An apparatus for automatic monitoring, cleaning and repairing of optical elements

Abstract

The utility model discloses a kind of optical element automatic monitoring cleaning and repair device, including displacement table, displacement table controller, ultraviolet laser, filter and beam splitter connected in sequence, and the beam splitter is divided into a road monitoring light path and a road processing light path by incident ultraviolet laser beam;Laser power meter is located on monitoring light path, lens is located on processing light path, focus ultraviolet main laser beam that beam splitter divides, irradiate to the optical element sample surface to be handled and be handled area;Fluorescence spectrum testing device, dark field microscopic analysis device, temperature detector and cleaning liquid injection device point to displacement table, computer controller is connected by data line and controls displacement table controller, ultraviolet laser, fluorescence spectrum testing device, temperature detector, laser power meter, dark field microscopic analysis device and cleaning liquid injection device;The utility model device can realize online to optical element using process encountered various conditions to carry out automatic monitoring and judgment, and give pertinence processing method.

Description

Technical Field

[0001] This utility model relates to the field of optical component monitoring and cleaning repair technology, specifically to a device for automatic monitoring, cleaning and repair of optical components. Background Technology

[0002] The importance of optical components to lasers is self-evident. A laser is a device capable of generating a focused, monochromatic, high-intensity beam of light, and optical components are responsible for controlling and manipulating these beams. Internal optical components of a laser, such as mirrors, lenses, and prisms, are used to adjust the direction, focus, and shape of the laser beam. Their selection and arrangement can affect the laser's output power, beam quality, and stability. High-quality optical components can reduce laser energy loss, improve beam quality and uniformity, thereby enhancing the laser's efficiency and performance.

[0003] Currently, the quality evaluation of optical components generally employs two methods: non-destructive testing, which typically involves offline spectroscopic analysis of optical properties, surface quality, and material phases; and determining their damage threshold. These evaluation methods are usually used in combination to comprehensively assess the quality of optical components. However, contamination and minor damage to optical components are key factors affecting their performance, and consequently, their lifespan and output optical quality.

[0004] During preparation, transportation, and use, optical components may be contaminated by grease, chemical reagents, airborne dust, water vapor, etc. A series of protective measures are typically taken, such as wearing gloves during handling, avoiding direct contact with the surface of the optical components, using cleanroom environments for preparation and use, and using dry and sealed packaging materials. These methods can significantly reduce contamination of optical components. However, contamination can still occur during use due to insufficient protective gas (a small amount of air), inadequate cleanliness, or interference from other components. Contamination is difficult to observe directly, and failure to address it promptly will severely degrade the lifespan of the optical components and the quality of the output light source. Furthermore, damage to optical components during use usually begins as minor damage; if not addressed promptly, this damage can easily spread, leading to component failure. Summary of the Invention

[0005] In view of the fact that contamination is difficult to observe directly during the use of optical components, and that failure to deal with it in time will greatly degrade the life of optical components and the quality of the output light source, and that even minor damage to optical components will quickly lead to component failure if not dealt with in time, this utility model proposes an automatic monitoring, cleaning and repair device for optical components.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An automatic monitoring, cleaning, and repair device for optical components includes a displacement stage 1 for placing a sample of the optical component to be processed, a displacement stage controller 2 for driving the displacement stage 1 to move in the X, Y, and Z directions, an ultraviolet laser 3 as the processing laser source, a filter 4 for purifying the laser beam and reducing stray light interference in the output optical path of the ultraviolet laser 3, a beam splitter 5 positioned in the optical path after the filter 4 to split the incident ultraviolet laser beam into two paths: a monitoring optical path and a processing optical path; a laser power meter 6 located in the monitoring optical path to provide real-time laser power feedback signals to the computer controller 12, automatically adjusting the output of the ultraviolet laser 3 when the measured power deviates from the set value; a lens 8 located in the processing optical path to focus the main ultraviolet laser beam split by the beam splitter 5 onto the surface of the optical component sample to be processed on the displacement stage 1; and a fluorescence spectroscopy testing device. A separate displacement stage 1 is independently constructed and pointed towards the displacement stage 1 to collect fluorescence signals; a dark-field microscopy analysis device 9 is independently constructed and pointed towards the displacement stage 1 to acquire high-contrast surface morphology images of the optical element sample to be processed; a temperature detector 10 is set to the side of the displacement stage 1 to monitor the surface temperature changes of the ultraviolet laser irradiation area in real time; a cleaning fluid spraying device 11 is set to the side of the displacement stage 1 to precisely spray cleaning fluid onto the area where removable contaminants are detected; a computer controller 12 is connected to and controls the displacement stage controller 2, ultraviolet laser 3, fluorescence spectroscopy testing device 7, temperature detector 10, laser power meter 6, dark-field microscopy analysis device 9, and cleaning fluid spraying device 11 via a data cable; it directly receives and processes spectral data from fluorescence spectroscopy testing device 7, microscopic image data from dark-field microscopy analysis device 9, temperature data from temperature detector 10, and power data from laser power meter 6.

