A chip testing apparatus

By designing an annular air blowing module and air inlet in the chip testing device, the gas is ensured to flow evenly to each air blowing hole, thus solving the problem of uneven temperature and improving the accuracy of chip testing.

CN224366140UActive Publication Date: 2026-06-16SHENZHEN GRAND INNOSYS CORP

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN GRAND INNOSYS CORP
Filing Date
2025-04-11
Publication Date
2026-06-16

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  • Figure CN224366140U_ABST
    Figure CN224366140U_ABST
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Abstract

The utility model discloses a chip testing arrangement, include: heat preservation casing, be equipped with the first opening in heat preservation casing, be equipped with the access door at the first opening, test seat, test seat sets up inside heat preservation casing, and test seat includes: seat body, its top surface is equipped with the mounting hole for installing chip and is passed to bottom surface, blow gas module, its top connection seat body's bottom, its bottom is installed on the inner bottom surface of heat preservation casing, blow gas module is along the annular of the rim of mounting hole and is arranged, and the space of blow gas module inboard and mounting hole intercommunication forms the accommodation space for installing chip, and the top of blow gas module is equipped with the blow gas groove that extends along the extension direction of blow gas module, and the slot of blow gas groove is closed by seat body, and a plurality of blow -gas holes are equipped with in the order interval along the inner circumferential side of blow gas module, and blow -gas hole is communicated with blow gas groove, and blow -gas hole is passed to the accommodation space, air inlet piece, air inlet piece passes seat body and communicates blow gas groove, and air inlet piece is used for conveying gas to blow gas groove.
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Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a chip testing device. Background Technology

[0002] Chips have a wide range of applications. For example, in the automotive electronics field, chips operate in high-temperature environments. In high-latitude regions, deep-sea areas, the aerospace field, and drilling fields, chips operate in low-temperature environments. To ensure that chips can be used normally in extreme high-temperature or low-temperature environments, they need to be placed in a test device that simulates high-temperature or low-temperature environments for performance testing before leaving the factory.

[0003] However, current chip testing equipment releases hot or cold air by placing the heating or cooling module on one side of the device. This can easily lead to uneven gas temperature inside the device, resulting in temperature fluctuations during testing. The gas temperature that different parts of the chip come into contact with is also different, resulting in poor chip testing accuracy. Utility Model Content

[0004] The purpose of this invention is to provide a chip testing device that provides a more uniform temperature environment for chip testing, thereby improving the testing accuracy of the chip.

[0005] To achieve the above objectives, this utility model provides a chip testing device, comprising:

[0006] An insulated shell, wherein a first opening is provided on the insulated shell, and an entrance / exit is provided at the first opening;

[0007] Test holder, the test holder being disposed inside the insulation shell, the test holder comprising:

[0008] The base has mounting holes that extend from the top surface to the bottom surface for mounting chips;

[0009] An air blowing module is connected at its top to the bottom of the base body, and its bottom is installed on the inner bottom surface of the heat insulation shell. The air blowing module is annular along the edge of the mounting hole. The space inside the air blowing module is connected to the mounting hole to form an accommodating space for mounting the chip. An air blowing groove is provided at the top of the air blowing module, extending along the extension direction of the air blowing module. The opening of the air blowing groove is closed by the base body. A plurality of air blowing holes are arranged at intervals along the inner circumference of the air blowing module. The air blowing holes are connected to the air blowing groove and penetrate into the accommodating space.

[0010] An air inlet component passes through the base and connects to the air blowing channel, the air inlet component being used to deliver gas into the air blowing channel.

[0011] Preferably, the air blowing module includes multiple air blowing components, which are connected end to end in sequence, and each air blowing component has an air blowing groove on its top.

[0012] The air intake component is provided in multiple ways, and the multiple air intake components and the multiple air blowing components correspond one-to-one. The multiple air intake components pass through the base body and are connected to the air blowing groove of the corresponding air blowing component.

[0013] Preferably, the air inlet passes through the center of the air inlet groove of the corresponding air inlet in the seat.

[0014] Preferably, the test socket further includes:

[0015] Multiple air distribution blocks are provided, and the multiple air distribution blocks are respectively disposed on the base body. The multiple air distribution blocks correspond one-to-one with the multiple air intake components. Each air distribution block is connected to three split pipes, one of which is connected to the corresponding air intake component, and the other two split pipes are respectively connected to the split pipes of two adjacent air distribution blocks.

