251. Third through hole; 26. Second slide plate; 261. Fourth through hole; 30. Second translation mechanism; 31. Second fixed plate; 311. Through hole one; 312. Through hole two; 32. Fixed rail one; 33. Upper slide rail one; 34. Lower slide rail one; 35. Slide plate one; 35 1. Through hole three; 36. Slide plate two; 361. Through hole four; 40. Cutting spindle mechanism; 41. First spindle; 411. First shaft body; 412. First fixed rotating shaft; 413. First spindle fixing plate; 42. Second spindle; 421. Second shaft body; 422. Second fixed rotating shaft; 423. Second spindle fixing plate; 43. Third spindle; 431. Third shaft body; 432. Third fixed rotating shaft; 433. Third spindle fixing plate; 50. Drive motor; 51. First motor; 52. Second motor; 53. Third motor. Detailed Implementation
[0024] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will now be described in detail with reference to the accompanying drawings. This drawing is a simplified schematic diagram, illustrating only the basic aspects of the present utility model, and therefore only shows the components relevant to the present utility model. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.
[0025] like Figure 1-6 As shown, this utility model provides a multi-wire cutting machine 100, including a frame 10, a first translation mechanism 20 disposed on one side of the frame 10, a second translation mechanism 30 disposed on the other side of the frame 10, and a cutting spindle mechanism 40. The first translation mechanism 20 includes a first fixed plate 21 fixed on the frame 10, a first slide plate 25 and a second slide plate 26 slidably fixed on the first fixed plate 21. The second translation mechanism 30 includes a second fixed plate 31 fixed on the frame 10, a first slide plate 35 and a second slide plate 36 slidably fixed on the second fixed plate 31. The cutting spindle mechanism 40 includes a first spindle 41 and a second spindle 42. The two ends of the first spindle 41 are embedded in the first slide plate 25 and the first slide plate 35, and the two ends of the second spindle 42 are fixed in the second slide plate 26 and the second slide plate 36.
[0026] In this embodiment, specifically: the first fixing plate 21 has a first through hole 211 and a second through hole 212, the first sliding plate 25 has a third through hole 251, the second sliding plate 26 has a fourth through hole 261, the second fixing plate 31 has a first through hole 311 and a second through hole 312, the first sliding plate 35 has a third through hole 351, and the second sliding plate 36 has a fourth through hole 361.
[0027] In this embodiment, specifically: the diameters of the first through hole 211 and the second through hole 212 are equal; the diameters of the third through hole 251 and the fourth through hole 261 are equal; the diameters of through hole one 311 and through hole two 312 are equal; the diameters of through hole three 351 and through hole four 361 are equal; and the diameters of the third through hole 251 and the fourth through hole 261 are greater than the diameters of the first through hole 211 and the second through hole 212.
[0028] In this embodiment, specifically: the two ends of the first spindle 41 are engaged in the third through hole 251 and the third through hole 351, and the two ends of the second spindle 42 are engaged in the fourth through hole 261 and the fourth through hole 361.
[0029] In this embodiment, specifically: the first translation mechanism 20 further includes a first fixed rail 22, a first upper slide rail 23, and a first lower slide rail 24. The first fixed plate 21 is provided with two first fixed rails 22, two first upper slide rails 23, and two first lower slide rails 24. The lower part of the first upper slide rail 23 has a wedge-shaped structure, and the upper part of the first lower slide rail 24 has a wedge-shaped structure. The first sliding plate 25 is fitted between the first upper slide rail 23 and the first lower slide rail 24 on one side of the first fixed plate 21, and the second sliding plate 26 is fitted between the first upper slide rail 23 and the first lower slide rail 24 on the other side of the first fixed rail 22.
[0030] In this embodiment, specifically: the second translation mechanism 30 further includes a fixed rail 32, an upper slide rail 33, and a lower slide rail 34. The second fixed plate 31 is provided with two fixed rails 32, two upper slide rails 33, and two lower slide rails 34. The lower part of the upper slide rail 33 has a wedge-shaped structure, and the upper part of the lower slide rail 34 has a wedge-shaped structure. The sliding plate 35 is fitted between the upper slide rail 33 and the lower slide rail 34 on one side of the second fixed plate 31, and the sliding plate 36 is fitted between the upper slide rail 33 and the lower slide rail 34 on the other side of the fixed rail 32.
[0031] In this embodiment, specifically: the first spindle 41 includes a first shaft body 411, a first fixed rotating shaft 412 disposed at both ends of the first shaft body 411, and a first spindle fixing plate 413.
