A crystal growth furnace seed rod centering adjustment device

Abstract

The utility model relates to the field of crystal preparation, concretely to a crystal growing furnace seed crystal rod center degree adjusting device, including furnace body, install the sliding seat on the drive arrangement in the furnace body. The utility model discloses through embedding the inside embedding groove of embedding board, make support seat with connecting seat connect, and through anticlockwise rotation screw tube, make the joint board spin into the inside joint slot, and the joint board moves upward in the inside joint slot, make the joint board drive joint board move upward, so that the joint board drive support seat top and connecting seat bottom end close connection, with this convenient seed crystal rod body and lifting rod are connected, cooperate first rubber pad and second rubber pad and carry out the shock absorption of the shock force that the equipment on the furnace body runs produces the buffer, if the motor rotation shock force causes the seed crystal rod body to vibrate, because the action of precision bearing seat, the seed crystal rod body appears the deviation and can be forced to reset to the furnace body center position by precision bearing seat when, with this guarantee the quality of crystal growth.

Description

Technical Field

[0001] This utility model relates to the field of crystal preparation, specifically a seed crystal rod centering adjustment device for a crystal growth furnace. Background Technology

[0002] Crystal growth furnaces are core equipment used to prepare high-quality crystal materials such as single crystals and polycrystalline materials. They are widely used in semiconductors, optoelectronics, optics, new energy and other fields. Crystal growth furnaces achieve directional solidification growth by controlling the temperature field, atmosphere and mechanical motion. The main methods include Czochralski method, Bridgman method, Czochralski method and laser floating zone method. Among them, Czochralski method is suitable for materials such as silicon and sapphire. Single crystals are grown by rotating seed crystals. Studies have found that lithium disilicate crystals nucleate at 500℃, and the crystal peak intensity continues to increase until it begins to melt at 960℃. This temperature is 40℃ higher than the die casting temperature of lithium disilicate ceramics. This fully demonstrates that the crystal exists during die casting and can be changed in direction by plastic deformation during extrusion. The die casting temperature (915℃) is close to the melting temperature of the crystal (960℃), which suggests that there may be thermodynamic conditions for crystal recrystallization or orientation adjustment during the die casting process. If precise control of crystal growth is required, isothermal heat treatment is usually required in the crystal growth furnace.

[0003] However, in existing crystal growth furnaces, the connection between the seed crystal rod and the lifting rod is usually threaded. Due to the lack of a mechanism for conveniently installing the seed crystal rod at the bottom of the lifting rod, the operator needs to continuously rotate the seed crystal rod until the top of the seed crystal rod is screwed into the bottom of the lifting rod. This process is not convenient. In addition, there is no mechanism to buffer and dampen the vibration generated by the equipment during the operation of the furnace and to reset the seed crystal rod. As a result, when the rotational vibration of the motor causes vibration of the seed crystal rod body, the seed crystal rod will deviate during rotation, thus affecting the quality of crystal growth. Utility Model Content

[0004] This utility model aims to provide a seed crystal rod centering adjustment device for a crystal growth furnace. It primarily addresses the shortcomings of existing technologies, such as the lack of a convenient mechanism for installing the seed crystal rod at the bottom of the lifting rod. This necessitates continuous rotation of the seed crystal rod by operators until its top is screwed into the bottom of the lifting rod, a process deemed inconvenient. Furthermore, the lack of a mechanism to buffer and dampen vibrations generated during furnace operation and to reset the seed crystal rod results in deviation during rotation when vibrations from the motor's rotation cause vibrations, thus affecting the quality of crystal growth.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0006] A seed crystal rod centering adjustment device for a crystal growth furnace includes a furnace body, a sliding seat mounted on a drive device within the furnace body, a motor embedded at the bottom of the sliding seat, a lifting rod fixedly connected to the motor output shaft, a seed crystal rod body disposed below the lifting rod, and a connecting mechanism, a screwing mechanism, a snap-fit ​​mechanism, and a correction mechanism. The connecting mechanism is disposed at the bottom of the lifting rod, and a first damping element is disposed at the bottom and inner wall of the connecting mechanism. The screwing mechanism is threadedly disposed at the top of the connecting mechanism. The snap-fit ​​mechanism is disposed at the top of the seed crystal rod body, with its outer wall inserted into the connecting mechanism and fitting against the first damping element. A second damping element is disposed at the top of the snap-fit ​​mechanism, with its top inserted into the screwing mechanism and contacting the second damping element. The correction mechanism is disposed on the furnace body, and the seed crystal rod body passes through the correction mechanism.

