Mechanical hand vacuum connection

Abstract

This utility model discloses a vacuum connector for a robotic arm, comprising a connector body with a through cavity in the middle and annular grooves on the inner walls of both sides of the through cavity. A sealing ring is installed in each groove, and the inner diameter of the sealing ring is smaller than the inner diameter of the through cavity. A threaded hole for connecting a vacuum interface is provided on one side of the connector body. This threaded hole communicates with the through cavity, and the center height of the threaded hole is higher than the axis of the through cavity. This utility model optimizes the structure of the vacuum connector by setting a sealing ring and moving the threaded hole upwards, achieving communication between the vacuum interface and the vacuum transmission port of the rod, enabling the LPE3061 epitaxial platform robotic arm to be successfully applied to the SES630 machine tool.

Description

Technical Field

[0001] This utility model relates to the field of epitaxial silicon growth equipment technology, and in particular to a robotic vacuum connector. Background Technology

[0002] Silicon epitaxy technology generally refers to the technique of growing a single-crystal silicon layer with a target thickness and resistivity on a substrate surface using chemical vapor deposition (CVD). The surface quality of the epitaxial wafer plays a crucial role in the overall yield. Epitaxial wafers are typically removed using a vacuum robot. The assembly structure of the vacuum robot on the existing SES630 machine is as follows: Figure 1 and Figure 2 As shown, 11 is the vacuum connector for the robotic arm, 12 is the robotic arm rod of the SES630 machine, 13 is the vacuum interface, 14 is the suction cup of the SES630 machine structure, and 15 is a screw. After assembly, the suction cup and rod are rigidly connected. The suction cup cannot adjust its angle slightly to follow the sliding of the epitaxial wafer or changes in the slope of the base. This connection method not only increases the probability of wafer retrieval alarms but also easily leads to indentations and scratches on the surface of the epitaxial wafer, affecting the surface quality of the epitaxial wafer and the machine's operating rate.

[0003] like Figure 3 As shown, a soft sealing ring is installed between the LPE3061 epitaxial platform robotic arm suction cup 28 and the rod 27, connected by a single screw. The height around the ring can change slightly when pressed, resulting in better compatibility with the epitaxial wafer and significantly improving the increased probability of wafer retrieval alarms and the problem of pressure marks and indentations on the epitaxial wafer surface. However, as... Figure 2 and Figure 3 As shown, due to the different opening directions of the vacuum transmission ports on the two types of robotic arm components, the SES630 robotic arm component 12 has a vacuum transmission port 16 on its side, which can be directly connected to the vacuum interface 13, with the axes of the two interfaces at the same height. However, the vacuum transmission port 29 of the LPE3061 robotic arm component 27 is located at the top and cannot be directly connected to the vacuum interface 13 on the platform. This means that the original vacuum connector of the SES630 machine tool is not compatible with the LPE3061 epitaxial platform robotic arm. Therefore, a new vacuum connector is needed to allow the LPE3061 epitaxial platform robotic arm to be successfully installed on the SES630 machine tool. Utility Model Content

[0004] Purpose of the invention: To address the above-mentioned shortcomings, this utility model provides a vacuum connector for robotic arms.

[0005] Technical solution: To solve the above problems, this utility model adopts a robotic vacuum connector, including a connector body, a through cavity in the middle of the connector body, annular grooves on the inner walls on both sides of the through cavity, a sealing ring installed in the groove, and the inner diameter of the sealing ring is smaller than the inner diameter of the through cavity; a threaded hole for connecting a vacuum interface is opened on one side of the connector body, the threaded hole is connected to the through cavity, and the center height of the threaded hole is higher than the axis of the through cavity.

[0006] Furthermore, the main body of the connector is a cuboid, and the cavity is cylindrical.

[0007] Furthermore, a boss is provided on the main body of the connector above the threaded hole.

[0008] Furthermore, the diameter of the cavity is 10 mm.

[0009] Furthermore, the sealing ring has an outer diameter of 11 mm and an inner diameter of 9 mm.

[0010] Furthermore, the center of the threaded hole is 2.5 mm away from the axis of the through cavity.

[0011] Furthermore, the length of the boss in the direction of the cavity axis is 15mm, and the height of the boss protrusion is 2mm.

