Magnetic shaft structure and magnetron sputtering device

Abstract

This application relates to the fields of semiconductor and photovoltaic technology, and particularly to a magnetic shaft structure and magnetron sputtering equipment, which solves the problem of poor magnetic field strength and stability affecting coating uniformity and coating rate in related technologies. The magnetic shaft structure includes a fixed component, a target cylinder assembly, a support component, multiple sets of magnetic pole assemblies, and a drive component. The target cylinder assembly is rotatably connected to the fixed component and has a first receiving chamber. The outer surface of the target cylinder assembly can be covered with target material. The support component is disposed in the first receiving chamber and has a second receiving chamber. The multiple sets of magnetic pole assemblies are movably connected to the first receiving chamber. The drive component is disposed in the second receiving chamber and can independently drive each magnetic pole assembly to move closer to or further away from the inner surface of the first receiving chamber. The magnetic shaft structure and magnetron sputtering equipment provided by this application can improve magnetic field strength and stability, thereby improving coating uniformity and coating rate.

Description

Technical Field

[0001] This application relates to the fields of semiconductor and photovoltaic technology, and in particular to a magnetic shaft structure and a magnetron sputtering device. Background Technology

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. The manufacturing process of solar cells requires various processing steps on silicon wafers, such as surface coating. Magnetron sputtering equipment is a commonly used coating method for silicon wafers. The magnetic shaft, as one of the core structures in magnetron sputtering equipment, has a significant impact on the uniformity and density of the coating on the silicon wafer surface.

[0003] In the magnetic shaft structure currently in use, the magnetic shaft is easily affected by the external environment (such as temperature changes, equipment vibration, etc.), which causes local magnetic field changes. Because it is impossible to adjust the locally changing magnetic field in time, the magnetic field stability is poor, and the strength of the magnetic field in each part is difficult to meet the requirements, resulting in poor coating uniformity. Utility Model Content

[0004] In view of this, embodiments of this application provide a magnetic shaft structure and a magnetron sputtering device to solve the problem of poor magnetic field strength and stability affecting the uniformity of coating in related technologies.

[0005] In a first aspect, one embodiment of this application provides a magnetic shaft structure, comprising: a fixing component; a target cylinder assembly rotatably connected to the fixing component, the target cylinder assembly having a first receiving chamber extending along its own axial direction, the outer surface of the target cylinder assembly being covered with a target material; a support component disposed in the first receiving chamber, the support component having a second receiving chamber extending along the axial direction, the first receiving chamber and the second receiving chamber being separated; multiple sets of magnetic pole assemblies movably connected to the first receiving chamber, the multiple sets of magnetic pole assemblies being arranged sequentially along the axial direction; and a driving component disposed in the second receiving chamber, a portion of the driving component being able to pass through the support component to connect to the multiple sets of magnetic pole assemblies respectively, the driving component being able to independently drive each magnetic pole assembly to move closer to or further away from the inner surface of the first receiving chamber.

[0006] In some embodiments, the support assembly has a plurality of through holes arranged in the axial direction, the through holes connecting the first accommodating chamber and the second accommodating chamber, and the drive assembly includes: a plurality of screws, the screws passing through the through holes and threadedly connected to the magnetic pole assembly; a plurality of drive motors located in the second accommodating chamber, the drive motors being connected to the other end of the screws, the drive motors being able to drive the screws to rotate so as to move the magnetic pole assembly along the radial direction of the target cylinder assembly to approach or move away from the inner surface of the first accommodating chamber.

[0007] In some embodiments, the magnetic pole assembly includes: a connecting plate connected to a screw; two first magnetic poles connected to the side of the connecting plate facing the inner surface of the first receiving chamber; and two second magnetic poles connected to the side of the connecting plate facing the inner surface of the receiving chamber. The two first magnetic poles and the two second magnetic poles are arranged at intervals along a first direction, which intersects the axial direction of the target cylinder assembly. The two first magnetic poles are located between the two second magnetic poles, and the height of the first magnetic poles protruding from the connecting plate is greater than the height of the second magnetic poles protruding from the connecting plate.

[0008] In some embodiments, the target cylinder assembly includes: a target cylinder having a cavity extending in an axial direction, with a target material covering the outer surface of the target cylinder; a first sealing end cap rotatably connected to a fixed assembly and connected to one end of the target cylinder; and a second sealing end cap rotatably connected to the fixed assembly and connected to the other end of the target cylinder, wherein the first sealing end cap, the target cylinder, and the second sealing end cap enclose the cavity to form a first accommodating chamber; the magnetic shaft structure further includes: a first driving member disposed on the fixed assembly, the first driving member being connected to the first sealing end cap or the second sealing end cap, and the first driving member being configured to drive the target cylinder to rotate about its own axis.

