A device for preventing the clogging of cooling circulating water

Abstract

The utility model discloses a device that prevents cooling circulating water from being blocked, which comprises a box, the box is divided into a filtering cavity and a water storage cavity by a filter screen, a water inlet assembly is connected to the box, the water inlet assembly comprises a first water inlet pipe, a second water inlet pipe is connected to the first water inlet pipe, the water outlet end of the first water inlet pipe is located in the filtering cavity, and a first valve is arranged on the first water inlet pipe, the water outlet end of the second water inlet pipe is located in the water storage cavity, and a second valve is arranged on the second water inlet pipe. Compared with the prior art, the second water inlet pipe of the utility model can deliver cooling water into the water storage cavity. At this time, the cooling water in the water storage cavity will flow into the filtering cavity through the filter screen, so that the cooling water flows through the filter screen in reverse, thereby washing away the impurities adhered to the filter screen in reverse, cleaning the filter screen, and reducing the workload.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer equipment technology, and in particular to a device for preventing blockage of cooling circulating water. Background Technology

[0002] In the semiconductor wafer manufacturing industry, advanced equipment such as wafer measurement and inspection in FAB plants are usually equipped with cooling circulating water systems. These systems transfer and release the heat generated during equipment operation or process through the circulation of water, thereby maintaining stable system temperature and are an important part of ensuring normal equipment operation.

[0003] However, as the cooling water circulates for extended periods, its quality gradually deteriorates. Impurities in the water tend to accumulate in the internal circulation pipes of the equipment, leading to blockages. This not only affects the cooling system's heat dissipation efficiency but can also cause equipment malfunctions, even requiring shutdowns for pipe cleaning, increasing equipment maintenance costs and the risk of production interruptions.

[0004] To address these issues, existing technologies typically involve installing a pre-filter between the internal circulating water end of the equipment and the plant's circulating water end to filter impurities from the cooling water. However, traditional filters accumulate impurities on the filter screen over long-term use, sometimes clogging the filter pores. Therefore, personnel need to periodically open the filter and manually clean the filter screen, increasing workload. Utility Model Content

[0005] The main purpose of this utility model is to provide a device to prevent the cooling water circulation from getting clogged. The second water inlet pipe can transport cooling water to the water storage chamber. At this time, the cooling water in the water storage chamber will flow into the filter chamber through the filter screen, so that the cooling water flows back through the filter screen and washes away the impurities adhering to the filter screen in reverse to clean the filter screen.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A device for preventing blockage of cooling circulating water includes a housing, the housing being divided into a filtration chamber and a water storage chamber by a filter screen, and a water inlet assembly connected to the housing. The water inlet assembly includes a first water inlet pipe and a second water inlet pipe connected to the first water inlet pipe. The outlet end of the first water inlet pipe is located in the filtration chamber and a first valve is provided on the first water inlet pipe. The outlet end of the second water inlet pipe is located in the water storage chamber and a second valve is provided on the second water inlet pipe.

[0008] Furthermore, a water pressure regulator is installed on the second water inlet pipe.

[0009] Furthermore, a water spray pipe is fixed inside the water storage chamber, with the spray nozzle of the water spray pipe pointing towards the filter screen, and the outlet end of the second water inlet pipe is fixedly connected to the water spray pipe.

[0010] Furthermore, a first water outlet pipe is installed on the housing, and the inlet end of the first water outlet pipe is located inside the water storage chamber.

[0011] Furthermore, a second water outlet pipe is also installed on the housing, and a third valve is installed on the second water outlet pipe.

[0012] Furthermore, a fourth valve is installed on the first water outlet pipe.

[0013] Furthermore, a cover plate is provided on the top of the box.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] The second water inlet pipe of this utility model can deliver cooling water to the water storage chamber. At this time, the cooling water in the water storage chamber will flow into the filter chamber through the filter screen, so that the cooling water flows back through the filter screen, thereby washing away the impurities adhering to the filter screen and cleaning the filter screen. This eliminates the need for personnel to open the box and manually clean the filter screen, reducing the workload.

