A multifunctional microwave plasma reactor device
CN224388753UActive Publication Date: 2026-06-23QINGDAO MAIWEI MICROWAVE CHEM EQUIP CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- QINGDAO MAIWEI MICROWAVE CHEM EQUIP CO LTD
- Filing Date
- 2025-07-10
- Publication Date
- 2026-06-23
AI Technical Summary
Technical Problem
Existing microwave plasma reactors can only generate plasma at one temperature, which is a single function and cannot meet the needs of different materials for plasma treatment at different temperatures.
Method used
Design a multifunctional microwave plasma reactor, comprising a first microwave reactor and a second microwave reactor, for generating low-temperature and high-temperature plasmas respectively, and achieving the generation of plasmas at different temperatures through different waveguide structures and needle designs.
Benefits of technology
It enables the selective generation of low-temperature or high-temperature plasma according to material requirements, meeting the processing needs of different materials and achieving multifunctional plasma treatment.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224388753U_ABST
Abstract
The utility model discloses a kind of multifunctional microwave plasma reactor devices, including: body;First microwave reactor includes: microwave resonant cavity;First quartz tube, through microwave resonant cavity setting, including first reaction tube section;First needle body, be arranged in first reaction tube section, set multiple;Flat waveguide, with microwave resonant cavity communication;Second microwave reactor, including: cooling jacket;Compression waveguide, insert mounting to cooling jacket and be connected fixedly with it;Second quartz tube, through compression waveguide insert mounting cooling jacket, including second reaction tube section;Base member, assembly to second quartz tube section, its inside is formed with air inlet channel;Second needle body, be arranged on base member, tip end is inserted into second reaction tube section;Microwave generating device is provided with interface component, interface component optionally with flat waveguide or compression waveguide connection.The utility model's multifunctional microwave plasma reactor device can satisfy the need different material processing demand.
Need to check novelty before this filing date? Find Prior Art