[0032] In this embodiment, specifically: the second spindle 42 includes a second spindle body 421, a second fixed rotating shaft 422 disposed at both ends of the second spindle body 421, and a second spindle fixing plate 423.
[0033] In this embodiment, specifically: the cutting spindle mechanism 40 further includes a third spindle 43 located at the lower ends of the first spindle 41 and the second spindle 42. The third spindle 43 includes a third shaft body 431, a third fixed rotating shaft 432 located at both ends of the third shaft body 431, and a third spindle fixing plate 433.
[0034] In this embodiment, specifically: the multi-wire cutting machine 100 further includes a drive motor 50, which includes a first motor 51, a second motor 52 and a third motor 53. The first motor 51 drives the first spindle 41 to rotate, the second motor 52 drives the second spindle 42 to rotate, and the third motor 53 drives the third spindle 43 to rotate.
[0035] In this embodiment, specifically: the first slide plate 25 and the second slide plate 26 are provided with waist-shaped holes (not shown in the figure), and the first fixing plate 21 is provided with waist-shaped holes corresponding to the waist-shaped holes on the first slide plate 25 and the second slide plate 26. When the slide plate slides to the designated position, the screw passes through the waist-shaped holes on the first slide plate 25, the second slide plate 26 and the first fixing plate 21 to fix the first slide plate 25 and the second slide plate 26 on the first fixing plate 21.
[0036] In this embodiment, specifically: the first slide plate 35 and the second slide plate 36 are provided with waist-shaped holes (not shown in the figure), and the second fixing plate 21 is provided with waist-shaped holes corresponding to the waist-shaped holes on the first slide plate 35 and the second slide plate 36. When the slide plate slides to the designated position, the screw passes through the waist-shaped holes on the first slide plate 35, the second slide plate 36 and the second fixing plate 31 to fix the first slide plate 35 and the second slide plate 36 on the second fixing plate 31.
[0037] The working process of a multi-wire cutting machine according to this utility model:
[0038] When silicon wafers of different sizes need to be cut, the distance between the first spindle 41 and the second spindle 42 needs to be adjusted. The operator moves the first slide plate 25 and the second slide plate 26. The slide plates slide between the first upper slide rail 23 and the first lower slide rail 24, which are fitted on the first fixed plate 21. The movement direction of the first slide plate 25 and the second slide plate 26 is parallel to the first fixed plate 21. Simultaneously, the operator moves the first slide plate 35 and the second slide plate 36. The slide plates slide between the first upper slide rail 33 and the first lower slide rail 34, which are fitted on the second fixed plate 31. The movement direction of the first slide plate 35 and the second slide plate 36 is parallel to the second fixed plate 31.
[0039] Since the two ends of the first main shaft 41 are respectively engaged in the third through hole 251 of the first slide plate 25 and the third through hole 351 of the slide plate 35, and the two ends of the second main shaft 42 are respectively engaged in the fourth through hole 261 of the second slide plate 26 and the fourth through hole 361 of the slide plate 36, when the first slide plate 25, the second slide plate 26, the slide plate 35, and the slide plate 36 slide on their respective translation mechanisms to change their spacing, the spacing between the first main shaft 41 and the second main shaft 42 also changes synchronously.
[0040] After the spindle spacing is adjusted, the silicon rod to be cut is fed into the cutting area. The first motor 51 drives the first spindle 41 to rotate, the second motor 52 drives the second spindle 42 to rotate, and the third motor 53 drives the third spindle 43 to rotate. A metal cutting wire (not shown in the figure) wound and tensioned around the spindle rotates at high speed with the spindle. Driven by the worktable or feed mechanism, the silicon wafer passes through the cutting wire mesh at a set speed; the high-speed moving cutting wire achieves precise multi-wire cutting of the silicon wafer.
[0041] The beneficial effects of this multi-wire cutting machine:
[0042] This design directly fixes the support ends of the first spindle 41 and the second spindle 42 to independently sliding slide plates, and integrates these slide plates into the translation mechanisms on both sides of the frame. The spindle spacing can be directly and precisely adjusted simply by moving these slide plates. This eliminates the need to replace large components and significantly reduces the equipment modification costs required to accommodate the production of silicon wafers of different sizes.
[0043] The spindle spacing adjustment process is quick and easy (simply slide the slide plate), which significantly shortens the equipment adjustment time when changing product specifications, reduces downtime, and enables the equipment to switch production tasks more quickly, thereby improving equipment utilization and overall production efficiency.
[0044] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0045] It should be noted that the terms "first," "second," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in sequences other than those illustrated or described herein.
