A mirror deflection angle measuring device
By using a beam splitter and a focusing device in the reflector deflection angle measurement device to vertically incident and converge the light beam onto the position-sensitive detector, the problems of cumbersome measurement and low accuracy in the prior art are solved, and high-precision and fast deflection angle detection is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 上海昊量光电设备有限公司
- Filing Date
- 2025-08-28
- Publication Date
- 2026-06-12
AI Technical Summary
Existing mirror deflection angle measurement devices are cumbersome to operate and have low measurement accuracy, which affects imaging quality and signal transmission, especially in optical systems.
A beam splitter is used to collimate the parallel beam output from the light source and incident it perpendicularly onto the surface of the reflector under test. The reflected beam is then focused onto the focal plane of the position-sensitive detector by a focusing device, and the deflection parameters are determined using the position-sensitive detector.
This improved the accuracy and ease of operation of mirror deflection angle measurement, ensured linearity consistency in different directions, and enhanced measurement accuracy.
Smart Images
Figure CN224354062U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical equipment technology, and in particular to a device for measuring the deflection angle of a mirror. Background Technology
[0002] In engineering fields such as precision machinery, semiconductor manufacturing, and aerospace, the deflection angle of a mirror directly affects the performance and accuracy of the system. For example, in optical systems, a small deflection of a mirror can lead to a significant change in the optical path, which can affect imaging quality and signal transmission. Therefore, accurately measuring the deflection angle of a mirror is of great significance for ensuring the normal operation of the system.
[0003] However, the relevant technology directly uses a parallel beam incident at an angle onto the mirror under test, which will form a large spot on the position sensitive detector (PSD). At the same time, the parallel beam must hit the center of rotation of the surface of the mirror under test. Otherwise, the position of the reflection point will be displaced before and after the mirror rotates, so that the deflection parameter measured by the position sensitive detector includes a translation amount, making the operation cumbersome. Utility Model Content
[0004] In view of the above-mentioned defects or deficiencies in the related technologies, it is desirable to provide a device for measuring the deflection angle of a reflector, which can be conveniently and quickly detected and has improved measurement accuracy.
[0005] This application provides a device for measuring the deflection angle of a reflector, which includes a light source, a beam splitter, a focusing element, and a position-sensitive detector, wherein the position-sensitive detector is disposed at the focal plane of the focusing element;
[0006] The beam splitter is used to perpendicularly incident the collimated parallel beam output by the light source onto the surface of the mirror under test; the focusing element is used to converge the reflected beam of the mirror under test onto the focal plane of the focusing element to form a focused spot after the reflected beam of the mirror under test passes through the beam splitter; and the position-sensitive detector is used to determine the deflection parameters of the mirror under test based on the position coordinates of the focused spot, the deflection parameters including pitch angle and yaw angle.
[0007] Optionally, in some embodiments of this application, the light source and the reflector under test are located on opposite sides of the beam splitter, the beam splitter is at an angle of 45 degrees to the horizontal plane, and the focusing element and the position-sensitive detector are perpendicular to the horizontal plane.
[0008] Optionally, in some embodiments of this application, the focusing element, the position-sensitive detector, and the reflector under test are respectively located on both sides of the beam splitter, the focusing element and the position-sensitive detector are on the same side, the beam splitter has an angle of 45 degrees with the horizontal plane, and the collimated parallel beam emitted by the light source is parallel to the horizontal plane.
[0009] Optionally, in some embodiments of this application, the focusing element is a convex lens.
[0010] Optionally, in some embodiments of this application, the focusing element is a concave reflector.
[0011] As can be seen from the above technical solutions, the embodiments of this application have the following advantages:
[0012] This application provides a device for measuring the deflection angle of a reflector. By using a beam splitter, a collimated parallel beam output from a light source can be incident perpendicularly onto the surface of the reflector under test, ensuring consistent linearity of the position-sensitive detector in different directions. Furthermore, the focusing element can focus the reflected beam onto the position-sensitive detector located on the focal plane, facilitating rapid detection. Since the focal length of the focusing element is fixed, the correspondence between the position coordinates of the focused spot and the deflection parameters of the reflector under test remains unchanged regardless of how the reflector under test rotates, significantly improving measurement accuracy. Attached Figure Description
[0013] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0014] Figure 1 This is a schematic diagram of the structure of a mirror deflection angle measuring device provided in an embodiment of this application;
[0015] Figure 2 An embodiment provided in this application Figure 1 A schematic diagram of the reflector under test rotating in the reflector deflection angle measuring device shown.
