Thinning machine cover structure

Abstract

The utility model discloses a kind of thinning machine cover structure, it is related to the technical field of semiconductor processing, including water tank lower and horizontal quick fixture, the water tank lower top is fixedly connected with water tank upper by bolt, and the left side of water tank upper top is connected with folding cover by hinge, installation mechanism is arranged at water tank upper and folding cover. The thinning machine cover structure, when water tank inside or main shaft lower end needs maintenance, loosen horizontal quick fixture, lift up the lower end of piano case, magnet screw and upper end magnetism are attracted, lift folding cover handle, fold to one side, the lower end of main shaft and water tank cover lower part can be maintained. After maintenance, folding cover is closed, the lower end of piano case is pressed to the upper end of water tank cover, press horizontal quick fixture handle, that is, complete the lower end of piano case compression fixed. This structure can protect main shaft, and improve the efficiency of thinning machine main shaft lower end component disassembly maintenance.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a thinning machine cover structure. Background Technology

[0002] During the wafer thinning process, the spindle of the thinning machine needs to be protected. Specifically, the upper end of the bellows cover is connected to the connecting plate at the lower end of the spindle seat, and the lower end of the bellows cover is connected to the water tank cover at the upper end of the upper water tank for protection. In the existing technology, the water tank cover is a single perforated plate, which is connected to the edge of the upper water tank cover by screws. When the lower end of the spindle, the vacuum chuck, or the thickness measuring device needs maintenance, the entire water tank cover plate needs to be removed before maintenance of each component can be performed. This results in inconvenient disassembly and installation, and low work efficiency.

[0003] Therefore, in view of this, we have studied and improved the existing structure to address its shortcomings, and proposed a thinner cover structure in order to achieve a more practical purpose. Utility Model Content

[0004] The purpose of this utility model is to provide a thinner machine cover structure to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a thinning machine cover structure, including a lower water tank and a horizontal quick clamp, wherein the top of the lower water tank is fixedly connected to the upper water tank by bolts, and a folding cover is connected to the top left side of the upper water tank by a hinge, and an installation mechanism is provided on the upper water tank and the folding cover.

[0006] Furthermore, the installation mechanism includes a fixing plate on the right side of the water tank that works in conjunction with the folding cover, and an accordion cover is provided between the folding cover and the fixing plate. The bottom of the accordion cover is connected and fixed to the folding cover and the fixing plate by magnetic screws, and an accordion cover fixing plate is installed on the top of the accordion cover. Four horizontal quick clamps are respectively fixed on the top of the folding cover and the fixing plate, and the horizontal quick clamps work in conjunction with the accordion cover. The horizontal quick clamps press down or lift the clamp handles to quickly press and release the lower end of the accordion cover.

[0007] Furthermore, a handle is fixedly connected to the right side of the upper surface of the folding cover near the accordion cover, and the folding cover is used for convenient folding and opening.

[0008] Furthermore, a connecting gasket is provided at the bottom of the accordion cover.

[0009] Furthermore, a magnet is fixedly connected to the outer ring of the upper surface of the bellows cover fixing plate, and the magnet is distributed in a circumferential shape along the center of the bellows cover fixing plate. The magnet is used in conjunction with a magnetic screw.

[0010] Furthermore, a main shaft seat is connected to the top of the bellows cover fixing plate.

[0011] Furthermore, a spindle is provided on the top of the spindle seat.

[0012] This utility model provides a thinner machine cover structure, which has the following beneficial effects:

[0013] When maintenance is required inside the water tank or at the lower end of the main shaft, loosen the horizontal quick-release clamp, lift the lower end of the bellows cover, and the magnetic screw will engage with the upper magnet. Lift the handle of the flip-up cover and flip it to one side to perform maintenance on the lower end of the main shaft and the lower part of the water tank cover. After maintenance, close the flip-up cover, press the lower end of the bellows cover down to the upper end of the water tank cover, and press down the handle of the horizontal quick-release clamp to secure the lower end of the bellows cover. This structure not only protects the main shaft but also improves the efficiency of disassembly and maintenance of the lower part of the thinning machine's main shaft. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the overall protective cover of the thinning machine cover structure of this utility model.

[0015] Figure 2 A three-dimensional structural diagram of the overall protective cover of the thinning machine cover structure of this utility model when opened;

[0016] Figure 3 This is a schematic diagram of a thinning machine cover structure according to the present invention.

[0017] In the diagram: 1. Lower part of water tank; 2. Upper part of water tank; 3. Folding cover; 4. Fixing plate; 5. Bellows cover; 6. Magnetic screw; 7. Bellows cover fixing plate; 8. Horizontal quick clamp; 9. Handle; 10. Connecting washer; 11. Magnet; 12. Spindle seat; 13. Spindle. Detailed Implementation

[0018] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0019] like Figures 1-3As shown, a thinning machine cover structure includes a lower water tank 1 and horizontal quick clamps 8. The top of the lower water tank 1 is fixedly connected to an upper water tank 2 by bolts, and a folding cover 3 is connected to the top left side of the upper water tank 2 by a hinge. An installation mechanism is provided at the upper water tank 2 and the folding cover 3. A fixing plate 4 is provided on the right side of the upper water tank 2 to cooperate with the folding cover 3, and an accordion cover 5 is provided between the folding cover 3 and the fixing plate 4. The bottom of the accordion cover 5 is connected and fixed to the folding cover 3 and the fixing plate by magnetic screws 6, and an accordion cover fixing plate 7 is installed on the top of the accordion cover 5. Four horizontal quick clamps 8 are respectively fixed to the top of the folding cover 3 and the fixing plate 4, and the horizontal quick clamps 8 cooperate with the accordion cover 5. The horizontal quick clamps 8 press down or lift the clamp handle to quickly press and release the lower end of the accordion cover.