[0016] A main gas distribution block is disposed on the base body and connected between the distribution pipes of two adjacent gas distribution blocks. The main gas distribution block is provided with a gas supply port for inputting gas.

[0017] Preferably, it further includes:

[0018] A temperature controller is disposed outside the insulation shell. The temperature controller has an air inlet for inputting external gas and for adjusting the temperature of the input gas.

[0019] A gas supply pipe, the first end of which is connected to the thermostat, and the second end of which passes through the insulation shell and is connected to the gas supply port.

[0020] Preferably, the air inlet of the thermostat is connected to an air inlet pipe, and a manual shut-off valve, a flow valve, and a solenoid valve are installed on the air inlet pipe.

[0021] Preferably, the manual shut-off valve, the flow valve, and the solenoid valve are installed sequentially on the air intake pipe toward the air intake port.

[0022] Preferably, the heat-insulating shell has a second opening, and a first safety door is provided at the second opening.

[0023] Preferably, the first safety door has a third opening, and a second safety door is provided at the third opening.

[0024] Preferably, the insulation shell has a double-layer structure, and a receiving groove is provided between the inner layer and the outer layer of the insulation shell. The test seat is installed inside the inner layer of the insulation shell. The receiving groove is connected to the first opening. A telescopic member is installed in the receiving groove, and the extension direction of the telescopic member is towards the first opening.

[0025] The entrance / exit is a baffle, which is disposed within a receiving groove and parallel to the first opening. The end of the baffle away from the first opening is connected to the telescopic member.

[0026] Compared with the prior art, the chip testing device of this utility model has the following advantages:

[0027] When chip testing is required, open the inlet / outlet door on the insulation housing, insert the chip through the inlet / outlet door into the insulation housing and install it in the accommodating space, then close the inlet / outlet door.

[0028] Gas is continuously supplied to the air inlet and enters the connected air blowing channel. The gas flows evenly into each air blowing hole within the air blowing channel. Since the air blowing holes are arranged sequentially and spaced along the inner circumference of the air blowing module and penetrate into the accommodating space, and the air blowing module is in a ring shape along the edge of the mounting hole, multiple air blowing holes can evenly blow air to all parts of the accommodating space. Placing the test seat inside the insulation shell and closing the door and exit door can create a closed testing environment, preventing the temperature inside the insulation shell from being affected by the external ambient temperature gas, which is beneficial for maintaining the temperature inside the insulation shell within the required temperature range for testing.

[0029] The device of this application provides a more uniform temperature environment for chip testing, effectively reducing temperature fluctuations and improving chip testing accuracy. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the interior of the heat-insulating shell of the chip testing device described in this embodiment of the present invention;

[0031] Figure 2 This is a schematic diagram of the chip testing device according to another embodiment of the present invention;

[0032] Figure 3 This is a schematic diagram of the chip testing device according to another embodiment of the present invention;

[0033] Figure 4 This is a schematic diagram of the structure of the test stand according to an embodiment of the present invention;

[0034] Figure 5 This is a schematic diagram of the structure of the test stand according to another embodiment of the present invention;

[0035] Figure 6This is a top view of the test stand described in this utility model;

[0036] Figure 7 yes Figure 6 A cross-sectional view of the test fixture in the HH direction;

[0037] Figure 8 yes Figure 6 A cross-sectional view of the test fixture in the FF direction;

[0038] Figure 9 yes Figure 8 A cross-sectional view of the air blowing module in the GG direction;

[0039] Figure 10 This is a schematic diagram of the thermostat, solenoid valve, flow valve, and manual shut-off valve described in this embodiment of the utility model;

[0040] In the diagram, 1 is the insulation shell; 11 is the first opening; and 12 is the entrance / exit door.