[0009] In some embodiments, the device further includes: a second driving member disposed on the fixing component, the second driving member being connected to the support component, the second driving member being capable of driving the support component to rotate around the axis of the target cylinder assembly within the first receiving cavity.

[0010] In some embodiments, the support assembly includes: a support member having a second accommodating chamber extending in an axial direction; a support rod connected to the support member, the support rod extending in an axial direction along the target cylinder, and both ends of the support rod being rotatably connected to a first sealing end cap and a second sealing end cap, respectively, the axis of the support rod coinciding with the axis of the target cylinder, and a second driving member connected to the support rod.

[0011] In some embodiments, the support member has a first through hole extending in the axial direction, and the support assembly further includes: a third sealing end cap connected to one end of the support member in the axial direction; and a fourth sealing end cap connected to the other end of the support member in the axial direction. The third sealing end cap, the fourth sealing end cap, and the support member enclose the first through hole to form a second accommodating chamber.

[0012] In some embodiments, the support rod has a receiving space extending in its own axial direction, and the magnetic shaft structure further includes a cooling component, which is at least disposed in the receiving space and is configured to cool at least the target material and the magnetic pole assembly.

[0013] In some embodiments, the fixing assembly includes: a first fixing plate; a second fixing plate, spaced apart from the first fixing plate along the axial direction, and the two ends of the target cylinder assembly are respectively rotatably connected to the first fixing plate and the second fixing plate; the cooling assembly includes: a first water-cooled pipe, located in the accommodating space and extending along the axial direction; a second water-cooled pipe, arranged on the first fixing plate, one end of the second water-cooled pipe passing through the target cylinder assembly and communicating with one end of the first water-cooled pipe, and the other end of the second water-cooled pipe communicating with a water inlet device; a third water-cooled pipe, arranged on the second fixing plate, one end of the third water-cooled pipe passing through the target cylinder assembly and communicating with the other end of the first water-cooled pipe, and the other end of the third water-cooled pipe communicating with a water outlet device.

[0014] Secondly, one embodiment of this application provides a magnetron sputtering apparatus, including: a process furnace having a process chamber configured to accommodate a sheet; and a magnetic shaft structure as described above disposed in the process chamber, the magnetic shaft structure being configured to deposit a film on the surface of the sheet in the process chamber.

[0015] This application provides a magnetic shaft structure and magnetron sputtering equipment. It utilizes a first and a second accommodating chamber disposed within a target barrel assembly and a support assembly, with a drive assembly positioned in the second accommodating chamber. Multiple sets of magnetic pole assemblies are sequentially arranged axially in the first accommodating chamber, such that the magnetic pole assemblies are directly opposite the inner surface of the target barrel assembly and are closer to the target material. Furthermore, during magnetron sputtering, the drive assembly can rapidly adjust the distance between the corresponding magnetic pole assembly and the inner surface of the target barrel assembly based on the real-time detected thickness of the coating in each region of the sheet surface. In other words, the drive assembly can timely and accurately adjust the position of one or more magnetic pole assemblies corresponding to different regions of the sheet surface, thereby changing the magnetron sputtering rate by increasing or decreasing the local magnetic field strength, which is beneficial for improving coating uniformity and coating rate.

[0016] In addition, by driving the multiple sets of magnetic pole components to move closer to or away from the inner surface of the first accommodating chamber, the driving component can quickly respond to changes in the local magnetic field caused by external factors such as temperature changes and equipment vibrations. This allows the magnetic pole components in the area of ​​magnetic field change to move closer to or away from the inner surface of the first accommodating chamber, thereby enabling the magnetic field in each area to quickly reach a uniform and stable state, further improving the coating uniformity and coating rate. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 The diagram shown is a schematic diagram of a magnetron sputtering apparatus provided in an embodiment of this application.

[0019] Figure 2 The diagram shown is a schematic diagram of a magnetic shaft structure provided in an embodiment of this application.

[0020] Figure 3 The image shown is a partial exploded view of a magnetic shaft structure provided in an embodiment of this application.

[0021] Figure 4 The image shown is a cross-sectional view of a magnetic shaft structure provided in an embodiment of this application.

[0022] Figure 5 The image shown is a side view of a magnetic shaft structure provided in an embodiment of this application.

[0023] Figure 6 As shown Figure 5 The cross-sectional view along the AA direction of the magnetic shaft structure shown.

[0024] Figure 7 As shown Figure 6 A magnified view of part B in the magnetic shaft structure shown.