[0007] The working principle and beneficial effects of this utility model:

[0008] 1. Working Principle: When the top of the seed crystal rod passes through the correction mechanism, the seed crystal rod body drives the snap-fit ​​mechanism to align with the connecting mechanism at the bottom of the lifting rod. Then, the top of the snap-fit ​​mechanism is embedded into the outer wall of the connecting mechanism, so that the snap-fit ​​mechanism is in contact with the first shock absorber, and the top of the snap-fit ​​mechanism passes through the top of the connecting mechanism. At this time, the top of the snap-fit ​​mechanism is aligned with the screw-fit mechanism. Rotating the screw-fit mechanism counterclockwise causes the outer end of the screw-fit mechanism to move upward and simultaneously rotate into the top of the snap-fit ​​mechanism, thereby driving the snap-fit ​​mechanism to move upward and press against the first shock absorber. Meanwhile, the outer end of the screw-fit mechanism presses against the second shock absorber. Together with the first and second shock absorbers, the vibration force generated by the equipment on the furnace body during operation is buffered and damped, preventing the seed crystal rod body from deviating from the center position of the furnace body due to the vibration force. When the motor drives the lifting rod to rotate, the lifting rod drives the seed crystal rod body to rotate. If the vibration force of the motor rotation causes vibration to the seed crystal rod body, the correction mechanism can force the seed crystal rod body to be reset to the center position of the furnace body if it deviates due to the action of the correction mechanism, thereby ensuring the quality of crystal growth.

[0009] 2. Beneficial effects:

[0010] (1) The embedded plate is embedded in the embedded groove, so that the support base and the connecting base are connected. By rotating the threaded cylinder counterclockwise, the snap-fit ​​plate is screwed into the snap-fit ​​groove. The snap-fit ​​plate moves upward in the snap-fit ​​groove, so that the top of the snap-fit ​​plate squeezes the second rubber pad and drives the snap-fit ​​plate to move upward. Thus, the snap-fit ​​plate drives the top of the support base to be tightly connected to the bottom of the connecting base. At this time, the first rubber pad is squeezed, so as to facilitate the connection between the seed crystal rod body and the lifting rod. The first rubber pad and the second rubber pad are used to buffer and dampen the vibration force generated by the equipment on the furnace body during operation, so as to avoid the seed crystal rod body and the furnace body center deviation due to the vibration force. When the motor drives the lifting rod to rotate, the lifting rod drives the seed crystal rod body to rotate. If the vibration force of the motor rotation causes vibration to the seed crystal rod body, the seed crystal rod body can be forcibly reset to the center position of the furnace body due to the effect of the precision bearing seat, so as to ensure the quality of crystal growth.

[0011] Preferably, the connecting mechanism includes a connecting seat and an embedding groove. The top end of the connecting seat is fixedly connected to the bottom end of the lifting rod. The outer wall of the connecting seat has a plurality of embedding grooves, which are arranged in a circular array at equal intervals to facilitate the connection of the locking mechanism with the connecting seat through the embedding grooves.

[0012] Preferably, the first shock absorber includes a first rubber pad, which is fixedly connected to the bottom of the connecting seat and the inner wall of several embedded grooves; when the snap-fit ​​mechanism is inserted into the embedded groove of the outer wall of the connecting seat, the outer wall of the embedded plate is in contact with the inside of the first rubber pad.

