A heat preservation mechanism of a single crystal furnace and a single crystal furnace

Abstract

This utility model provides a heat preservation mechanism for a single crystal furnace and the single crystal furnace itself, including an inner layer structure and an outer layer structure coaxially arranged, with a gap between the outer layer structure and the inner layer structure; a lifting structure connected to the outer layer structure, which drives the outer layer structure to rise and fall under the drive of an external driving device; a guide structure located between the inner layer structure and the outer layer structure, which is connected to the outer layer structure and / or the inner layer structure to guide the rising and falling of the outer layer structure; a re-feeding hole is provided on the inner layer structure, and the re-feeding hole is controlled by the rising and falling action of the outer layer structure to determine whether it is blocked. When the re-feeding hole is not blocked by the outer layer structure, re-feeding is performed. After re-feeding is completed, the outer layer structure blocks the re-feeding hole. This solves the problems of displacement and poor fit of ordinary blocking blocks, and solves the problems of single crystal quality caused by power consumption, furnace oxidation, and temperature gradient. There is no friction between the outer layer structure and the inner layer structure, avoiding the risk of carbon felt shedding.

Description

Technical Field

[0001] This utility model belongs to the field of Czochralski single crystal technology, and in particular relates to a heat preservation mechanism for a single crystal furnace and a single crystal furnace. Background Technology

[0002] Currently, the mainstream method for monocrystalline silicon production is RCZ (Repeated Crystal Pulling). In existing monocrystalline furnace production processes, due to limited furnace capacity, the amount of silicon material added at one time is limited. Previously, re-adding required waiting for the furnace to cool down, using a quartz re-feeding bucket with approximately four re-feeding cycles per segment. After adding material, the furnace was heated to resume production. This process wasted significant time and energy, greatly reducing production efficiency. An external feeder can directly perform re-feeding during the slow-cooling process. Traditional re-feeding methods cannot perform re-feeding before the monocrystalline silicon is removed, directly saving cooling and segment removal time. This time saving can be converted into increased production capacity for the company. Summary of the Invention

[0003] Currently, the insulation cylinder on the external re-feeding furnace platform needs to be perforated. The current method of using a blocking block to block the opening of the upper insulation cylinder has many problems. First, the hanging rod is prone to breakage. Second, the blocking block is prone to displacement. Third, the blocking block does not fit tightly. These problems directly affect the crystal formation of the furnace platform.

[0004] In view of the above problems, the present invention provides a heat preservation mechanism for a single crystal furnace and a single crystal furnace to solve the above or other problems existing in the prior art.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a heat preservation mechanism for a single crystal furnace, comprising:

[0006] The inner and outer structures are coaxially arranged, with a gap between them;

[0007] The lifting structure, which is connected to the outer structure, drives the outer structure to rise and fall under the drive of an external drive device.

[0008] A guide structure is provided between the inner and outer structures, and the guide structure is connected to the outer and / or inner structures to guide the lifting and lowering of the outer structure;

[0009] The inner structure is equipped with a re-sinking hole. The re-sinking hole is controlled by the lifting action of the outer structure. When the re-sinking hole is not blocked by the outer structure, re-sinking is performed. After re-sinking is completed, the outer structure blocks the re-sinking hole to reduce heat loss.

[0010] Furthermore, the guide structure includes a fixed component and a rotating component. The fixed component is fixedly connected to the inner wall of the outer structure or the outer wall of the inner structure, and the rotating component is connected to the fixed component, and the rotating component can rotate relative to the fixed component.

[0011] Furthermore, the rotating assembly includes a rotating shaft and a rotating component, the rotating shaft being rotatably connected to the fixed assembly, and the rotating component being fixedly connected to the rotating shaft; or,

[0012] The rotating shaft is fixedly connected to the fixed component, and the rotating part is rotatably connected to the rotating shaft.

[0013] Furthermore, the rotating assembly includes a fixed connector and a rotating component arranged coaxially, and a plurality of rolling components disposed between the fixed connector and the rotating component. The plurality of rolling components are arranged sequentially along the circumferential direction of the fixed connector. The fixed connector is connected to the fixed assembly, and the rotating component can rotate relative to the fixed connector by rotating the rolling components.

[0014] Furthermore, the guide structure is arranged along the axial direction of the outer layer structure. The guide structure includes a guide member and a sliding member that are slidably connected. The guide member and the sliding member are respectively connected to the inner layer structure and the outer layer structure. During the lifting and lowering process of the outer layer structure, the sliding member slides along the axial direction of the guide member.

[0015] Furthermore, the inner structure includes a first insulation layer, a second insulation layer, and a third insulation layer arranged coaxially, with the second insulation layer located between the first and third insulation layers, and the re-drilling hole penetrating through the first, second, and third insulation layers.

[0016] Furthermore, the first and third insulation layers are made of carbon-carbon materials, while the second insulation layer is made of carbon felt.

[0017] Furthermore, the number of lifting structures is at least two, and multiple lifting structures are arranged sequentially along the circumference of the outer structure, with the multiple lifting structures arranged symmetrically in pairs.

[0018] Furthermore, the lifting structure includes a first lifting member and a second lifting member connected to each other. The first lifting member and the second lifting member are arranged intersectingly. The first lifting member is fixedly connected to the outer wall of the outer layer structure, and the second lifting member is connected to an external driving device.