[0025] Figure 8 The image shown is an exploded view of a magnetic shaft structure provided in an embodiment of this application.

[0026] Figure 9 The diagram shown is a schematic diagram of the cooperation between the magnetic pole assembly and the support assembly provided in an embodiment of this application.

[0027] Figure 10 The diagram shown is a schematic diagram of a magnetic pole assembly provided in an embodiment of this application.

[0028] Figure 11 The diagram shown is a schematic diagram of a driving component provided in an embodiment of this application.

[0029] Figure 12 The diagram shown is a schematic diagram of a fixing component provided in an embodiment of this application.

[0030] Figure label:

[0031] 100. Magnetron sputtering equipment; 10. Magnetic shaft structure; 1. Fixing assembly; 11. First bearing assembly; 12. Second bearing assembly; 13. First fixing plate; 131. Wiring conduit; 14. Second fixing plate; 2. Target barrel assembly; 2a. First receiving chamber; 2a1. Cavity; 2c. Target material; 2d. Axis; 21. Target barrel; 22. First sealing end cap; 23. Second sealing end cap; 3. Support assembly; 3a. Second receiving chamber; 3a1. First through hole; 3b. Mounting hole; 31. Support member; 311. Through hole; 32. Support rod; 321. Slot; 3 2a. Accommodation space; 33. Third sealing end cap; 34. Fourth sealing end cap; 4. Magnetic pole assembly; 41. Connecting plate; 42. First magnetic pole; 43. Second magnetic pole; 44. Mounting block; 441. Threaded hole; 5. Drive assembly; 51. Screw; 52. Drive motor; 53. Mounting plate; 54. Limiting rod; 6. First driving component; 7. Second driving component; 8. Cooling assembly; 81. First water-cooled pipe; 82. Second water-cooled pipe; 83. Third water-cooled pipe; 20. Process furnace; 201. Process chamber; 30. Sheet; X. Axial direction; Y. First direction. Detailed Implementation

[0032] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0033] Figure 1 The diagram shown is a schematic diagram of a magnetron sputtering apparatus provided in an embodiment of this application. Figure 2 The diagram shown is a schematic diagram of a magnetic shaft structure provided in an embodiment of this application. Figure 3 The image shown is a partial exploded view of a magnetic shaft structure provided in an embodiment of this application. Figure 4 The image shown is a cross-sectional view of a magnetic shaft structure provided in an embodiment of this application. Figure 5 The image shown is a side view of a magnetic shaft structure provided in an embodiment of this application. Figure 6 As shown Figure 5 The diagram shows a cross-sectional view along direction AA in the magnetic shaft structure. Arrow X points to the axial direction of the magnetic shaft structure 10, which is also the axial direction X of the target cylinder 21. Arrow Y points to the first direction, which is perpendicular to the axial direction X and parallel to the horizontal plane; this will not be emphasized further.

[0034] This application provides a magnetic shaft structure, such as... Figures 1 to 3The magnetic shaft structure 10 is applied in the magnetron sputtering equipment 100. The magnetic shaft structure 10 includes a fixing component 1 and a target barrel assembly 2. The target barrel assembly 2 is rotatably connected to the fixing component 1, and the outer surface of the target barrel assembly 2 can be covered with target material 2c. The magnetron sputtering equipment 100 includes a process furnace 20, which has a process chamber 201 configured to accommodate a sheet 30. The magnetic shaft structure 10 is connected to the process chamber 201 through the fixing component 1 and is positioned above the sheet 30 for magnetron sputtering of the surface of the sheet 30 to form a film.

[0035] It is understood that the process furnace 20 of the magnetron sputtering equipment may also include an air inlet and an air outlet connected to the process chamber 201 for filling the process chamber 201 with reactive gas. The magnetic shaft structure 10 can form a magnetic field around the target material 2c. During the rotation of the target cylinder assembly 2, the reactive gas bombards the surface of the target material 2c on the magnetic shaft structure 10 under the action of the magnetic field. Molecules, atoms, ions and electrons on the surface of the target material 2c are sputtered onto the surface of the sheet 30 to deposit a film, which will not be described in detail.

[0036] Optionally, the sheet 30 can be a semiconductor or photovoltaic material for preparing solar cells. The shape of the sheet 30 includes square, round, etc., and its specific size can be adapted to actual needs without being specifically limited.