[0041] 2. Test socket; 21. Base body; 211. Mounting hole; 22. Air blowing module; 221. Air blowing groove; 222. Air blowing hole; 223. Air blowing component; 23. Air inlet component; 24. Air distribution block; 241. Distribution pipe; 25. Main air distribution block; 251. Air supply port;

[0042] 3. Thermostat; 31. Inlet pipe; 4. Supply pipe; 5. Manual shut-off valve; 6. Flow valve; 7. Solenoid valve; 8. First safety door; 9. Second safety door; 10. Accommodation space. Detailed Implementation

[0043] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0044] In the description of this utility model, it should be understood that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0045] In the description of this utility model, it should be understood that the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, the terms "upper," "lower," "left," "right," "front," "rear," "top," "bottom," "inner," "outer," "middle," "vertical," "horizontal," "lateral," "longitudinal," "X-axis direction," "Y-axis direction," and "Z-axis direction," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Moreover, some of the above terms, in addition to indicating orientation or positional relationship, may also be used to indicate other meanings; for example, the term "upper" may in some cases be used to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application according to the specific circumstances.

[0046] like Figure 1-9 As shown, a chip testing device according to an embodiment of the present invention includes:

[0047] The insulation shell 1 has a first opening 11 and an access door 12 at the first opening 11.

[0048] Test holder 2, which is disposed inside the insulation housing 1, includes:

[0049] The base 21 has mounting holes 211 extending from the top surface to the bottom surface for mounting chips;

[0050] The air blowing module 22 is connected to the bottom of the base 21 at its top and is installed on the inner bottom surface of the heat insulation shell 1. The air blowing module 22 is in the shape of a ring along the edge of the mounting hole 211. The space inside the air blowing module 22 is connected to the mounting hole 211 to form an accommodating space 10 for mounting the chip. The top of the air blowing module 22 is provided with an air blowing groove 221 extending along the extension direction of the air blowing module 22. The opening of the air blowing groove 221 is closed by the base 21. Multiple air blowing holes 222 are arranged at intervals along the inner periphery of the air blowing module 22. The air blowing holes 222 are connected to the air blowing groove 221 and penetrate into the accommodating space 10.

[0051] The air inlet 23 passes through the base 21 and connects to the air blowing channel 221. The air inlet 23 is used to deliver gas into the air blowing channel 221.

[0052] It should be noted that when the chip needs to be tested, open the inlet / outlet door 12 on the insulation housing 1, send the chip through the inlet / outlet door 12 into the insulation housing 1 and install it in the accommodating space 10, and then close the inlet / outlet door 12.

[0053] To meet the temperature requirements of chip testing, gas is continuously input into the air inlet 23. The gas enters the connected air blowing channel 221 from the air inlet 23 and flows evenly into each air blowing hole 222 in the air blowing channel 221. Since the air blowing holes 222 are arranged sequentially at intervals along the inner periphery of the air blowing module 22 and penetrate into the accommodating space 10, and the air blowing module 22 is in a ring shape arranged along the edge of the mounting hole 211, multiple air blowing holes 222 can evenly blow air to all parts of the accommodating space 10. The test seat 2 is placed inside the heat preservation shell 1. Closing the door 12 can create a closed testing environment and prevent the temperature inside the heat preservation shell 1 from being affected by the external room temperature gas. This is conducive to maintaining the temperature inside the heat preservation shell 1 at the preset temperature for testing.

[0054] The device of this application provides a more uniform temperature environment for chip testing, effectively reducing temperature fluctuations and improving chip testing accuracy.

[0055] The diameter of the air blowing holes 222 is the same, which ensures that the gas flow delivered by the air blowing holes 222 is more uniform.

[0056] Test socket 2 is a device with built-in testing functions, or test socket 2 is connected to external testing equipment to perform chip testing.

[0057] A hole is made in the base 21 for inserting the air inlet 23. The air inlet 23 is preferably a flexible hose, which makes it easier to insert the air inlet 23 into the base 21 and communicate with the air blowing groove 221.

[0058] After the chip test is completed, open the access door 12, remove the chip from the containment space 10, and send it out of the insulation shell 1 through the access door 12.

[0059] In a more specific embodiment, the heat insulation shell 1 has two first openings 11, one of which is an inlet for the chip to be fed into the heat insulation shell 1, and the other is an outlet for the chip to be fed out of the heat insulation shell 1.

[0060] like Figure 5 As shown, in a more specific embodiment, the air blowing module 22 includes a plurality of air blowing components 223, which are connected end to end in sequence, and each air blowing component 223 has an air blowing groove 221 on its top.

[0061] Multiple air intake components 23 are provided, and multiple air intake components 23 correspond one-to-one with multiple air blowing components 223. The multiple air intake components 23 pass through the base body 21 and are connected to the air blowing groove 221 of the corresponding air blowing component 223.

