High-voltage connection assembly, microwave head and microwave generating device

Abstract

The utility model provides a high pressure connection subassembly for connecting the cathode lead-out end of magnetron of microwave head and filament power module, and the microwave head includes installation shell, and the magnetron and filament power module are located in the installation shell, and the high pressure connection subassembly includes insulating protection box, adapter copper bar and lap copper bar, and the insulating protection box is fixedly connected to the installation shell, and the cathode lead-out end is located in the insulating protection box, and the filament power module is located outside the insulating protection box, and the insulating protection box is provided with through -hole, and the adapter copper bar is located in the insulating protection box, and is electrically connected to the cathode lead-out end of magnetron, and the lap copper bar has first connecting part and second connecting part, and the first connecting part is electrically connected to the filament power module, and the second connecting part extends into the insulating protection box from the through -hole to and adapter copper bar electrically connected, and the utility model provides a kind of microwave head and microwave generating device comprising the high pressure connection subassembly of the utility model. The high pressure connection subassembly is simple in structure, easy to install, and high in safety.

Description

Technical Field

[0001] This utility model relates generally to the field of microwave equipment technology, and more specifically to a high-voltage connection component, a microwave head, and a microwave generator. Background Technology

[0002] With the widespread application of microwave technology, microwave generators, as core equipment for generating microwave energy, play a vital role in industries, medicine, and scientific research. A microwave generator typically includes a microwave power supply and a microwave head, with the microwave head being the core component, mainly composed of a magnetron and a filament power module. The magnetron, as a high-efficiency microwave oscillator, converts electrical energy into microwave energy, while the filament power module provides the necessary electrical energy for the magnetron to operate.

[0003] In existing technologies, the connection between the cathode lead of a magnetron and the filament power module is typically achieved through a direct cable connection. For example, CN119581295A discloses a high-power magnetron microwave source design method that integrates an anode high-voltage power supply, a filament power supply, and a control and protection unit, but still requires complex wiring operations during installation. CN222690626U discloses an X-band magnetron wiring device, including a cathode connection section, a filament connection section, and an insulating component. While this improves the convenience and reliability of wiring, the complexity of the wiring remains.

[0004] Existing microwave generators still present several challenges during installation. First, installation requires separate wiring, a complex process that increases installation difficulty and time costs. Second, the high voltage generated during microwave operation poses a risk of electric shock if the filament wire breaks or is exposed, endangering operator safety. Third, cable connections require insulation, typically achieved by wrapping with insulating tape, which is time-consuming, labor-intensive, and lacks safety and aesthetics. Furthermore, wrapping insulating tape is difficult and cumbersome within limited installation space. Finally, conventional cable connections are prone to arcing under prolonged high-current operation, creating a safety hazard and impacting the lifespan of the microwave generator.

[0005] Therefore, there is a need to provide a high-voltage connection assembly, a microwave head, and a microwave generator to at least partially solve the above problems. Utility Model Content

[0006] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0007] To at least partially solve the above problems, a first aspect of this utility model provides a high-voltage connection assembly for connecting the cathode lead of a magnetron in a microwave head to a filament power module. The microwave head includes a mounting housing, and the magnetron and the filament power module are located inside the mounting housing. The high-voltage connection assembly includes: an insulating protective box fixedly connected to the mounting housing, the cathode lead located inside the insulating protective box, and the filament power module located outside the insulating protective box, the insulating protective box having a through hole; a transition copper busbar located inside the insulating protective box and electrically connected to the cathode lead of the magnetron; and a connecting copper busbar having a first connecting portion and a second connecting portion, the first connecting portion being electrically connected to the filament power module, and the second connecting portion extending from the through hole into the insulating protective box to be electrically connected to the transition copper busbar.

[0008] Optionally, the adapter copper busbar is further provided with a first connecting hole, the insulating protective box is provided with a first strip hole, and the adapter copper busbar is fixed to the insulating protective box and the cathode lead-out end by fasteners, the first connecting hole and the first strip hole.

[0009] Optionally, the adapter copper busbar is provided with a second strip hole, and the insulating protective box is provided with a second connection hole. The adapter copper busbar is fixedly connected to the insulating protective box through fasteners, the second connection hole, and the second strip hole.