[0037] Specifically, such as Figures 3 to 6 The target cylinder assembly 2 has a first receiving chamber 2a extending along its own axial direction X. The magnetic shaft structure 10 also includes a support assembly 3, multiple sets of magnetic pole assemblies 4, and a drive assembly 5. The support assembly 3 is disposed in the first receiving chamber 2a and has a second receiving chamber 3a extending along the axial direction X. The first receiving chamber 2a and the second receiving chamber 3a are separated. Multiple sets of magnetic pole assemblies 4 are movably connected to the first receiving chamber 2a and are arranged sequentially along the axial direction X. The drive assembly 5 is disposed in the second receiving chamber 3a. A portion of the drive assembly 5 can pass through the support assembly 3 to connect to the multiple sets of magnetic pole assemblies 4 respectively. The drive assembly 5 can independently drive each magnetic pole assembly 4 to move closer to or further away from the inner surface of the first receiving chamber 2a.

[0038] The magnetic shaft structure 10 provided in this embodiment utilizes a first receiving chamber 2a and a second receiving chamber 3a disposed in the target barrel assembly 2 and the support assembly 3, with the drive assembly 5 disposed in the second receiving chamber 3a. Multiple sets of magnetic pole assemblies 4 are sequentially arranged in the first receiving chamber 2a along the axial direction X, such that the magnetic pole assemblies 4 are directly opposite to the inner surface of the target barrel assembly 2 and are closer to the target material 2c. Furthermore, during magnetron sputtering, the drive assembly 5 can quickly adjust the distance between the magnetic pole assembly 4 corresponding to each region of the sheet 30 surface and the inner surface of the target barrel assembly 2 based on the real-time detected thickness of the coating in each region. That is, the drive assembly 5 can timely and accurately adjust the position of one or more magnetic pole assemblies 4 corresponding to different regions of the sheet 30 surface, thereby changing the magnetron sputtering rate by increasing or decreasing the magnetic field strength in the local area, which is beneficial for improving coating uniformity and coating rate.

[0039] In addition, by driving the drive component 5 to move multiple sets of magnetic pole components 4 to move closer to or away from the inner surface of the first accommodating chamber 2a, when the local magnetic field changes due to external factors such as temperature changes or equipment vibration, the drive component 5 can respond quickly according to the actual situation to move the magnetic pole components 4 in the area of ​​magnetic field change closer to or away from the inner surface of the first accommodating chamber 2a, so that the magnetic field in each area can quickly and accurately reach a uniform and stable state, further improving the coating uniformity and coating rate, reducing equipment debugging time, and improving production efficiency.

[0040] In addition, by driving the drive component 5 to independently drive each magnetic pole component 4, the magnetic shaft structure 10 can be applied to the coating of the surface of parts with more complex shapes. The distance between the magnetic pole component 4 and the target material 2c in the corresponding area is matched according to the shape of the part, so that the overall coating of the surface of the complex-shaped parts has high uniformity and density, and can be applied to different coating scenarios.

[0041] like Figure 5 and Figure 6 The fixing assembly 1 may include a first fixing plate 13 and a second fixing plate 14. The second fixing plate 14 is spaced apart from the first fixing plate 13 along the axial direction X. The two ends of the target cylinder assembly 2 are rotatably connected to the first fixing plate 13 and the second fixing plate 14, respectively. The first fixing plate 13 and the second fixing plate 14 are used to rotatably connect the target cylinder assembly 2 and also to connect the magnetic shaft structure 10 to the process chamber 201 so that the magnetic shaft assembly is located above the sheet 30.

[0042] It is understandable that the shape and size of the first fixing plate 13 and the second fixing plate 14 can be adapted to actual needs without being specifically limited.

[0043] Optionally, a first bearing assembly 11 may be provided on the first fixed plate 13 or the second fixed plate 14. The first bearing assembly 11 connects the fixed plate and the target cylinder assembly 2 so that the target cylinder assembly 2 can rotate. The specific mating structure will not be described in detail.

[0044] In some alternative embodiments, the magnetic shaft structure 10 further includes a first driving member 6, which is disposed on the first fixing plate 13 or the second fixing plate 14 of the fixing assembly 1. The output end of the first driving member 6 is connected to the target cylinder assembly 2, and the first driving member 6 is configured to drive the target cylinder assembly 2 to rotate.

[0045] Optionally, the first driving element 6 may be, for example, a small electric motor or other structure capable of rotating the target cylinder assembly 2, without specific limitation.

[0046] like Figure 6 The target cylinder assembly 2 may specifically include a target cylinder 21, a first sealing end cap 22, and a second sealing end cap 23. The target cylinder 21 has a cavity 2a1 that extends through in the axial direction X. The target material 2c covers the outer surface of the target cylinder 21. The first sealing end cap 22 is rotatably connected to the fixing assembly 1 and is connected to one end of the target cylinder 21. The second sealing end cap 23 is rotatably connected to the fixing assembly 1 and is connected to the other end of the target cylinder 21. The first sealing end cap 22, the target cylinder 21, and the second sealing end cap 23 enclose the cavity 2a1 to form a first accommodating chamber 2a. The output end of the first driving member 6 is connected to the first sealing end cap 22 or the second sealing end cap 23. The first driving member 6 is configured to drive the target cylinder 21 to rotate around its own axis 2d.

