A vacuum furnace

Abstract

This utility model relates to the field of vacuum furnace technology, specifically to a vacuum furnace, including a furnace body, a furnace door, a motor, a sealing flange, and an aviation plug. The furnace body has a furnace door on one side, and a chamber is formed inside the furnace body, where the motor is located. The furnace door is fitted with a sealing flange, which has a mounting hole. The aviation plug includes a fixed section and a first plug-in section. The fixed section is fixed in the mounting hole, and one end of the first plug-in section is connected to the motor wire of the motor, while the other end is detachably plugged into the end of the fixed section facing the chamber. During use, when the motor needs maintenance, the vacuum furnace provided by this utility model only requires opening the furnace door and unplugging the corresponding first plug-in section from the fixed end to remove the motor from the furnace body for maintenance, which is very convenient. Since the fixed section is always fixedly installed on the sealing flange, there is no need to consider the sealing problem caused by disassembly.

Description

Technical Field

[0001] This utility model relates to the field of vacuum furnace technology, and specifically to a vacuum furnace. Background Technology

[0002] A vacuum furnace is a piece of equipment used for processes such as heating, sintering, and annealing, and is widely used in fields such as semiconductors, aerospace, new materials, and metallurgy.

[0003] Some internal components of a vacuum furnace require motor drive. Currently, existing vacuum furnaces often install motors outside the furnace body, extending the motor shaft through the side wall or door of the furnace body to connect with the driven components. This results in an excessively long motor shaft, affecting the stability of motor operation. Even if the motor is installed inside the furnace body, holes need to be drilled in the side wall or door of the furnace body to extend the motor wires to the outside for connection. Regardless of whether the motor is installed inside or outside the furnace body, the parts through which the motor components pass need to be sealed, increasing costs. When the motor needs maintenance, disassembly is very cumbersome. Utility Model Content

[0004] (I) This utility model provides a vacuum furnace, which alleviates the technical problem that the motor used in the vacuum furnace is cumbersome to disassemble when it needs to be repaired or replaced in the prior art.

[0005] (II) Technical Solution

[0006] To solve the above-mentioned technical problems, embodiments of this utility model provide a vacuum furnace, including a furnace body, a furnace door, a motor, a sealing flange, and an aviation plug;

[0007] The furnace door is provided on one side of the furnace body, and a chamber is formed inside the furnace body, with the motor located in the chamber;

[0008] The furnace door is equipped with the sealing flange, and the sealing flange has an installation hole;

[0009] The aviation plug includes a fixed section and a first plug section. The fixed section is fixed in the mounting hole. One end of the first plug section is connected to the motor wire of the motor, and the other end is detachably plugged into the end of the fixed section.

[0010] Furthermore, the aviation plug also includes a second plug section, the end of which is detachably plugged into the fixed section opposite to the end of the first plug section.

[0011] Furthermore, the fixed segment has a first identification point and a second identification point at its two ends, the first plug-in segment has a third identification point at its end opposite to the fixed segment, and the second plug-in segment has a fourth identification point at its end opposite to the fixed segment.

[0012] Furthermore, the first marker, the second marker, the third marker, and the fourth marker are circular, rhomboid, or square.

[0013] Furthermore, the outer wall of the fixing section is arc-shaped and has threads, and the fixing section is fixed to the mounting hole by a nut.

[0014] Furthermore, the outer sidewall of the fixing segment is provided with a set of opposing first planes along its own radial direction, and the inner sidewall of the mounting hole is provided with a set of opposing second planes along its own radial direction. When the fixing segment is located in the mounting hole, the first plane fits against the second plane.

[0015] Furthermore, the motor is also equipped with a water-cooling pipe, the end of which, away from the motor, extends out of the furnace body through the sealing flange.

[0016] Furthermore, the sealing flange is also provided with a connection hole for installing the water-cooling pipe.

[0017] Furthermore, the motor wires are bound to the water-cooling pipes with straps.

[0018] Furthermore, the motor is covered with a protective shell.