[0019] A single crystal furnace includes a heat preservation mechanism as described above.

[0020] Furthermore, it also includes a guide tube displacement drive device, which is reused as an external drive device.

[0021] By adopting the above technical solution, the heat preservation mechanism of the single crystal furnace has a guiding structure. The guiding structure is set between the coaxial inner and outer layers. The guiding structure is connected to the outer or inner layer and can rotate or slide. This allows the guiding structure to limit the gap between the inner and outer layers, preventing the outer layer from contacting the inner layer. During the lifting and lowering of the outer layer, the guiding structure guides the movement and prevents friction between the outer and inner layers, thus avoiding scratching of the carbon felt and preventing the risk of carbon felt shedding. This solves the problem of carbon felt shedding caused by friction during the lifting and lowering of the outer layer, ensuring the quality of the single crystal.

[0022] The outer structure is connected to the lifting structure, which in turn is connected to an external drive device. The lifting action of the guide tube enables the outer structure to move up and down along the axial direction. The inner structure has a refill hole, while the outer structure does not. When the outer structure rises through the lifting structure and guide tube, the refill hole is exposed. The outer structure does not block the refill hole, allowing the external refiller to perform refilling operations. After refilling, the outer structure descends to its original position, blocking the refill hole to prevent excessive heat loss during crystal pulling, reduce heat field power consumption, and ensure good temperature stability in the heat field. This prevents temperature gradient changes and guarantees the quality of the pulled single crystal. This solves the problems of displacement and poor adhesion that exist in ordinary blockages, as well as the single crystal quality problems caused by power consumption, furnace oxidation, and temperature gradients.

[0023] The lifting structure is connected to the external drive device via a quick-connect component. The quick-connect component is equipped with quick-connect holes, through which the lifting structure can be engaged with the quick-connect component, thereby improving the efficiency of installation and disassembly of the lifting structure and the external drive device. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the heat preservation mechanism of a single crystal furnace according to an embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the inner layer structure of one embodiment of the present invention;

[0026] Figure 3 This is a schematic diagram of the structure of a rotating assembly according to an embodiment of the present invention;

[0027] Figure 4 This is a cross-sectional view of the rotating assembly according to an embodiment of the present invention;

[0028] Figure 5 This is a schematic diagram of another structure of the heat preservation mechanism of a single crystal furnace according to an embodiment of the present invention;

[0029] Figure 6 This is a side view of the lifting structure according to an embodiment of the present invention;

[0030] Figure 7 This is a front view schematic diagram of the lifting structure according to an embodiment of the present invention;

[0031] Figure 8 This is a schematic diagram of the structure of a quick-assembly component according to an embodiment of the present invention;

[0032] Figure 9 This is a schematic diagram of the structure when the quick-release component and the suspension component are connected according to an embodiment of this utility model.

[0033] In the picture:

[0034] 1. Outer structure 2. Inner structure 3. Guide structure

[0035] 4. Re-entry hole; 5. Lifting structure; 20. First insulation layer

[0036] 21. Second insulation layer; 22. Third insulation layer; 30. Fixing components.

[0037] 31. Rotating assembly 50, First lifting component 51, Second lifting component

[0038] 52. Suspension rod; 6. Quick-release assembly; 53. Connecting rod

[0039] 32. Guide component; 33. Sliding component; 60. Quick-release body

[0040] 61. Connecting hole; 62. Quick-release hole; 620. Insertion part

[0041] 621, Transition section; 622, Snap-fit ​​section; 520, Snap-fit ​​groove Detailed Implementation

[0042] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0043] Figure 1 A schematic diagram of an embodiment of the present invention is shown. This embodiment relates to a heat preservation mechanism for a single crystal furnace and the single crystal furnace itself. The device is installed on an upper heat preservation mechanism. The upper heat preservation mechanism is structurally improved by setting a guide structure between the inner and outer layers, and setting a lifting structure on the outer layer. The lifting structure is connected to an external driving device. The inner layer has a re-casting hole. During re-casting, the outer layer can be raised along with the guide tube, so that the re-casting hole on the inner layer is exposed and not blocked. After re-casting, the outer layer descends along with the water cooling device, and the outer layer blocks the re-casting hole to avoid excessive heat loss during crystal pulling, thus solving the problems of displacement and poor fit that exist in ordinary blockages.

[0044] A heat preservation mechanism for a single crystal furnace involves structural improvements to the upper heat preservation mechanism. The existing upper heat preservation mechanism's structure is modified, eliminating the use of blocking blocks and resolving issues such as misalignment and incomplete fit associated with existing blocking blocks. Figure 1 and 2 As shown, the device includes:

[0045] The inner layer structure 2 and the outer layer structure 1 are coaxially arranged. The inner layer structure 2 is located inside the outer layer structure 1, and there is a gap between the inner layer structure 2 and the outer layer structure 1. The inner layer structure 2 and the outer layer structure 1 constitute the overall structural skeleton of the upper insulation mechanism.

[0046] The lifting structure 5 is connected to the outer structure 1. The lifting structure 5 connects the outer structure 1 to the external drive device. Under the drive of the external drive device, the lifting structure 5 drives the outer structure 1 to move up and down.

