High-purity PFA corrosion-resistant pressure gauge

Abstract

The utility model discloses a kind of high-purity PFA corrosion-resistant pressure gauges, including watch case, further include;Process joint, the process joint is arranged at the bottom side of the watch case, the process joint with the watch case intercommunication;Movement, the movement is arranged in the inside of the watch case;Dial, the dial is arranged in the inside of the watch case;Hand, the hand is arranged in the inside of the watch case and with the movement transmission connection;Watch cover, the watch cover is arranged in one side of the watch case;Glass plate, the glass plate is arranged in one side of the watch case, the glass plate is arranged between watch cover and the watch case, sealing ring is arranged between the glass plate and the watch case.Compared with existing pressure gauge, service life is improved 8-10 times (semiconductor wet process verification data), so that maintenance cycle is extended to 5 years;Compared with imported hastelloy alloy instrument, cost is reduced by 40%;In chemical industry chlorosilane reaction kettle lining, metal pollution is reduced by 80%.

Description

Technical Field

[0001] This utility model relates to the field of pressure gauge technology, and in particular to a high-purity PFA corrosion-resistant pressure gauge. Background Technology

[0002] High-purity chemical supply systems deliver chemicals such as etching solutions and photoresists to semiconductor equipment, preventing metal ion contamination. Chemical monitoring systems (CMS) monitor the liquid status in real time. For equipment or monitoring systems used in corrosive, high-purity environments, the safety of the medium pressure is a crucial technical indicator of the entire system's safety performance. Therefore, pressure gauges with corrosion resistance are typically installed to monitor the system pressure. Ordinary pressure gauges lack corrosion resistance; leaks of corrosive media can cause serious safety accidents. Traditional metal pressure gauges have a lifespan of less than 200 hours under extreme conditions such as hydrofluoric acid (≥40%) and hot concentrated sulfuric acid (≥80℃), while existing PTFE-lined gauges suffer from cold-flow deformation (ASTM D638 test deformation rate >15%). Therefore, it is necessary to design high-purity pressure gauges that possess both high purity and corrosion resistance while also monitoring system pressure. Utility Model Content

[0003] The purpose of this invention is to provide a high-purity PFA corrosion-resistant pressure gauge to solve the above-mentioned problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A high-purity PFA corrosion-resistant pressure gauge, including a gauge housing, and further comprising;

[0006] A process connector is disposed on the bottom side of the watch case and is in communication with the watch case.

[0007] The movement is located inside the watch case;

[0008] The dial is disposed inside the watch case;

[0009] Watch hands, which are disposed inside the watch case and are connected to the movement drive;

[0010] Watch cover, the watch cover being disposed on one side of the watch case;

[0011] A glass plate is disposed on one side of the watch case, and the glass plate is disposed between the watch cover and the watch case. A sealing ring is provided between the glass plate and the watch case.

[0012] A transmission mechanism, located within the process joint, is used to drive the hands of the watch to rotate via the movement.

[0013] Preferably, the transmission mechanism includes a transmission groove formed inside the process joint, a through hole at the bottom end of the process joint, the through hole and the transmission groove being interconnected, a bellows being provided inside the transmission groove, a supporting base plate being provided at the bottom of the bellows, a supporting top plate being provided at the top of the bellows, a compression spring being provided inside the bellows, and the bellows being made of PFA material.

[0014] Preferably, the transmission mechanism further includes an adjusting screw, a storage groove is provided at the connection end between the process connector and the watch case, the adjusting screw is disposed in the storage groove, the support top plate and the adjusting screw abut against each other, a connecting rod is disposed inside the bellows, one end of the connecting rod is connected to an adjusting nut, and the adjusting nut is movably connected to the balance rod on the movement.

[0015] Preferably, the adjusting screw contains a first screw, the connecting rod passes through the supporting top plate and the first screw in sequence, the bottom of the adjusting nut has a groove adapted to the connecting rod, the top of the first screw has a sliding groove, and the bottom of the adjusting nut and the sliding groove are slidably connected.

[0016] Preferably, a limiting groove is provided on the supporting base plate, and a limiting block adapted to the limiting groove is provided at the bottom of the connecting rod.

