Carrier structure and epitaxy apparatus

Abstract

The application discloses a bearing structure and an epitaxial equipment, and belongs to the technical field of semiconductor processing equipment. The bearing structure comprises a base, a first connecting part and a transmission shaft assembly. The base comprises a bearing surface for bearing a substrate and a first connecting surface opposite to the bearing surface in a first direction. The first connecting part is arranged on the side of the base away from the bearing surface in the first direction and is connected to the first connecting surface. The transmission shaft assembly is connected to the side of the first connecting part away from the base in the first direction. The first connecting part comprises a first body arranged in a ring shape and a receiving cavity arranged on the inner side of the ring-shaped first body. The first body is arranged between the base and the transmission shaft assembly in the first direction. The material of the first body comprises graphite. The application can reduce the contact area of the first connecting part and the base under the premise of ensuring the maximum shear stress, thereby reducing the heat loss at the connection between the base and the first connecting part and improving the epitaxial yield.

Description

Technical Field

[0001] This application belongs to the field of semiconductor processing equipment technology, specifically relating to support structures and epitaxial devices. Background Technology

[0002] Silicon carbide epitaxy (SiC) via chemical vapor deposition (CVD) can grow high-quality epitaxial layers on SiC substrates, allowing for precise control of film thickness and doping concentration, thus improving device performance. Typically, the substrate is placed on the support structure of the SiC epitaxial equipment, and the processes are performed on the substrate at high temperatures.

[0003] However, existing load-bearing structures have low connection reliability and poor thermal insulation performance at the connection between the drive shaft and the base, resulting in large heat loss and low yield of epitaxy. Utility Model Content

[0004] The purpose of this utility model is to provide a load-bearing structure to solve the technical problem of large heat loss in load-bearing structures; another purpose of this application is to provide an epitaxial device.

[0005] Technical solution: This application provides a load-bearing structure, including:

[0006] A base, the base including a bearing surface for supporting a substrate and a first connecting surface opposite to the bearing surface along a first direction;

[0007] A first connecting portion is disposed on the side of the base away from the bearing surface along the first direction and connected to the first connecting surface;

[0008] A drive shaft assembly is connected to the first connecting portion on the side opposite to the base along the first direction, and is capable of supporting and / or driving the base through the first connecting portion;

[0009] The first connecting portion includes a first body arranged in an annular shape and a receiving cavity disposed on the inner side of the annular shape of the first body. The first body is disposed between the base and the drive shaft assembly along the first direction. The material of the first body includes graphite.

[0010] In some embodiments, the base has a receiving groove for supporting a substrate, the receiving groove having a supporting surface and groove sidewalls disposed around the supporting surface;

[0011] In the first direction, the orthographic projection of the groove sidewall onto the plane where the first connecting surface is located is the first projection, and the orthographic projection of the first connecting portion onto the plane where the first connecting surface is located is the second projection. The first projection and the second projection are spaced apart. Relative to the radial direction of the base, the first projection is located outside the second projection, and the radial direction intersects with the first direction.

[0012] In some embodiments, the first body has a first end that is connected to the drive shaft assembly;

[0013] The drive shaft assembly includes a second connecting portion, the second connecting portion including a second end portion that connects to the first end portion;

[0014] In the first direction, one of the first end and the second end is provided with a first protrusion, and the other of the first end and the second end is provided with a first groove. The first protrusion and the first groove are configured to cooperate with each other so that the second connecting part and the first body can transmit torque to each other.

[0015] And / or, the first connecting portion includes a third end portion that connects to the first connecting surface; in the first direction, one of the first connecting surface and the third end portion is provided with a second protrusion, and the other of the first connecting surface and the third end portion is provided with a second groove, the second protrusion and the second groove being configured to cooperate so that torque can be transmitted between the second connecting portion and the base.

[0016] In some embodiments, the second connecting portion is further provided with a boss at the second end, the boss being correspondingly disposed with the receiving cavity and inserted into the receiving cavity, the first protrusion or the first groove being located on the outer periphery of the boss; the material of the second connecting portion is configured as quartz or ceramic with a thermal conductivity of less than 5W / (m*K).