[0010] Optionally, the adapter copper busbar is further provided with a third strip hole, and the second connecting part is provided with a third connecting hole. The adapter copper busbar is fixedly connected to the second connecting part of the overlapping copper busbar through fasteners, the third connecting hole and the third strip hole.

[0011] Optionally, the insulating protective box includes a box body and a protective cover, the box body being detachably connected to the mounting shell, and the protective cover being detachably connected to the box body.

[0012] Optionally, the housing has a mounting groove on the side facing the magnetron, and the cathode lead of the magnetron extends into the housing from the mounting groove; and / or the housing has a through hole at the bottom.

[0013] Optionally, the cathode has two leads;

[0014] The insulating protective box also includes an insulating partition, which is disposed inside the insulating protective box and divides the internal space of the insulating protective box into a first area and a second area to separate the two cathode leads.

[0015] Optionally, the insulating protective box is an insulating protective box made of polytetrafluoroethylene.

[0016] A second aspect of this utility model also provides a microwave head, which includes a mounting shell, a magnetron, and a filament power module. The magnetron and the filament power module are located inside the mounting shell. The microwave head also includes a high-voltage connection assembly according to the first aspect of this utility model.

[0017] A third aspect of this utility model also provides a microwave generating device, the microwave generating device comprising a microwave power supply and a microwave head according to a second aspect of this utility model, the microwave power supply being electrically connected to the microwave head.

[0018] The beneficial effects of this invention are as follows: By placing the electrical connection between the filament power module and the cathode lead of the magnetron inside the insulating protective box, and using adapter copper busbars and overlapping copper busbars for electrical connection, the safety hazards existing in microwave generators in the prior art are effectively solved. Compared with the traditional separate wiring method, the high-voltage connection component of this invention greatly simplifies the wiring process and reduces the time required for product installation and disassembly; compared with conventional wire connection methods, this invention improves safety protection through the protection of the insulating protective box, effectively avoiding the risk of electric shock that may be caused by broken or exposed filament wires; at the same time, this invention uses copper busbar connection instead of traditional cable connection, avoiding problems such as wire aging caused by long-term operation of the equipment, and improving the service life and safety of the equipment.

[0019] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention can be realized and obtained through the structures pointed out in the description and the accompanying drawings. Attached Figure Description

[0020] The following drawings, which illustrate embodiments of the present invention, are incorporated herein as part of the present invention for understanding the invention. The drawings show embodiments of the present invention and their descriptions, serving to explain the principles of the present invention. In the drawings,

[0021] Figure 1 This is a three-dimensional structural diagram of a microwave head according to a preferred embodiment of the present invention;

[0022] Figure 2 for Figure 1 A schematic diagram of the internal three-dimensional structure of a medium-wave microwave head;

[0023] Figure 3 for Figure 2 A schematic diagram of the structure of a microwave head, showing the internal structure of the insulating protective box;

[0024] Figure 4 for Figure 3 Enlarged structural diagram of the location of the central insulation protection box;

[0025] Figure 5 for Figure 3 A three-dimensional structural diagram of the box body of the intermediate insulation protective box;

[0026] Figure 6 for Figure 5 A top view of the middle box section; and

[0027] Figure 7 for Figure 1 A schematic diagram of the filament power supply module, showing the overlapping copper busbars.

[0028] Explanation of reference numerals in the attached figures:

[0029] 10. Microwave head; 100. High-voltage connection assembly; 110. Insulating protective box; 111. Box body; 112. Protective cover; 113. Through hole; 114. First strip hole; 115. Second connection hole; 116. Mounting groove; 117. Insulating partition; 120. Adapter copper busbar; 121. First connection hole; 122. Second strip hole; 123. Third strip hole; 130. Overlapping copper busbar; 131. First connection part; 132. Second connection part; 133. Third connection hole; 200. Magnetron; 210. Cathode lead-out end; 300. Filament power supply module; 400. Mounting shell; 410. Output port; 420. Heat dissipation hole. Detailed Implementation

[0030] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that embodiments of the present invention may be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with embodiments of the present invention.