[0019] The beneficial effects of this utility model are:

[0020] This utility model provides a vacuum furnace, including a furnace body, a furnace door, a motor, a sealing flange, and an aviation plug. The interior of the furnace body forms a chamber, and the motor is installed inside the chamber. A furnace door is provided on one side of the furnace body, and a sealing flange is installed on the furnace door. The sealing flange has a mounting hole for installing the fixing section of the aviation plug. By fixing the fixing section of the aviation plug in the mounting hole, the sealing flange can ensure the airtightness of the vacuum furnace during use. The aviation plug also includes a first plug section that can be detachably plugged into the fixing section. One end of the first plug section is connected to the motor wire of the motor, and the other end is detachably plugged into the end of the fixing section facing the chamber. When the motor needs maintenance, it is only necessary to open the furnace door and unplug the corresponding first plug section from the fixing end to remove the motor from the furnace body for maintenance, which is very convenient. Since the fixing section is always fixedly installed on the sealing flange, there is no need to consider the airtightness problem caused by disassembly. Attached Figure Description

[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 A schematic diagram of the structure of a vacuum furnace provided in an embodiment of this utility model;

[0023] Figure 2 An exploded view of an aviation plug structure for a vacuum furnace provided in an embodiment of this utility model;

[0024] Figure 3 An exploded view of the first angle structure of an aviation plug for a vacuum furnace provided in an embodiment of this utility model;

[0025] Figure 4 An exploded view of the second angle structure of an aviation plug for a vacuum furnace provided in an embodiment of this utility model.

[0026] icon:

[0027] 100-Furnace body; 101-Furnace door; 102-Motor; 103-Motor wire; 104-Water cooling pipe; 105-Protective shell;

[0028] 200 - Sealing flange; 201 - Mounting hole;

[0029] 300 - Aviation plug; 301 - Fixed section; 302 - First plug section; 303 - Second plug section; 304 - First marking point; 305 - Second marking point; 306 - Third marking point; 307 - Fourth marking point. Detailed Implementation

[0030] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "upper" and "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0033] like Figures 1 to 4 As shown, this utility model provides a vacuum furnace, including a furnace body 100, a furnace door 101, a motor 102, a sealing flange 200, and an aviation plug 300;

[0034] A furnace door 101 is provided on one side of the furnace body 100, and a chamber is formed inside the furnace body 100, where the motor 102 is located;

[0035] The furnace door 101 is equipped with a sealing flange 200, and the sealing flange 200 has a mounting hole 201;

[0036] The aviation plug 300 includes a fixed section 301 and a first plug section 302. The fixed section 301 is fixed in the mounting hole 201. One end of the first plug section 302 is connected to the motor wire 103 of the motor 102, and the other end is detachably plugged into the end of the fixed section 301 facing the cavity.

[0037] In this embodiment, the vacuum furnace includes a furnace body 100, a furnace door 101, a motor 102, a sealing flange 200, and an aviation connector 300. The furnace body 100 forms an interior chamber, and the motor 102 is installed inside the chamber. A furnace door 101 is located on one side of the furnace body 100, and a sealing flange 200 is installed on the furnace door 101. The sealing flange 200 has a mounting hole 201 for mounting the fixing section 301 of the aviation connector 300. By fixing the fixing section 301 of the aviation connector 300 to the mounting hole 201, and in conjunction with the sealing flange 200, the vacuum furnace's sealing performance during use can be guaranteed. Meanwhile, the aviation plug 300 also includes a first plug section 302 that can be detachably plugged into the fixed section 301. One end of the first plug section 302 is connected to the motor wire 103 of the motor 102, and the other end is detachably plugged into the end of the fixed section 301 facing the chamber. When the motor 102 needs maintenance, it is only necessary to open the furnace door 101 and pull out the corresponding first plug section 302 from the fixed end to remove the motor 102 from the furnace body 100 for maintenance, which is very convenient. Since the fixed section 301 is always fixedly installed on the sealing flange 200, there is no need to consider the sealing problem caused by disassembly.

[0038] Of course, the aviation plug 300 and sealing flange 200 have good sealing performance, so they will not affect the sealing environment inside the furnace body 100 during use.

[0039] According to one embodiment provided by this utility model, such as Figure 2 , Figure 3 and Figure 4 As shown, the aviation plug 300 also includes a second plug section 303, the end of which is detachably plugged into the end of the fixed section 301 that is away from the end of the first plug section 302.

[0040] In this embodiment, the aviation plug 300 also includes a second plug section 303. The end of the second plug section 303 can be detachably connected to the end of the fixed section 301 away from the first plug section 302 (i.e. the end located outside the chamber), thereby achieving the effect of connecting the motor 102 to the outside of the furnace body 100, avoiding redundant wires, and improving the overall aesthetics.