[0017] In some embodiments, the drive shaft assembly further includes a second connecting portion connected to the first body and a third connecting portion connected to the second connecting portion. The second connecting portion is connected to the side of the first body away from the base along the first direction, and the third connecting portion is connected to the side of the second connecting portion away from the first body along the first direction. The material of the second connecting portion is configured as quartz or ceramic with a thermal conductivity of less than 5 W / (m*K), and the material of the third connecting portion includes metal.

[0018] In some embodiments, the supporting structure further includes a heat-insulating part disposed within the accommodating cavity, wherein the thermal conductivity of the heat-insulating part is less than that of the first body.

[0019] In some embodiments, the insulation part is made of at least one of quartz, C / C composite material with a thermal conductivity of less than 5 W / (m*K), and ceramic with a thermal conductivity of less than 5 W / (m*K).

[0020] In some embodiments, the first body is configured to be made of graphite; the first connecting portion further includes a coating portion coated on the surface of the first body opposite to the receiving cavity, the coating portion being configured to be made of silicon carbide.

[0021] Accordingly, this application also provides an epitaxial device, comprising:

[0022] The load-bearing structure as described in any of the above embodiments;

[0023] A housing having a receiving cavity, a base disposed in the receiving cavity, and a drive shaft assembly passing through the housing;

[0024] The first connecting portion is disposed within the receiving cavity.

[0025] In some embodiments, the extension device further includes a heat insulation element disposed in the receiving cavity, the heat insulation element being disposed on the side of the base away from the bearing surface; in the first direction, the first connecting portion has a maximum dimension H, the heat insulation element has a first surface away from the first connecting surface, the first surface and the first connecting surface having a maximum distance h, satisfying: 0.5h≤H≤1.2h.

[0026] Beneficial Effects: Compared with the prior art, the support mechanism provided in this application includes a base, a first connecting part, and a drive shaft assembly. The base includes a supporting surface for supporting a substrate and a first connecting surface opposite to the supporting surface along a first direction. The first connecting part is disposed on the side of the base opposite to the supporting surface along the first direction and connected to the first connecting surface. The drive shaft assembly is connected to the side of the first connecting part opposite to the base along the first direction and can support and / or drive the base through the first connecting part. The first connecting part includes a first body arranged in an annular shape and an accommodating cavity disposed on the inner side of the annular shape of the first body. The first body is disposed between the base and the drive shaft assembly along the first direction, and the material of the first body includes graphite. By setting the first connecting part as an annular column, this application can reduce the contact area between the first connecting part and the base while ensuring maximum shear stress resistance, thereby reducing heat loss at the connection between the base and the first connecting part and improving epitaxial yield. Attached Figure Description

[0027] The technical solution and other beneficial effects of this application will become apparent from the following detailed description of specific embodiments in conjunction with the accompanying drawings.

[0028] Figure 1This is a cross-sectional schematic diagram of the load-bearing structure provided in the embodiments of this application;

[0029] Figure 2 for Figure 1 Detailed view of area A (circled);

[0030] Figure 3 This is a cross-sectional schematic diagram of a load-bearing structure provided in another embodiment of this application;

[0031] Figure 4 This is a cross-sectional schematic diagram of the epitaxial device provided in an embodiment of this application;

[0032] Figure 5 This is a cross-sectional schematic diagram of the first connecting portion in the load-bearing structure provided in the embodiments of this application;

[0033] Figure 6 This is an exploded view of the base, the first connecting part, and the second connecting part in the load-bearing structure provided in the embodiments of this application.

[0034] Explanation of reference numerals in the attached figures:

[0035] 10-Bearing structure; 100-Base; 110-First connecting surface; 120-Receiving groove; 121-Bearing surface; 122-Groove sidewall; 200-First connecting part; 210-First main body; 220-Receiving cavity; 230-First end; 240-Coated part; 250-Third end; 300-Drive shaft assembly; 310-Second connecting part; 311-Second end; 313-Boss; 320-Third connecting part; 400-Insulation part; 510-First protrusion; 520-Second protrusion; 610-First groove; 620-Second groove; 20-Shell; 21-Receiving cavity; 30-Insulation component; 31-First surface; X-First direction; Y-Radial direction. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0037] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for mutual communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances. In the description of this application, "multiple" means two or more, unless otherwise expressly and specifically limited. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features.