[0017] Preferably, a connecting pipe is sleeved on the outer side of the process connector.

[0018] Preferably, the movement is fixedly connected to the inner wall of the watch case by a third screw, and the dial is fixedly connected to the inner wall of the watch case by a second screw.

[0019] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0020] Service life is increased by 8-10 times (semiconductor wet process verification data), extending the maintenance cycle to 5 years; compared with imported Hastelloy instruments, the cost is reduced by 40%; in the chemical industry, metal contamination in chlorosilane reactor linings is reduced by 80%. Attached Figure Description

[0021] Figure 1 A schematic diagram of the exploded structure of a pressure gauge according to an embodiment of the present invention is shown;

[0022] Figure 2 A cross-sectional structural schematic diagram of a pressure gauge provided according to an embodiment of the present invention is shown;

[0023] Figure 3 A cross-sectional view of the process connector provided according to an embodiment of the present invention is shown;

[0024] Figure 4 A schematic diagram of the exploded structure of a process joint according to an embodiment of the present invention is shown;

[0025] Figure 5 A three-dimensional structural schematic diagram of a pressure gauge provided according to an embodiment of the present invention is shown;

[0026] Figure 6 A schematic diagram of the internal structure of the watch case according to an embodiment of the present invention is shown.

[0027] Legend:

[0028] 1. Watch case; 2. Connecting pipe; 3. Process connector; 4. Adjusting screw; 5. First screw; 6. Connecting rod; 7. Adjusting nut; 8. Compression spring; 9. Bellows; 10. Third screw; 11. Dial; 12. Second screw; 13. Hand; 14. Sealing ring; 15. Glass plate; 16. Watch cover; 17. Movement; 18. Transmission groove; 19. Through hole; 20. Support base plate; 21. Limiting groove; 22. Limiting block; 23. Slot; 24. Slide groove; 25. Support top plate; 26. Storage slot. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0030] Please see Figure 1-6 This utility model provides a technical solution:

[0031] A high-purity PFA corrosion-resistant pressure gauge includes a gauge housing 1, and also includes;

[0032] Process connector 3 is located on the bottom side of the watch case 1 and is interconnected with the watch case 1; movement 17 is located inside the watch case 1; dial 11 is located inside the watch case 1; hands 13 are located inside the watch case 1 and are connected to the movement 17; watch cover 16 is located on one side of the watch case 1; glass plate 15 is located on one side of the watch case 1 and is positioned between the watch cover 16 and the watch case 1, with a sealing ring 14 between the glass plate 15 and the watch case 1; a transmission mechanism is located inside the process connector 3 and is used to drive the hands 13 to rotate via the movement 17; a connecting pipe 2 is sleeved on the outside of the process connector 3; the movement 17 is fixedly connected to the inner wall of the watch case 1 by a third screw 10, and the dial 11 is fixedly connected to the inner wall of the watch case 1 by a second screw 12.

[0033] Specifically, such as Figure 2 and Figure 3 As shown, the transmission mechanism includes a transmission groove 18 formed inside the process connector 3. A through hole 19 is provided at the bottom end of the process connector 3, and the through hole 19 and the transmission groove 18 are interconnected. A bellows 9 is provided inside the transmission groove 18. A support base plate 20 is provided at the bottom of the bellows 9, and a support top plate 25 is provided at the top of the bellows 9. A compression spring 8 is provided inside the bellows 9. The bellows 9 is made of PFA material. The PFA material is modified and stabilized at the end of the molecular chain to improve its hydrofluoric acid resistance to 5000 hours. The bellows 9 completely isolates the contact medium to prevent the contact medium from overflowing, thus improving the service life of the pressure gauge. The compression spring 8 can improve the elasticity of the bellows 9.

[0034] Specifically, such as Figure 3 and Figure 4 As shown, the transmission mechanism also includes an adjusting screw 4. The process connector 3 is connected to the end of the watch case 1 with a storage slot 26. The adjusting screw 4 is set in the storage slot 26. The support top plate 25 and the adjusting screw 4 abut against each other. A connecting rod 6 is set in the bellows 9. One end of the connecting rod 6 is connected to an adjusting nut 7. The adjusting nut 7 is movably connected to the balance rod on the movement 17.