[0062] It should be noted that multiple air blowing components 223 are connected end to end and arranged in a ring along the edge of the mounting hole 211. The air blowing slots 221 of the air blowing components 223 are not connected to each other, which is equivalent to dividing the air blowing module 22 into multiple air blowing components 223. There are multiple air inlets 23, and the multiple air inlets 23 correspond to the multiple air blowing components 223, so that gas is input from the multiple air inlets 23. When the multiple air inlets 23 pass through the base 21 and connect to the air blowing slots 221 of the corresponding air blowing components 223, the distance that the gas needs to flow into the air blowing slots 221 is shortened, which can more quickly and evenly distribute the gas.

[0063] For example: Figure 4 In the middle, the mounting hole 211 is a quadrilateral hole, and there are 4 air blowing parts 223. The 4 air blowing parts 223 are connected in sequence to form a quadrilateral frame.

[0064] like Figure 5 , 7 As shown in Figure 8, in a more specific embodiment, the air inlet 23 passes through the seat 21 and connects to the center of the air inlet groove 221 corresponding to the air inlet 223.

[0065] It should be noted that the air inlet 23 passes through the seat 21 and connects to the center of the air blowing groove 221 of the corresponding air blowing component 223. When the gas enters the air blowing groove 221 from the air inlet 23, it can disperse to both ends of the air blowing groove 221, allowing the gas to flow more quickly to all parts of the air blowing groove 221.

[0066] like Figure 4 As shown, in a more specific embodiment, the test stand 2 further includes: a main gas distribution block 25 and a plurality of gas distribution blocks 24;

[0067] Multiple air distribution blocks 24 are respectively installed on the base 21. The multiple air distribution blocks 24 correspond one-to-one with multiple air intake components 23. Each air distribution block 24 is connected to three split pipes 241. One split pipe 241 is connected to the corresponding air intake component 23, and the other two split pipes 241 are respectively connected to the split pipes 241 of two adjacent air distribution blocks 24.

[0068] The main gas splitter block 25 is installed on the base 21. The main gas splitter block 25 is connected between the splitter pipes 241 connected by two adjacent splitter blocks 24. The main gas splitter block 25 is provided with a gas supply port 251 for inputting gas.

[0069] It should be noted that multiple gas distribution blocks 24 are respectively installed on the base 21, and the multiple gas distribution blocks 24 correspond one-to-one with multiple air inlet components 23. The two diversion pipes 241 connected to each gas distribution block 24 are respectively connected to the diversion pipes 241 of two adjacent gas distribution blocks 24, so that the gas between the multiple gas distribution blocks 24 can circulate through the diversion pipes 241.

[0070] A main gas distribution block 25 is connected between the distribution pipes 241 connecting two adjacent gas distribution blocks 24. External gas enters from the gas supply port 251 of the main gas distribution block 25 and is distributed to each gas distribution block 24. The third distribution pipe 241 connected to each gas distribution block 24 is connected to the corresponding air inlet 23, and the gas is input into each air inlet 23.

[0071] The main gas distribution block 25 is equipped with a temperature sensing element for sensing the temperature of the terminal gas.

[0072] like Figure 1 , 4 As shown, in a more specific embodiment, it also includes: a thermostat 3 and a gas supply pipe 4;

[0073] The thermostat 3 is located outside the insulation shell 1. The thermostat 3 is provided with an air inlet (not shown in the figure). The air inlet is used to input external gas, and the thermostat 3 is used to adjust the temperature of the input gas.

[0074] The first end of the gas supply pipe 4 is connected to the thermostat 3, and the second end of the gas supply pipe 4 is inserted into the insulation shell 1 and connected to the gas supply port 251.

[0075] It should be noted that the thermostat 3 includes an adjustable temperature air heating rod. This heating rod is hollow for ventilation, and its outer wall is equipped with a temperature sensing element and a heating element. The outer side of the outer wall is wrapped with insulation cotton. External gas enters the thermostat 3 through the air inlet. The thermostat 3 adjusts the temperature of the input gas, and the air heating rod can precisely adjust the gas temperature to a preset temperature (or a temperature within a preset threshold range). The thermostat 3 may also include other temperature control components.