[0038] It should also be noted that in the accompanying drawings of the embodiments of this application, the arrows labeled X and Y respectively represent an example of the first direction X and the radial direction Y. The description of this application introduces the first direction X and the radial direction Y in order to more clearly express the relative positional relationship involved in this application. The first direction X and the radial direction Y are two relative directions that intersect each other, rather than absolute directions.

[0039] The following disclosure provides many different implementations or examples for carrying out different structures of this application. To simplify the disclosure of this application, the components and arrangements of specific examples are described below. Of course, these are merely examples and are not intended to limit this application.

[0040] Silicon carbide epitaxy via chemical vapor deposition (CVD) can grow high-quality epitaxial layers on silicon carbide substrates, allowing for precise control of film thickness and doping concentration, thus improving device performance. Typically, the substrate is placed on the support structure 10 of the epitaxial equipment, and the relevant processes are performed on the substrate under high-temperature conditions.

[0041] However, the existing load-bearing structure 10 has low connection reliability and poor thermal insulation performance at the connection between the drive shaft and the base 100, resulting in large heat loss and low yield of the epitaxy.

[0042] To address the technical problems of low connection reliability and poor thermal insulation performance at the connection between the drive shaft and the base 100, the first embodiment of this application provides a load-bearing structure 10. Please refer to... Figure 1The supporting structure 10 includes a base 100, a first connecting portion 200, and a drive shaft assembly 300. The base 100 includes a supporting surface 121 for supporting a substrate and a first connecting surface 110 opposite to the supporting surface 121 along a first direction X. Along the first direction X, the first connecting portion 200 is disposed on the side of the base 100 away from the supporting surface 121 and connected to the first connecting surface 110. The drive shaft assembly 300 is connected to the side of the first connecting portion 200 away from the base 100 along the first direction X and can support and / or drive the base 100 through the first connecting portion 200. The first connecting portion 200 includes a first body 210 arranged in an annular shape and a receiving cavity 220 disposed on the inner side of the annular shape of the first body 210. The first body 210 is disposed between the base 100 and the drive shaft assembly 300 along the first direction X, and the material of the first body 210 includes graphite.

[0043] In this embodiment, the first connecting part 200 and the base 100 can be integrally arranged, that is, the first connecting part 200 is only used to drive the base 100 to rotate so as to transmit the torque provided by the transmission shaft assembly 300 to the base 100; in other embodiments, the first connecting part 200 and the base 100 are separately arranged, that is, the first connecting part 200 is used to support the base 100 to limit the position of the base 100 in the first direction X, and also to drive the base 100 to rotate.

[0044] In this embodiment, the first main body 210 arranged in a ring shape is a circular cylindrical body.

[0045] Specifically, the central axis of the first body 210 is coaxial with the axial direction of the base 100, wherein the first direction X is parallel to the axial direction of the base 100.

[0046] In some other embodiments, the annular column can be configured such that the outer surface of the first body 210 is a cylindrical surface and the inner surface used to form the accommodating cavity 220 is a prismatic surface; or, the outer surface of the annular first body 210 is a prismatic surface and the inner surface used to form the accommodating cavity 220 is a cylindrical surface.

[0047] It is understandable that the rate of heat loss from the base 100 is related to the size of the connection area between the base 100 and other parts or components. The larger the connection area, the easier it is for heat to be lost, while the smaller the connection area, the less likely heat is to be lost.