[0047] A guide structure 3 is provided between the inner layer structure 2 and the outer layer structure 1. The guide structure 3 is connected to the outer layer structure 1 and / or the inner layer structure 2. The guide structure 3 is rotatable. The setting of the guide structure 3 limits the gap between the inner layer structure 2 and the outer layer structure 1, so that the inner wall of the outer layer structure 1 does not contact the outer wall of the inner layer structure 2. At the same time, it guides the lifting and lowering movement of the outer layer structure 1, so that the outer layer structure 1 does not contact the inner layer structure 2 during the lifting and lowering process, and does not generate friction. This avoids the situation where carbon felt is shedding due to friction between the outer layer structure 1 and the inner layer 2, so that no new impurities are introduced during the single crystal pulling process, and avoids affecting the quality of the single crystal.

[0048] The refill hole 4 is provided on the inner layer structure 2. The refill hole 4 is used to cooperate with the external refill device outside the single crystal furnace. The quartz tube of the external refill device can pass through the refill hole 4 to enter the hot field. The discharge end of the quartz tube is located above the quartz crucible for refilling. The lifting action of the outer layer structure 1 controls whether the refill hole 4 is blocked. When the refill hole 4 is not blocked by the outer layer structure 1, refilling is performed. After the refilling is completed, the outer layer structure 1 blocks the refill hole 4 to reduce heat loss.

[0049] A refill hole 4 is provided on the inner layer structure 2, while no refill hole 4 is provided on the outer layer structure 1. There is a gap between the outer layer structure 1 and the inner layer structure 2, and they do not contact each other. The outer layer structure 1 can move with the guide tube through the lifting structure 5. When the guide tube rises, the outer layer structure 1 rises together with it. The outer layer structure 1 rises relative to the inner layer structure 2 along the axial direction of the inner layer structure 2, while the inner layer structure 2 does not rise. During the rise of the outer layer structure 1, the guide structure 3 guides it and ensures that the outer layer structure 1 does not contact the inner layer structure 2, thus preventing scratching of the carbon felt and reducing the risk of carbon felt shedding. When the outer layer structure 1 moves above the refill hole 4, the refill hole 4 is exposed. The process involves repeated casting. During repeated casting, the inner structure 2 shields the high-temperature radiation from the thermal field, preventing direct radiation of high temperature onto the furnace cylinder of the single crystal furnace. After repeated casting, the guide tube descends, and the outer structure 1 descends along with it. When the guide tube reaches zero, the outer structure 1 also descends to its original position, coinciding with the inner structure 2. The outer structure 1 shields the repeated casting hole 4 on the inner structure 2, preventing heat from entering between the outer structure 1 and the furnace body of the single crystal furnace through the repeated casting hole 4 during crystal pulling. This avoids excessive heat loss during the Czochralski single crystal pulling process, ensuring the stability of the thermal field temperature and thus guaranteeing the quality of the single crystal.

[0050] Specifically, one configuration of the aforementioned guide structure 3 is as follows: During installation, the guide structure 3 can be fixedly installed either the outer structure 1 or the inner structure 2. The guide structure 3 can rotate relative to both the outer structure 1 and the inner structure 2, reducing the frictional resistance when the guide structure 3 slides into contact with either the inner structure 2 or the outer structure 1. That is, the guide structure 3 can be fixedly installed on the inner wall of the outer structure 1, or it can be fixedly installed on the outer wall of the inner structure 2. The installation position of the guide structure 3 can be selected and set according to actual needs, and no specific requirements are specified here. Regardless of whether the guide structure 3 is connected to the outer structure 1 or the inner structure 2, the guide structure 3 can rotate relative to both the outer structure 1 and the inner structure 2, resulting in low frictional resistance when the guide structure 3 slides into contact with either the outer structure 1 or the inner structure 2.

[0051] The length of the guide structure 3 along the radial direction of the outer layer structure 1 is adapted to the gap distance between the inner layer structure 2 and the outer layer structure 1, so that the guide structure 3 can limit the gap between the outer layer structure 1 and the inner layer structure 2. When the length of the guide structure 3 along the radial direction of the outer layer structure 1 is consistent with the gap distance between the inner layer structure 2 and the outer layer structure 1, if the guide structure 3 is installed on the inner wall of the outer layer structure 1, the guide structure 3 is in contact with the outer wall of the inner layer structure 2. If the guide structure 3 is installed on the outer wall of the inner layer structure 2, the guide structure 3 is in contact with the inner wall of the outer layer structure 1.

[0052] In some feasible embodiments, preferably, in order to make the overall heat preservation device of the single crystal furnace compact and to ensure the stability of the outer layer structure 1 during the lifting and lowering process, the length of the guide structure 3 along the radial direction of the outer layer structure 1 is consistent with the gap distance between the inner layer structure 2 and the outer layer structure 1, and the guide structure 3 is fixedly installed on the inner wall of the outer layer structure 1.

[0053] The following description of the setting method of guide structure 3 is based on the example of guide structure 3 being installed on the inner wall of outer structure 1. The setting method of guide structure 3 being installed on the outer wall of inner structure 2 is similar to that of guide structure 3 being installed on the inner wall of outer structure 1, and will not be described in detail here.

[0054] The number of the aforementioned guide structures 3 is multiple. Multiple guide structures 3 are arranged sequentially along the circumferential direction of the outer structure 1. Multiple guide structures 3 can be arranged on the same circumference of the outer structure 1, or multiple guide structures 3 can be arranged on different circumferences. It is defined that the guide structures 3 located on the same circumference are a group. Multiple groups of guide structures 3 are arranged along the axial direction of the outer structure 1. The number and arrangement of guide structures 3 are selected and set according to actual needs, and no specific requirements are made here.

