Cooling disc transfer tool
By designing a limiting support structure and a transparent protective cover for the cooling tray transfer fixture, the problems of scratches and impurities entering the cooling tray during transportation were solved, achieving stable transportation and convenient cleaning of the cooling tray.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI RUISHENG SEMICON TECH CO LTD
- Filing Date
- 2025-04-17
- Publication Date
- 2026-06-16
AI Technical Summary
Existing cooling trays are easily scratched and can easily get contaminants in during handling, affecting yield and performance.
Design a cooling tray transfer fixture, including a limiting support structure and a transparent protective cover. The limiting support structure prevents sliding friction, and the transparent protective cover prevents impurities from entering.
It effectively prevents the cooling tray from being scratched during transportation and prevents impurities from entering the cavity, improving the yield and reliability of use, while also facilitating cleaning.
Smart Images

Figure CN224361674U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of etching processing technology, and in particular to a cooling plate transfer fixture. Background Technology
[0002] The cooling plate is a crucial component in the etching machine used for cooling. It helps control the temperature during the etching process, ensuring etching quality and extending the equipment's lifespan. The cooling plate has high aesthetic requirements; its surface needs to be polished to a mirror finish, with a roughness of approximately Ra0.1µm.
[0003] Current methods for handling cooling trays typically involve manual transport, where the trays are placed on a transport trolley and then dragged by workers. However, during this process, slippage and friction can easily occur between the cooling tray and the trolley, resulting in numerous scratches on the tray surface. This leads to multiple reworks and reduces the yield rate of the cooling trays. Furthermore, during transport, metal shavings, dust, and other particulate matter from the workshop can enter the cooling tray's internal cavity, causing the particle count to exceed acceptable levels during use and ultimately affecting its performance.
[0004] Therefore, there is an urgent need to design a transfer device that can avoid scratching the cooling plate and prevent impurities from entering the cooling plate. Utility Model Content
[0005] The purpose of this utility model is to provide a cooling plate transfer fixture that can not only prevent the cooling plate from being scratched, but also prevent foreign objects from entering the cooling plate cavity, and is also very easy to clean.
[0006] To achieve this objective, the present invention adopts the following technical solution:
[0007] A cooling tray transfer fixture, comprising:
[0008] Base;
[0009] A limiting support structure is disposed on the base, and the limiting support structure is used to support the cooling plate and limit the position of the cooling plate;
[0010] A transparent protective cover is disposed above the base and covers the limiting support structure. A closed receiving cavity is formed between the transparent protective cover and the base, and the receiving cavity is used to accommodate the cooling plate supported by the limiting support structure.
[0011] Optionally, the limiting support structure includes at least two stepped blocks, each stepped block having a first step surface, and the at least two stepped blocks are arranged at intervals on the base, with the at least two first step surfaces forming a support surface for supporting the cooling plate.
[0012] Optionally, the step block is slidably disposed on the base, and the support range of the support surface can be changed by sliding the step block.
[0013] Optionally, the limiting support structure includes a stepped column, one end of which is inserted into the through hole of the cooling plate, and the other end of which is fixed to the base. The stepped column is provided with a second step surface, which is used to support the cooling plate.
[0014] Optionally, the base has a blind hole, and the stepped post can be inserted into the blind hole.
[0015] Optionally, the base has a slot, and the open end of the transparent protective cover can be inserted into the slot.
[0016] Optionally, one side of the open end of the transparent protective cover is hinged to the base, and the transparent protective cover is rotatably mounted on the base.
[0017] Optionally, a sealing structure is provided between the transparent protective cover and the base.
[0018] Optionally, the transparent protective cover is provided with a handle.
[0019] Optionally, the base is a structural component made of ABS material;
[0020] And / or, the limiting support structure is a structural component made of PA66 material;
[0021] And / or, the transparent protective cover is a shell made of acrylic sheet.
[0022] The beneficial effects of this utility model are:
[0023] This utility model provides a cooling tray transfer fixture that, by limiting the cooling tray to a limiting support structure, prevents sliding friction between the cooling tray and the base during transport, thus avoiding scratches on the cooling tray. A transparent protective cover over the base prevents metal shavings, dust, and other particles from entering the cooling tray cavity, thus avoiding any impact on the cooling tray's use. Furthermore, when metal shavings, dust, or other particles adhere to the transparent protective cover, its transparency allows workers to directly see the location of the impurities, making cleaning of the cooling tray transfer fixture very convenient. Attached Figure Description
[0024] Figure 1 This is a front view of the cooling tray transfer fixture provided in this embodiment of the utility model;
[0025] Figure 2 This is a structural schematic diagram of the base and stepped block provided in an embodiment of the present utility model;
[0026] Figure 3 This is a top view of the base and step blocks provided in this embodiment of the utility model.