[0048] That is, in this embodiment, the thermal resistance between the base 100 and the first body 210 is related to 1 / (D 2 -d 2 The shear strength of the first body 210 is positively correlated with D / (D), where D is the outer diameter of the annulus of the first body 210 and d is the inner diameter of the annulus of the first body 210. Simultaneously, the shear strength of the first body 210 is positively correlated with D / (D). 4 -d4 As can be seen, under the same shear strength, the annular columnar first body 210 has a smaller contact area with the base 100 compared to a solid columnar first body 210, resulting in a higher thermal resistance and thus lower heat loss from the base 100. Furthermore, the first body 210 is made of graphite. Because the aforementioned shape of the first body 210 significantly increases its thermal resistance, there are more options for its material; even graphite, with its low thermal resistance, can achieve a relatively high overall thermal resistance. Additionally, because graphite is heat-resistant and has high structural strength, the first body 210 can provide better support for the base 100 at higher temperatures, preventing deformation or failure at the connection point due to high base 100 temperatures. This improves the connection reliability between the first connecting part 200 and the base 100, thereby enhancing the connection reliability between the base 100 and the drive shaft assembly 300.

[0049] In this embodiment, please refer to Figure 1 and Figure 2 The base 100 has a receiving groove 120 for supporting a substrate. The receiving groove 120 has a supporting surface 121 and a groove sidewall 122 disposed around the supporting surface 121. In the first direction X, the orthographic projection of the groove sidewall 122 onto the plane where the first connecting surface 110 is located is a first projection, and the orthographic projection of the first connecting portion 200 onto the plane where the first connecting surface 110 is located is a second projection. The first projection and the second projection are spaced apart. Relative to the radial direction Y of the base 100, the first projection is located outside the second projection. The first direction X intersects the radial direction Y.

[0050] In some embodiments, the base 100 has a plurality of receiving grooves 120, and the plurality of receiving grooves 120 are arranged circumferentially along the base 100, and the first projection formed by the groove sidewalls 122 of the plurality of receiving grooves 120 surrounds the second projection.

[0051] In the above embodiments, by setting the first projection and the second projection generated along the first direction X to be staggered in the radial direction Y, the substrate will not be located on the side of the first connection portion 200 along the first direction X when the receiving groove 120 is carrying the substrate, so as to extend the heat transfer path between the substrate and the first connection portion 200, reduce the heat loss from the substrate to the first connection portion 200, improve the heat insulation performance of the support structure 10, and improve the yield of epitaxy using the support structure 10.

[0052] In some embodiments, please refer to Figure 6The first body 210 has a first end 230 that connects to the drive shaft assembly 300; the drive shaft assembly 300 includes a second connecting portion 310, which includes a second end 311 that connects to the first end 230; in the first direction X, one of the first end 230 and the second end 311 is provided with a first protrusion 510, and the other of the first end 230 and the second end 311 is provided with a first groove 610. The first protrusion 510 and the first groove 610 are configured to cooperate so that the second connecting portion 310 and the first body 210 can transmit torque to each other.

[0053] In some embodiments, a plurality of first protrusions 510 are circumferentially spaced at a distance from a first end 230 or a second end 311; in some embodiments, a plurality of first grooves 610 are circumferentially spaced at a distance from a first end 230 or a second end 311.

[0054] During the torque transmission process, the side of the first protrusion 510 along the circumferential direction of the base 100 can contact the circumferential groove wall of the first groove 610 so that the first body 210 can be circumferentially connected to the drive shaft assembly 300 and transmit torque.

[0055] In some embodiments, please refer to Figure 6 The first connecting portion 200 includes a third end portion 250 that connects to the first connecting surface 110. Similar to the aforementioned cooperation between the first body 210 and the second connecting portion 310, in the first direction X, one of the first connecting surface 110 and the third end portion 250 is provided with a second protrusion 520, and the other of the first connecting surface 110 and the third end portion 250 is provided with a second groove 620. The second protrusion 520 and the second groove 620 are configured to cooperate so that torque can be transmitted between the second connecting portion 310 and the base 100.

[0056] In some embodiments, please refer to Figure 2 The second connecting part 310 is also provided with a boss 313 at the second end 311. The boss 313 is correspondingly provided with the receiving cavity 220 and inserted into the receiving cavity 220. The first protrusion 510 or the first groove 610 is located on the outer periphery of the boss 313. The material of the second connecting part 310 is quartz or ceramic with a thermal conductivity of less than 5W / (m*K).

