Integrated direct-drive rotary vacuum adsorption module

Abstract

The utility model provides a kind of integrated direct drive rotary vacuum adsorption module, including mounting seat, and the mounting hole of mounting seat is installed with module body, and the axial limit boss is provided on the upper end of module body, and steel ball is provided between axial limit boss and mounting seat, and module body is fixed on mounting seat by screw and screw hole;The utility model provides a kind of integrated direct drive rotary vacuum adsorption module to solve three major core problems of structure redundancy, dynamic interference, precision loss.

Description

Technical Field

[0001] This utility model relates to the field of high-precision motion control technology, and is particularly applicable to vacuum adsorption and angle compensation devices in semiconductor chip bonding and 3C electronic product screen / lens assembly, specifically an integrated direct-drive rotary vacuum adsorption module. Background Technology

[0002] In semiconductor packaging, display module assembly, and thin-film material lamination processes, it is often necessary to precisely bond flexible materials (such as FPC, polarizers, and OCA optical adhesive) to substrates. Traditional fixed vacuum heads have the following limitations: 1. Unable to compensate for angle deviations: The head angle is fixed, making it difficult to adapt to substrate tilt or curvature; 2. Low reversing efficiency: An additional robotic arm is required to rotate the workpiece, increasing cycle time; 3. Difficulty in multi-angle bonding: For example, Z-shaped folding bonding requires multiple pick-and-place operations, resulting in low efficiency; 4. Insufficient integration: Existing DDR rotary bonding heads are driven by servo motors and pulleys, resulting in a non-compact structure and no built-in vacuum channel, requiring external rotary joints, increasing size and reducing reliability; 5. Dynamic interference: Vibration from an independent vacuum generator is transmitted to the working end, causing slight vibrations in the bonded sheets (such as wafers and glass); 6. Transmission errors: The rotating platform driven by the coupling has backlash and elastic deformation, leading to micron-level angle compensation deviations and affecting the parallelism of the bonding. Utility Model Content

[0003] To address the shortcomings of existing technologies, this utility model provides an integrated direct-drive rotary vacuum adsorption module.

[0004] To achieve the above objectives, the technical solution adopted by this utility model to solve its technical problem is as follows: an integrated direct-drive rotary vacuum adsorption module, including a mounting base, a module body installed in a mounting hole on the mounting base, an axial limiting boss at the upper end of the module body, a steel ball between the axial limiting boss and the mounting base, and the module body fixed to the mounting base by screws and screw holes; the module body consists of a central rotating shaft, a bearing housing, a first bearing, a motor rotor assembly, a coil winding, a locking nut, a bearing cover, a second bearing, a first sealing ring, an air inlet seat, a second sealing ring, an encoder mounting base, an encoder, steel balls, an air pipe connector, a fitting connector, and a magnetic ring, wherein the first bearing is mounted on the bearing housing. At the bottom of the inner wall, the lower end of the central shaft passes through the first bearing and bearing seat and is fixedly and tightly connected to the fitting connector. The magnetic ring is installed and adsorbed in the mounting groove opened in the center of the bottom of the fitting connector. The motor rotor assembly is sleeved on the central shaft and locked and fixed by the lock nut. The coil winding is installed inside the bearing seat. The motor rotor assembly rotates and is sleeved inside the coil winding. The bottom of the coil winding presses against the first bearing. The bearing cover presses against the coil winding and is fixed to the bearing seat by screws and screw holes. The top of the bearing cover is sequentially and tightly fixed with an air inlet seat and an encoder mounting seat. The upper end of the central shaft is located in the inner cavity of the air inlet seat and is connected to the air pipe connector. The encoder is installed on the encoder mounting seat.

[0005] The present invention further provides an integrated direct-drive rotary vacuum adsorption module, wherein the air inlet seat and the bearing cover are sealed by a first sealing ring, and the air inlet seat and the encoder mounting seat are sealed by a second sealing ring.

[0006] The present invention further provides an integrated direct-drive rotary vacuum adsorption module, wherein the bearing seat is installed in the mounting hole opened on the mounting base, and four steel ball positioning grooves are arranged in a rectangular pattern on the outer side of the mounting hole. The steel balls are installed in the steel ball positioning grooves, and the surface of the axial limiting boss is in contact with the steel balls.

[0007] The present invention further provides an integrated direct-drive rotary vacuum adsorption module, wherein the through shaft is a 304 stainless steel hollow tube, and the inner wall is polished to the point that the arithmetic mean deviation of the contour is less than or equal to 0.8um.