[0013] Preferably, the screw-on mechanism includes a threaded ring, a threaded cylinder, and snap-fit ​​plates. The bottom end of the threaded ring is fixedly connected to the top end of the connecting mechanism. The inner wall of the threaded ring is sleeved on the outside of the lifting rod. The outer wall of the threaded ring is connected to the threaded cylinder. Several snap-fit ​​plates are fixedly connected to the outer wall of the threaded cylinder. The snap-fit ​​plates are arranged in a circular array at equal intervals. The bottom end of the threaded ring is fixedly connected to the top end of the connecting seat. Rotating the threaded cylinder counterclockwise causes the threaded cylinder to move upward on the outer wall of the threaded ring. This causes the threaded cylinder to drive the several snap-fit ​​plates to screw into the snap-fit ​​mechanism and move upward inside the snap-fit ​​mechanism.

[0014] Preferably, the snap-fit ​​mechanism includes a support base, an embedded plate, and a snap-fit ​​groove. The bottom end of the support base is fixedly connected to the top end of the seed crystal rod body. Several embedded plates are fixedly connected to the top end of the support base. The several embedded plates are arranged in a circular array at equal intervals. The same snap-fit ​​groove is opened on both sides of the embedded plate. The seed crystal rod body and the lifting rod are aligned, so that the connecting seat is aligned with the support base. Pulling the seed crystal rod body upward causes the seed crystal rod body to drive the support base to move upward. Thus, the support base drives the several embedded plates to be inserted into the several embedded grooves on the outer wall of the connecting seat. At this time, the outer wall of the embedded plate is in contact with the inside of the first rubber pad.

[0015] Preferably, the second shock absorber includes a second rubber pad, and a plurality of second rubber pads are provided. The outer walls of the plurality of second rubber pads are fixedly connected to the inner wall of the snap-fit ​​groove. When the top of the snap-fit ​​plate presses the second rubber pad and drives the embedded plate to move upward, the snap-fit ​​plate drives the top of the support seat to be tightly connected to the bottom of the connecting seat.

[0016] Preferably, the correction mechanism includes a connecting plate, a fixing plate, and a precision bearing seat. The bottom end of the connecting plate is fixedly connected to the top of the furnace body, and the fixing plate is fixedly connected to the front side of the connecting plate. The top and bottom ends of the fixing plate are equipped with the same precision bearing seat. If the seed crystal rod body vibrates due to the vibration force of the motor rotation, the seed crystal rod body can be forcibly reset to the center position of the furnace body due to the action of the precision bearing seat, thereby ensuring the quality of crystal growth. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of a seed crystal rod centering adjustment device for a crystal growth furnace according to this utility model patent;

[0018] Figure 2 This utility model patent discloses a seed rod centering adjustment device for a crystal growth furnace. Figure 1 Structural diagram of region A in the middle;

[0019] Figure 3 This is a structural diagram of the connection seat and support seat of a seed crystal rod center adjustment device for a crystal growth furnace according to this utility model patent.

[0020] Figure 4 This is a structural diagram of the snap-fit ​​plate of a seed crystal rod center degree adjustment device for a crystal growth furnace according to this utility model patent.

[0021] Figure 5 This is a structural diagram of the embedded plate of a seed crystal rod centering adjustment device for a crystal growth furnace, which is part of this utility model patent.