[0016] The spray nozzle of this utility model is directed towards the filter screen. Therefore, when the second water inlet pipe delivers cooling water to the spray pipe, the spray pipe can spray the cooling water onto the filter screen. Furthermore, the water flow sprayed from the spray pipe has a certain impact force under the action of the water pressure regulator, thereby washing away the impurities adhering to the filter screen and improving the cleaning quality of the filter screen.

[0017] When the third valve of this utility model is opened, impurities inside the box can be mixed with cooling water and discharged through the second outlet pipe. Attached Figure Description

[0018] Figure 1 This is a top view of the device for preventing blockage of cooling circulating water according to the present invention.

[0019] Figure 2 This is a front view schematic diagram of a device for preventing blockage of cooling circulating water according to the present invention.

[0020] Figure 3 This is a schematic diagram of the housing, cover plate, and filter screen of a device for preventing blockage of cooling circulating water according to this utility model.

[0021] In the diagram: 1. Housing; 2. Filter screen; 3. Water inlet assembly; 301. Second water inlet pipe; 302. Water pressure regulator; 303. Second valve; 304. First valve; 305. First water inlet pipe; 4. Spray pipe; 5. Water storage chamber; 6. Filter chamber; 7. Fourth valve; 8. First water outlet pipe; 9. Second water outlet pipe; 10. Third valve; 11. Cover plate. Detailed Implementation

[0022] The present invention will now be described in detail with reference to the accompanying drawings.

[0023] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. Example 1

[0026] like Figure 1-3 As shown, a device for preventing blockage of cooling circulating water includes a housing 1. The housing 1 is divided into a filter chamber 6 and a water storage chamber 5 by a filter screen 2. A water inlet assembly 3 is connected to the housing 1. The water inlet assembly 3 includes a first water inlet pipe 305 and a second water inlet pipe 301 connected to the first water inlet pipe 305. The outlet end of the first water inlet pipe 305 is located in the filter chamber 6 and a first valve 304 is provided on the first water inlet pipe 305. The outlet end of the second water inlet pipe 301 is located in the water storage chamber 5 and a second valve 303 is provided on the second water inlet pipe 301. A first water outlet pipe 8 is installed on the housing 1. The inlet end of the first water outlet pipe 8 is located in the water storage chamber 5 and a fourth valve 7 is provided on the first water outlet pipe 8. The fourth valve 7 can control the opening and closing of the first water outlet pipe 8. A cover plate 11 is provided on the top of the housing 1.

[0027] In this embodiment, such as Figure 1 As shown, the inlet end of the first water inlet pipe 305 is connected to the cooling water tank, and the first water outlet pipe 8 is connected to the water pump of the cooling unit inside the equipment. When cooling the equipment, the cooling water tank delivers cooling water to the first water inlet pipe 305 through its own pump. At this time, the first valve 304 is open and the second valve 303 is closed, so the cooling water enters the filter chamber 6. Since the cooling water flows, it flows through the filter screen 2 into the water storage chamber 5. During this process, the filter screen 2 can intercept impurities in the cooling water, thereby ensuring that impurities do not enter the water storage chamber 5. Therefore, when the water pump of the cooling unit can input the filtered cooling water in the water storage chamber 5 into the equipment for cooling, impurities are prevented from clogging the water pipes.

[0028] When it is necessary to clean the filter screen 2, the personnel drain the box 1 through the first water outlet pipe 8, then close the first valve 304 and open the second valve 303. At this time, the cooling water in the cooling pool will be transported to the water storage chamber 5 through the second water inlet pipe 301. The cooling water in the water storage chamber 5 will flow into the filter chamber 6 through the filter screen 2, so that the cooling water flows in reverse through the filter surface of the filter screen 2, thereby washing away the impurities adhering to the filter screen 2 and cleaning the filter screen 2.

[0029] like Figure 2 As shown, a second water outlet pipe 9 is also installed on the housing 1, and a third valve 10 is installed on the second water outlet pipe 9. When cleaning the filter screen 2, the third valve 10 can be opened, so that the impurities in the housing 1 can be mixed with the cooling water and discharged through the second water outlet pipe 9.

