Ultrasonic atomizing bubbler for MOCVD

Abstract

The utility model provides a kind of for MOCVD's ultrasonic atomization bubbler, it is related to bubbler field, including main body cavity, the bottom of main body cavity inner cavity is provided with cotton swab, and the top of cotton swab is provided with ultrasonic atomization sheet;The utility model is by liquid injection pipe for injecting salt solution into main body cavity, and discharge pipe is used for discharging atomized precursor droplet and carrier gas mixture, by cotton swab adsorbing salt solution, ensure that solution is evenly distributed below ultrasonic atomization sheet, prevent affecting the atomization effect of later period, by ultrasonic atomization sheet using ultrasonic atomization technology to convert water-soluble salt etc. Difficult volatile substance into gaseous precursor, and ultrasonic atomization power can be controlled during atomization process, accurately adjust the amount of metal precursor into cavity, this mode gets rid of the dependence on metal organic compound saturated vapor pressure, realizes more flexible precursor delivery can be used as precursor with various difficult volatile water-soluble substance, effectively reduce cost.

Description

Technical Field

[0001] This utility model belongs to the field of bubblers, specifically an ultrasonic atomizing bubbler for MOCVD. Background Technology

[0002] Metal-organic chemical vapor deposition is a technique widely used in the preparation of semiconductor thin film materials. Its basic principle is to introduce a gaseous precursor into a reaction chamber, where a chemical reaction occurs under high temperature and specific conditions to generate the target thin film material.

[0003] Traditional MOCVD technology typically uses pure gaseous precursors and volatile organometallic compounds (such as molybdenum hexacarbonyl and gallium chloride) as raw materials. In an MOCVD system, the bubbler is a key component, mainly used to convert liquid or solid precursors into gaseous state and uniformly introduce them into the reaction chamber. Traditional bubblers regulate the amount of precursor discharged by controlling temperature, pressure, and carrier gas flow rate, thereby achieving precise control of the thin film growth process. However, traditional bubblers rely on organometallic compounds as precursors, but the limited variety of these compounds restricts the types of semiconductor materials that can be synthesized. Furthermore, many organometallic compounds have low saturated vapor pressures, making efficient delivery and precise control difficult, which limits the quality and efficiency of material preparation and increases costs.

[0004] In summary, this invention provides an ultrasonic atomizing bubbler for MOCVD to solve the above-mentioned problems. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0006] An ultrasonic nebulizer for MOCVD includes a main cavity. A cotton swab is placed at the bottom of the inner cavity of the main cavity, and an ultrasonic atomizing plate is placed above the cotton swab. The cotton swab and the ultrasonic atomizing plate are close together and do not contact each other. A liquid injection tube is connected to the left side of the top of the main cavity. The bottom of the liquid injection tube penetrates the main cavity and extends into the inner cavity of the main cavity. A drain tube is connected to the right side of the top of the main cavity. A saline solution is injected into the interior of the main cavity.

[0007] Furthermore, in this invention, the surface of the main cavity is provided with an observation window, which is made of transparent material and is located above the ultrasonic atomizing sheet.

[0008] Furthermore, in this invention, a feedthrough is provided on the surface of the main cavity and above the observation window. One end of the feedthrough is connected to an external power source, and the other end is connected to an ultrasonic atomizing plate via a wire.

[0009] Beneficial effects: This utility model has the following beneficial effects:

[0010] This invention uses an injection tube to inject a salt solution into the main cavity and a discharge tube to discharge the atomized precursor droplets and carrier gas mixture, facilitating the delivery of the atomized material to the MOCVD cavity for reaction. A cotton swab is used to absorb the salt solution, ensuring uniform distribution beneath the ultrasonic atomizing plate and preventing interference with subsequent atomization. The ultrasonic atomizing plate utilizes ultrasonic atomization technology to convert water-soluble salts and other non-volatile substances into gaseous precursors. Furthermore, the ultrasonic atomization power can be controlled during atomization, precisely adjusting the amount of metal precursor entering the cavity. This method eliminates dependence on the saturated vapor pressure of organometallic compounds, enabling more flexible precursor delivery. Various non-volatile water-soluble substances can be used as precursors, effectively reducing costs. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of this utility model;

[0012] Figure 2 This is a cross-sectional structural diagram of the main cavity of this utility model.