[0027] In the picture:
[0028] 1. Base; 11. Blind hole;
[0029] 2. Step block; 21. First step surface; 22. Fixing hole;
[0030] 3. Transparent protective cover; 4. Handle. Detailed Implementation
[0031] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.
[0032] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0033] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0034] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0035] Example 1
[0036] like Figure 1 and Figure 2 As shown, this embodiment provides a cooling tray transfer fixture, which includes a base 1, a limiting support structure, and a transparent protective cover 3. The limiting support structure is disposed on the base 1 and is used to support the cooling tray and limit its movement. The transparent protective cover 3 is disposed above the base 1 and covers the limiting support structure. A closed receiving cavity is formed between the transparent protective cover 3 and the base 1, which is used to receive the cooling tray supported by the limiting support structure.
[0037] The cooling tray transfer fixture provided in this embodiment limits the cooling tray to the limiting support structure, thereby preventing sliding friction between the cooling tray and the base 1 during the handling process and avoiding scratches on the cooling tray. The fixture also features a transparent protective cover 3 over the base 1, preventing airborne metal shavings, dust, and other particles from entering the cooling tray cavity and affecting its use. Furthermore, when airborne metal shavings, dust, or other particles adhere to the transparent protective cover 3, its transparency allows workers to directly see the location of the impurities, making cleaning the cooling tray transfer fixture very convenient.
[0038] like Figure 2 and Figure 3 As shown, in this embodiment, the base 1 is a square plate structure. This shape of the base 1 is simple in structure and easy to manufacture, and it also facilitates the manufacture of the transparent protective cover 3 that matches the base 1. It is understood that in some other embodiments, the shape of the base 1 can be selected according to actual needs, and there is no limitation here.
[0039] Optionally, the base 1 is a structural component made of ABS material. ABS is a high-strength, tough, and easily processed thermoplastic polymer material. By using ABS material to make the base 1, deformation of the base 1 during the handling of the cooling tray can be avoided. Furthermore, structural components made of ABS material are lightweight, thereby reducing the overall weight of the cooling tray transfer fixture and facilitating handling by personnel. It is understood that in some other embodiments, the base 1 may also be made of other lightweight and non-deformable materials, and this is not a limitation.
[0040] In some embodiments, the limiting support structure includes at least two stepped blocks 2, each stepped block 2 having a first stepped surface 21. The at least two stepped blocks 2 are spaced apart on the base 1, and the at least two first stepped surfaces 21 constitute a support surface for supporting the cooling tray. Each stepped block 2 also includes a stepped slope at an angle to the first stepped surface 21, and the at least two stepped slopes constitute a limiting surface for limiting the cooling tray. By placing the cooling tray on the at least two stepped blocks 2, the support surface formed by the at least two first stepped surfaces 21 supports the cooling tray above the base 1, and the at least two stepped slopes perpendicular to the first stepped surfaces 21 limit the cooling tray, thereby preventing the cooling tray from sliding during transport and preventing scratches.
[0041] like Figure 2 and Figure 3 As shown, the limiting support structure in this embodiment includes four stepped blocks 2, all of which are identical fan-shaped structural blocks. These four stepped blocks 2 are evenly spaced along the circumference of the base 1. The first step surface 21 on each stepped block 2 is also fan-shaped, resulting in a curved surface perpendicular to the first step surface 21. This curved surface can fit against the sidewall of the disc-shaped cooling plate, thus achieving stable support and limiting of the cooling plate. It is understood that in some other embodiments, the number of stepped blocks 2 can be adaptively set according to actual needs; the shape of the stepped blocks 2 can also be adaptively changed according to the shape of the cooling plate, as long as it can achieve support and limiting of the cooling plate.
[0042] like Figure 2 and Figure 3 As shown, in some embodiments, the step block 2 is also provided with a fixing hole 22, and the base 1 is provided with a threaded hole at the corresponding position of the fixing hole 22. By tightening the screw in the fixing hole 22 and the threaded hole, the step block 2 is fixed on the base 1 to achieve stable support and limit of the cooling plate.
[0043] Furthermore, to expand the applicability of the cooling tray transfer fixture, the stepped block 2 can also be slidably mounted on the base 1. By sliding the stepped block 2, the support range of the support surface can be changed, thereby supporting cooling trays of different sizes. Optionally, a slider is provided on the stepped block 2, and a groove is provided on the base 1. The slider can move within the groove, thereby allowing the stepped block 2 to slide on the base 1. It is understood that in some other embodiments, other structures can also be used to achieve the sliding of the stepped block 2 on the base 1, such as providing a groove on the stepped block 2 and a slide rail on the base 1, thereby allowing the stepped block 2 to move on the slide rail. Optionally, the slider or slide rail can be a dovetail block, and the groove can be a dovetail groove.