[0022] The reference numerals in the accompanying drawings of the instruction manual include: 1. Furnace body; 2. Sliding seat; 3. Motor; 4. Lifting rod; 5. Connecting seat; 6. Embedding groove; 7. First rubber pad; 8. Threaded ring; 9. Threaded cylinder; 10. Snap-fit ​​plate; 11. Support seat; 12. Embedding plate; 13. Snap-fit ​​groove; 14. Second rubber pad; 15. Seed crystal rod body; 16. Connecting plate; 17. Fixing plate; 18. Precision bearing seat. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figures 1-5As shown, a seed crystal rod centering adjustment device for a crystal growth furnace includes a furnace body 1. A sliding seat 2 is installed on an electric slide rail in the furnace body 1. A motor 3 is embedded at the bottom of the sliding seat 2. A lifting rod 4 is fixedly connected to the output shaft of the motor 3. A seed crystal rod body 15 is arranged below the lifting rod 4. The device also includes a connecting mechanism, a screwing mechanism, a snapping mechanism, and a correction mechanism. The connecting mechanism is located at the bottom of the lifting rod 4. A first damping element is provided at the bottom and inner wall of the connecting mechanism. The connecting mechanism includes a connecting seat 5 and an embedding groove 6. The top of the connecting seat 5 is fixedly connected to the bottom of the lifting rod 4. A plurality of embedding grooves 6 are opened on the outer wall of the connecting seat 5. The plurality of embedding grooves 6 are arranged in a circular array at equal intervals. The first damping element includes a first rubber pad 7, which is fixedly connected to the bottom of the connecting seat 5 and the inner wall of the connecting rod 4. The inner walls of several embedded slots 6 are provided. A screw-on mechanism is threadedly movable at the top of the connecting mechanism. A snap-on mechanism is located at the top of the seed crystal rod body 15. The screw-on mechanism includes a threaded ring 8, a threaded cylinder 9, and snap-on plates 10. The bottom end of the threaded ring 8 is fixedly connected to the top of the connecting mechanism. The inner wall of the threaded ring 8 is sleeved on the outside of the lifting rod 4. The outer wall of the threaded ring 8 is connected to the threaded cylinder 9. Several snap-on plates 10 are fixedly connected to the outer wall of the threaded cylinder 9. The snap-on plates 10 are arranged in a ring array at equal intervals. The outer wall of the snap-on mechanism is inserted into the connecting mechanism and fits against the first shock absorber. A second shock absorber is provided at the top of the snap-on mechanism. The top of the snap-on mechanism is inserted into the screw-on mechanism and contacts the second shock absorber. The snap-on mechanism includes a support base 11, an embedded slot 12, a screw-on slot 13, a screw-on slot 14, a screw-on slot 15, a screw-on slot 15, a screw-on slot 15, a screw-on slot 16, a screw-on slot 17, a screw-on slot 18, a screw-on slot 19, a screw-on slot 10 ... The bottom end of the support base 11 is fixedly connected to the top end of the seed crystal rod body 15, and the top end of the support base 11 is fixedly connected to several embedded plates 12. The several embedded plates 12 are arranged in a circular array at equal intervals. The same snap-fit ​​groove 13 is opened on both sides of the embedded plates 12. The second shock absorber includes a second rubber pad 14. Several second rubber pads 14 are provided. The outer wall of the several second rubber pads 14 is fixedly connected to the inner wall of the snap-fit ​​groove 13. Open the furnace body 1, pass the bottom end of the seed crystal rod body 15 through the tight bearing seat and move it into the furnace body 1. At this time, the seed crystal rod body 15 and the lifting rod 4 are aligned, so that the connecting seat 5 is aligned with the support base 11. Pull the seed crystal rod body 15 upward, so that the seed crystal rod body 15 drives the support base 11 to move upward, thereby supporting the seed crystal rod body 15. The support 11 drives the embedded plate 12 to insert into the embedded groove 6 on the outer wall of the connecting seat 5. At this time, the outer wall of the embedded plate 12 is in contact with the inside of the first rubber pad 7. The top of the support 11 is moved to contact the first rubber pad 7 at the bottom of the connecting seat 5. At this time, the top of the embedded plate 12 passes through the embedded groove 6, and the snap-fit ​​groove 13 on the embedded plate 12 is aligned with the snap-fit ​​plate 10. Then, the threaded cylinder 9 is rotated counterclockwise, so that the threaded cylinder 9 moves upward on the outer wall of the threaded ring 8. Thus, the threaded cylinder 9 drives several snap-fit ​​plates 10 to screw into the corresponding snap-fit ​​grooves 13 and move upward inside the snap-fit ​​grooves 13. When the top of the snap-fit ​​plate 10 presses against the second rubber pad 14 and drives the embedded plate 12 to move upward, the snap-fit ​​plate 10 drives the top of the support 11 to be tightly connected to the bottom of the connecting seat 5.At this time, the first rubber pad 7 is compressed, which facilitates the connection between the seed crystal rod body 15 and the lifting rod 4. Together with the first rubber pad 7 and the second rubber pad 14, they buffer and dampen the vibration generated during the operation of the equipment on the furnace body 1, preventing deviation in the center alignment of the seed crystal rod body 1 and the furnace body 1 due to vibration.