[0013] In the picture:

[0014] 1. Main cavity; 2. Cotton swab; 3. Ultrasonic atomizing plate; 4. Injection tube; 5. Outlet tube; 6. Observation window; 7. Feedthrough. Detailed Implementation

[0015] To better understand the technical content of this utility model, specific embodiments are described below in conjunction with the accompanying drawings. Various aspects of this utility model are described in this disclosure with reference to the accompanying drawings, which illustrate numerous illustrative embodiments. The embodiments of this disclosure are not necessarily defined to include all aspects of this utility model. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways, because the concepts and embodiments disclosed in this utility model are not limited to any particular implementation. Furthermore, some aspects of this utility model can be used alone or in any suitable combination with other aspects disclosed in this utility model.

[0016] Example 1

[0017] like Figure 1-2As shown, this is the first embodiment of the present invention. This embodiment provides an ultrasonic atomizing bubbler for MOCVD, including a main cavity 1. A cotton swab 2 is disposed at the bottom of the inner cavity of the main cavity 1, and an ultrasonic atomizing plate 3 is disposed above the cotton swab 2. The distance between the cotton swab 2 and the ultrasonic atomizing plate 3 is relatively close and they do not contact each other. A liquid injection tube 4 is connected to the left side of the top of the main cavity 1. The bottom of the liquid injection tube 4 penetrates the main cavity 1 and extends into the inner cavity of the main cavity 1. A drain pipe 5 is connected to the right side of the top of the main cavity 1. A saline solution is injected into the interior of the main cavity 1.

[0018] like Figure 1-2 As shown, the injection tube 4 is used to inject salt solution into the main cavity 1, and the drain tube 5 is used to discharge the atomized precursor droplets and carrier gas mixture, facilitating the delivery of the atomized material to the MOCVD cavity for reaction. The salt solution is adsorbed by the cotton swab 2 to ensure that the solution is evenly distributed below the ultrasonic atomizing plate 3, preventing it from affecting the subsequent atomization effect. The ultrasonic atomizing plate 3 uses ultrasonic atomization technology to convert water-soluble salts and other non-volatile substances into gaseous precursors. During the atomization process, the ultrasonic atomization power can be controlled to precisely adjust the amount of metal precursor entering the cavity. This method eliminates the dependence on the saturated vapor pressure of metal-organic compounds, realizes more flexible precursor delivery, and can use various non-volatile water-soluble substances as precursors, effectively reducing costs.

[0019] Example 2

[0020] Reference Figure 1 This is the second embodiment of the present invention, which is based on the previous embodiment.

[0021] In this embodiment, an observation window 6 is provided on the surface of the main cavity 1. The observation window 6 is made of transparent material and is located above the ultrasonic atomizing sheet 3.

[0022] A feedthrough 7 is provided on the surface of the main cavity 1 and above the observation window 6. One end of the feedthrough 7 is connected to an external power source, and the other end is connected to the ultrasonic atomizing plate 3 via a wire.

[0023] like Figure 1 As shown, through the observation window 6, the operator can observe the working status and atomization process of the ultrasonic atomizing plate 3 in real time. If the atomization effect is poor or there is a blockage, the operator can quickly find the abnormality and take measures through the observation window 6. The feeder 7 is responsible for transmitting the high-frequency electrical signal of the external power supply to the ultrasonic atomizing plate 3, driving it to generate high-frequency vibration to achieve the atomization function. At the same time, the operator can control the signal strength of the feeder 7 through the external power supply to adjust the power of the ultrasonic atomizing plate 3.

[0024] Example 3

[0025] This is the third embodiment of the present invention, which is based on the first two embodiments.

[0026] In this embodiment, by embedding the ultrasonic atomizing plate 2 inside the bubbler 1, the ultrasonic waves are used to transfer energy to the aqueous solution of the metal precursor and atomize it.

[0027] Taking the growth of molybdenum disulfide as an example, hydrogen sulfide is used as a non-metallic precursor, and molybdenum hexacarbonyl, ammonium molybdate, molybdenum chloride or ammonium thiomolybdate is used as a metallic precursor.