[0044] It should be noted that when the step block 2 is slidably set on the base 1, the fixing method of the step block 2 can also be adjusted accordingly. For example, a limiting hole is set at the preset position of the slide groove, and a pin is inserted to fix it after the slider is in place. Then, when the staff adjusts the step block 2 to the required position, the step block 2 is fixed at that position.
[0045] Optionally, in this embodiment, the limiting support structure is a structural component made of PA66 material. PA66 can ensure dimensional stability through its high elastic modulus, while relying on its toughness to resist impact loads. Thus, it can stably support the cooling plate while avoiding damage to it. It is understood that in some other embodiments, the limiting support structure may also be made of other materials that are not easily deformed and have a certain degree of toughness, and this is not limited here.
[0046] like Figure 1 As shown, in this embodiment, the transparent protective cover 3 is a square cover structure with one open end, and the shape of the open end is the same as the shape of the base 1, thus allowing the transparent protective cover 3 to be placed on the base 1. By using the transparent protective cover 3 to cover the base 1, the operator can clearly observe the condition of the cooling plate inside the tooling during the handling process. When the cooling plate detaches from the limiting support structure or falls off due to bumps, the operator can promptly detect and adjust it, thereby avoiding damage to the cooling plate. In addition, when air or impurities in the internal flow channels of the cooling plate adhere to the transparent protective cover 3, the operator can directly see it, thus facilitating the cleaning of the tooling. It should be noted that the cross-sectional shape of the transparent protective cover 3 can be the same as or different from the cross-sectional shape of the base 1. For example, the transparent protective cover 3 can be a cylindrical cover structure, and the base 1 can be a square plate structure or a circular plate structure. The cross-sectional dimension of the transparent protective cover 3 is not larger than the cross-sectional dimension of the base 1.
[0047] Optionally, in this embodiment, the transparent protective cover 3 is a shell made of acrylic sheet. Acrylic sheet has high light transmittance, is lightweight, and has strong impact resistance. While providing good protection, it can also reduce the overall weight of the cooling tray transfer fixture, making it easier for workers to handle. It is understood that in some other embodiments, the transparent protective cover 3 may also be made of other materials with transparent and lightweight properties, and this is not limited here.
[0048] Furthermore, to facilitate the disassembly of the transparent protective cover 3 and the base 1 and improve the handling efficiency of the cooling tray, a slot is provided on the base 1 in this embodiment. The shape of the slot is adapted to the open end of the transparent protective cover 3, and the open end of the transparent protective cover 3 can be inserted into the slot. Thus, when it is necessary to place or remove the cooling tray, it is only necessary to lift the transparent protective cover 3 upwards, which is convenient for operators.
[0049] Furthermore, the transparent protective cover 3 is also equipped with a handle 4. By setting the handle 4, when the transparent protective cover 3 needs to be moved away or placed on the base 1, the staff can operate it by holding the handle 4 with only one hand, which makes it more convenient for the staff to operate.
[0050] Furthermore, to prevent impurities in the air from entering the cooling tray transfer fixture through the assembly gap between the transparent protective cover 3 and the base 1 and contaminating the cooling tray, a sealing structure is provided between the transparent protective cover 3 and the base 1. Optionally, the sealing structure can be a sealing ring or a sealing strip.
[0051] Example 2
[0052] This embodiment provides a cooling tray transfer fixture. The cooling tray transfer fixture in this embodiment has a basically the same structure as the cooling tray transfer fixture in Embodiment 1, except that the limiting support structure is a stepped ring. The cooling tray is placed inside the stepped ring, and the annular stepped surface on the stepped ring supports the bottom surface of the cooling tray. The annular stepped slope on the stepped ring limits the annular side wall surface of the cooling tray. By supporting and limiting the cooling tray through the stepped ring, the cooling tray can be made more stable during transportation.
[0053] Example 3
[0054] This embodiment provides a cooling tray transfer fixture. The structure of this fixture is basically the same as that of the cooling tray transfer fixture in Embodiment 1, with the only difference being that the limiting support structure includes a stepped column. One end of the stepped column is inserted into the through hole of the cooling tray, and the other end is fixed to the base 1. A second step surface is provided on the stepped column to support the cooling tray. When the cooling tray is limited and supported by the stepped column, since the limiting is achieved by directly inserting one end of the stepped column into the through hole of the cooling tray, the size of the cooling tray does not need to be considered. Therefore, cooling trays of various sizes can be supported without moving the stepped column.
[0055] Optionally, such as Figure 3 As shown, a blind hole 11 is provided on the base 1, and the stepped post can be inserted into the blind hole 11 to fix the stepped post to the base 1. It is understood that in some other embodiments, the stepped post can also be fixed to the base 1 in other ways, which is not limited here.
