A diffuser tube device for improving gas uniformity in a chamber

Abstract

The utility model discloses a kind of dispersion pipe devices for improving cavity gas uniformity, including the peripheral dispersion pipe around hot wire, the middle part of peripheral dispersion pipe is equipped with center zone dispersion pipe;The center zone dispersion pipe is equipped with dispersion head and dispersion pipe body, and dispersion pipe body is equipped with heat wire winding support rod.This utility model solves the problem of film thickness anomaly, uneven composition and the like caused by uneven distribution of cavity gas concentration, improves the uniformity of heterojunction film layer structure, and improves the performance of battery piece.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cells, and in particular to a diffusion tube device for improving the uniformity of gas in a cavity. Background Technology

[0002] HJT photovoltaic cells, with their advantages of high efficiency, low temperature coefficient, and high bifaciality, have become an important development direction in the photovoltaic field. To achieve high efficiency, the quality requirements for the heterojunction film layer are extremely high, and the uniformity and stability of the cavity gas are one of the key factors in ensuring film quality and improving cell efficiency. Uneven gas distribution may lead to inconsistent film thickness and composition, thus affecting the photoelectric conversion efficiency of the cell. Existing diffusion tubes are arranged in a ring around the hot filament plane along the cavity, mainly distributed on the periphery. During the process, the gas in the diffusion tubes diffuses from the periphery to the center of the cavity. Furthermore, due to the large size of the cavity itself, it is difficult to balance the gas concentration in the central region with the periphery, and it is also difficult to ensure that the diffusion of the entire cavity gas is completed in a short time.

[0003] Therefore, it is necessary to develop a diffusion tube device to improve the uniformity of gas in the cavity, and solve problems such as abnormal film thickness and uneven composition caused by uneven gas concentration distribution in the cavity. Utility Model Content

[0004] Purpose of the utility model: In view of the shortcomings and defects of the prior art, this utility model provides a diffusion tube device to improve the uniformity of gas in the cavity, solves the problems of abnormal film thickness and uneven composition caused by uneven gas concentration distribution in the cavity, improves the uniformity of heterojunction film layer structure, and enhances the performance of solar cells.

[0005] Technical solution: The present invention provides a diffusion tube device for improving the uniformity of gas in a cavity, characterized in that: it includes an outer diffusion tube surrounding a hot wire, and a central diffusion tube is provided in the middle of the outer diffusion tube; the central diffusion tube is provided with a diffusion head and a diffusion tube body, and the diffusion tube body is provided with a support rod to prevent the hot wire from winding.

[0006] The hot wires are arranged in parallel inside the outer diffusion tube.

[0007] The diffusion head of the central area diffusion tube is an eight-hole diffusion head, with the holes arranged around the diffusion head.

[0008] The lower half of the eight-hole diffuser head is supported by a bridge arch pipe, and the bridge arch pipe has downward-facing holes.

[0009] The diffusion tube in the central area consists of four sections, each with an adjustable height.

[0010] The heat-resistant wire-wound support rod is equipped with ceramic forks at both ends.

[0011] The hot wire is located within the concave structure of the ceramic fork.

[0012] Beneficial effects: Compared with the prior art, the present invention has the following significant advantages: The present invention solves the problems of abnormal film thickness and uneven composition caused by uneven distribution of gas concentration in the cavity, improves the uniformity of heterojunction film layer structure, and enhances the performance of battery cells. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of a diffusion tube device in the prior art;

[0014] Figure 2 This is a schematic diagram of the dispersion tube device of this utility model;

[0015] Figure 3 This is a schematic diagram of the structure of the central area diffusion tube of this utility model;

[0016] Figure 4 This is a schematic diagram of the structure of the eight-hole diffusion head of this utility model;

[0017] Figure 5 This is a schematic diagram of the air pore structure of the eight-hole diffusion head of this utility model;

[0018] Figure 6 This is a schematic diagram of the structure of the four-section diffusion tube of this utility model;

[0019] Figure 7 This is a schematic diagram of the end structure of the four-section diffusion tube of this utility model;

[0020] Figure 8 This is a schematic diagram of the structure of the ceramic fork of this utility model;

[0021] Figure 9 This is a diagram showing the usage state of the heat-resistant wire winding support rod of this utility model;

[0022] In the diagram, 1 is the outer diffusion tube; 2 is the hot wire; 3 is the chemical gas; 4 is the central diffusion tube; 41 is the eight-hole diffusion head; 42 is the four-section diffusion tube; 43 is the heat-resistant wire winding support rod; and 431 is the ceramic fork. Detailed Implementation

[0023] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0024] like Figure 1 The existing diffusion tube device only has an outer diffusion tube 1 surrounding the hot wire 2, making it difficult to replenish the chemical gas concentration in the central area and resulting in poor gas uniformity.

[0025] In response to the above problems, such as Figure 2 This utility model discloses a diffusion tube device for improving the uniformity of gas in a cavity, comprising an outer diffusion tube 1 surrounding a hot wire 2, and a central diffusion tube 4 located in the middle of the outer diffusion tube 1; the central diffusion tube 4 has a diffusion head and a diffusion tube body, and an anti-heat wire winding support rod 43 is provided on the diffusion tube body. The hot wire 2 is arranged parallel to each other inside the outer diffusion tube 1. After the outer diffusion tube 1 and the central diffusion tube 4 release chemical gas 3 to each other, the gas concentration of the entire cavity will be increased, and the uniformity of chemical gas 3 in the cavity will be significantly improved.