[0041] Of course, the end of the fixed segment 301 facing the first plug-in segment 302 is the male pin end, and the end of the fixed segment 301 facing the second plug-in segment 303 is the female pin end. Correspondingly, the end of the first plug-in segment 302 facing the fixed segment 301 is the female pin end, and the end of the second plug-in segment 303 facing the fixed segment 301 is the male pin end. The quick and detachable plug-in of the male pin end and the female pin end enables quick plugging and detachment between the first plug-in segment 302 and the fixed segment 301, and between the second plug-in segment 303 and the fixed segment 301.

[0042] According to one embodiment provided by this utility model, such as Figure 3 and Figure 4 As shown, the two ends of the fixed section 301 are respectively provided with a first identification point 304 and a second identification point 305, the end of the first plug-in section 302 opposite to the fixed section 301 is provided with a third identification point 306, and the end of the second plug-in section 303 opposite to the fixed section 301 is provided with a fourth identification point 307.

[0043] In this embodiment, the two ends of the fixed section 301 are respectively provided with a first identification point 304 and a second identification point 305. The first identification point 304 and the second identification point 305 are symmetrically arranged. Preferably, the end of the fixed section 301 facing the first insertion section 302 is the first identification point 304, and the end of the fixed section 301 facing the second insertion section 303 is the second identification point 305. A third identification point 306 is provided at the end of the first insertion section 302 opposite to the fixed section 301, and a fourth identification point 307 is provided at the end of the second insertion section 303 opposite to the fixed section 301. In use, the fixed section 301 is fixedly installed in the mounting hole 201, and the first identification point 304 and the second identification point 305 are kept facing upwards synchronously. When plugging in, the orientation of the third identification point 306 and the fourth identification point 307 is kept consistent with the orientation of the first identification point 304 and the second identification point 305, so as to ensure that the wiring error will not occur during plugging in and affect the normal use of the motor 102.

[0044] According to one embodiment provided by this utility model, such as Figure 3 and Figure 4 As shown, the first marker point 304, the second marker point 305, the third marker point 306, and the fourth marker point 307 are circular, rhomboid, or square.

[0045] In this embodiment, for easy visibility, the shapes of the first marker 304, the second marker 305, the third marker 306, and the fourth marker 307 include, but are not limited to, circles, rhombuses, or squares. Correspondingly, they can also be set to bright colors, such as red, so that they can be quickly identified during use.

[0046] According to one embodiment provided by this utility model, such as Figure 2 , Figure 3 and Figure 4 As shown, the outer wall of the fixing section 301 is arc-shaped and has threads. The fixing section 301 is fixed to the mounting hole 201 by a nut.

[0047] In this embodiment, the outer wall of the fixing section 301 is arc-shaped. Of course, the outer walls of the first insertion section 302 and the second insertion section 303 are also arc-shaped. Threads are provided circumferentially on the outer wall of the fixing section 301 so that the fixing section 301 can be fixed to the mounting hole 201 by a nut. The nut and the thread engage to fix the fixing section 301 to the mounting hole 201 opened in the sealing flange 200.

[0048] According to one embodiment of the present invention, the outer sidewall of the fixing segment 301 is provided with a set of opposing first planes along its own radial direction, and the inner sidewall of the mounting hole 201 is provided with a set of opposing second planes along its own radial direction. When the fixing segment 301 is located in the mounting hole 201, the first plane is in contact with the second plane.

[0049] In this embodiment, the outer side wall of the fixing segment 301 is provided with a set of opposing first planes, that is, symmetrically arranged along its own radial direction. Similarly, the inner side wall of the mounting hole 201 is provided with a set of opposing second planes, that is, symmetrically arranged along its own radial direction. When the fixing segment 301 is placed in the mounting hole 201, by fitting the first plane against the second plane and then tightening it with a nut in the threaded engagement of its side wall, the fixing segment 301 will not rotate, thereby ensuring that the first marking point 304 and the second marking point 305 can maintain their orientation during placement without change, so as to facilitate identification during subsequent insertion.

[0050] According to one embodiment provided by this utility model, such as Figure 1 As shown, the motor 102 is also equipped with a water cooling pipe 104, and the end of the water cooling pipe 104 away from the motor 102 extends to the outside of the furnace body 100 through a sealing flange 200.