[0008] The beneficial effects of this utility model are as follows: The integrated direct-drive rotary vacuum adsorption module provided by this utility model solves three core problems: structural redundancy, dynamic interference, and precision loss. Specifically, it is manifested in the following aspects: 1. Miniaturized integration: The vacuum adsorption channel is built into the DDR motor rotor structure, eliminating the need for an external rotary joint; 2. Zero-contact transmission: The direct-drive motor eliminates mechanical transmission errors and high-frequency jitter during vacuum adsorption and rotation; 3. Sub-arc level compensation: It is adapted to urad (micro-arc) level closed-loop control to meet high-precision scenarios such as semiconductor photoresist bonding. Attached Figure Description

[0009] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0010] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0011] Figure 2 This is an exploded view of the structure of this utility model;

[0012] Figure 3 This is a schematic diagram of the main structure of this utility model;

[0013] Figure 4 for Figure 3 A schematic diagram of the AA-direction cross-sectional structure;

[0014] In the diagram, 1. Central shaft; 2. Bearing housing; 3. First bearing; 4. Motor rotor assembly; 5. Coil winding; 6. Locking nut; 7. Bearing cover; 8. Second bearing; 9. First sealing ring; 10. Air inlet seat; 11. Second sealing ring; 12. Encoder mounting seat; 13. Encoder; 14. Steel ball; 15. Mounting seat; 16. Air pipe connector; 17. Magnet ring; 18. Axial limiting boss; 19. Module body; 20. Fitting connector. Detailed Implementation

[0015] The preferred embodiments of the present invention will be described below with reference to specific implementation methods. It should be understood that the preferred embodiments described herein are only for illustration and explanation of the present invention and are not intended to limit the present invention.

[0016] Example 1

[0017] like Figures 1 to 4 The integrated direct-drive rotary vacuum adsorption module shown includes a mounting base 15. A module body 19 is installed in the mounting hole on the mounting base 15. An axial limiting boss 18 is provided at the upper end of the module body 19. A steel ball 14 is provided between the axial limiting boss 18 and the mounting base 15. The module body 19 is fixed to the mounting base 15 by screws and screw holes.

[0018] The module body 19 consists of a central shaft 1, a bearing housing 2, a first bearing 3, a motor rotor assembly 4, a coil winding 5, a locking nut 6, a bearing cover 7, a second bearing 8, a first sealing ring 9, an air inlet seat 10, a second sealing ring 11, an encoder mounting seat 12, an encoder 13, a steel ball 14, an air pipe connector 16, a bonding connector 20, and a magnetic ring 17. The first bearing 3 is installed at the bottom of the inner wall of the bearing housing 2. The lower end of the central shaft 1 passes through the first bearing 3 and the bearing housing 2 and is fixedly and tightly connected to the bonding connector 20. The magnetic ring 17 is installed and adsorbed on the mounting hole at the center of the bottom of the bonding connector 20. The motor rotor assembly 4 is fitted onto the central shaft 1 and locked in place by the locking nut 6. The coil winding 5 is installed inside the bearing seat 2. The motor rotor assembly 4 rotates and is fitted into the coil winding 5. The bottom of the coil winding 5 presses against the first bearing 3. The bearing cover 7 presses against the coil winding 5 and is fixed to the bearing seat 2 by screws and screw holes. The top of the bearing cover 7 is sequentially and tightly fixed with an air inlet seat 10 and an encoder mounting seat 12. The upper end of the central shaft 1 is located in the inner cavity of the air inlet seat 10 and is connected to the air pipe connector 16. The encoder 13 is installed on the encoder mounting seat 12.

[0019] The gas pipe connector 16 connects to the upper end of the central rotating shaft 1. The gas passes through the polished inner cavity and directly reaches the adsorption surface component connected below the fitting connector 20. The magnetic ring 17 generates a uniform adsorption force. The high-gloss inner wall of the rotating shaft reduces gas turbulence, which is beneficial to shortening the vacuum response time.

[0020] The motor rotor assembly 4 is fitted into the central shaft 1 and secured by the lock nut 6; the coil winding 5 is installed into the inner cavity of the bearing housing 2 and presses against the first bearing 3; the bearing cover 7 is secured to the coil winding by screws, forming a closed electromagnetic drive cavity. The integrated design of the direct drive motor and the shaft is beneficial for improving torque density.

[0021] Preferably, the air intake seat 10 is sealed to the bearing cover 7 by a first sealing ring 9, and the air intake seat 10 is sealed to the encoder mounting seat 12 by a second sealing ring 11.

[0022] Preferably, the bearing housing 2 is installed in a mounting hole on the mounting base 15. Four steel ball positioning grooves are arranged in a rectangular pattern on the outer side of the mounting hole. Steel balls 14 are installed in these grooves, and the surface of the axial limiting boss 18 contacts the steel balls 14. When the bearing housing 2 is inserted into the mounting hole of the mounting base 15, the four steel balls 14 fall precisely into the rectangular positioning grooves on the outer side of the mounting hole. The axial limiting boss 18 of the module body 19 presses against the steel balls 14, forming an axial constraint, while allowing slight radial movement to compensate for installation errors. The steel ball limiting structure reduces frictional loss and improves axial positioning accuracy.