[0008] The ultraviolet laser 3 is an all-solid-state ultraviolet laser with a wavelength of 355nm and an output power range of 1-10W.

[0009] Compared with the prior art, the present invention has at least the following beneficial technical effects:

[0010] (1) Unlike conventional optical component cleaning and repair techniques, the device of this utility model can realize the judgment and treatment of optical component contamination and minor damage online without the need for frequent disassembly of optical components;

[0011] (2) The device of this utility model can realize the automated monitoring and judgment of various situations that may be encountered during the use of optical components, including various contaminations and minor damages, and provide targeted treatment methods;

[0012] (3) It can automatically determine the effect of treating component contaminants and minor damage, and carry out further cleaning, repair, continued use, or prompt consideration of component replacement;

[0013] (4) Based on spectral analysis and dark-field microscopy results, it can comprehensively judge whether the optical components are suitable for continued use, and avoid affecting the output beam quality due to the failure to detect component damage in time; Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the device for automatic monitoring, cleaning, and repair of optical components according to this utility model.

[0015] In the attached diagram: 1. Displacement stage; 2. Displacement stage controller; 3. Ultraviolet laser; 4. Filter; 5. Beam splitter; 6. Laser power meter; 7. Fluorescence spectroscopy testing device; 8. Lens; 9. Dark-field microscopy analysis device; 10. Temperature detector; 11. Cleaning fluid spraying device; 12. Computer controller. Detailed Implementation

[0016] This patent aims to propose a device for automatic monitoring, cleaning, and repair of optical components, so as to realize the monitoring and automatic cleaning of contaminants during the use of optical components, and provide a practical solution for improving the service life of optical components and improving the quality and stability of output beams.

[0017] like Figure 1As shown, this utility model discloses an automatic monitoring, cleaning, and repair device for optical components, comprising a displacement stage 1 and a displacement stage controller 2 for placing and precisely positioning the optical component sample to be processed. The displacement stage controller 2 drives the displacement stage 1 to move in the X, Y, and Z directions, precisely moving the area to be processed on the surface of the optical component sample to the monitoring or processing position. An ultraviolet laser 3 serves as the processing laser source, with a filter 4 installed on its output optical path to purify the laser beam and reduce stray light interference. A beam splitter 5 is positioned on the optical path after the filter 4, splitting the incident ultraviolet laser beam into two paths: a monitoring optical path and a processing optical path. A laser power meter 6 is located on the monitoring optical path, receiving and measuring a portion of the ultraviolet laser energy split by the beam splitter 5 in real time, providing a real-time laser power feedback signal to the computer controller 12. When the measured power deviates from the set value, the output of the ultraviolet laser 3 is automatically adjusted. Lens 8, located in the processing optical path, focuses the ultraviolet main laser beam split by beam splitter 5, precisely irradiating the area to be treated on the surface of the optical element sample on the displacement stage 1. This ultraviolet laser beam has a dual function: (a) as a low-energy-density irradiation source for treating reactive contaminants; (b) as a high-energy-density irradiation source for repairing minor damage. A fluorescence spectroscopy testing device 7, independently constructed and pointed at the displacement stage 1, collects fluorescence signals to obtain fluorescence spectral data reflecting the chemical state of the surface of the optical element sample. A dark-field microscopy analysis device 9, independently constructed and pointed at the displacement stage 1, acquires high-contrast surface morphology images of the optical element sample. A temperature detector 10, located to the side of the displacement stage 1, monitors the surface temperature changes in the ultraviolet laser irradiation area in real time and transmits the temperature signal to the computer controller 12 to prevent thermal damage. A cleaning fluid spraying device 11, located to the side of the displacement stage 1 and controlled by the computer controller 12, precisely sprays cleaning fluid onto areas where removable contaminants are detected. After the cleaning fluid forms a film and solidifies, it can be peeled off to remove the contaminants. The computer controller 12 is connected to and controls the displacement stage controller 2, ultraviolet laser 3, fluorescence spectroscopy testing device 7, temperature detector 10, laser power meter 6, dark field microscopy analysis device 9 and cleaning fluid spraying device 11 via a data cable. It directly receives and processes spectral data from fluorescence spectroscopy testing device 7, microscopic image data from dark field microscopy analysis device 9, temperature data from temperature detector 10 and power data from laser power meter 6.