[0057] It is understood that in some embodiments, the second connecting part 310 is a part independent of the first connecting part 200, and can be connected to the first connecting part 200 by assembly.

[0058] In the above embodiment, by providing a boss 313, the boss 313 can contact the cavity wall of the receiving cavity 21 when the second connecting part 310 and the first connecting part 200 are assembled, thereby realizing the limiting of the second connecting part 310 relative to the first connecting part 200 in the radial direction Y, achieving the centering effect, ensuring a certain coaxiality tolerance, and reducing the assembly difficulty of the second connecting part 310 and the second connecting part 310.

[0059] In some embodiments, the drive shaft assembly 300 further includes a second connecting portion 310 connected to the first body 210 and a third connecting portion 320 connected to the second connecting portion 310. The second connecting portion 310 is connected to the side of the first body 210 away from the base 100 along the first direction X, and the third connecting portion 320 is connected to the side of the second connecting portion 310 away from the first body 210 along the first direction X. The material of the second connecting portion 310 is configured as quartz or ceramic with a thermal conductivity of less than 5 W / (m*K), and the material of the third connecting portion 320 includes metal.

[0060] In the above embodiments, by configuring the material of the second connecting portion 310, which is closer to the base 100 and operates at a higher ambient temperature, as quartz or ceramic with a thermal conductivity of less than 5 W / (m*K), the second connecting portion 310 can provide better support to the base 100 at higher temperatures, thereby improving the connection stability between the drive shaft assembly 300 and the base 100. Meanwhile, by configuring the material of the third connecting portion 320, which is farther from the base 100 and operates at a lower ambient temperature, as metal, the third connecting portion 320 is easier to manufacture and process than the second connecting portion 310, making the drive shaft assembly 300 easier to manufacture and process while maintaining good support.

[0061] In some embodiments, please refer to Figure 3 The supporting structure 10 also includes a heat insulation part 400, which is disposed in the accommodating cavity 220. The thermal conductivity of the heat insulation part 400 is less than that of the first main body 210.

[0062] It is understandable that when the temperature is high, the efficiency of thermal radiation is greater than that of thermal conduction. In epitaxial processes, the ambient temperature of the first connecting part 200 is very high, generally reaching over 1000℃.

[0063] By providing an insulation portion 400 within the accommodating cavity 220, heat from the base 100 is made difficult to radiate directly to the drive shaft assembly 300 through the accommodating cavity 220, further improving the insulation performance of the first connecting portion 200. Furthermore, the thermal conductivity of the insulation portion 400 is lower than that of the first main body 210, increasing the difficulty of heat transfer from the insulation portion 400 to the drive shaft assembly 300, further enhancing the insulation performance of the first connecting portion 200.

[0064] In some embodiments, since there is no strength requirement for the insulation portion 400 of the filling cavity 220, the material of the insulation portion 400 may be configured as at least one of quartz, C / C composite material with a thermal conductivity of less than 5 W / (m*K), and ceramic with a thermal conductivity of less than 5 W / (m*K).

[0065] Specifically, the insulation part 400 can be made of one of the following: quartz, C / C composite material with a thermal conductivity of less than 5 W / (m*K), and ceramic with a thermal conductivity of less than 5 W / (m*K), or it can be made of any two or all three of the above.

[0066] In the above embodiments, by setting the thermal conductivity of the non-supporting base 100 to at least one of quartz material, C / C composite material with thermal conductivity less than 5 W / (m*K), and ceramic with thermal conductivity less than 5 W / (m*K), the heat insulation effect of the first connection part 200 is improved, the difficulty of heat transfer from the base 100 to the first connection part 200 is further increased, and the heat insulation effect of the load-bearing structure 10 is improved.

[0067] In some embodiments, please refer to Figure 5 The first body 210 is configured to be made of graphite; the first connecting part 200 also includes a coating part 240, which is coated on the surface of the first body 210 away from the receiving cavity 220, and the coating part 240 is configured to be made of silicon carbide.

