High-low temperature air generating device for chip testing

By designing the inlet pipe, outlet pipe, throttle valve, and vortex tube, and combining them with the real-time control of the flow channel temperature sensing element, the problem of heat exchange and temperature fluctuation between high-temperature or low-temperature gases and the outside environment in the gas storage cylinder is solved, thus achieving accurate and reliable control of the chip testing environment.

CN224415416UActive Publication Date: 2026-06-26SHENZHEN GRAND INNOSYS CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHENZHEN GRAND INNOSYS CORP
Filing Date
2025-07-01
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

High-temperature or low-temperature gases are prone to heat exchange with the outside environment inside the gas storage cylinder, and the instantaneous pressure change of the gas output causes large temperature fluctuations, making it impossible to guarantee the accuracy and reliability of the chip testing environment temperature.

Method used

The design incorporates an inlet pipe, an outlet pipe, a first branch pipe, a second branch pipe, a first throttle valve, a second throttle valve, an air heater, a vortex tube, and a flow channel temperature sensing element. The controller controls the gas temperature and flow rate in real time, achieving a stable output of high-temperature or low-temperature air and avoiding heat exchange and temperature fluctuations.

Benefits of technology

It achieves accurate and reliable control of the chip testing environment temperature, avoids heat exchange during high-temperature or low-temperature gas storage, and ensures the stability and reliability of the testing environment.

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Abstract

The utility model relates to chip testing technical field discloses a high and low temperature air generating device for chip test, including air inlet pipe, air outlet pipe, first branch pipe, second branch pipe, first throttle valve, second throttle valve, air heater, vortex tube and flow channel temperature sensing element, first branch pipe, second branch pipe are in parallel and are established between air inlet pipe and air outlet pipe, the end of air inlet pipe is equipped with gas source interface, first throttle valve and air heater are connected in first branch pipe in proper order, second throttle valve and vortex tube are connected in second branch pipe in proper order, vortex tube has air inlet interface and cold gas interface and is connected with second branch pipe respectively, the end of air outlet pipe is equipped with test seat interface, and flow channel temperature sensing element is installed in air outlet pipe close to test seat interface, controller is connected with first throttle valve, second throttle valve, air heater and flow channel temperature sensing element electricity respectively. The parallel arrangement of double branch roads can convert pressure gas source into high temperature air or low temperature air, and the accurate reliable of chip test environment temperature is ensured.
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