[0028] Taking gallium oxide growth as an example, oxygen is used as a non-metallic precursor, and gallium chloride, gallium nitrate, or gallium sulfate is used as a metallic precursor.

[0029] Taking aluminum nitride growth as an example, ammonia is used as a non-metallic precursor, and aluminum chloride or aluminum nitrate is used as a metallic precursor.

[0030] In this embodiment, various non-volatile water-soluble substances such as gallium chloride, gallium nitrate, gallium sulfate, and ammonium molybdate can be used as precursors, and a wide variety of non-volatile substances such as water-soluble salts can be used as sources. This eliminates the limitation of saturated vapor pressure of organometallic compounds and allows for a wide range of control over the precursor concentration. Because water-soluble salts are abundant and have diverse chemical properties, they can meet the preparation requirements of different materials, thereby greatly expanding the types of precursors available in MOCVD technology and providing more possibilities for the development of new materials.

[0031] In use, the prepared salt solution is first injected into the inner cavity of the main body 1 through the injection tube 4. The salt solution is absorbed by the cotton swab 2, ensuring that the solution is evenly distributed below the ultrasonic atomizing plate 3. At the same time, ensure that the feedthrough 7 is correctly connected to the external power supply. Then, turn on the external power supply and send a high-frequency electrical signal to the ultrasonic atomizing plate 3 through the feedthrough 7. At this time, the ultrasonic atomizing plate 3 generates high-frequency vibration, causing the salt solution absorbed by the cotton swab 2 to atomize into tiny droplets. Finally, the atomized droplets are discharged from the outlet tube 5 with the carrier gas and enter the MOCVD cavity for chemical reaction. During the atomization process, the atomization process can be monitored in real time through the observation window 6 to check whether the size and density of the atomized droplets meet the requirements. If the atomization effect is found to be unsatisfactory, the solution can be replaced through the injection tube 4. This allows for adjustment of the salt solution concentration, or by controlling the signal strength of the feedthrough 7 via an external power source, thereby adjusting the power of the ultrasonic atomizing plate 3. The ultrasonic atomizing plate 3 utilizes ultrasonic atomization technology to convert water-soluble salts and other non-volatile substances into gaseous precursors. Furthermore, the ultrasonic atomization power and solution concentration can be controlled during the atomization process, thus precisely adjusting the amount of metal precursor entering the cavity. This method eliminates the dependence on the saturated vapor pressure of organometallic compounds, achieving more flexible precursor delivery. Various non-volatile water-soluble substances can also be used as precursors, effectively reducing costs, breaking through the dependence of traditional MOCVD technology on organometallic compounds, and significantly improving the flexibility and economy of material preparation.

[0032] All standard parts used in this application can be purchased from the market, and can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art. The control method is automatic control through a controller. The control circuit of the controller can be implemented by simple programming by those skilled in the art and is common knowledge in the field. Since this application is mainly used to protect mechanical devices, the control method and circuit connection will not be explained in detail in this application.

[0033] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Those skilled in the art to which this invention pertains can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this invention shall be determined by the claims.

Claims

1. An ultrasonic atomizing bubbler for MOCVD, comprising a main cavity (1), characterized in that: A cotton swab (2) is provided at the bottom of the inner cavity of the main body (1), and an ultrasonic atomizing plate (3) is provided above the cotton swab (2). The cotton swab (2) and the ultrasonic atomizing plate (3) are close together and do not contact each other. An injection tube (4) is connected to the left side of the top of the main body (1). The bottom of the injection tube (4) penetrates the main body (1) and extends into the inner cavity of the main body (1). A drain pipe (5) is connected to the right side of the top of the main body (1). A salt solution is injected into the inside of the main body (1).

2. The ultrasonic atomizing bubbler for MOCVD as described in claim 1, characterized in that: The surface of the main cavity (1) is provided with an observation window (6), which is made of transparent material and is located above the ultrasonic atomizing sheet (3).

3. The ultrasonic atomizing bubbler for MOCVD as described in claim 1, characterized in that: A feed passage (7) is provided on the surface of the main cavity (1) and above the observation window (6). One end of the feed passage (7) is connected to an external power source, and the other end is connected to the ultrasonic atomizing plate (3) via a wire.

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