[0068] In the above embodiments, by providing a silicon carbide coating, the corrosion resistance of the first body 210 can be improved, thereby increasing the service life of the load-bearing structure 10.

[0069] Accordingly, please refer to Figure 4 This application also provides an extension device, including a housing 20 and a support structure 10 as described in any of the above embodiments; the housing 20 has a receiving cavity 21, a base 100 is disposed in the receiving cavity 21, and a drive shaft assembly 300 passes through the housing 20; wherein, a first connecting portion 200 is disposed in the receiving cavity 21.

[0070] In some embodiments, the second connecting portion 310 is also located within the receiving cavity 21, that is, both the first connecting portion 200 and the second connecting portion 310 are located within the receiving cavity 21 where the temperature is higher.

[0071] Understandably, the temperature inside the receiving cavity 21 is relatively high. In the above embodiment, having a first connecting portion 200 made of graphite disposed inside the receiving cavity 21 and connecting the base 100 and the drive shaft assembly 300 makes the connection between the base 100 and the drive shaft assembly 300 more stable. Furthermore, having a second connecting portion 310 made of quartz disposed inside the receiving cavity 21 and connecting the first connecting portion 200 and the third connecting portion 320 also makes the connection between the first connecting portion 200 and the third connecting portion 320 more stable.

[0072] In some embodiments, please refer to Figure 4 The extension device also includes a heat insulation component 30 disposed in the receiving cavity 21. The heat insulation component 30 is disposed on the side of the base 100 away from the bearing surface 121. In the first direction X, the first connecting part 200 has a maximum dimension H, and the heat insulation component 30 has a first surface 31 away from the first connecting surface 110. The first surface 31 and the first connecting surface 110 have a maximum distance h, which satisfies: 0.5h≤H≤1.2h.

[0073] Specifically, the value of H can be any one or any two of the following: 0.5h, 0.6h, 0.7h, 0.8h, 0.9h, 1.0h, 1.1h, and 1.2h.

[0074] When the value of H is large, the first connecting part 200 protrudes from the insulation member 30 along the first direction X, and the distance between the second connecting part 310 and the base 100 along the first direction X is large. The second connecting part 310 is not easily affected by high temperature, and the structural strength of the second connecting part 310 is relatively stable. When the value of H is small, the first connecting part 200 is embedded in the insulation member 30, and heat is not easily transferred from the first connecting part 200 to the receiving cavity 21. The insulation effect of the bearing structure 10 is good. When the value of H is within the range defined in the embodiments of this application, the second connecting part 310 will not be subjected to excessively high temperature, the second connecting part 310 has good structural strength, and the first connecting part 200 will not radiate too much heat into the receiving cavity 21. The bearing structure 10 has a good insulation effect.

[0075] In the above embodiments, by limiting the range of H with respect to h, the second connecting part 310 can be allowed to have better structural strength, and the supporting structure 10 can also be allowed to have better thermal insulation performance. This further improves the structural strength and thermal insulation performance of the supporting structure 10, thereby improving the operational stability of the epitaxial device and the yield of epitaxy.

[0076] The above provides a detailed description of a load-bearing structure 10 and an extension device provided in the embodiments of this application. Specific examples have been used in this application to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A support structure for an epitaxial device, characterized in that, include: The base (100) includes a support surface (121) for supporting a substrate and a first connecting surface (110) opposite to the support surface (121) along a first direction (X); The first connecting part (200) is disposed on the side of the base (100) away from the bearing surface (121) along the first direction (X) and is connected to the first connecting surface (110); A drive shaft assembly (300) is connected to the first connecting portion (200) on the side opposite to the base (100) along the first direction (X); The first connecting part (200) includes a first body (210) arranged in an annular shape and a receiving cavity (220) disposed on the inner side of the annular shape of the first body (210). The first body (210) is disposed between the base (100) and the drive shaft assembly (300) along the first direction (X). The material of the first body (210) includes graphite.