[0031] To fully understand the embodiments of this utility model, a detailed structure will be presented in the following description. Obviously, the implementation of the embodiments of this utility model is not limited to the specific details familiar to those skilled in the art. Preferred embodiments of this utility model are described in detail below; however, in addition to these detailed descriptions, this utility model may have other embodiments and should not be construed as being limited to the embodiments set forth herein.

[0032] It should be understood that the terminology used herein is intended only to describe particular embodiments and is not intended to limit the scope of the invention. The singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. When the terms “comprising” and / or “including” are used in this specification, they indicate the presence of the stated feature, integral, step, operation, element, and / or component, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components, and / or combinations thereof. The terms “upper,” “lower,” “front,” “rear,” “left,” “right,” and similar expressions used in this invention are for illustrative purposes only and are not intended to be limiting.

[0033] The ordinal numbers such as "first" and "second" used in this invention are merely identifiers and have no other meaning, such as a specific order. Furthermore, for example, the term "first component" does not imply the existence of "second component," and the term "second component" does not imply the existence of "first component."

[0034] In this document, terms such as “equal” and “same” are not strict mathematical and / or geometric limitations, but also include errors that are understandable to those skilled in the art and permissible in manufacturing or use.

[0035] Unless otherwise stated, the numerical ranges in this document include not only the entire range within its two endpoints, but also the subranges contained therein.

[0036] The specific embodiments of the present invention will be described in more detail below with reference to the accompanying drawings, which show representative embodiments of the present invention and are not intended to limit the present invention.

[0037] refer to Figures 1 to 7 This utility model provides a high-voltage connection assembly 100 for connecting the cathode lead 210 of the magnetron 200 of the microwave head 10 to the filament power module 300. The microwave head 10 includes a mounting housing 400, and the magnetron 200 and the filament power module 300 are located inside the mounting housing 400.

[0038] In the illustrated embodiment, the insulating protective box 110 is fixedly connected to the mounting shell 400, and the cathode lead-out end 210 is located inside the insulating protective box 110 (see figure). Figure 2 and Figure 3 The filament power module 300 is located outside the insulating protective box 110, which has a through hole 113 (see...). Figure 5 The insulating protective box 110 can effectively isolate high-voltage connection components and improve the safety of microwave head 10.

[0039] like Figure 3 and Figure 4 As shown, the adapter copper busbar 120 is located inside the insulating protective box 110 and is electrically connected to the cathode lead-out terminal 210 of the magnetron 200. The adapter copper busbar 120 enables electrical connection between the cathode lead-out terminal 210 and the connecting copper busbar 130, while also facilitating installation and disassembly.

[0040] refer to Figure 2 , Figure 4 and Figure 7 The overlapping copper busbar 130 has a first connecting portion 131 and a second connecting portion 132. The first connecting portion 131 is used for electrical connection to the filament power module 300, and the second connecting portion 132 extends from the through hole 113 into the insulating protective box 110 for electrical connection with the adapter copper busbar 120. The overlapping copper busbar 130 and the adapter copper busbar 120 achieve a reliable electrical connection between the filament power module 300 and the cathode lead-out terminal 210 of the magnetron 200, while also facilitating maintenance and replacement.

[0041] like Figure 4 As shown, the cathode lead-out end 210 is constructed as a ring terminal to facilitate connection with the adapter copper busbar 120. The adapter copper busbar 120 is provided with a first connection hole 121. Figure 5 As shown, the insulating protective box 110 is provided with a first slotted hole 114. The adapter copper busbar 120 is fixed to the insulating protective box 110 and the cathode lead-out end 210 through fasteners, the first connecting hole 121, and the first slotted hole 114. This connection method ensures a stable connection between the insulating protective box 110, the adapter copper busbar 120, and the cathode lead-out end 210, achieving a reliable electrical connection. At the same time, the design of the first slotted hole 114 provides a certain adjustment space, facilitating fine-tuning of the position during installation and reducing the installation difficulty during the assembly of the microwave head 10. The fasteners can be threaded fasteners.

[0042] Continue to refer to Figure 4 The adapter copper busbar 120 is also provided with a second strip hole 122, and the insulating protective box 110 is provided with a second connection hole 115. The adapter copper busbar 120 is fixedly connected to the insulating protective box 110 through fasteners, the second connection hole 115, and the second strip hole 122. This connection structure enhances the fixed stability between the adapter copper busbar 120 and the insulating protective box 110, preventing the connection from loosening due to vibration or external force during use.

