A carrier table for 12-inch wafer boxes

By designing a 12-inch wafer cassette carrier with three-point positioning pins and multiple sensors, the problem of inaccurate wafer cassette positioning in automated handling was solved, achieving stable positioning and multiple detections to ensure correct placement. The sensors can be quickly replaced and their positions adjusted.

CN224419246UActive Publication Date: 2026-06-26SHANGHAI GECHUANGWEISHENG INTELLIGENT TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI GECHUANGWEISHENG INTELLIGENT TECH CO LTD
Filing Date
2023-11-22
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

In the current automated handling process of 12-inch wafer cassettes, the gripper equipment cannot accurately detect whether the wafer cassette is clamped in place, and uneven placement of the wafer cassette can easily lead to gripping misalignment.

Method used

A support platform comprising a planar support plate and three-point positioning pins was designed, equipped with photoelectric sensors and a mounting sensor to detect the placement status of the wafer cassette, and connected to external devices through precision holes to enable quick replacement and position adjustment.

Benefits of technology

It achieves stable positioning of the wafer cassette, multiple detection confirmations to ensure correct placement, and the support platform structure is stable, easy to install, and the sensors can be quickly replaced and their positions are adjustable.

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Abstract

The utility model provides a kind of bearing platform for 12 inch wafer box, solve the problem that conventional bearing platform only provides supporting effect, cannot detect whether wafer box is clamped in place, its main scheme includes: planar support plate, three-point positioning pin is protruded thereon, the positioning pin height is not less than 12mm and every two adjacent positioning pin hole distance is consistent, the top end of the positioning pin is circular table and the center of circular table is point-like plane, the plane is extruded contact with external wafer box bottom surface, the support plate center is also fixed with photoelectric sensor, the photoelectric sensor at least includes two and is distributed in staggered, the support plate both sides are also symmetrically provided with seat sensor, the support plate one end is trapezoidal opening structure, the other end is also vertically fixed with mounting plate, the mounting plate is fixedly installed with terminal platform, the photoelectric sensor and the seat sensor are electrically connected with the terminal platform.
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