[0056] It should be noted that the number of stepped columns can be set according to actual needs, and there is no limit here.
[0057] Example 4
[0058] This embodiment provides a cooling tray transfer fixture. The difference between this fixture and those in Embodiments 1 or 3 is that the limiting support structure in this embodiment includes both stepped blocks 2 and stepped columns. The stepped blocks 2 and stepped columns together support and limit the cooling tray, making it more stable during transport. The number of stepped blocks 2 and stepped columns can be one or more depending on requirements.
[0059] Example 5
[0060] This embodiment provides a cooling tray transfer fixture. The difference between the cooling tray transfer fixture in this embodiment and those in Embodiment 2 or Embodiment 3 is that the limiting support structure includes both a stepped ring and a stepped column. The stepped ring and the stepped column together support and limit the cooling tray. The stepped ring supports the edge part of the cooling tray, and the stepped column supports the non-edge part of the cooling tray, which makes the cooling tray more stable during transportation.
[0061] Example 6
[0062] This embodiment provides a cooling tray transfer fixture. The cooling tray transfer fixture in this embodiment has a basically the same structure as the cooling tray transfer fixture in Embodiment 1, the only difference being that: one side of the open end of the transparent protective cover 3 is hinged to the base 1, and the transparent protective cover 3 is rotatably mounted on the base 1. By rotatably mounting the transparent protective cover 3 on the base 1, when the operator loads or unloads the cooling tray, only the transparent protective cover 3 needs to be rotated, making the operation more convenient and further improving the handling efficiency of the cooling tray.
[0063] In summary, the cooling tray transfer fixture in all embodiments of this utility model, by placing the cooling tray on the limiting support structure, prevents sliding friction between the cooling tray and the base 1 during the handling of the cooling tray, thereby avoiding scratches on the cooling tray. By providing a transparent protective cover 3 over the base 1, it prevents metal shavings, dust, and other particles in the air from entering the cooling tray cavity, thus avoiding these impurities affecting the use of the cooling tray. Simultaneously, the transparent protective cover 3 allows for clear observation of the cooling tray inside the fixture during handling. If the cooling tray detaches from or falls off the limiting support structure due to bumps, the operator can promptly detect and adjust it, thus preventing damage to the cooling tray. Furthermore, when air or impurities in the cooling tray's internal flow channels adhere to the transparent protective cover 3, the operator can directly see this, facilitating cleaning of the fixture.
[0064] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.
Claims
1. A cooling tray transfer fixture, characterized in that, include: Base (1); A limiting support structure is provided on the base (1). The limiting support structure is used to support the cooling plate and limit the cooling plate. A transparent protective cover (3) is disposed above the base (1) and covers the limiting support structure. A closed receiving cavity is formed between the transparent protective cover (3) and the base (1). The receiving cavity is used to receive the cooling plate supported by the limiting support structure.
2. The cooling tray transfer fixture according to claim 1, characterized in that, The limiting support structure includes at least two step blocks (2), each step block (2) having a first step surface (21). At least two step blocks (2) are arranged at intervals on the base (1), and at least two first step surfaces (21) constitute a support surface for supporting the cooling plate.
3. The cooling tray transfer fixture according to claim 2, characterized in that, The step block (2) is slidably disposed on the base (1), and the support range of the support surface can be changed by sliding the step block (2).
4. The cooling tray transfer fixture according to any one of claims 1 to 3, characterized in that, The limiting support structure includes a stepped column, one end of which is inserted into the through hole of the cooling plate, and the other end of which is fixed on the base (1). A second step surface is provided on the stepped column, and the second step surface is used to support the cooling plate.
5. The cooling tray transfer fixture according to claim 4, characterized in that, The base (1) has a blind hole (11) and the stepped column can be inserted into the blind hole (11).
6. The cooling tray transfer fixture according to claim 1, characterized in that, The base (1) has a slot, and the open end of the transparent protective cover (3) can be inserted into the slot.
7. The cooling tray transfer fixture according to claim 1, characterized in that, The open end of the transparent protective cover (3) is hinged to the base (1), and the transparent protective cover (3) is rotatably mounted on the base (1).
8. The cooling tray transfer fixture according to claim 1, characterized in that, A sealing structure is provided between the transparent protective cover and the base.
9. The cooling tray transfer fixture according to claim 1, characterized in that, The transparent protective cover is equipped with a handle.
10. The cooling tray transfer fixture according to claim 1, characterized in that, The base is a structural component made of ABS material; And / or, the limiting support structure is a structural component made of PA66 material; And / or, the transparent protective cover is a shell made of acrylic sheet.