[0047] Optionally, the first sealing end cap 22 or the second sealing end cap 23 is rotatably connected to the corresponding first fixing plate 13 or second fixing plate 14 via the first bearing assembly 11, and the axis 2d of the first bearing assembly 11 coincides with the axis 2d of the target cylinder 21.

[0048] Optionally, sealing rings can be provided at the mating positions of the first sealing end cap 22 and the target cylinder 21, and at the mating positions of the second sealing end cap 23 and the target cylinder 21, to form a sealed first accommodating chamber 2a, thereby separating the first accommodating chamber 2a from the process chamber 201, so as to prevent the reaction gas in the process chamber 201 from affecting the performance of the magnetic pole assembly 4.

[0049] It is understandable that the target material 2c is uniformly coated on the outer surface of the target cylinder 21, and the first driving component 6 can drive the target cylinder 21 to rotate at a constant speed in the forward or reverse direction around its own axis 2d, so that the target material 2c is uniformly sputtered onto the surface of the sheet 30 under the bombardment of the reactive gas when passing through the magnetic field formed by the magnetic pole component 4.

[0050] Figure 7 As shown Figure 6 A magnified view of part B in the magnetic shaft structure shown. Figure 8 The image shown is an exploded view of a magnetic shaft structure provided in an embodiment of this application. Figure 9 The diagram shown is a schematic diagram of the cooperation between the magnetic pole assembly and the support assembly provided in an embodiment of this application. Figure 10 The diagram shown is a schematic diagram of a magnetic pole assembly provided in an embodiment of this application. Figure 11 The diagram shown is a schematic diagram of a driving component provided in an embodiment of this application. Figure 12 The diagram shown is a schematic diagram of a fixing component provided in an embodiment of this application.

[0051] like Figure 7 and Figure 8 The support assembly 3 includes a support member 31 and a support rod 32. The support member 31 has a second accommodating chamber 3a extending in the axial direction X. The support rod 32 is connected to the support member 31 and extends in the axial direction X of the target cylinder 21. Both ends of the support rod 32 are rotatably connected to a first sealing end cap 22 and a second sealing end cap 23, respectively. The axis 2d of the support rod 32 coincides with the axis 2d of the target cylinder 21. The support member 31 is confined within the first accommodating chamber 2a by the support rod 32, and the support rod 32 will not rotate with the rotation of the magnetic cylinder, so that the magnetic pole assembly 4 can be stably set in the first accommodating chamber 2a, ensuring the uniformity of the coating.

[0052] Optionally, the support member 31 is provided with a mounting hole 3b extending and penetrating along the axial direction X of the target cylinder 21. The support rod 32 passes through the mounting hole 3b and its two ends are rotatably connected to the first sealing end cap 22 and the second sealing end cap 23, respectively. The rotation of the target cylinder 21 will not cause the support rod 32 to rotate.

[0053] It is understandable that after the support rod 32 passes through the mounting hole 3b, the support member 31 and the support rod 32 can be fixed relative to the support rod 32 by means of snap-fit ​​or welding.

[0054] It is understood that the support rod 32 and the corresponding sealing end cap can be rotatably connected by the second bearing assembly 12, and the end of the support rod 32 and the second bearing assembly 12 can be engaged by the matching slot 321 and the locking block to improve the stability and strength of the connection.

[0055] like Figures 7 to 11 The support assembly 3 is provided with a plurality of through holes 311 arranged along the axial direction X. The through holes 311 connect the first accommodating chamber 2a and the second accommodating chamber 3a. The drive assembly 5 includes a plurality of screws 51 and a plurality of drive motors 52. The screws 51 pass through the through holes 311 and are threadedly connected to the magnetic pole assembly 4. The plurality of drive motors 52 are located in the second accommodating chamber 3a. The drive motors 52 are connected to the other end of the screws 51. The drive motors 52 can drive the screws 51 to rotate so as to drive the magnetic pole assembly 4 to move along the radial direction of the target cylinder assembly 2 to approach or move away from the inner surface of the first accommodating chamber 2a.