[0055] In some feasible embodiments, preferably, in order to ensure that the inner structure 2 is subjected to uniform force during the lifting and lowering of the outer structure 1, each guide structure 3 is arranged along the radial direction of the outer structure 1, and multiple guide structures 3 on the same circumference are arranged symmetrically in pairs.

[0056] The aforementioned guide structure 3 includes a fixed component 30 and a rotating component 31. The fixed component 30 is fixedly connected to the inner wall of the outer layer structure 1 or the outer wall of the inner layer structure 2. The rotating component 31 is connected to the fixed component 30 and can rotate relative to the fixed component 30 to reduce the frictional resistance between the rotating component 31 and the inner layer structure 2 or the outer layer structure 1. The fixed component 30 facilitates the installation of the rotating component 31 on the outer wall of the inner layer structure 2 or the inner wall of the outer layer structure 1. The rotating component 31 reduces the frictional resistance when it slides into contact with the inner layer structure 2 or the outer layer structure 1, thus avoiding scratches on the contact surfaces of the inner layer structure 2 or the outer layer structure 1.

[0057] The rotating assembly 31 has various structures. One structure of the rotating assembly 31 is as follows: the rotating assembly 31 includes a rotating shaft and a rotating component. One connection method between the rotating shaft and the rotating component is that the rotating shaft is rotatably connected to the fixed assembly 30, and the rotating component is fixedly connected to the rotating shaft, so that the rotating component can rotate relative to the fixed assembly 30. The rotating shaft is a shaft structure, and the rotating component can be a cylindrical structure with a circular cross-section. The rotating shaft is fixedly installed at both ends of the rotating component along its axial direction. The peripheral surface of the rotating component contacts the outer wall of the inner layer structure 2 or the inner wall of the outer layer structure 1. Alternatively, the rotating component can also be a spherical structure, with the rotating shaft arranged along any radial direction of the rotating component, and both ends of the rotating shaft protruding from the peripheral surface of the rotating component so that the rotating shaft is rotatably connected to the fixed assembly 30. Of course, there can also be two rotating shafts, with the two rotating shafts located on the same diameter and fixedly installed on the peripheral surface of the rotating component. No specific limitation is made here.

[0058] Another connection method between the rotating shaft and the rotating component is as follows: the rotating shaft is fixedly connected to the fixed assembly 30, and the rotating shaft cannot rotate relative to the fixed assembly 30. The rotating component is rotatably connected to the rotating shaft, so that the rotating component can rotate relative to the fixed assembly 30. The rotating component is rotatably connected to the rotating shaft through a bearing. In this structure, the rotating component is preferably a cylindrical structure with a circular cross-section, so that a bearing can be installed between the rotating component and the rotating shaft.

[0059] Regarding the structure of this rotating component 31, the structure of the fixing component 30 is as follows: the fixing component 30 includes a first mounting plate and a second mounting plate arranged opposite to each other. The first mounting plate and the second mounting plate are arranged in parallel. The two ends of the rotating shaft are respectively connected to the first mounting plate and the second mounting plate. The first mounting plate and the second mounting plate are respectively fixedly connected to the outer wall of the inner layer structure 2 or the inner wall of the outer layer structure 1.

[0060] Another structure for the rotating assembly 31 is as follows: Figure 1 , 3 As shown in Figure 4, the rotating assembly 31 includes a fixed connector and a rotating component coaxially arranged, and multiple rolling components disposed between the fixed connector and the rotating component. The multiple rolling components are arranged sequentially along the circumferential direction of the fixed connector. The fixed connector is connected to the fixed assembly 30. The rotating component contacts the outer wall of the inner layer structure 2 or the inner wall of the outer layer structure 1. The rotation of the rolling components causes the rotating component to rotate relative to the fixed connector, and the rolling components support the rotation of the rotating component. Both the fixed connector and the rotating component are annular structures. The fixed connector is disposed on the inner side of the rotating component, and a gap is provided between the fixed connector and the rotating component. The rolling components are disposed between the fixed connector and the rotating component and can roll relative to the fixed connector and the rotating component.

[0061] To ensure the rolling element is stably positioned between the fixed connector and the rotating component and prevents it from detaching, a groove is provided on the side of the fixed connector facing the rotating component, and a groove is also provided on the side of the rotating component facing the fixed connector. The grooves on the fixed connector and the rotating component correspond to each other. Part of the rolling element is located within the groove of the fixed connector, and simultaneously, part of the rolling element is located within the groove of the rotating component. The depth of the groove of the fixed connector is less than the radius of the rolling element, and the depth of the groove of the rotating component is less than the radius of the rolling element. The rolling element is a spherical or cylindrical structure to prevent it from contacting the fixed connector during rotation, thus avoiding friction between the rotating component and the fixed connector and extending the service life of the rotating assembly 31. When the rolling element is a cylindrical structure, its axis is parallel to the axis of the rotating component.