[0018] The ultraviolet laser 3 is an all-solid-state ultraviolet laser with a wavelength of 355nm and an output power range of 1-10W. This laser has the advantages of high photon energy, low absorption by optical substrate materials, excellent beam quality, and a wide range of stable and adjustable power.

[0019] During operation, the optical component sample to be processed is placed on the displacement stage 1. The fluorescence spectroscopy testing device 7 and the dark-field microscope device 9 are turned on to detect the designated position of the optical component sample, acquire spectral and image data, and determine whether there is a strong fluorescence phenomenon based on the spectral test results. If there is a strong fluorescence peak, it is further determined whether the substance corresponding to the fluorescence peak is a removable contaminant (such as particulate matter, dust, etc.) or a reactive contaminant (such as carbon oxides, etc.). If a removable contaminant is present, the cleaning liquid spraying device 11 is operated by the computer controller 12 to spray the cleaning liquid and form a uniform film, which is then peeled off to complete the cleaning. If it is a reactive contaminant, the computer controller 12 turns on the ultraviolet laser 3 and uses a low-energy-density ultraviolet laser for irradiation treatment. The processing parameters are determined based on online fluorescence monitoring and temperature testing. During irradiation, the computer controller 12 ensures the stability of the laser energy density based on the real-time energy feedback from the laser power meter 6, and simultaneously monitors the data from the temperature detector 10 and the fluorescence spectral intensity. The processing is terminated when the fluorescence intensity drops to the threshold. If there is no obvious strong fluorescence on the surface of the optical element sample to be treated, it indicates that the surface contamination of the optical element sample is light or non-contamination, and no cleaning is required; it can continue to be used in the laser. The presence of bright areas (usually linear or dotted bright areas) on the surface of the optical element sample is determined based on the results of the dark-field microscopy device 9. If there are no obvious bright areas, it indicates that the surface of the optical element sample to be treated is not significantly damaged and can continue to be used. If bright areas are present, it indicates slight damage. The ultraviolet laser 3 is then controlled to output high-energy-density ultraviolet laser to repair the damaged area. During the repair process, the computer controller 12 ensures stable laser energy density based on real-time energy feedback from the laser power meter 6, and controls the temperature of the repair area to not exceed the material's tolerance limit based on data from the temperature detector 10. When the temperature of the repair area exceeds the material's tolerance limit, the operation is stopped, and the sample is allowed to cool naturally before resuming the operation until the damaged area smoothly transitions to the substrate under dark-field microscopy and the bright areas are no longer obvious. If the bright areas on the surface of the optical element sample to be treated do not significantly decrease during the repair process, it indicates that the optical element sample to be treated has suffered a certain degree of damage, and replacement of the optical element should be considered.

[0020] Taking the use of a certain optical element as an example, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

[0021] (1) Turn on the fluorescence spectroscopy test device 7 and the dark field microscopy analysis device 9 to test the required positions on the surface of the optical element and store the spectral and image data.

[0022] (2) Based on the results of the spectral experiment, determine whether there is a strong fluorescence phenomenon.

[0023] (3) The test results show a strong fluorescence peak. Identify the substance corresponding to the fluorescence peak.

[0024] (4) Determine whether the fluorescence peak corresponds to a reactive pollutant (such as carbon oxides).

[0025] (5) Turn on the irradiation treatment ultraviolet laser 3 and use a low energy density laser to irradiate the area to be tested.