[0056] Understandably, when the screw 51 is threadedly connected to the magnetic pole assembly 4 through the through hole 311, the magnetic pole assembly 4 may include a mounting block 44. The mounting block 44 has a threaded hole 441 that mates with the screw 51. The mounting block 44 can at least partially extend into the through hole 311. The mounting block 44 and the through hole 311 are either clearance-fitted or sealing-fitted, allowing the mounting block 44 to move in the radial direction of the target cylinder assembly 2. That is, when the drive motor 52 drives the connected screw 51 to rotate in the forward or reverse direction, the depth of the screw 51 screwed into the threaded hole 441 changes, thereby causing the mounting block 44 to move in the axial direction X along the through hole 311, thereby causing the magnetic pole assembly 4 to move closer to or further away from the inner surface of the target cylinder 21.

[0057] Alternatively, threads can be directly provided on the inner wall of the through hole 311 to form a threaded hole 441, and the screw 51 passes through the two ends of the through hole 311 and is connected to the drive motor 52 and the magnetic pole assembly 4 respectively.

[0058] It is understandable that, such as Figure 11 The drive assembly 5 may also include multiple mounting plates 53 and multiple limiting rods 54 connected to each other. The mounting plates 53 and the limiting rods 54 are located in the second accommodating chamber 3a and correspond to multiple through holes 311 respectively. The limiting rods 54 are fixedly connected to the four corners of the mounting plates 53 so that the mounting plates 53 are located above the corresponding through holes 311. The drive motor 52 is fixedly connected to the mounting plates 53 and will not be described in detail.

[0059] like Figure 7 and Figure 10 Each magnetic pole assembly 4 includes a connecting plate 41, two first magnetic poles 42 and two second magnetic poles 43. The connecting plate 41 is connected to the screw 51. The two first magnetic poles 42 are connected to the side of the connecting plate 41 facing the inner surface of the first accommodating chamber 2a. The two second magnetic poles 43 are connected to the side of the connecting plate 41 facing the inner surface of the first accommodating chamber 2a. The two first magnetic poles 42 and the two second magnetic poles 43 are arranged at intervals along a first direction Y. The first direction Y intersects the axial direction X of the target cylinder assembly 2. The two first magnetic poles 42 are located between the two second magnetic poles 43. The height of the first magnetic pole 42 protruding from the connecting plate 41 is greater than the height of the second magnetic pole 43 protruding from the connecting plate 41. It should be emphasized that the height difference between the first magnetic pole 42 protruding from the connecting plate 41 and the second magnetic pole 43 protruding from the connecting plate 41 can be adaptively adjusted according to actual needs. The height difference between the first magnetic pole 42 and the second magnetic pole 43 can be adaptively adjusted according to the shape of the inner wall of the matching target cylinder 21, so that when the magnetic pole assembly 4 is located in the first accommodating chamber 2a, the distance from the first magnetic pole 42 to the inner wall of the target cylinder 21 is similar to or the same as the distance from the second magnetic pole 43 to the inner wall of the target cylinder 21, which is beneficial to the uniformity of the formed magnetic field and further improves the uniformity of the coating on the surface of the sheet 30.

[0060] Optionally, such as Figure 8 and Figure 9 The support member 31 has a first through hole 3a1 extending in the axial direction X. The support assembly 3 also includes a third sealing end cap 33 and a fourth sealing end cap 34. The third sealing end cap 33 is connected to one end of the support member 31 in the axial direction X, and the fourth sealing end cap 34 is connected to the other end of the support member 31 in the axial direction X. The third sealing end cap 33, the fourth sealing end cap 34, and the support member 31 enclose the first through hole 3a1 to form a second accommodating chamber 3a. It can be understood that when the support rod 32 is connected to the first sealing end cap 22 and the second sealing end cap 23, the third sealing end cap 33 and the fourth sealing end cap 34 can be pre-set with openings at the positions corresponding to the support rod 32, so that the support rod 32 can partially extend into the first accommodating chamber 2a and be rotatably connected with the first sealing end cap 22 and the second sealing end cap 23. Sealing rings can be respectively provided at the positions where the third sealing end cap 33 and the fourth sealing end cap 34 mate with the support rod 32 to seal the second accommodating chamber 3a.

[0061] In some embodiments, the magnetic shaft structure 10 further includes a second driving member 7, which is disposed on the fixing assembly 1 and connected to the support assembly 3. The second driving member 7 can drive the support assembly 3 to rotate around the axis 2d of the target cylinder assembly 2 within the first accommodating chamber 2a. Specifically, the second driving member 7 can be, for example, a small motor. The second driving member 7 is fixedly connected to the first fixing plate 13 or the second fixing plate 14. The output end of the second driving member 7 is connected to the support rod 32, specifically to the end of the support rod 32 through the second bearing assembly 12. The second driving member 7 can drive the support rod 32 to rotate in the forward or reverse direction around the axis 2d of the target cylinder 21. The rotation of the support rod 32 and the rotation of the target cylinder 21 are independent of each other and do not interfere with each other. The second driving component 7 enables the support rod 32 to rotate around the axis 2d, thereby driving the magnetic pole assembly 4 connected to the support rod 32 to rotate around the axis 2d as well, so that the magnetic pole assembly 4 can be directly facing the sheet 30 in the vertical direction or tilted at a certain angle relative to the vertical direction, thereby realizing the adjustment of the sputtering angle of the sheet 30, so as to further improve the coating uniformity and coating density.