[0025] The correction mechanism is installed on the furnace body 1, and the seed crystal rod body 15 passes through the correction mechanism. The correction mechanism includes a connecting plate 16, a fixing plate 17, and a precision bearing seat 18. The bottom end of the connecting plate 16 is fixedly connected to the top of the furnace body 1, and the fixing plate 17 is fixedly connected to the front side of the connecting plate 16. The same precision bearing seat 18 is installed at the top and bottom ends of the fixing plate 17. When the motor 3 drives the lifting rod 4 to rotate, the lifting rod 4 drives the seed crystal rod body 15 to rotate. If the vibration force of the motor 3 causes vibration to the seed crystal rod body 15, the precision bearing seat 18 can force the seed crystal rod body 15 to be reset to the center position of the furnace body 1 when it is offset, thereby ensuring the quality of crystal growth.

[0026] As described above, the specific implementation of this utility model is as follows: The drive device on the furnace body 1 is activated, causing the sliding seat 2 to slide upwards. Then, the furnace body 1 is opened, and the bottom end of the seed crystal rod body 15 passes through the tight bearing seat and moves into the furnace body 1. At this time, the seed crystal rod body 15 and the lifting rod 4 are aligned, thus aligning the connecting seat 5 with the support seat 11. The seed crystal rod body 15 is pulled upwards, causing the seed crystal rod body 15 to drive the support seat 11 to move upwards. This causes the support seat 11 to drive the embedding plate 12 to insert into the embedding groove 6 on the outer wall of the connecting seat 5. At this time, the outer wall of the embedding plate 12 is in contact with the inside of the first rubber pad 7. The top end of the support seat 11 is moved until it contacts the first rubber pad 7 at the bottom end of the connecting seat 5. At this time, the top end of the embedding plate 12 passes through the embedding groove 6, and the snap-fit ​​groove 13 on the embedding plate 12 is aligned with the snap-fit ​​plate 10. Then, the threaded cylinder 9 is rotated counterclockwise, causing the threaded cylinder 9 to move upwards on the outer wall of the threaded ring 8. This causes the threaded cylinder 9 to drive several snap-fit ​​plates 10 to rotate. The seed crystal rod 15 is inserted into the corresponding slot 13 and moves upward within the slot 13. When the top of the snap-fit ​​plate 10 presses against the second rubber pad 14, it drives the embedded plate 12 to move upward, thereby causing the top of the snap-fit ​​plate 10 to be tightly connected to the bottom of the connecting seat 5. At this time, the first rubber pad 7 is compressed, which facilitates the connection between the seed crystal rod body 15 and the lifting rod 4. The first rubber pad 7 and the second rubber pad 14 work together to buffer and dampen the vibration force generated by the equipment on the furnace body 1 during operation, so as to avoid the seed crystal rod body 15 from deviating from the center of the furnace body 1 due to the vibration force. When the motor 3 drives the lifting rod 4 to rotate, the lifting rod 4 drives the seed crystal rod body 15 to rotate. If the vibration force of the motor 3 causes vibration to the seed crystal rod body 15, the precision bearing seat 18 can force the seed crystal rod body 15 to be reset to the center position of the furnace body 1 when it deviates, thereby ensuring the quality of crystal growth.