[0016] Figure 3 A schematic diagram of a reflector deflection angle measuring device provided for related technologies;
[0017] Figure 4 This is a schematic diagram of another mirror deflection angle measuring device provided in an embodiment of this application;
[0018] Figure 5 This is a schematic diagram of another reflector deflection angle measuring device provided in an embodiment of this application.
[0019] Figure label:
[0020] 1-Reflector deflection angle measuring device, 11-Light source, 12-Beam splitter, 13-Focusing element, 14-Position sensitive detector, 2-Reflector under test. Detailed Implementation
[0021] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0022] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0023] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The following examples illustrate this. Figures 1 to 5 The reflector deflection angle measuring device provided in the embodiments of this application is described in detail.
[0024] Please refer to Figure 1 This is a schematic diagram of a mirror deflection angle measuring device provided in an embodiment of this application. The mirror deflection angle measuring device 1 includes a light source 11, a beam splitter 12, a focusing element 13, and a position-sensitive detector 14. The position-sensitive detector 14 is disposed at the focal plane of the focusing element 13, and the light source 11 can be a laser. The beam splitter 12 can perpendicularly incident the collimated parallel beam output from the light source 11 onto the surface of the mirror 2 under test. The focusing element 13 can converge the reflected beam from the mirror 2 under test onto the focal plane of the focusing element 13 after passing through the beam splitter 12, forming a focused spot. Therefore, the position-sensitive detector 14 can determine the deflection parameters of the mirror 2 under test based on the position coordinates (Δx, Δy) of the focused spot. These deflection parameters include the pitch angle. and yaw angle
[0025] It should be noted that when the reflector 2 under test is perpendicular to the parallel beam, the position coordinates of the focused spot on the position-sensitive detector 14 are (0,0). However, as... Figure 2 As shown, when the mirror under test 2 rotates, the surface normal of the mirror under test 2 will form an angle with the laser beam, which is in the X direction. In the Y direction According to the law of reflection, the angle between the incident ray and the reflected ray in the X direction is... In the Y direction The X direction refers to the direction on the sensitive detector 14 corresponding to the position of the mirror 2 under test when it rotates around the horizontal axis in the plane, that is, the direction perpendicular to the plane. The Y direction refers to the direction on the sensitive detector 14 corresponding to the position of the mirror 2 under test when it rotates around the horizontal axis perpendicular to the plane, that is, the vertical direction in the plane. Further, according to lens relationships, the position of the focal point on the focal plane is... f represents the focal length of the focusing element 13, meaning that (Δx, Δy) corresponds to the position coordinates on the position-sensitive detector 14. Therefore, the pitch angle can be determined based on the position coordinates (Δx, Δy). and yaw angle
[0026] Furthermore, the mirror deflection angle measuring device 1 of this application embodiment can converge the reflected light beam through the focusing element 13, making it easier to more accurately determine the movement distance of the focused spot, thereby reflecting the deflection angle of the mirror 2 under test. Meanwhile, as Figure 3 As shown, the calculation relationship of the related technologies is as follows: θ represents the incident angle when the beam is obliquely incident, and L represents the perpendicular distance from the reflected light spot on the mirror under test to the PSD when the mirror surface is initially horizontal. If the rotation center of the mirror under test does not coincide with the reflected light spot, the light spot hitting the mirror surface will change after the mirror under test rotates, and the perpendicular distance L from the reflected light spot to the PSD will also change. Therefore, Δx′, Δy′ and If the correspondence changes, the accurate deflection parameters cannot be obtained. However, in this embodiment, the position-sensitive detector 14 is set on the focal plane of the focusing element 13, that is, L becomes a fixed focal length f, and the beam splitter 12 incident the parallel beam perpendicularly onto the surface of the reflector 2 under test, that is, the incident angle θ is 0 degrees. The linearity of the changes in the X direction and the Y direction is consistent. No matter how the reflector under test rotates, the correspondence between the position coordinates of the focused spot and the deflection parameters of the reflector under test remains unchanged, which greatly improves the measurement accuracy.