[0062] like Figure 7 , Figure 8 and Figure 12 The support rod 32 has a receiving space 32a extending along its own axial direction X. The magnetic shaft structure 10 also includes a cooling component 8, which is at least disposed in the receiving space 32a and is configured to cool at least the target material 2c and the magnetic pole assembly 4. This mating structure isolates water and electricity and separates them from the magnetic pole assembly 4, preventing water and electricity-related faults from interfering with the coating process and providing a good coating environment.

[0063] Specifically, the cooling component 8 includes a first water-cooled pipe 81, a second water-cooled pipe 82, and a third water-cooled pipe 83. The first water-cooled pipe 81 is located in the accommodating space 32a and extends along the axial direction X. The second water-cooled pipe 82 is arranged on the first fixed plate 13. One end of the second water-cooled pipe 82 passes through the target cylinder assembly 2 and is connected to one end of the first water-cooled pipe 81. The other end of the second water-cooled pipe 82 is connected to the water inlet device. The third water-cooled pipe 83 is arranged on the second fixed plate 14. One end of the third water-cooled pipe 83 passes through the target cylinder assembly 2 and is connected to the other end of the first water-cooled pipe 81. The other end of the third water-cooled pipe 83 is connected to the water outlet device.

[0064] It is understood that the first water-cooled pipe 81, the second water-cooled pipe 82 and the third water-cooled pipe 83 form a circulating water-cooled pipeline. The specific arrangement of the first fixed plate 13, the accommodating space 32a and the second fixed plate 14 can be adapted to actual needs. The water inlet equipment and the water outlet equipment can be evenly connected to the water-cooled pipes on the first fixed plate 13 or the second fixed plate 14 without specific limitations.

[0065] Optionally, at least one of the first fixing plate 13 and the second fixing plate 14 is also provided with a wiring conduit 131, and the support member 31 is also provided with a corresponding wiring hole for isolating water and electricity, which will not be described in detail.

[0066] In other embodiments, the first water-cooling pipe 81 may also be disposed in the second accommodating chamber 3a, without specific limitation.

[0067] This application embodiment also provides a magnetron sputtering apparatus, including a process furnace 20 and a magnetic shaft structure 10. The process furnace 20 has a process chamber 201, which is configured to accommodate a sheet 30. The magnetic shaft structure 10 is disposed in the process chamber 201 and configured to deposit a film on the surface of the sheet 30 in the process chamber 201.

[0068] It is understood that the process furnace 20 of the magnetron sputtering equipment may also include an air inlet and an air outlet connected to the process chamber 201 for filling the process chamber 201 with reactive gas. The magnetic shaft structure 10 can form a magnetic field around the target material 2c. During the rotation of the target cylinder assembly 2, the reactive gas bombards the surface of the target material 2c on the magnetic shaft structure 10 under the action of the magnetic field. Molecules, atoms, ions and electrons on the surface of the target material 2c are sputtered onto the surface of the sheet 30 to deposit a film, which will not be described in detail.

[0069] Optionally, the specific structure of the magnetic shaft structure 10 can be referred to the relevant descriptions in the above embodiments, and will not be repeated here.

[0070] In the embodiments of this application, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for the form of detachable fit, a non-detachable connection can be achieved by welding, bonding, etc.

[0071] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details of the above application are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0072] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0073] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0074] The above description of the claimed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be applied within the widest scope consistent with the principles and novel features of this application.

[0075] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit the embodiments of this application to the forms described herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A magnetic shaft structure, characterized in that, include; Fixed components; The target cylinder assembly is rotatably connected to the fixed assembly. The target cylinder assembly has a first receiving chamber extending along its own axial direction, and the outer surface of the target cylinder assembly can be covered with target material. A support assembly is disposed in the first receiving chamber, the support assembly having a second receiving chamber extending along the axial direction, the first receiving chamber and the second receiving chamber being separated; Multiple sets of magnetic pole assemblies are movably connected to the first accommodating chamber, and the multiple sets of magnetic pole assemblies are arranged sequentially along the axial direction; A drive assembly is disposed in the second accommodating chamber. A portion of the drive assembly can pass through the support assembly to connect to multiple sets of magnetic pole assemblies. The drive assembly can independently drive each magnetic pole assembly to move closer to or further away from the inner surface of the first accommodating chamber.

