Argon protection system for reducing seed crystal welding oxidation of single crystal furnace and crystal pulling method

By setting up auxiliary argon gas inlet holes and gas hoods in the single crystal furnace to form an annular gas curtain and airflow along the wall, the problem of seed crystal welding oxidation was solved, the quality and number of uses of single crystal silicon were improved, and the production cost was reduced.

CN122235823APending Publication Date: 2026-06-19LESHAN JINGYUNTONG SEMICON MATERIALS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
LESHAN JINGYUNTONG SEMICON MATERIALS CO LTD
Filing Date
2026-04-08
Publication Date
2026-06-19

AI Technical Summary

Technical Problem

During the Czochralski crystal pulling process, the seed crystal weld joint is prone to oxidation, resulting in blackening and discoloration, which affects the yield and number of uses of monocrystalline silicon. Existing technologies are unable to effectively prevent this phenomenon.

Method used

Multiple symmetrically distributed auxiliary argon gas inlets are set on the side wall of the throat connection section at the top of the main furnace chamber of the single crystal furnace. The gas is guided by the gas hood to form an annular gas curtain and airflow along the wall, which locally cools down the seed crystal and protects it from oxidation reaction.

Benefits of technology

It effectively reduces seed crystal welding oxidation, extends the number of seed crystal uses, improves the yield of monocrystalline silicon, and reduces production costs.

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Abstract

This invention discloses an argon gas protection system and crystal pulling method for reducing oxidation at the weld joint of seed crystals in a single crystal furnace. Multiple symmetrically distributed argon gas inlets are opened on the side wall of the throat connection section at the top of the main furnace chamber to form localized auxiliary argon gas. The auxiliary argon gas enters through the inclined inlets and is guided by a gas hood, causing the auxiliary argon gas discharged through the lower opening of the gas hood to flow downwards. A portion of the gas near the inner wall of the gas hood diffuses outwards to form an annular gas curtain surrounding the seed crystal, while a portion of the gas near the graphite chuck and the outer wall of the seed crystal is guided downwards along the wall to the weld joint for localized cooling, reducing oxidation at the weld joint and preventing iridescence, thus extending the number of uses.
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