[0046] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the scope of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. A multi-wire cutting machine, characterized in that: The device includes a frame (10), a first translation mechanism (20) disposed on one side of the frame (10), a second translation mechanism (30) disposed on the other side of the frame (10), and a cutting spindle mechanism (40). The first translation mechanism (20) includes a first fixed plate (21) fixed on the frame (10), a first slide plate (25) and a second slide plate (26) slidably fixed on the first fixed plate (21). The second translation mechanism (30) includes a second fixed plate (31) fixed on the frame (10), a first slide plate (35) and a second slide plate (36) slidably fixed on the second fixed plate (31). The cutting spindle mechanism (40) includes a first spindle (41) and a second spindle (42). The two ends of the first spindle (41) are fitted into the first slide plate (25) and the first slide plate (35), and the two ends of the second spindle (42) are fixed into the second slide plate (26) and the second slide plate (36).
2. The multi-wire cutting machine according to claim 1, characterized in that: The first fixing plate (21) has a first through hole (211) and a second through hole (212), the first sliding plate (25) has a third through hole (251), the second sliding plate (26) has a fourth through hole (261), the second fixing plate (31) has a first through hole (311) and a second through hole (312), the first sliding plate (35) has a third through hole (351), and the second sliding plate (36) has a fourth through hole (361).
3. A multi-wire cutting machine according to claim 2, characterized in that: The diameters of the first through hole (211) and the second through hole (212) are equal, the diameters of the third through hole (251) and the fourth through hole (261) are equal, the diameters of the first through hole (311) and the second through hole (312) are equal, the diameters of the third through hole (351) and the fourth through hole (361) are equal, and the diameters of the third through hole (251) and the fourth through hole (261) are greater than the diameters of the first through hole (211) and the second through hole (212).
4. A multi-wire cutting machine according to claim 2, characterized in that: The first spindle (41) is engaged at both ends in the third through hole (251) and the third through hole (351), and the second spindle (42) is engaged at both ends in the fourth through hole (261) and the fourth through hole (361).
5. A multi-wire cutting machine according to claim 1, characterized in that: The first translation mechanism (20) further includes a first fixed rail (22), a first upper slide rail (23) and a first lower slide rail (24). The first fixed plate (21) is provided with two first fixed rails (22), two first upper slide rails (23) and two first lower slide rails (24). The lower part of the first upper slide rail (23) is a wedge structure, and the upper part of the first lower slide rail (24) is a wedge structure. The first sliding plate (25) is fitted between the first upper slide rail (23) and the first lower slide rail (24) on one side of the first fixed plate (21). The second sliding plate (26) is fitted between the first upper slide rail (23) and the first lower slide rail (24) on the other side of the first fixed rail (22).
6. A multi-wire cutting machine according to claim 1, characterized in that: The second translation mechanism (30) further includes a fixed rail (32), an upper slide rail (33) and a lower slide rail (34). The second fixed plate (31) is provided with two fixed rails (32), two upper slide rails (33) and two lower slide rails (34). The lower part of the upper slide rail (33) is a wedge-shaped structure, and the upper part of the lower slide rail (34) is a wedge-shaped structure. The sliding plate (35) is fitted between the upper slide rail (33) and the lower slide rail (34) on one side of the second fixed plate (31). The sliding plate (36) is fitted between the upper slide rail (33) and the lower slide rail (34) on the other side of the fixed rail (32).
7. A multi-wire cutting machine according to claim 1, characterized in that: The first spindle (41) includes a first shaft body (411), a first fixed rotating shaft (412) disposed at both ends of the first shaft body (411), and a first spindle fixing plate (413).
8. A multi-wire cutting machine according to claim 1, characterized in that: The second spindle (42) includes a second spindle body (421), a second fixed rotating shaft (422) disposed at both ends of the second spindle body (421), and a second spindle fixing plate (423).
9. A multi-wire cutting machine according to claim 1, characterized in that: The cutting spindle mechanism (40) further includes a third spindle (43) located at the lower ends of the first spindle (41) and the second spindle (42). The third spindle (43) includes a third shaft body (431), a third fixed rotating shaft (432) located at both ends of the third shaft body (431), and a third spindle fixing plate (433).
10. A multi-wire cutting machine according to claim 9, characterized in that: The multi-wire cutting machine (100) also includes a drive motor (50), which includes a first motor (51), a second motor (52) and a third motor (53). The first motor (51) drives the first spindle (41) to rotate, the second motor (52) drives the second spindle (42) to rotate, and the third motor (53) drives the third spindle (43) to rotate.