[0062] With this rotating component 31 structure, the fixing component 30 structure is as follows: the fixing component 30 includes a third mounting plate and a fourth mounting plate arranged opposite to each other and a mounting shaft. The two ends of the mounting shaft are fixedly connected to the third mounting plate and the fourth mounting plate respectively. The fixing connector is fixedly installed on the mounting shaft. The third mounting plate and the fourth mounting plate are respectively connected to the inner wall of the outer layer structure 1 or the outer wall of the inner layer structure 2. Alternatively, the fixing component 30 includes a first bracket and a second bracket arranged opposite to each other. Both the first bracket and the second bracket are L-shaped structures. One end of the first bracket and the second bracket are respectively fixedly connected to the fixing connector. The other end of the first bracket and the other end of the second bracket are respectively connected to the inner wall of the outer layer structure 1 or the outer wall of the inner layer structure 2.

[0063] Alternatively, another structure of the aforementioned guide structure 3 is as follows: Figure 5 As shown, the guide structure 3 is arranged along the axial direction of the outer layer structure 1. The guide structure 3 includes a guide member 32 and a slider 33 that are slidably connected. The guide member 32 and the slider 33 are respectively connected to the inner layer structure 2 and the outer layer structure 1. During the lifting and lowering process of the outer layer structure 1, the slider 33 slides along the axial direction of the guide member 32. During the lifting and lowering process of the outer layer structure 1, the guide structure 3 guides the lifting and lowering of the outer layer structure 1. When installing the guide structure 3, the guide member 32 is connected to the outer wall of the inner layer structure 2, and the slider 33 is connected to the inner wall of the outer layer structure 1; or, the guide member 32 is connected to the inner wall of the outer layer structure 1, and the slider 33 is connected to the outer wall of the inner layer structure 2. The installation positions of the guide member 32 and the slider 33 are selected according to actual needs, and no specific requirements are specified here.

[0064] The guide 32 is a slide groove, the length of which is adapted to the axial length of the inner structure 2 or the outer structure 1, so that the sliding member 33 is always located in the slide groove and slides along the axial length of the slide groove during the lifting and lowering process of the outer structure 1. The guide 32 guides the sliding of the sliding member 33. The sliding member 33 is a slider, which is slidably disposed in the slide groove.

[0065] Both the outer layer structure 1 and the inner layer structure 2 are cylindrical structures with a certain length. The cross-sectional shapes of the outer layer structure 1 and the inner layer structure 2 are adapted to the thermal field structure. The cross-sectional shapes of the outer layer structure 1 and the inner layer structure 2 are preferably circular, which facilitates the installation of the thermal field structure and reduces the gap between the inner wall of the inner layer structure 2 and the thermal field, thus insulating the thermal field, reducing heat transfer, and reducing heat loss.

[0066] Specifically, such as Figure 2 As shown, the inner layer structure 2 includes a first insulation layer 20, a second insulation layer 21, and a third insulation layer 22 arranged coaxially. The second insulation layer 21 is disposed between the first insulation layer 20 and the third insulation layer 22. That is, the inner layer structure 2 is a three-layer structure. The first insulation layer 20 and the third insulation layer 22 form the supporting skeleton of the inner layer structure 2. The second insulation layer 21 is fixedly installed between the first insulation layer 20 and the second insulation layer 22. The first insulation layer 20 and the third insulation layer 22 are both cylindrical structures with a certain length. The diameter of the third insulation layer 22 is smaller than the diameter of the first insulation layer 20. The third insulation layer 22 is disposed inside the first insulation layer 20. There is a gap between the first insulation layer 20 and the third insulation layer 22, forming a receiving cavity. The second insulation layer 21 is disposed in the receiving cavity. To prevent the second insulation layer 21 from falling off between the first insulation layer 20 and the third insulation layer 22, sealing plates are respectively installed at both ends of the first insulation layer 20 and the third insulation layer 22 to seal the axial ends of the receiving cavity and fix the second insulation layer 21 in the receiving cavity between the first insulation layer 20 and the third insulation layer 22.

[0067] The aforementioned refill hole 4 is located on the peripheral side of the inner layer structure 2, and the axis of the refill hole 4 is perpendicular to the axis of the inner layer structure 2. The refill hole 4 is a through hole structure, which penetrates the first insulation layer 20, the second insulation layer 21 and the third insulation layer 22, so that the internal space of the inner layer structure 2 is connected to the external space of the inner layer structure 2 (that is, the gap space between the inner layer structure 2 and the outer layer structure 1) through the refill hole 4. When the outer layer structure 1 does not block the refill hole 4, the discharge end of the quartz tube of the external refiller passes through the through hole and the refill hole 4 on the single crystal furnace body in sequence, enters the hot field, and is located above the quartz crucible for refilling.

[0068] To avoid introducing new impurities during the Czochralski single crystal growth process, the first insulation layer 20 and the third insulation layer 22 are made of carbon-carbon, the second insulation layer 21 is made of carbon felt, the outer layer structure 1 is made of carbon-carbon, and the guiding structure 3 is made of carbon-carbon.

[0069] like Figure 6-9 As shown, one end of the lifting structure 5 is fixedly connected to the outer wall of the outer layer structure 1, and the other end of the lifting structure 5 is fixedly connected to the external driving device. Connecting the outer layer structure 1 to the external driving device allows the external driving device to lift and lower the outer layer structure 1 during the lifting and lowering process, ensuring that the outer layer structure 1 does not block the re-casting hole 4 on the inner layer structure 2 during re-casting. Here, the external driving device is connected to the guide tube and is used to lift or lower the guide tube during the Czochralski single crystal pulling process. This external driving device is existing technology, and its specific structure is not described in detail.