2. The magnetic shaft structure according to claim 1, characterized in that, The support assembly has a plurality of through holes arranged along the axial direction, the through holes connecting the first receiving chamber and the second receiving chamber, and the drive assembly includes: Multiple screws, the screws passing through the through hole and threadedly connected to the magnetic pole assembly; Multiple drive motors are located in the second accommodating chamber. The drive motors are connected to the other end of the screw. The drive motors can drive the screw to rotate so that the magnetic pole assembly moves along the radial direction of the target cylinder assembly to approach or move away from the inner surface of the first accommodating chamber.

3. The magnetic shaft structure according to claim 2, characterized in that, The magnetic pole assembly includes: A connecting plate is connected to the screw. Two first magnetic poles are connected to the side of the connecting plate facing the inner surface of the first accommodating chamber; Two second magnetic poles are connected to the inner surface of the connecting plate facing the first accommodating chamber. The two first magnetic poles and the two second magnetic poles are arranged at intervals along a first direction, which intersects the axial direction of the target cylinder assembly. The two first magnetic poles are located between the two second magnetic poles. The height of the first magnetic pole protruding from the connecting plate is greater than the height of the second magnetic pole protruding from the connecting plate.

4. The magnetic shaft structure according to claim 1, characterized in that, The target cylinder assembly includes: A target cylinder having a cavity extending along the axial direction, the target material covering the outer surface of the target cylinder; The first sealing end cap is rotatably connected to the fixing assembly, and the first sealing end cap is connected to one end of the target cylinder; The second sealing end cap is rotatably connected to the fixed assembly and connected to the other end of the target cylinder. The first sealing end cap, the target cylinder, and the second sealing end cap enclose the lumen to form the first accommodating chamber. The magnetic shaft structure also includes: A first driving member is disposed on the fixed assembly. The first driving member is connected to the first sealing end cap or the second sealing end cap. The first driving member is configured to drive the target cylinder to rotate about its own axis.

5. The magnetic shaft structure according to any one of claims 1-4, characterized in that, Also includes: A second driving member is disposed on the fixing component and connected to the support component. The second driving member can drive the support component to rotate around the axis of the target cylinder component within the first accommodating cavity.

6. The magnetic shaft structure according to claim 5, characterized in that, The support components include: The support member is provided with a second receiving chamber extending along the axial direction; A support rod is connected to the support member. The support rod extends along the axial direction of the target cylinder, and both ends of the support rod are rotatably connected to the first sealing end cap and the second sealing end cap, respectively. The axis of the support rod coincides with the axis of the target cylinder, and the second driving member is connected to the support rod.

7. The magnetic shaft structure according to claim 6, characterized in that, The support member is provided with a first through hole extending along the axial direction, and the support assembly further includes: The third sealing end cap is connected to one end of the support member in the axial direction; The fourth sealing end cap is connected to the other end of the support member in the axial direction, and the third sealing end cap, the fourth sealing end cap and the support member enclose the first through hole to form the second accommodating cavity.

8. The magnetic shaft structure according to claim 6, characterized in that, The support rod has an accommodating space extending along its own axial direction, and the magnetic shaft structure further includes: A cooling component is disposed at least in the accommodating space, and the cooling component is configured to cool at least the target material and the magnetic pole assembly.

9. The magnetic shaft structure according to claim 8, characterized in that, The fixing component includes: First fixing plate; The second fixing plate is spaced apart from the first fixing plate along the axial direction, and the two ends of the target cylinder assembly are rotatably connected to the first fixing plate and the second fixing plate, respectively. The cooling component includes: A first water-cooled pipe is located in the accommodating space and extends along the axial direction; A second water-cooled pipe is arranged on the first fixed plate. One end of the second water-cooled pipe passes through the target cylinder assembly and is connected to one end of the first water-cooled pipe. The other end of the second water-cooled pipe is connected to the water inlet device. A third water-cooled pipe is arranged on the second fixed plate. One end of the third water-cooled pipe passes through the target cylinder assembly and is connected to the other end of the first water-cooled pipe. The other end of the third water-cooled pipe is connected to the water outlet device.

10. A magnetron sputtering apparatus, characterized in that, include: A process furnace having a process chamber configured to accommodate a sheet; The magnetic shaft structure according to any one of claims 1 to 9 is disposed in the process chamber, and the magnetic shaft structure is configured to coat the sheet surface of the process chamber.

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