[0027] In some embodiments of this application, for example Figure 1 As shown, the light source 11 and the reflector 2 under test can be located on opposite sides of the beam splitter 12, with the beam splitter 12 at a 45-degree angle to the horizontal plane. The focusing element 13 and the position-sensitive detector 14 are perpendicular to the horizontal plane. For example... Figure 4 As shown, the focusing element 13, the position-sensitive detector 14, and the reflector 2 under test can also be located on opposite sides of the beam splitter 12, with the focusing element 13 and the position-sensitive detector 14 on the same side. The beam splitter 12 forms a 45-degree angle with the horizontal plane, and the collimated parallel beam emitted by the light source 11 is parallel to the horizontal plane. Figure 4 The structure shown is Figure 1The difference in the structure shown is that the combination of the focusing element 13 and the position-sensitive detector 14 is swapped with the overall position of the light source 11, which meets diverse usage requirements.
[0028] In some embodiments of this application, for example Figure 1 As shown, the focusing element 13 can be a convex lens. For example... Figure 5 As shown, the focusing element 13 can also be a concave reflector. The optical axis of the concave reflector is perpendicular to the position-sensitive detector 14. When the reflector 2 under test does not rotate, the parallel beam of light will converge at the center of the position-sensitive detector 14 after being focused by the concave reflector. The advantage of this setting is that the concave reflector can ignore the error caused by the lens thickness, which further improves the measurement accuracy.
[0029] The mirror deflection angle measuring device provided in this application embodiment can use a beam splitter to perpendicularly incident a collimated parallel beam output from the light source onto the surface of the mirror under test. This ensures that the linearity of the position-sensitive detector changes in different directions is consistent. Furthermore, the focusing element can focus the reflected beam onto the position-sensitive detector located on the focal plane, facilitating rapid detection. Since the focal length of the focusing element is fixed, the correspondence between the position coordinates of the focused spot and the deflection parameters of the mirror under test remains unchanged regardless of how the mirror under test rotates, significantly improving the measurement accuracy.
[0030] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0031] This document uses specific examples to illustrate the principles and implementation methods of this application. The descriptions of the above embodiments are only for the purpose of helping to understand the methods and core ideas of this application. Furthermore, those skilled in the art will recognize that, based on the ideas of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.
Claims
1. A device for measuring the deflection angle of a reflector, characterized in that, The mirror deflection angle measuring device (1) includes a light source (11), a beam splitter (12), a focusing element (13), and a position-sensitive detector (14), wherein the position-sensitive detector (14) is disposed at the focal plane of the focusing element (13); The beam splitter (12) is used to perpendicularly incident the collimated parallel beam output by the light source (11) onto the surface of the reflector (2) under test; the focusing element (13) is used to focus the reflected beam of the reflector (2) under test onto the focal plane of the focusing element (13) after the beam splitter (12) passes through the beam splitter (12) to form a focused spot; and the position-sensitive detector (14) is used to determine the deflection parameters of the reflector (2) under test according to the position coordinates of the focused spot, the deflection parameters including pitch angle and yaw angle.
2. The reflector deflection angle measuring device according to claim 1, characterized in that, The light source (11) and the reflector to be tested (2) are located on opposite sides of the beam splitter (12), the beam splitter (12) is at an angle of 45 degrees to the horizontal plane, and the focusing element (13) and the position-sensitive detector (14) are perpendicular to the horizontal plane.
3. The reflector deflection angle measuring device according to claim 1, characterized in that, The focusing element (13), the position-sensitive detector (14), and the reflector (2) to be tested are located on both sides of the beam splitter (12), the focusing element (13) and the position-sensitive detector (14) are on the same side, the beam splitter (12) has an angle of 45 degrees with the horizontal plane, and the collimated parallel beam emitted by the light source (11) is parallel to the horizontal plane.
4. The reflector deflection angle measuring device according to any one of claims 1 to 3, characterized in that, The focusing element (13) is a convex lens.
5. The reflector deflection angle measuring device according to any one of claims 1 to 3, characterized in that, The focusing element (13) is a concave reflector.