[0026] (6) The parameters of the irradiated laser are determined based on online fluorescence monitoring and temperature testing based on thermal resistance. In this embodiment, it is 50 mJ / cm2.

[0027] (7) No obvious strong fluorescence phenomenon was observed on the surface of the treated sample.

[0028] (8) If there is no obvious bright area on the sample surface according to the dark field microscopy results, the component is not obviously damaged and can continue to be used.

[0029] Taking the use of a certain optical element as an example, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

[0030] (1) Turn on the fluorescence spectroscopy test device 7 and the dark field microscopy analysis device 9 to test the required positions on the surface of the optical element and store the spectral and image data.

[0031] (2) Based on the results of the spectral experiment, determine whether there is a strong fluorescence phenomenon.

[0032] (3) The test results showed no strong fluorescence peak.

[0033] (4) The test results showed no microscopic bright areas.

[0034] (5) The optical element can continue to be used.

[0035] Taking the use of a certain optical element as an example, the present invention will be further described in detail with reference to the accompanying drawings and specific embodiments.

[0036] (1) Turn on the fluorescence spectroscopy test device 7 and the dark field microscopy analysis device 9 to test the required positions on the surface of the optical element and store the spectral and image data.

[0037] (2) Based on the results of the spectral experiment, determine whether there is a strong fluorescence phenomenon.

[0038] (3) The test results show a strong fluorescence peak. Identify the substance corresponding to the fluorescence peak.

[0039] (4) Determine whether the fluorescence peak corresponds to pollutant particles and dust.

[0040] (5) Operate the cleaning fluid spray setting 11 to spray cleaning fluid onto the test location.

[0041] (6) After the cleaning solution forms a film, remove the cleaning film from the surface of the optical element to complete the cleaning process.

[0042] (7) No obvious strong fluorescence phenomenon was observed on the surface of the treated sample.

[0043] (8) Determine whether there is a bright area based on the dark field microscopy results.

[0044] (9) The test results showed a linear bright area, indicating that there was slight scratch damage.

[0045] (10) Turn on the high-energy long-wave ultraviolet laser to irradiate the bright area, stabilize the energy output according to the feedback of the power meter 6, and monitor the temperature <80℃ until the damaged area and the substrate show a smooth transition and the dark field microscopic image is not obvious, then the component can continue to be used.

Claims

1. A device for automatically monitoring, cleaning, and repairing optical components, characterized in that: The system includes a displacement stage (1) for placing the optical component sample to be processed, a displacement stage controller (2) for driving the displacement stage (1) to move in the X, Y, and Z directions, an ultraviolet laser (3) as the processing laser source, a filter (4) set on the output optical path of the ultraviolet laser (3) for purifying the laser beam and reducing stray light interference, a beam splitter (5) set on the optical path after the filter (4) to split the incident ultraviolet laser beam into two paths: a monitoring optical path and a processing optical path; a laser power meter (6) located on the monitoring optical path to provide real-time laser power feedback signals to the computer controller (12); and a lens (8) located on the processing optical path to... The ultraviolet main laser beam split by the beam splitter (5) is focused and irradiated onto the surface of the optical element sample to be processed on the displacement stage (1); the fluorescence spectroscopy test device (7) is independently built and pointed to the displacement stage (1) to collect fluorescence signals; the dark field microscopy analysis device (9) is independently built and pointed to the displacement stage (1) to obtain a high-contrast surface morphology image of the optical element sample to be processed; the temperature detector (10) is set on the side of the displacement stage (1) to monitor the surface temperature change of the ultraviolet laser irradiation area in real time; the cleaning liquid spraying device (11) is set on the side of the displacement stage (1) to accurately spray cleaning liquid onto the area where removable contaminants are detected. The computer controller (12) is connected to and controls the displacement stage controller (2), ultraviolet laser (3), fluorescence spectroscopy testing device (7), temperature detector (10), laser power meter (6), dark field microscopy analysis device (9) and cleaning fluid spraying device (11) via a data cable.

2. The device for automatic monitoring, cleaning, and repair of optical components according to claim 1, characterized in that: The ultraviolet laser (3) is an ultraviolet all-solid-state laser with a wavelength of 355nm and an output power range of 1-10W.

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