[0035] Specifically, such as Figure 3 and Figure 4 As shown, the adjusting screw 4 contains a first screw 5, the connecting rod 6 passes through the supporting top plate 25 and the first screw 5 in sequence, the bottom of the adjusting nut 7 has a groove 23 that matches the connecting rod 6, the top of the first screw 5 has a sliding groove 24, and the bottom of the adjusting nut 7 is slidably connected to the sliding groove 24; the supporting bottom plate 20 has a limit groove 21, and the bottom of the connecting rod 6 has a limit block 22 that matches the limit groove 21.

[0036] In summary, the high-purity PFA corrosion-resistant pressure gauge provided in this embodiment, when the contact medium comes into contact with the support base plate 20 through the through hole 19, the bellows 9 and the compression spring 8 are compressed simultaneously. The support base plate 20 drives the connecting rod 6 to move upward. During the movement, the adjusting nut 7 at the top of the connecting rod 6 drives the movement 17, and the movement 17 drives the needle 13 to rotate, thus measuring the pressure.

[0037] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-purity PFA corrosion-resistant pressure gauge, comprising a gauge housing (1), characterized in that, Also includes; Process connector (3), the process connector (3) is disposed on the bottom side of the watch case (1), and the process connector (3) is in communication with the watch case (1); Movement (17), said movement (17) being disposed inside the case (1); The dial (11) is disposed inside the case (1); The watch hand (13) is disposed inside the watch case (1) and is connected to the movement (17) in a transmission manner; Watch cover (16), said watch cover (16) is disposed on one side of the watch case (1); A glass plate (15) is disposed on one side of the watch case (1). The glass plate (15) is disposed between the watch cover (16) and the watch case (1). A sealing ring (14) is disposed between the glass plate (15) and the watch case (1). The transmission mechanism is located inside the process connector (3) and is used to drive the hands (13) to rotate through the movement (17).

2. The high-purity PFA corrosion-resistant pressure gauge according to claim 1, characterized in that, The transmission mechanism includes a transmission groove (18) opened inside the process connector (3). A through hole (19) is opened at the bottom end of the process connector (3). The through hole (19) and the transmission groove (18) are connected to each other. A bellows (9) is provided inside the transmission groove (18). A support base plate (20) is provided at the bottom of the bellows (9). A support top plate (25) is provided at the top of the bellows (9). A compression spring (8) is provided inside the bellows (9). The bellows (9) is made of PFA material.

3. The high-purity PFA corrosion-resistant pressure gauge according to claim 2, characterized in that, The transmission mechanism also includes an adjusting screw (4), and the process connector (3) is connected to the watch case (1) with a storage slot (26). The adjusting screw (4) is located in the storage slot (26), the support top plate (25) and the adjusting screw (4) abut against each other, and a connecting rod (6) is provided in the bellows (9). One end of the connecting rod (6) is connected to an adjusting nut (7), and the adjusting nut (7) is movably connected to the balance rod on the movement (17).

4. The high-purity PFA corrosion-resistant pressure gauge according to claim 3, characterized in that, The adjusting screw (4) is provided with a first screw (5), the connecting rod (6) passes through the support top plate (25) and the first screw (5) in sequence, the bottom of the adjusting nut (7) is provided with a slot (23) adapted to the connecting rod (6), the top of the first screw (5) is provided with a sliding groove (24), and the bottom of the adjusting nut (7) and the sliding groove (24) are slidably connected.

5. A high-purity PFA corrosion-resistant pressure gauge according to claim 4, characterized in that, A limiting groove (21) is provided on the supporting base plate (20), and a limiting block (22) adapted to the limiting groove (21) is provided at the bottom of the connecting rod (6).

6. A high-purity PFA corrosion-resistant pressure gauge according to claim 1, characterized in that, The process connector (3) is fitted with a connecting pipe (2) on its outer side.

7. A high-purity PFA corrosion-resistant pressure gauge according to claim 1, characterized in that, The movement (17) is fixedly connected to the inner wall of the case (1) by a third screw (10), and the dial (11) is fixedly connected to the inner wall of the case (1) by a second screw (12).

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