[0076] The thermostat 3 is installed outside the insulation shell 1. The gas, after being regulated by the thermostat 3, flows into the gas supply port 251 through the gas supply pipe 4 that penetrates into the insulation shell 1.

[0077] like Figure 10 As shown, in a more specific embodiment, the air inlet of the thermostat 3 (not shown in the figure) is connected to an air inlet pipe 31, on which a manual shut-off valve 5, a flow valve 6 and a solenoid valve 7 are installed.

[0078] It should be noted that the manual shut-off valve 5 on the intake pipe 31 can manually cut off the air entering the intake pipe 31, the flow valve 6 can control the flow rate of the incoming air, and the solenoid valve 7 is used to automatically control the opening and closing of the intake pipe 31 at that point to realize the on / off of air intake.

[0079] like Figure 10 As shown, in a more specific embodiment, a manual shut-off valve 5, a flow valve 6, and a solenoid valve 7 are sequentially installed on the intake pipe 31 toward the intake port.

[0080] It should be noted that the manual shut-off valve 5 requires manual operation, while the solenoid valve 7 relies on an automatic control system for opening and closing. Installing the manual shut-off valve 5 before the solenoid valve 7 ensures that if the solenoid valve 7 malfunctions due to power failure or mechanical failure, the manual shut-off valve 5 can be manually operated to guarantee the normal opening, closing, and regulation of the valves.

[0081] The flow valve 6 is positioned between the manual shut-off valve 5 and the solenoid valve 7, serving as a connecting link. It can work in conjunction with the preceding manual shut-off valve 5 or the following solenoid valve 7.

[0082] like Figure 2 As shown, in a more specific embodiment, the insulation shell 1 has a second opening, and a first safety door 8 is provided at the second opening.

[0083] It should be noted that the first safety door 8 is used to facilitate internal maintenance of the insulation shell 1 when the device is not in operation. The first safety door 8 is installed on the insulation shell 1 by a hinge.

[0084] like Figure 2 As shown, in a more specific embodiment, the first safety door 8 has a third opening, and a second safety door 9 is provided at the third opening.

[0085] It should be noted that the second safety door 9 is smaller than the first safety door 8. The second safety door 9 is used to facilitate the maintenance of the interior of the insulation shell 1 when the device is working. The second safety door 9 is installed on the first safety door 8 by a hinge.

[0086] like Figure 3 As shown, in a more specific embodiment, the insulation shell 1 has a double-layer structure, and a receiving groove (not shown in the figure) is provided between the inner layer and the outer layer of the insulation shell 1. The test seat 2 is installed inside the inner layer of the insulation shell 1. The receiving groove is connected to the first opening 11. A telescopic member (not shown in the figure) is installed in the receiving groove. The extension direction of the telescopic member is towards the first opening 11.

[0087] The entrance / exit 12 is a baffle, which is set in the receiving groove and parallel to the first opening 11. The end of the baffle away from the first opening 11 is connected to a telescopic component.

[0088] It should be noted that the first opening 11 passes through the inner and outer layers of the insulation shell 1, and the test socket 2 is installed inside the inner layer of the insulation shell 1. The chip enters the inner layer of the insulation shell 1 from the outside of the insulation shell 1 through the outer layer and the inner layer, and is installed on the test socket 2.

[0089] When the telescopic component extends, it moves the connected baffle towards the first opening 11. The baffle gradually enters the first opening 11 from the receiving groove. When the baffle completely closes the first opening 11, the telescopic component stops extending. When it is necessary to open the access door 12, the telescopic component retracts, moving the baffle away from the first opening 11. The baffle returns to the receiving groove, allowing the chip to enter and exit the insulation housing 1 through the first opening 11.

[0090] The telescopic component is preferably a cylinder.

[0091] The working process of this utility model is as follows: when it is necessary to test the chip, open the inlet / outlet 12 on the insulation shell 1, send the chip from the inlet / outlet 12 into the insulation shell 1 and install it in the accommodating space 10, and then close the inlet / outlet 12.

[0092] Gas is continuously input into the air inlet 23, and the gas enters the connected air blowing channel 221 from the air inlet 23. The gas flows evenly into each air blowing hole 222 in the air blowing channel 221. Since the air blowing holes 222 are arranged sequentially at intervals along the inner periphery of the air blowing module 22 and penetrate into the accommodating space, and the air blowing module 22 is in a ring shape arranged along the edge of the mounting hole 211, the multiple air blowing holes 222 can blow air evenly to all parts of the accommodating space 10. The test seat 2 is placed inside the heat preservation shell 1. Closing the door 12 can create a closed test environment and avoid the temperature inside the heat preservation shell 1 from being affected by the external room temperature gas. This is conducive to maintaining the temperature inside the heat preservation shell 1 at the preset temperature for testing.