2. The load-bearing structure according to claim 1, characterized in that, The base (100) has a receiving groove (120) for carrying a substrate, the receiving groove (120) having the carrying surface (121) and a groove sidewall (122) disposed around the carrying surface (121); In the first direction (X), the orthographic projection of the groove sidewall (122) onto the plane where the first connecting surface (110) is located is the first projection, and the orthographic projection of the first connecting part (200) onto the plane where the first connecting surface (110) is located is the second projection. The first projection and the second projection are spaced apart. Relative to the radial direction (Y) of the base (100), the first projection is located outside the second projection. The radial direction (Y) intersects with the first direction (X).

3. The load-bearing structure according to claim 1, characterized in that, The first body (210) has a first end (230) that is connected to the drive shaft assembly (300); The drive shaft assembly (300) includes a second connecting portion (310), which includes a second end portion (311) that connects to the first end portion (230); In the first direction (X), one of the first end portion (230) and the second end portion (311) is provided with a first protrusion (510), and the other of the first end portion (230) and the second end portion (311) is provided with a first groove (610). The first protrusion (510) and the first groove (610) are configured to cooperate with each other so that the second connecting portion (310) and the first body (210) can transmit torque to each other. And / or, the first connecting portion (200) includes a third end portion (250) connecting the first connecting surface (110); in the first direction (X), one of the first connecting surface (110) and the third end portion (250) is provided with a second protrusion (520), and the other of the first connecting surface (110) and the third end portion (250) is provided with a second groove (620), the second protrusion (520) and the second groove (620) are configured to cooperate so that torque can be transmitted between the first connecting portion (200) and the base (100).

4. The load-bearing structure according to claim 3, characterized in that, The second connecting part (310) is further provided with a boss (313) at the second end (311). The boss (313) is correspondingly provided with the receiving cavity (220) and inserted into the receiving cavity (220). The first protrusion (510) or the first groove (610) is located on the outer periphery of the boss (313). The material of the second connecting part (310) is configured as quartz or ceramic with a thermal conductivity of less than 5W / (m*K).

5. The load-bearing structure according to claim 1, characterized in that, The drive shaft assembly (300) further includes a second connecting portion (310) connected to the first body (210) and a third connecting portion (320) connected to the second connecting portion (310). The second connecting portion (310) is connected to the side of the first body (210) away from the base (100) along the first direction (X). The third connecting portion (320) is connected to the side of the second connecting portion (310) away from the first body (210) along the first direction (X). The material of the second connecting portion (310) is configured as quartz or ceramic with a thermal conductivity of less than 5 W / (m*K). The material of the third connecting portion (320) includes metal.

6. The load-bearing structure according to claim 1, characterized in that, The supporting structure further includes a heat insulation part (400), which is disposed in the accommodating cavity (220). The thermal conductivity of the heat insulation part (400) is less than that of the first body (210).

7. The load-bearing structure according to claim 6, characterized in that, The insulation part (400) is made of at least one of quartz, C / C composite material with a thermal conductivity of less than 5 W / (m*K), and ceramic with a thermal conductivity of less than 5 W / (m*K).

8. The load-bearing structure according to claim 1, characterized in that, The first body (210) is configured to be made of graphite; the first connecting part (200) further includes a coating part (240), which is coated on the surface of the first body (210) away from the receiving cavity (220), and the coating part (240) is configured to be made of silicon carbide.

9. An epitaxial device, characterized in that, include: The load-bearing structure as described in any one of claims 1 to 8; The housing (20) has a receiving cavity (21), the base (100) is disposed in the receiving cavity (21), and the drive shaft assembly (300) passes through the housing (20); The first connecting part (200) is disposed in the receiving cavity (21).

10. The epitaxial device according to claim 9, characterized in that, The extended device further includes a heat insulation component (30) disposed in the receiving cavity (21), the heat insulation component (30) being disposed on the side of the base (100) away from the bearing surface (121); in the first direction (X), the first connecting portion (200) has a maximum dimension H, the heat insulation component (30) has a first surface (31) away from the first connecting surface (110), the first surface (31) and the first connecting surface (110) have a maximum distance h, satisfying: 0.5h≤H≤1.2h.

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