[0027] The above descriptions are merely embodiments of this utility model, and common knowledge regarding specific structures and characteristics is not elaborated upon here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. A crystal growing furnace seed rod centering adjustment device characterized by, The furnace body (1) includes a sliding seat (2) installed on the drive device in the furnace body (1), a motor (3) embedded at the bottom of the sliding seat (2), a lifting rod (4) fixedly connected to the output shaft of the motor (3), a seed crystal rod body (15) set below the lifting rod (4), and a connecting mechanism, a screwing mechanism, a snap-fit ​​mechanism and a correction mechanism. The connecting mechanism is set at the bottom of the lifting rod (4), and a first shock absorber is set at the bottom and inner wall of the connecting mechanism. The screwing mechanism is set at the top of the connecting mechanism in a threaded manner. The snap-fit ​​mechanism is set at the top of the seed crystal rod body (15). The outer wall of the snap-fit ​​mechanism is inserted into the connecting mechanism, and the outer wall of the snap-fit ​​mechanism is in contact with the first shock absorber. A second shock absorber is set at the top of the snap-fit ​​mechanism. The top of the snap-fit ​​mechanism is inserted into the screwing mechanism, and the screwing mechanism is in contact with the second shock absorber. The correction mechanism is set on the furnace body (1), and the seed crystal rod body (15) passes through the correction mechanism.

2. A crystal growing furnace seed rod centering adjustment device as defined in claim 1 wherein: The connecting mechanism includes a connecting seat (5) and an embedding groove (6). The top of the connecting seat (5) is fixedly connected to the bottom of the lifting rod (4). The outer wall of the connecting seat (5) is provided with a number of embedding grooves (6), which are arranged in a ring array at equal intervals.

3. A crystal growing furnace seed rod centering adjustment device as defined in claim 2 wherein: The first shock absorber includes a first rubber pad (7), which is fixedly connected to the bottom end of the connecting seat (5) and the inner wall of several embedded grooves (6).

4. A crystal growing furnace seed rod centering adjustment device as defined in claim 1 wherein: The screwing mechanism includes a threaded ring (8), a threaded cylinder (9), and a snap-fit ​​plate (10). The bottom end of the threaded ring (8) is fixedly connected to the top end of the connecting mechanism. The inner wall of the threaded ring (8) is sleeved on the outside of the lifting rod (4). The outer wall of the threaded ring (8) is connected to the threaded cylinder (9). The outer wall of the threaded cylinder (9) is fixedly connected to several snap-fit ​​plates (10). The several snap-fit ​​plates (10) are arranged in a ring array at equal intervals.

5. A crystal growing furnace seed rod centering adjustment device as defined in claim 1 wherein: The snap-fit ​​mechanism includes a support base (11), an embedded plate (12), and a snap-fit ​​groove (13). The bottom end of the support base (11) is fixedly connected to the top end of the seed crystal rod body (15). Several embedded plates (12) are fixedly connected to the top end of the support base (11). The several embedded plates (12) are arranged in a ring array at equal intervals. The same snap-fit ​​groove (13) is opened on both sides of the embedded plate (12).

6. A crystal growing furnace seed rod centering adjustment device as defined in claim 5 wherein: The second shock absorber includes a second rubber pad (14), and several second rubber pads (14) are provided. The outer walls of several second rubber pads (14) are fixedly connected to the inner wall of the snap-fit ​​groove (13).

7. A crystal growing furnace seed rod centering adjustment device as defined in claim 1 wherein: The correction mechanism includes a connecting plate (16), a fixing plate (17) and a precision bearing seat (18). The bottom end of the connecting plate (16) is fixedly connected to the top of the furnace body (1), and the front side of the connecting plate (16) is fixedly connected to the fixing plate (17). The top and bottom ends of the fixing plate (17) are equipped with the same precision bearing seat (18).

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