[0093] In summary, this utility model provides a chip testing device that provides a more uniform temperature environment for the chip during testing, thereby improving the testing accuracy.

[0094] The above are merely preferred embodiments of this utility model. It should be noted that, for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of this utility model, and these improvements and substitutions should also be considered within the protection scope of this utility model.

Claims

1. A chip testing device, characterized in that, include: An insulated shell, wherein a first opening is provided on the insulated shell, and an entrance / exit is provided at the first opening; Test holder, the test holder being disposed inside the insulation shell, the test holder comprising: The base has mounting holes that extend from the top surface to the bottom surface for mounting chips; An air blowing module is connected at its top to the bottom of the base body, and its bottom is installed on the inner bottom surface of the heat insulation shell. The air blowing module is annular along the edge of the mounting hole. The space inside the air blowing module is connected to the mounting hole to form an accommodating space for mounting the chip. An air blowing groove is provided at the top of the air blowing module, extending along the extension direction of the air blowing module. The opening of the air blowing groove is closed by the base body. A plurality of air blowing holes are arranged at intervals along the inner circumference of the air blowing module. The air blowing holes are connected to the air blowing groove and penetrate into the accommodating space. An air inlet component passes through the base and connects to the air blowing channel, the air inlet component being used to deliver gas into the air blowing channel.

2. The chip testing apparatus according to claim 1, characterized in that, The air blowing module includes multiple air blowing components, which are connected end to end in sequence, and each air blowing component has an air blowing groove on its top. The air intake component is provided in multiple ways, and the multiple air intake components and the multiple air blowing components correspond one-to-one. The multiple air intake components pass through the base body and are connected to the air blowing groove of the corresponding air blowing component.

3. The chip testing apparatus according to claim 2, characterized in that, The air inlet passes through the base and connects to the center of the air blowing groove of the corresponding air blowing component.

4. The chip testing apparatus according to claim 2, characterized in that, The test socket also includes: Multiple air distribution blocks are provided, and the multiple air distribution blocks are respectively disposed on the base body. The multiple air distribution blocks correspond one-to-one with the multiple air intake components. Each air distribution block is connected to three split pipes, one of which is connected to the corresponding air intake component, and the other two split pipes are respectively connected to the split pipes of two adjacent air distribution blocks. A main gas distribution block is disposed on the base body and connected between the distribution pipes of two adjacent gas distribution blocks. The main gas distribution block is provided with a gas supply port for inputting gas.

5. The chip testing apparatus according to claim 4, characterized in that, Also includes: A temperature controller is disposed outside the insulation shell. The temperature controller has an air inlet for inputting external gas and for adjusting the temperature of the input gas. A gas supply pipe, the first end of which is connected to the thermostat, and the second end of which passes through the insulation shell and is connected to the gas supply port.

6. The chip testing apparatus according to claim 5, characterized in that, The air inlet of the thermostat is connected to an air inlet pipe, and a manual shut-off valve, a flow valve, and a solenoid valve are installed on the air inlet pipe.

7. The chip testing apparatus according to claim 6, characterized in that, The manual shut-off valve, flow valve, and solenoid valve are installed sequentially on the air intake pipe toward the air intake port.

8. The chip testing apparatus according to claim 1, characterized in that, The insulation shell has a second opening, and a first safety door is provided at the second opening.

9. The chip testing apparatus according to claim 8, characterized in that, The first safety door has a third opening, and a second safety door is provided at the third opening.

10. The chip testing apparatus according to claim 1, characterized in that, The insulation shell has a double-layer structure, with a receiving groove between the inner and outer layers of the insulation shell. The test seat is installed inside the inner layer of the insulation shell. The receiving groove is connected to the first opening. A telescopic component is installed in the receiving groove, and the extension direction of the telescopic component is towards the first opening. The entrance / exit is a baffle, which is disposed in the receiving groove and parallel to the first opening. The end of the baffle away from the first opening is connected to the telescopic member.