[0051] In this embodiment, in order to ensure the performance of the motor 102, the motor 102 is also equipped with a water-cooling pipe 104. The water-cooling pipe 104 is extended to the outside of the furnace body 100 through the sealing flange 200. That is, one end of the water-cooling pipe 104 is connected to the motor 102, and the other end extends to the outside of the furnace body 100 through the sealing flange 200. By setting the water-cooling pipe 104, heat dissipation can be achieved efficiently, the power density of the motor 102 can be increased, the service life of the motor 102 can be further extended, and the performance can be stabilized to ensure the quality of the vacuum furnace.

[0052] According to one embodiment provided by this utility model, such as Figure 1 As shown, the sealing flange 200 also has a connection hole for installing the water cooling pipe 104.

[0053] In this embodiment, the water-cooling pipe 104 is welded and fixed through the connection hole opened in the sealing flange 200, so as to facilitate connection to the outside, without affecting the sealing of the furnace body 100.

[0054] According to one embodiment of the present invention, the motor wire 103 and the water cooling pipe 104 are bound together by a strap.

[0055] In this embodiment, in order to ensure the aesthetics of the internal structure and to prevent the motor wire 103 from shaking and affecting the use of the motor 102 during use, the motor wire 103 and the water cooling pipe 104 are bound together with a strap.

[0056] According to one embodiment provided by this utility model, such as Figure 1 As shown, the motor 102 is covered with a protective shell 105.

[0057] In this embodiment, the motor 102 is installed and fixed at a dedicated installation position near the furnace door 101, and a protective shell 105 is installed on the outside of the motor 102 to prevent the high temperature of the furnace body 100 from damaging the motor 102 and to extend the service life of the motor 102.

[0058] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum furnace, characterized in that, Includes furnace body (100), furnace door (101), motor (102), sealing flange (200) and aviation plug (300); The furnace body (100) has a furnace door (101) on one side, and a chamber is formed inside the furnace body (100), and the motor (102) is located in the chamber; The furnace door (101) is equipped with the sealing flange (200), and the sealing flange (200) has a mounting hole (201); The aviation plug (300) includes a fixed section (301) and a first plug section (302). The fixed section (301) is fixed in the mounting hole (201). One end of the first plug section (302) is connected to the motor wire (103) of the motor (102), and the other end is detachably plugged into the end of the fixed section (301) facing the cavity.

2. The vacuum furnace according to claim 1, characterized in that, The aviation plug (300) further includes a second plug section (303), the end of which is detachably plugged into the fixed section (301) away from the end of the first plug section (302).

3. The vacuum furnace according to claim 2, characterized in that, The fixed section (301) has a first marker (304) and a second marker (305) at its two ends respectively. The first plug-in section (302) has a third marker (306) at the end opposite to the fixed section (301). The second plug-in section (303) has a fourth marker (307) at the end opposite to the fixed section (301).

4. The vacuum furnace according to claim 3, characterized in that, The first marker (304), the second marker (305), the third marker (306), and the fourth marker (307) are circular, rhomboid, or square.

5. The vacuum furnace according to claim 3, characterized in that, The outer wall of the fixing section (301) is arc-shaped and threaded. The fixing section (301) is fixed to the mounting hole (201) by a nut.

6. The vacuum furnace according to claim 5, characterized in that, The outer sidewall of the fixing segment (301) is provided with a set of opposing first planes along its own radial direction, and the inner sidewall of the mounting hole (201) is provided with a set of opposing second planes along its own radial direction. When the fixing segment (301) is located in the mounting hole (201), the first plane is in contact with the second plane.

7. The vacuum furnace according to any one of claims 1-6, characterized in that, The motor (102) is also provided with a water cooling pipe (104), and one end of the water cooling pipe (104) away from the motor (102) extends to the outside of the furnace body (100) through the sealing flange (200).

8. The vacuum furnace according to claim 7, characterized in that, The sealing flange (200) is also provided with a connection hole for installing the water cooling pipe (104).

9. The vacuum furnace according to claim 8, characterized in that, The motor wire (103) is bound to the water cooling pipe (104) by a strap.

10. The vacuum furnace according to claim 7, characterized in that, The motor (102) is covered with a protective shell (105).

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