[0070] To ensure that the outer structure 1 is subjected to balanced forces during lifting, the number of lifting structures 5 is at least two. Multiple lifting structures 5 are arranged sequentially along the circumference of the outer structure 1, and are symmetrically arranged in pairs. In some feasible embodiments, the number of lifting structures 5 is preferably two.

[0071] like Figure 6 and 7 As shown, the lifting structure 5 includes a first lifting member 50 and a second lifting member 51 connected to each other. The first lifting member 50 and the second lifting member 51 are intersecting and arranged. The first lifting member 50 is fixedly connected to the outer wall of the outer structure 1, and the second lifting member 51 is connected to an external driving device. Both the first lifting member 50 and the second lifting member 51 are rod structures. One end of the first lifting member 50 is fixedly connected to the outer wall of the outer structure 1, and the other end of the first lifting member 50 is fixedly connected to the second lifting member 51. The other end of the second lifting member 51 is fixedly connected to the external driving device.

[0072] In some feasible embodiments, preferably, the first lifting member 50 and the second lifting member 51 are arranged perpendicularly, the first lifting member 50 is arranged along the axial direction of the outer layer structure 1, and the second lifting member 51 is arranged along the radial direction of the outer layer structure 1, so that the lifting structure 5 is an L-shaped structure.

[0073] To further optimize the lifting structure 5 and enable it to quickly connect to an external drive device, the lifting structure 5 also includes a connecting rod 53, multiple suspension rods 52 connected to the connecting rod 53, and a quick-connect component 6. The connecting rod 53 serves as a transition, connecting the second lifting member 51 to the multiple suspension rods 52. This ensures that the multiple suspension rods 52 are all located at the same end of the second lifting member 51, on the same side of the connecting rod 53, and parallel to each other. This arrangement of the multiple suspension rods 52 ensures that the lifting structure 5 never... The suspension rod 52 is connected to the external drive device at the same position to enhance the overall stability of the lifting structure 5. The suspension rod 52 is arranged parallel to the first lifting member 50, that is, the suspension rod 52 is arranged vertically, the connecting rod 53 is arranged horizontally, the suspension rod 52 and the connecting rod 53 are arranged perpendicularly, the connecting rod 53 is arranged perpendicularly to the second lifting member 51, and the second lifting member 51 and the connecting rod 53 are located in the same plane. The suspension rod 52 is perpendicular to the plane where the second lifting member 51 and the connecting rod 53 are located. Both the connecting rod 53 and the suspension rod 52 are rod structures, and their cross-sectional shapes can be selected according to actual needs.

[0074] Each suspension rod 52 has a snap-fit ​​groove 520 at the end furthest from the connecting rod 53. Through the snap-fit ​​groove 520, each suspension rod 52 can be quickly connected to the corresponding quick-connect piece 6, realizing a detachable connection between the suspension rod 52 and the quick-connect piece 6. The quick-connect piece 6 is connected to the external drive device. The quick-connect piece 6 enables the suspension rod 52 to be quickly connected to the external drive device, thereby connecting the entire lifting structure 5 to the external drive device. Furthermore, the quick-connect piece 6 enables the lifting structure 5 to be quickly installed and disassembled with the external drive device, improving work efficiency and shortening installation time.

[0075] The aforementioned snap-fit ​​groove 520 is an annular groove structure, located on the circumferential side of the end of the suspension rod 52 near the end connected to the quick-connect piece 6. It is formed by an inward indentation from the circumferential side of the suspension rod 52 along the radial direction of the suspension rod 52. The depth of the indentation is the depth of the snap-fit ​​groove 520. The depth of the snap-fit ​​groove 520 is less than half of the radial dimension of the suspension rod 52. Along the axial direction of the suspension rod 52, the snap-fit ​​groove 520 has a certain width. The width of the snap-fit ​​groove 520 is not less than the thickness of the quick-connect piece 6, so that the snap-fit ​​groove 520 can snap into the quick-connect piece 6.

[0076] like Figure 8-9As shown, the quick-connect component 6 is a plate-like structure with a certain thickness. It is horizontally positioned so that the suspension rod 52 is perpendicular to it, allowing for quick installation. The thickness of the quick-connect component 6 is selected based on actual needs and is not specifically required here. The quick-connect component 6 includes a quick-connect body 60 and connecting holes 61 and 62 on the body. The quick-connect body 60 facilitates the placement of the connecting holes 61 and 62. The connecting hole 61 is used to connect to an external drive device via bolts or other connectors, thus connecting the quick-connect component 6 to the external drive device. The 62 is used to connect to the suspension rod 52, thus connecting the quick-connect component 6 to the suspension rod 52.

[0077] The aforementioned connecting hole 61 is a through hole and a strip-shaped hole, so that the quick-connect component 6 can be adjusted in position relative to the external drive device, so that the quick-connect component 6 can be quickly and accurately connected to the suspension rod 52.