[0043] like Figure 4 and Figure 7As shown, the adapter copper busbar 120 is also provided with a third slotted hole 123. The second connecting part 132 of the overlapping copper busbar 130 is provided with a third connecting hole 133. The adapter copper busbar 120 is connected and fixed to the second connecting part 132 through fasteners, the third connecting hole 133, and the third slotted hole 123. This connection method ensures a reliable electrical connection between the adapter copper busbar 120 and the overlapping copper busbar 130. At the same time, the design of the third slotted hole 123 provides flexibility for installation and adjustment, reducing the process requirements for assembly.

[0044] like Figure 2 and Figure 3 As shown, the insulating protective box 110 includes a box body 111 and a protective cover 112. The box body 111 is detachably connected to the mounting housing 400, and the protective cover 112 is detachably connected to the box body 111. The detachable connection can be, for example, via threaded fasteners. (See reference...) Figure 5 The housing 111 has multiple connection holes for connecting the protective cover 112 and fixing it to the mounting shell 400 of the microwave head 10. This detachable design facilitates installation, maintenance, and repair of internal components, thus improving the product's maintainability.

[0045] like Figure 4 , Figure 5 and Figure 6 As shown, a mounting groove 116 is provided on the side of the housing 111 facing the magnetron 200, and the cathode lead-out end 210 of the magnetron 200 extends into the housing 111 through the mounting groove 116. The design of the mounting groove 116 facilitates the positioning and installation of the cathode lead-out end 210. See also Figure 2 In the illustrated embodiment, the filament power module 300 is located below the cathode lead-out end 210, therefore the through hole 113 is located at the bottom of the housing 111. The through hole 113 at the bottom provides a channel for the second connection portion 132 of the overlapping copper busbar 130 to enter the interior of the insulating protective housing 110. It can be understood that the position of the through hole 113 can be adjusted accordingly for other mounting methods of the filament power module 300.

[0046] The cathode lead-out terminal 210 has two terminals (positive and negative), and correspondingly, the connecting copper busbar 130 and the transition copper busbar 120 each have two terminals. For example... Figure 5 and Figure 6 As shown, the insulating protective box 110 also includes an insulating partition 117, which is disposed inside the insulating protective box 110 to divide the internal space of the insulating protective box 110 into a first zone and a second zone. Figures 4 to 6 As shown, the insulating partition 117 is located between the two first strip-shaped holes 114; the insulating partition 117 improves the insulation isolation effect between the two cathode leads 210; similarly, referring to... Figure 4Two connecting copper busbars 120 are spaced apart at a predetermined distance and are set inside the insulating protective box 110 and the box body 111 (two third strip holes 123 are spaced apart); this prevents arc discharge at each high-voltage connection position of the high-voltage connection assembly and improves the safety and stability of the entire connection assembly.

[0047] In a preferred embodiment, the insulating protective box 110 is made of polytetrafluoroethylene (PTFE). PTFE has excellent insulation properties, high-temperature resistance, and chemical stability, enabling it to maintain good insulation and structural stability in the high-voltage and high-temperature operating environment of the microwave head 10, effectively preventing leakage and short circuits.

[0048] like Figure 1 , Figure 2 , Figure 3 and Figure 7 As shown, the high-voltage connection assembly 100 is installed inside the mounting housing 400 of the microwave head 10. Through the adapter copper busbar 120 and the overlapping copper busbar 130, the cathode lead 210 of the magnetron 200 is reliably connected to the filament power module 300, achieving a safe connection of the high-voltage circuit. The entire connection assembly is compact, easy to install, and simple to maintain, effectively improving the safety and reliability of the microwave head 10.

[0049] This utility model also provides a microwave head 10, such as Figures 1 to 7 As shown, a microwave head 10 according to a preferred embodiment of the present invention includes a mounting shell 400, a magnetron 200 and a filament power control module 300, wherein the magnetron 200 and the filament power control module are located inside the mounting shell 400.