[0012] Beneficial effects: Compared with the prior art, the significant advantage of this utility model is that by setting a sealing ring and moving the threaded hole upward, the structure of the vacuum connector is optimized, realizing the connection between the vacuum interface and the vacuum transmission port of the rod, so that the LPE3061 epitaxial platform robot can be successfully applied to the SES630 machine. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the assembly structure of the vacuum manipulator and vacuum connector of the SES630 machine tool in the prior art;

[0014] Figure 2 A schematic diagram of the vacuum manipulator structure of the SES630 machine tool in the prior art;

[0015] Figure 3 This is a schematic diagram of the vacuum manipulator structure of the LPE3061 machine tool in the prior art;

[0016] Figure 4 This is a front sectional view of the vacuum connector for the robotic arm of this utility model;

[0017] Figure 5 This is a side sectional view of the vacuum connector for the robotic arm of this utility model;

[0018] Figure 6 This is a schematic diagram of the assembly structure of the vacuum connector for the robotic arm of this utility model;

[0019] Figure 7 This is a schematic diagram of the internal structure of the vacuum connector for the robotic arm in its assembled state. Detailed Implementation

[0020] like Figures 4 to 7 As shown, a robotic vacuum connector in this embodiment includes a rectangular connector body 21. A cylindrical cavity 22 is formed in the center of the connector body 21. Annular grooves 25 are formed on the inner walls of both sides of the cavity 22, and sealing rings 26 are installed within the grooves 25. Sealing rings 26 with different inner diameters can be selected according to the diameter of different rods, improving the connector's versatility. A threaded hole 24 for connecting a vacuum hose interface is formed on one side of the connector body 21. This threaded hole 24 communicates with the cavity 22, while the other side of the threaded hole 24 is located inside the connector body 21 and is not through. The center height of the threaded hole 24 is higher than the axis of the cavity 22. Moving the threaded hole upwards increases the communication area between the threaded hole and the vacuum transmission port, ensuring subsequent vacuuming efficiency. Since the threaded hole 24 is moved upwards compared to the original vacuum connector position, a boss 23 is provided on the connector body 21 above the threaded hole 24 to ensure the strength of the connector body above the threaded hole 24.

[0021] The diameter of the through cavity 22 is 10mm, and the diameter of the grooves 25 at both ends of the through cavity 22 is 11mm and the width is 5mm. The outer diameter of the sealing ring 26 is 11mm and the inner diameter is 9mm. The center position of the threaded hole 24 is 2.5mm higher than the axis of the through cavity, and the thread depth is 17mm. The length of the boss 23 in the axial direction of the through cavity 22 is 15mm, and the protrusion height is 2mm.

[0022] In use, the LPE3061 robotic arm rod 27 is inserted into the through cavity 22. The rod 27 is clamped and sealed on both sides by sealing rings 27. The vacuum interface 13 is installed in the threaded hole 24. The gap between the inner wall of the through cavity and the rod 27, the threaded hole, and the vacuum transmission port form a connected sealed cavity. After the threaded hole is moved upward, the communication area with the vacuum transmission port is larger. After connecting the vacuum interface 13, the inside of the rod can be evacuated smoothly, so that the suction cup 28 can complete the gripping of the epitaxial wafer.

Claims

1. A robot vacuum connection, characterized in that, The connector body (21) includes a through cavity (22) in the middle of the connector body (21), and annular grooves (25) on the inner walls of both sides of the through cavity (22). A sealing ring (26) is installed in the groove (25), and the inner diameter of the sealing ring (26) is smaller than the inner diameter of the through cavity (22). A threaded hole (24) for connecting a vacuum interface is opened on one side of the connector body (21). The threaded hole (24) communicates with the through cavity (22), and the center height of the threaded hole (24) is higher than the axis of the through cavity (22).

2. The robot vacuum connection of claim 1, wherein, The main body (21) of the connector is a cuboid, and the cavity (22) is cylindrical.

3. The robot vacuum connection of claim 2, wherein, A boss (23) is provided on the main body (21) of the connector above the threaded hole (24).

4. The robotic arm vacuum connector as described in claim 3, characterized in that, The diameter of the through cavity (22) is 10 mm.

5. The robotic arm vacuum connector as described in claim 4, characterized in that, The sealing ring (26) has an outer diameter of 11 mm and an inner diameter of 9 mm.

6. The robotic arm vacuum connector as described in claim 5, characterized in that, The center of the threaded hole (24) is 2.5 mm away from the axis of the through cavity (22).

7. The robotic arm vacuum connector as described in claim 5, characterized in that, The length of the boss (23) in the axial direction of the cavity (22) is 15mm, and the height of the boss (23) is 2mm.

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