[0078] The aforementioned quick-release hole 62 includes an insertion part 620, a transition part 621, and a locking part 622. The insertion part 620, the transition part 621, and the locking part 622 are connected in sequence so that the end of the suspension rod 52 entering the insertion part 620 can enter the transition part 621 from the insertion part 620, move along the transition part 621, and enter the locking part 622. The insertion part 620 facilitates the end of the suspension rod 52 to enter the quick-release hole 62, thereby enabling the suspension rod 52 to be inserted into the quick-release hole 62. The connection with the quick-installation hole 62 and the provision of the transition part 621 enable the insertion part 620 and the snap-fit ​​part 622 to communicate, facilitating the entry of the end of the suspension rod 52 located in the insertion part 620 into the snap-fit ​​part 622 via the transition part 621. At the same time, the snap-fit ​​groove 520 engages with the snap-fit ​​part 622 and the transition part 621 to connect the end of the suspension rod 52 with the snap-fit ​​groove 520 to the quick-installation hole 62, thereby enabling the quick installation of the suspension rod 52 and the quick-installation part 6.

[0079] Along the thickness direction of the quick-release body 60, the insertion part 620, the transition part 621, and the snap-fit ​​part 622 are all through holes, penetrating the opposite sides of the quick-release body 60 in the thickness direction, so that the end of the suspension rod 52 with the snap-fit ​​groove 520 is inserted into the insertion part 620, so that the snap-fit ​​groove 520 corresponds to the transition part 621. The shape of the insertion part 620 corresponds to the cross-sectional shape of the suspension rod 52, and the size of the insertion part 620 is larger than the radial size of the suspension rod 52 to facilitate the installation of the suspension rod 52. The end of the snap-fit ​​groove 520 is inserted into the insertion part 620; the transition part 621 is a strip-shaped hole structure with a certain length, and the width of the transition part 621 is adapted to the radial dimension of the bottom of the snap-fit ​​groove 520 so that the transition part 621 snaps into the snap-fit ​​groove 520. That is, a set of oppositely arranged sidewalls of the transition part 621 are located in the snap-fit ​​groove 520, and the upper sidewall of the set of oppositely arranged sidewalls of the snap-fit ​​groove 520 contacts the end face of the set of oppositely arranged sidewalls of the transition part 621. This allows the suspension rod 52 to be suspended on the quick-release component 6. When the width of the locking groove 520 matches the thickness of the quick-release body 60, a set of oppositely arranged sidewalls of the locking groove 520 contact the end faces of the two oppositely arranged sidewalls of the transition portion 621. The aforementioned locking portion 622 has an arc-shaped hole structure, and the sidewall of the locking portion 622 is arc-shaped. The upper side of the sidewall of the locking portion 622 contacts the upper sidewall of the locking groove 520, or the upper and lower sides of the sidewall of the locking portion 622 respectively contact the locking groove 620. The upper and lower side walls of the slot 520 are in contact. Through the provision of the transition part 621 and the snap-fit ​​part 622, the side wall of the snap-fit ​​slot 520 is supported from three positions. The snap-fit ​​part 622 limits the snap-fit ​​slot 520 that moves along the transition part 621. The bottom wall of the snap-fit ​​slot 520 can be selected to contact the side wall of the snap-fit ​​part 622. By controlling the movement of the snap-fit ​​slot 520, the suspension rod 52 is supported, so that the suspension rod 52 is stably suspended at the quick-release hole 62 of the quick-release part 6.

[0080] To ensure that no new impurities are introduced during the single crystal pulling process, the material of the lifting structure 5 is the same as that of the external driving device.

[0081] A single crystal furnace includes a heat preservation mechanism as described above.

[0082] In a further optimized version, the single crystal furnace also includes a guide tube displacement drive device, which is reused as an external drive device. The external drive device is connected to the lifting structure 5 of the heat preservation mechanism of the single crystal furnace. The external drive device drives the outer structure 1 to rise and fall. The external drive device is the lifting mechanism of the guide tube, and its mechanism is existing technology and will not be described in detail here.

[0083] When the heat preservation mechanism of the single crystal furnace (the guide structure 3 is installed on the inner wall of the outer structure 1 and rotates relative to the inner structure 2) is working, the outer structure 1 does not move when no re-pulling is required. The outer structure 1 blocks the re-pulling hole 4 on the inner structure 2 to prevent excessive heat loss from the thermal field during crystal pulling. When external re-pulling is required, the guide tube needs to be raised to the upper limit. During the raising of the guide tube, due to the setting of the lifting structure 5, the outer structure 1 rises along with the guide tube. When the guide tube rises to the upper limit, the outer structure 1 rises above the re-pulling hole 4. The outer structure 1 does not block the re-pulling hole 4. During the raising of the outer structure 1, the rotating component 31 of the guide structure 3 contacts the outer wall of the inner structure 2, guiding the rise of the guide device and limiting the gap between the outer structure 1 and the inner structure 2. This design ensures that the outer structure 1 does not contact the inner structure 2, preventing friction between them and avoiding scratches on the carbon felt, thus avoiding the risk of carbon felt shedding and ensuring the quality of the single crystal. After the outer structure 1 rises above the re-feeding hole 4, the re-feeding hole 4 on the inner structure 2 connects with the re-feeding through hole on the single crystal furnace body. The discharge end of the quartz tube of the external re-feeding device passes through the re-feeding through hole on the single crystal furnace body and the re-feeding hole 4 on the inner structure 2 in sequence and enters the hot zone, located above the quartz crucible. The external re-feeding device performs the re-feeding operation, re-feeding the material. After the re-feeding is completed, the guide tube descends, and the outer structure 1 descends along with the guide tube. When the guide tube descends to the zero position, the outer structure 1 overlaps with the inner structure 2, and the outer structure 1 descends to its original position. The outer structure 1 blocks the re-feeding hole 4 on the inner structure 2 to prevent excessive heat loss during crystal pulling.