[0020] Among them, such as Figure 1 and Figure 2 As shown, a handle 9 is fixedly connected to the right side of the upper surface of the folding cover 3 near the accordion cover 5. The folding cover 3 is used for convenient folding and opening. A connecting washer 10 is provided at the bottom of the accordion cover 5. A magnet 11 is fixedly connected to the outer ring of the upper surface of the accordion cover fixing plate 7. The magnet 11 is distributed in a circumferential shape along the center of the accordion cover fixing plate 7. The magnet 11 is used in conjunction with the magnetic screw 6. A main shaft seat 12 is connected to the top of the accordion cover fixing plate 7. A main shaft 13 is provided on the top of the main shaft seat 12.

[0021] The magnetic screw 6 and the magnet 11 are designed to work together so that when the lower end of the bellows cover 5 is lifted, the magnetic screw 6 is attracted to the magnet 11 at the upper end of the bellows cover fixing plate 7 to avoid interference. In addition, the connecting washer 10 at the bottom of the bellows cover 5 not only improves the water discharge capacity, but also increases the coefficient of friction, thereby improving the firmness of the connection.

[0022] In summary, as Figure 1-3 As shown, this thinning machine cover structure, when in use, firstly, when maintenance is needed inside the water tank or at the lower end of the main shaft 13, loosen the horizontal quick clamp 8 and lift the lower end of the bellows cover 5. Utilizing the interaction between the magnetic screw 6 and the magnet 11, the magnetic screw 6 is attracted to the magnet 11 at the upper end of the bellows cover fixing plate 7, preventing the bellows cover 5 from falling and interfering with the maintenance work. Then, lift the handles 9 on both sides of the folding cover 3, causing the folding cover 3 to fold to one side, allowing maintenance of the lower end of the main shaft 13 and the lower part of the water tank cover. After maintenance, close the folding cover 3, pressing the lower end of the bellows cover 5 down to the upper end of the water tank cover. Press down the handle 8 of the horizontal quick clamp to tighten and fix the lower end of the bellows cover 5. Furthermore, the connecting washer 10 at the bottom of the bellows cover 5 not only improves the water drainage capacity but also increases the coefficient of friction, thereby enhancing the connection's firmness. This structure not only protects the main shaft 13 but also improves the efficiency of disassembly and maintenance of the lower part of the thinning machine's main shaft.

[0023] The embodiments of this utility model are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the utility model to the forms disclosed. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical applications of this utility model, and to enable those skilled in the art to understand this utility model and design various embodiments with various modifications suitable for a particular purpose.

Claims

1. A thinning machine cover structure, comprising a water tank lower part (1) and a horizontal quick clamp (8), characterized in that: The top of the lower part (1) of the water tank is fixedly connected to the upper part (2) of the water tank by bolts, and the top left side of the upper part (2) of the water tank is connected to the folding cover (3) by hinges. The upper part (2) of the water tank and the folding cover (3) are provided with installation mechanisms.

2. The thinning machine cover structure according to claim 1, characterized in that, The installation mechanism includes a fixing plate (4) on the right side of the water tank (2) that works in conjunction with the folding cover (3), and a bellows cover (5) is provided between the folding cover (3) and the fixing plate (4). The bottom of the bellows cover (5) is connected and fixed to the folding cover (3) and the fixing plate by magnetic screws (6), and a bellows cover fixing plate (7) is installed on the top of the bellows cover (5). Four horizontal quick clamps (8) are fixed on the top of the folding cover (3) and the fixing plate (4), and the horizontal quick clamps (8) work in conjunction with the bellows cover (5). The horizontal quick clamps (8) press down or lift the clamp handle to quickly press and release the lower end of the bellows cover.

3. The thinning machine cover structure according to claim 1, characterized in that, A handle (9) is fixedly connected to the right side of the upper surface of the folding cover (3) near the accordion cover (5), and the folding cover (3) is used for convenient folding and opening.

4. The thinning machine cover structure according to claim 3, characterized in that, A connecting washer (10) is provided at the bottom of the accordion cover (5).

5. The thinning machine cover structure according to claim 2, characterized in that, The outer ring of the upper surface of the bellows cover fixing plate (7) is fixedly connected with a magnet (11), and the magnet (11) is distributed in a circular shape along the center of the bellows cover fixing plate (7). The magnet (11) is used in conjunction with the magnetic screw (6).

6. The thinning machine cover structure according to claim 2, characterized in that, The top of the bellows cover fixing plate (7) is connected to the main shaft seat (12).

7. The thinning machine cover structure according to claim 6, characterized in that, A spindle (13) is provided on the top of the spindle seat (12).

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