[0050] The microwave head 10 also includes a high-voltage connection assembly 100, the structure of which is the same as that described above. Specifically, refer to... Figures 2 to 7 The high-voltage connection assembly 100 includes an insulating protective box 110, an adapter copper busbar 120, and a connecting copper busbar 130. The insulating protective box 110 is fixedly connected to the mounting housing 400. The cathode lead-out end 210 of the magnetron 200 is located inside the insulating protective box 110, and the filament power module 300 is located outside the insulating protective box 110. The insulating protective box 110 is provided with a through hole 113.

[0051] like Figure 3 and Figure 4 As shown, the adapter copper busbar 120 is located inside the insulating protective box 110 and is electrically connected to the cathode lead 210 of the magnetron 200. Figure 2 , Figure 4 and Figure 7As shown, the connecting copper busbar 130 has a first connecting part 131 and a second connecting part 132. The first connecting part 131 is electrically connected to the filament power module 300, and the second connecting part 132 extends from the through hole 113 into the insulating protective box 110 to be electrically connected to the adapter copper busbar 120.

[0052] The microwave head 10 achieves a safe and reliable connection between the cathode lead 210 of the magnetron 200 and the filament power module 300 through the high-voltage connection assembly 100. The insulating protective box 110 of the high-voltage connection assembly 100 effectively isolates the high-voltage connection components, improving the safety of the microwave head 10. Simultaneously, the detachable design of the high-voltage connection assembly 100 facilitates the maintenance and repair of the microwave head 10, improving the product's maintainability.

[0053] In this embodiment, the mounting shell 400 of the microwave head 10 is made of metal, providing excellent electromagnetic shielding and effectively preventing microwave leakage. The magnetron 200 is mounted on one side inside the mounting shell 400, and the filament power module 300 is mounted on the other side. The two are electrically connected via a high-voltage connection assembly 100, forming a complete microwave generating system. The output port 410 of the microwave head 10 is located on the mounting shell 400 and connected to the magnetron 200. The mounting shell 400 has a heat dissipation hole 420 near the magnetron 200 (see...). Figure 1 and Figure 2 ).

[0054] The microwave head 10 has a compact structure, is easy to install and maintain. The application of the high-voltage connection component 100 effectively improves the safety and reliability of the microwave head 10. It is suitable for various equipment that requires microwave heating, such as MPCVD devices and plasma generators.

[0055] A third aspect of this utility model also discloses a microwave generating device, which includes a microwave power supply (not shown) and a microwave head 10. The microwave power supply is electrically connected to the microwave head 10 to provide power to the microwave head 10.

[0056] The structure of the microwave head 10 is the same as that described above. The microwave head 10 includes a mounting housing 400, a magnetron 200, and a filament power module 300, with the magnetron 200 and filament power module located within the mounting housing 400. The microwave head 10 also includes a high-voltage connection assembly 100, which includes an insulating protective box 110, a connecting copper busbar 120, and a connecting copper busbar 130. The insulating protective box 110 is fixedly connected to the mounting housing 400. The cathode lead 210 of the magnetron 200 is located inside the insulating protective box 110, and the filament power module 300 is located outside the insulating protective box 110. The insulating protective box 110 has a through hole 113. The connecting copper busbar 120 is located inside the insulating protective box 110 and is electrically connected to the cathode lead 210 of the magnetron 200. The connecting copper busbar 130 has a first connecting part 131 and a second connecting part 132. The first connecting part 131 is electrically connected to the filament power module 300, and the second connecting part 132 extends from the through hole 113 into the insulating protective box 110 to be electrically connected to the adapter copper busbar 120.

[0057] The microwave generator achieves stable microwave energy output through the coordinated operation of the microwave power supply and the microwave head 10. The microwave power supply provides the necessary electrical energy to the microwave head 10, and the magnetron 200 in the microwave head 10 converts the electrical energy into microwave energy. The high-voltage connection assembly 100 ensures a safe and reliable connection between the cathode lead 210 of the magnetron 200 and the filament power module 300, effectively improving the safety of the microwave generator.

[0058] In some implementations, the microwave power supply can be integrated with the magnetron within the mounting housing.