[0084] By adopting the above technical solution, the heat preservation mechanism of the single crystal furnace has a guiding structure. The guiding structure is set between the coaxial inner and outer layers. The guiding structure is connected to the outer or inner layer and can rotate, thus limiting the gap between the inner and outer layers. This prevents the outer layer from contacting the inner layer. During the lifting and lowering of the outer layer, the guiding structure guides the movement and prevents friction between the outer and inner layers, thus avoiding scratching of the carbon felt and preventing the risk of carbon felt shedding. This solves the problem of carbon felt shedding caused by friction during the lifting and lowering of the outer layer, ensuring the quality of the single crystal.

[0085] The outer layer structure is connected to the lifting structure, which in turn is connected to an external drive device. The lifting and lowering motion of the guide tube enables the outer layer structure to move axially. The inner layer structure has a refill hole, while the outer layer structure does not. When the outer layer structure rises via the lifting structure and guide tube, the refill hole is exposed. The outer layer structure does not block the refill hole, allowing the external refiller to perform refilling operations. After refilling, the outer layer structure returns to its original position, blocking the refill hole to prevent excessive heat dissipation during crystal pulling. The design reduces heat loss and heat field power consumption, resulting in good temperature stability and preventing temperature gradient changes. This ensures the quality of the pulled single crystal and solves the problems of misalignment and poor adhesion found in ordinary blocks. It also addresses the issues of single crystal quality caused by power consumption, furnace oxidation, and temperature gradients. The lifting structure is connected to the external drive device via a quick-connect component with quick-connect holes. This allows the lifting structure to snap into the quick-connect component, improving the efficiency of installation and disassembly of the lifting structure and the external drive device. The cover plate seals the gap between the outer and inner layers, preventing heat loss.

[0086] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A heat retaining mechanism of a single crystal furnace, characterized by comprising: include: An inner layer structure and an outer layer structure are coaxially arranged, with a gap between the outer layer structure and the inner layer structure; A lifting structure connected to the outer structure, which, under the drive of an external driving device, causes the outer structure to move up and down; A guide structure is provided between the inner structure and the outer structure, the guide structure is connected to the outer structure and / or the inner structure, and guides the lifting and lowering of the outer structure; The inner layer structure is provided with a re-projection hole, and the re-projection hole is controlled by the lifting and lowering action of the outer layer structure to determine whether it is blocked.

2. The heat preservation mechanism of the single crystal furnace according to claim 1, characterized in that: The guide structure includes a fixed component and a rotating component. The fixed component is fixedly connected to the inner wall of the outer layer structure or the outer wall of the inner layer structure. The rotating component is connected to the fixed component and can rotate relative to the fixed component.

3. The heat preservation mechanism of the single crystal furnace according to claim 2, characterized in that: The rotating assembly includes a rotating shaft and a rotating component, wherein the rotating shaft is rotatably connected to the fixed assembly, and the rotating component is fixedly connected to the rotating shaft; or, The rotating shaft is fixedly connected to the fixed component, and the rotating component is rotatably connected to the rotating shaft.

4. The heat preservation mechanism of the single crystal furnace according to claim 2, characterized in that: The rotating assembly includes a fixed connector and a rotating component arranged coaxially, and a plurality of rolling components disposed between the fixed connector and the rotating component. The plurality of rolling components are arranged sequentially along the circumferential direction of the fixed connector. The fixed connector is connected to the fixed assembly. The rotating component can rotate relative to the fixed connector by rotating the rolling components.

5. The heat preservation mechanism of the single crystal furnace according to claim 1, characterized in that: The guide structure is arranged along the axial direction of the outer layer structure. The guide structure includes a guide member and a slider that are slidably connected. The guide member and the slider are respectively connected to the inner layer structure and the outer layer structure. During the lifting and lowering process of the outer layer structure, the slider slides along the axial direction of the guide member.

6. The heat preservation mechanism of the single crystal furnace according to any one of claims 1-5, characterized in that: The inner layer structure includes a first insulation layer, a second insulation layer, and a third insulation layer arranged coaxially. The second insulation layer is disposed between the first insulation layer and the third insulation layer. The re-entry hole penetrates through the first insulation layer, the second insulation layer, and the third insulation layer.

7. The heat preservation mechanism of the single crystal furnace according to claim 6, characterized in that: The first and third insulation layers are made of carbon-carbon materials, and the second insulation layer is made of carbon felt.

8. The heat preservation mechanism of the single crystal furnace according to any one of claims 1-5 and 7, characterized in that: The number of lifting structures is at least two, and multiple lifting structures are arranged sequentially along the circumference of the outer layer structure, and the multiple lifting structures are arranged symmetrically in pairs; each lifting structure includes a first lifting member and a second lifting member connected to each other, the first lifting member and the second lifting member are intersecting each other, the first lifting member is fixedly connected to the outer wall of the outer layer structure, and the second lifting member is connected to the external driving device.

9. A single crystal furnace, characterized in that: Including the heat preservation mechanism of the single crystal furnace as described in any one of claims 1-8.

10. The single crystal furnace according to claim 9, characterized in that: It also includes a guide tube displacement driving device, which is reused as the external driving device.

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