[0023] Preferably, the central shaft 1 is a 304 stainless steel hollow tube, and the inner wall is polished to Ra (arithmetic mean deviation of profile) less than or equal to 0.8 μm. The central shaft 1 is made of 304 stainless steel tube with the inner wall polished to Ra≤0.8μm, and the lower end passes through the bearing seat 2 and is threaded and locked to the fitting connector 20. The magnetic ring 17 is embedded in the mounting groove at the bottom of the fitting connector.

[0024] Preferably, encoder 13 is an optical encoder with a detection repeatability accuracy of 0.025°.

[0025] Example 2

[0026] This embodiment is designed for multi-station automation scenarios, optimizing installation and functional expansion. The basic technical solution is the same as that in Embodiment 1, but the difference lies in:

[0027] The mounting holes of mounting base 15 adopt ISO standard flange interfaces and are connected to external equipment via four sets of M4 screws. The steel ball positioning groove is designed as a V-shaped guide groove, allowing the module body 19 to self-align within a range of ±0.5mm, reducing the machining requirements of the installation reference surface. The V-shaped steel ball guide groove greatly reduces the equipment installation and commissioning time.

[0028] The encoder mounting base 12 has a reserved through-hole slot, which is compatible with incremental and absolute encoders. Users can choose to equip it with a 23-bit multi-turn absolute encoder as needed.

[0029] Spiral heat dissipation fins are machined on the outer wall of bearing housing 2, and the coil winding 5 uses H-grade high-temperature resistant enameled wire, allowing the module to operate continuously at an ambient temperature of 80℃. Thermally conductive silicone grease is filled between bearing cover 7 and air intake seat 10, and heat is quickly dissipated through the aluminum alloy base of mounting base 15. The heat dissipation structure controls the motor temperature rise within 15K, extending the life to 20,000 hours.

[0030] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0031] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Furthermore, the various method steps in the technical solution of this application can be reversed or their order changed, yet still fall within the scope of the utility model covered by this application. Thus, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalents, this application also intends to include these modifications and variations.

Claims

1. An integrated direct-drive rotary vacuum adsorption module, characterized in that, The module includes a mounting base (15), a module body (19) is installed in the mounting hole on the mounting base (15), an axial limiting boss (18) is provided at the upper end of the module body (19), a steel ball (14) is provided between the axial limiting boss (18) and the mounting base (15), and the module body (19) is fixed on the mounting base (15) by screws and screw holes; The module body (19) consists of a central shaft (1), a bearing housing (2), a first bearing (3), a motor rotor assembly (4), a coil winding (5), a locking nut (6), a bearing cover (7), a second bearing (8), a first sealing ring (9), an air inlet seat (10), a second sealing ring (11), an encoder mounting seat (12), an encoder (13), a steel ball (14), an air pipe connector (16), a fitting connector (20), and a magnetic ring (17). The first bearing (3) is installed at the bottom of the inner wall of the bearing housing (2). The lower end of the central shaft (1) passes through the first bearing (3) and the bearing housing (2) and is fixedly and tightly connected to the fitting connector (20). The magnetic ring (17) is installed and adsorbed on the bottom of the fitting connector (20). The motor rotor assembly (4) is fitted onto the central shaft (1) and locked in place by a locking nut (6). The coil winding (5) is installed inside the bearing seat (2). The motor rotor assembly (4) rotates and is fitted into the coil winding (5). The bottom of the coil winding (5) presses against the first bearing (3). The bearing cover (7) presses against the coil winding (5) and is fixed to the bearing seat (2) by screws and screw holes. The top of the bearing cover (7) is sequentially and tightly fixed with an air inlet seat (10) and an encoder mounting seat (12). The upper end of the central shaft (1) is located in the inner cavity of the air inlet seat (10) and communicates with the air pipe connector (16). The encoder (13) is installed on the encoder mounting seat (12).

2. The integrated direct-drive rotary vacuum adsorption module according to claim 1, characterized in that, The air intake seat (10) is sealed to the bearing cover (7) by a first sealing ring (9), and the air intake seat (10) is sealed to the encoder mounting seat (12) by a second sealing ring (11).

3. The integrated direct-drive rotary vacuum adsorption module according to claim 2, characterized in that, The bearing housing (2) is installed in the mounting hole opened on the mounting base (15). Four steel ball positioning grooves are arranged in a rectangular pattern on the outside of the mounting hole. The steel ball (14) is installed in the steel ball positioning groove. The surface of the axial limiting boss (18) is in contact with the steel ball (14).

4. The integrated direct-drive rotary vacuum adsorption module according to claim 2 or 3, characterized in that, The central pivot shaft (1) is a 304 stainless steel hollow tube, and the inner wall is polished to the point that the arithmetic mean deviation of the outline is less than or equal to 0.8 μm.

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