[0026] like Figure 3 , Figure 4 , Figure 5 The diffuser head is an eight-hole diffuser head 41, with holes arranged around the diffuser head. The lower half of the eight-hole diffuser head 41 is supported by a bridge arch pipe, and the bridge arch pipe has downward-facing holes. Figure 5 The pores af in the mesoporous body are the pores distributed in the diffusion head, and the f-pore body achieves downward gas discharge through the bridge arch pipe erected in the lower half of the diffusion head.

[0027] like Figure 6 , Figure 7 The diffusion tube body consists of four diffusion tubes 42, which are divided into four sections, each becoming thinner and shorter. The four diffusion tubes 42 have an adjustable height. Figure 6 L1-L4 are the lengths of each section. To ensure the overall structural stability of the diffusion tube, the lengths of each section are divided according to the golden ratio of the Fibonacci sequence, that is, L1:L2=L2:L3=L3:L4=1.618.

[0028] like Figure 8 , Figure 9 The heat-resistant wire winding support rod 43 has ceramic forks 431 at both ends. The hot wire 2 is located within the concave structure of the ceramic fork 431. The heat-resistant wire winding support rod 43 mainly serves to prevent the hot wire 2 on both sides of the four-section diffusion tube 42 from deforming or being disturbed during the process, thus preventing it from winding around the four-section diffusion tube 42. The ceramic inserts at both ends of the heat-resistant wire winding support rod 43 can effectively isolate the hot wire 2 on both sides, ensuring the normal operation and use of the four-section diffusion tube 42.

[0029] The schematic diagram of the improved cavity diffusion tube layout of this utility model shows that a diffusion tube is added in the central area to increase the gas concentration in the central area of ​​the cavity. At the same time, the gas diffuses from the center to the periphery, forming convection with the gas diffuses from the outside to the inside in the outer diffusion tube. This means that the time for the gas to diffuse completely throughout the cavity is reduced by half, which not only improves the uniformity of gas concentration in the overall cavity, but also ensures a short-term increase in gas concentration.

[0030] To improve the uniformity of gas distribution within the cavity, a diffusion tube needs to be added to the central area. The following issues also need to be considered: 1. When adding a diffusion tube to the central area of ​​the hot wire plane, it is essential to ensure that the material of the diffusion tube is not affected by the high temperature of the hot wire. 2. The central diffusion tube must have the function of diffusing gas outwards. 3. During normal process operations, it must be unaffected by factors such as the hot wire's movement or entanglement.

[0031] In comparison, this utility model addresses the following issues: 1. It adds a diffusion tube to the central region of the hot filament plane, using ceramic as the substrate and C-Si-O honeycomb reinforced low-density ablation heat-resistant material as the insulation layer. This material is widely used in the aerospace field, can withstand temperatures up to 3000 degrees Celsius, and its internal structure remained intact after the Chang'e 5 lunar probe returned to Earth 20 years ago, thus solving problem 1. 2. It employs an eight-hole diffusion head with eight vent directions, ensuring gas diffusion in all eight directions and maintaining increased gas concentration throughout the cavity, thus solving problem 2. 3. The ceramic fork effectively prevents disturbances caused by sudden deformation of adjacent hot filaments and interference from the magnetic field of high current from contacting or wrapping around the diffusion tube structure, preventing damage to the diffusion tube structure, thus solving problem 3.

[0032] This invention solves the problems of abnormal film thickness and uneven composition caused by uneven gas concentration distribution in the cavity, improves the uniformity of the heterojunction film layer structure, and enhances the performance of the solar cell.

Claims

1. A diffusion tube device for improving the uniformity of gas in a cavity, characterized in that: It includes an outer diffusion tube (1) surrounding the hot wire (2), and a central diffusion tube (4) is provided in the middle of the outer diffusion tube (1); the central diffusion tube (4) is provided with a diffusion head and a diffusion tube body, and an anti-heat wire winding support rod (43) is provided on the diffusion tube body.

2. The diffusion tube device for improving the uniformity of gas in a cavity according to claim 1, characterized in that: The hot wire (2) is arranged in parallel inside the peripheral diffusion tube (1).

3. The diffusion tube device for improving the uniformity of gas in a cavity according to claim 1, characterized in that: The diffusion head of the central area diffusion tube (4) is an eight-hole diffusion head (41), with the holes arranged around the diffusion head.

4. The diffusion tube device for improving the uniformity of gas in a cavity according to claim 3, characterized in that: The lower half of the eight-hole diffuser head (41) is supported by a bridge arch pipe, and the bridge arch pipe has downward-facing holes.

5. The diffusion tube device for improving the uniformity of gas in a cavity according to claim 1, characterized in that: The diffusion tube body of the central area diffusion tube (4) is a four-section diffusion tube (42), and the four-section diffusion tube (42) has an adjustable height structure.

6. The diffusion tube device for improving the uniformity of gas in a cavity according to claim 1, characterized in that: The heat-resistant wire-wound support rod (43) is equipped with ceramic forks (431) at both ends.

7. The diffusion tube device for improving the uniformity of gas in a cavity according to claim 6, characterized in that: The hot wire (2) is located within the concave structure of the ceramic fork (431).

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