[0059] In this embodiment, the microwave power supply is electrically connected to the microwave head 10 via a cable. The microwave power supply is responsible for providing stable power to the microwave head 10, ensuring that the magnetron 200 can work normally and generate microwaves.

[0060] For example, the microwave power supply may contain a voltage regulation circuit and a protection circuit, which can automatically adjust the output voltage according to the operating status of the microwave head 10 and cut off the power supply in time in case of abnormality, thus protecting the safe operation of the microwave generator. The connection between the microwave power supply and the microwave head 10 uses a waterproof connector to ensure a reliable connection and facilitate maintenance.

[0061] Unless otherwise defined, the technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein is for descriptive purposes only and is not intended to limit the scope of the invention. Terms such as “set” appearing herein can refer to either a component being directly attached to another component or a component being attached to another component via an intermediary. A feature described in one embodiment may be applied, alone or in combination with other features, to another embodiment, unless that feature is not applicable in that other embodiment or is otherwise stated.

[0062] This utility model has been described through the above embodiments. However, it should be understood that the above embodiments are for illustrative purposes only and are not intended to limit this utility model to the described embodiments. Those skilled in the art will understand that many more variations and modifications can be made based on the teachings of this utility model, and all such variations and modifications fall within the scope of protection claimed by this utility model.

Claims

1. A high-voltage connection assembly for connecting the cathode lead of a magnetron in a microwave head to a filament power supply module, the microwave head comprising a mounting housing, the magnetron and the filament power supply module being located within the mounting housing, characterized in that, The high-voltage connection assembly includes: An insulating protective box is fixedly connected to the mounting shell. The cathode lead-out end is located inside the insulating protective box, and the filament power module is located outside the insulating protective box. The insulating protective box is provided with a through hole. A transition copper busbar, located inside the insulating protective box and electrically connected to the cathode lead of the magnetron; and The overlapping copper busbar has a first connecting part and a second connecting part. The first connecting part is electrically connected to the filament power module, and the second connecting part extends from the through hole into the insulating protective box to be electrically connected to the adapter copper busbar.

2. The high-voltage connection assembly according to claim 1, characterized in that, The adapter copper busbar is also provided with a first connection hole, and the insulating protective box is provided with a first strip hole. The adapter copper busbar is fixed to the insulating protective box and the cathode lead-out end by fasteners, the first connection hole and the first strip hole.

3. The high-voltage connection assembly according to claim 2, characterized in that, The adapter copper busbar is provided with a second strip-shaped hole, and the insulating protective box is provided with a second connecting hole. The adapter copper busbar is fixedly connected to the insulating protective box through fasteners, the second connecting hole, and the second strip-shaped hole.

4. The high-voltage connection assembly according to claim 3, characterized in that, The adapter copper busbar is also provided with a third strip hole, and the second connecting part is provided with a third connecting hole. The adapter copper busbar is fixedly connected to the second connecting part of the overlapping copper busbar through fasteners, the third connecting hole and the third strip hole.

5. The high-voltage connection assembly according to any one of claims 1 to 4, characterized in that, The insulating protective box includes a box body and a protective cover, the box body being detachably connected to the mounting shell, and the protective cover being detachably connected to the box body.

6. The high-voltage connection assembly according to claim 5, characterized in that, The housing has a mounting groove on the side facing the magnetron, and the cathode lead of the magnetron extends into the housing from the mounting groove; and / or The bottom of the box is provided with the through hole.

7. The high-voltage connection assembly according to claim 5, characterized in that, The cathode has two leads; The insulating protective box also includes an insulating partition, which is disposed inside the insulating protective box and divides the internal space of the insulating protective box into a first area and a second area to separate the two cathode leads.

8. The high-voltage connection assembly according to claim 7, characterized in that, The insulating protective box is made of polytetrafluoroethylene.

9. A microwave head, characterized in that, The microwave head includes a mounting housing, a magnetron, and a filament power module, wherein the magnetron and the filament power module are located within the mounting housing, and the microwave head further includes a high-voltage connection assembly according to any one of claims 1 to 8.

10. A microwave generator, characterized in that, The microwave generator includes a microwave power supply and a microwave head according to claim 9, wherein the microwave power supply is electrically connected to the microwave head.

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