[0030] When the cooling water from the cooling pool enters the water storage chamber 5 directly, although the cooling water is not filtered, the amount of cooling water directly injected into the water storage chamber 5 is small, so the impurities are also small and can be ignored. In the subsequent cooling water circulation process, these impurities will be mixed with the cooling water and re-enter the filter chamber 6 for filtration to avoid clogging the pipes. Example 2

[0031] Based on Example 1, such as Figure 1 As shown, a water pressure regulator 302 is installed on the second water inlet pipe 301, and a water spray pipe 4 is fixed inside the water storage chamber 5. The spray nozzle of the water spray pipe 4 points towards the filter screen 2. The outlet end of the second water inlet pipe 301 is fixedly connected to the water spray pipe 4. The second water inlet pipe 301 can transport cooling water to the water spray pipe 4, so that the water spray pipe 4 sprays cooling water onto the filter screen 2. Furthermore, the water flow sprayed out by the water spray pipe 4 has a certain impact force under the action of the water pressure regulator 302, thereby washing away the impurities adhering to the filter screen 2.

[0032] Working principle: The inlet end of the first inlet pipe 305 is connected to the cooling water tank, and the first outlet pipe 8 is connected to the water pump of the internal cooling unit. The cooling water tank delivers cooling water to the first inlet pipe 305 through its own pump. At this time, the first valve 304 is open and the second valve 303 is closed, so the cooling water enters the filter chamber 6. Since the cooling water flows, it flows through the filter screen 2 into the water storage chamber 5. During this process, the filter screen 2 can intercept impurities in the cooling water, thus ensuring that impurities do not enter the water storage chamber 5. Therefore, when the water pump of the cooling unit... The system can input filtered cooling water from the water storage chamber 5 into the equipment for cooling, thereby preventing impurities from clogging the water pipes. When it is necessary to clean the filter screen 2, personnel drain the box 1 through the first outlet pipe 8, then close the first valve 304 and open the second valve 303. At this time, the cooling water from the cooling pool will be transported to the water storage chamber 5 through the second inlet pipe 301. The cooling water in the water storage chamber 5 will then flow into the filter chamber 6 through the filter screen 2, thereby causing the cooling water to flow in reverse through the filter screen 2, thus washing away the impurities adhering to the filter screen 2 and cleaning the filter screen 2.

[0033] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent transformations or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A device for preventing blockage of cooling circulating water, comprising a housing (1), characterized in that: The housing (1) is divided into a filter chamber (6) and a water storage chamber (5) by a filter screen (2). A water inlet assembly (3) is connected to the housing (1). The water inlet assembly (3) includes a first water inlet pipe (305) and a second water inlet pipe (301) connected to the first water inlet pipe (305). The outlet end of the first water inlet pipe (305) is located in the filter chamber (6) and a first valve (304) is provided on the first water inlet pipe (305). The outlet end of the second water inlet pipe (301) is located in the water storage chamber (5) and a second valve (303) is provided on the second water inlet pipe (301).

2. The device for preventing blockage of cooling circulating water according to claim 1, characterized in that: A water pressure regulator (302) is installed on the second water inlet pipe (301).

3. The device for preventing blockage of cooling circulating water according to claim 2, characterized in that: A water spray pipe (4) is fixed inside the water storage chamber (5). The spray nozzle of the water spray pipe (4) points to the filter screen (2). The outlet of the second water inlet pipe (301) is fixedly connected to the water spray pipe (4).

4. The device for preventing blockage of cooling circulating water according to claim 1, characterized in that: The first water outlet pipe (8) is installed on the box (1), and the water inlet end of the first water outlet pipe (8) is located in the water storage chamber (5).

5. The device for preventing blockage of cooling circulating water according to claim 1, characterized in that: The box (1) is also equipped with a second water outlet pipe (9), and a third valve (10) is installed on the second water outlet pipe (9).

6. The device for preventing blockage of cooling circulating water according to claim 4, characterized in that: A fourth valve (7) is installed on the first water outlet pipe (8).

7. The device for preventing blockage of cooling circulating water according to claim 1, characterized in that: The top of the box (1) is provided with a cover plate (11).

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