A purification device
By designing a purification device that combines a robotic arm and an ultrasonic dust removal head with positive and negative pressure closed-loop airflow, the problem of dust and foreign matter affecting the electronic packaging process has been solved, improving product yield and stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CERAMIC GOLD TECHNOLOGY (DENGFENG) CO LTD
- Filing Date
- 2025-07-31
- Publication Date
- 2026-06-30
AI Technical Summary
In the existing electronic packaging process, fine dust and foreign objects are easily generated on the product before and after fine-tuning, resulting in poor product stability, substandard performance, and affecting the processing yield.
The system employs a purification device, including a feeding hopper, a dust removal platform, and a dust removal chamber. Products are transported to the dust removal chamber via a robotic arm, and combined with an ultrasonic dust removal head and a positive and negative pressure closed-loop airflow environment, contactless dust removal is achieved.
It effectively removes dust and foreign objects from products, improves product yield, enhances cleaning efficiency, and ensures product stability and performance.
Smart Images
Figure CN224423714U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of wafer manufacturing equipment technology, specifically to a purification device. Background Technology
[0002] In existing electronic packaging processes, during the pre-fine-tuning stages, foreign objects or fine dust invisible to the naked eye can fall into the internal and external structures of the product, leading to poor product stability and substandard performance. Furthermore, during the fine-tuning process, residual dust may remain on the silver surface after ion etching; these foreign objects also negatively impact process stability and yield. Utility Model Content
[0003] The purpose of this application is to provide a purification device that fulfills the function of cleaning foreign objects from products, enhances the removal efficiency, and improves product yield.
[0004] One aspect of this application provides a purification device, including a feeding hopper, a dust removal platform, and a dust removal chamber arranged sequentially. The dust removal platform is connected to a conveyor belt. A robotic arm is installed between the feeding hopper and the dust removal platform. The robotic arm transfers the product from the feeding hopper to the dust removal platform. The conveyor belt transports the dust removal platform and the product to the area below the dust removal chamber. The dust removal chamber is equipped with an ultrasonic dust removal head and a dust collector for forming a positive and negative pressure closed-loop airflow environment within the dust removal chamber, for dust removal of the product.
[0005] Optionally, the device also includes a dust removal fixture, which has a hollowed-out area that corresponds to and is connected to the area of the product to be dusted. The conveyor belt transports the product to the bottom of the dust removal chamber, and the ultrasonic dust removal head removes dust from the area of the product to be dusted through the hollowed-out area of the dust removal fixture.
[0006] Optionally, nitrogen gas at a pressure of 0.2 MPa to 1.0 MPa is installed inside the dust collector to blow into the dust collection chamber, so as to generate ultrasonic energy in the ultrasonic dust removal head to vibrate and remove dust from the product.
[0007] Optionally, a sensor is also provided inside the dust removal chamber to detect the product arriving at the dust removal chamber.
[0008] Optionally, there are two feeding hoppers and two dust removal platforms, with the two dust removal platforms and the two feeding hoppers arranged side by side; it also includes a translation component arranged along the side-by-side direction, with the dust removal hopper connected to the translation component for moving the dust removal hopper and docking the dust removal hopper with the dust removal platforms in different rows.
[0009] Optionally, the feeding hopper is provided with multiple clamping posts, and the multiple clamping posts form a receiving cavity for positioning the product.
[0010] Optionally, the robotic arm is also connected to a lifting mechanism, which drives the robotic arm to rise and fall to a position corresponding to the loading bin and the dust removal platform, so that the robotic arm can easily pick up and put down the product.
[0011] Optionally, a limiting mold is provided on the dust removal platform, and the robotic arm places the product in the limiting mold to position the product.
[0012] Optionally, the gripping end of the robotic arm is a V-shaped end.
[0013] Optionally, it also includes a control unit, which is electrically connected to the robotic arm, the conveyor belt, the ultrasonic dust removal head, and the dust collector, respectively.
[0014] The purification device provided in this application embodiment receives the product from the previous production process through the feeding hopper. The robotic arm transfers the product from the feeding hopper to the dust removal platform, and then the dust removal platform and the product are conveyed to the bottom of the dust removal hopper by the conveyor belt. The dust removal hopper has a closed-loop airflow environment with positive and negative pressure, combined with ultrasonic non-contact dust removal, which can effectively clean dust and other foreign objects on the product, enhance the cleaning efficiency, and improve the product yield. Attached Figure Description
[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0016] Figure 1 This is a schematic diagram of the purification device structure provided in the embodiments of this application;
[0017] Figure 2 This is an enlarged view of the purifier column provided in the embodiments of this application.
[0018] Icons: 100 - Feeding bin; 101 - Column clamp; 101a - Inclined surface; 110 - Dust removal platform; 120 - Robotic arm; 121 - Gripping end; 130 - Placement platform; 140 - Dust removal bin; 150 - Translation component; F - Side-by-side direction. Detailed Implementation
[0019] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.
[0020] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0021] It should also be noted that, unless otherwise explicitly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0022] Please refer to Figure 1 As shown in the figure, this application embodiment provides a purification device, including: a feeding hopper 100, a dust removal platform 110 and a dust removal chamber 140 arranged in sequence. The dust removal platform 110 is connected to a conveyor belt. A robot arm 120 is arranged between the feeding hopper 100 and the dust removal platform 110. The robot arm 120 transfers the product on the feeding hopper 100 to the dust removal platform 110. The conveyor belt transports the dust removal platform 110 and the product to the area below the dust removal chamber 140. The dust removal chamber 140 is equipped with an ultrasonic dust removal head and a dust collector for forming a positive and negative pressure closed-loop airflow environment in the dust removal chamber 140 for dust removal of the product.
[0023] The feeding bin 100, robotic arm 120, dust removal platform 110, and dust removal bin 140 are arranged in sequence. The feeding bin 100 is used to receive the products from the previous production process. The robotic arm 120 transfers the products from the feeding bin 100 to the dust removal platform 110. Then, the dust removal platform 110 and the products are conveyed to the bottom of the dust removal bin 140 by a conveyor belt. The dust removal bin 140 has a closed-loop airflow environment with positive and negative pressure, combined with ultrasonic non-contact dust removal, which can effectively clean dust and other foreign objects on the products, enhance the cleaning efficiency, and improve the product yield.
[0024] Furthermore, it also includes a dust removal fixture, which is set inside the dust removal chamber 140. The dust removal fixture has a hollow area that corresponds to and is connected to the area of the product to be dusted. The conveyor belt transports the product to the bottom of the dust removal chamber 140, and the ultrasonic dust removal head removes dust from the area of the product to be dusted through the hollow area of the dust removal fixture.
[0025] A dust removal fixture is placed on the product, with its perforated area exposing the area to be dusted and its non-perforated area concealing the non-dust-removing areas. This effectively isolates the areas to be dusted from the non-dust-removing areas. During dust removal, the area to be dusted is cleaned through the perforated area of the fixture, allowing for precise positioning of the dust-removing area.
[0026] During the dust removal process, nitrogen gas with a pressure of 0.2 MPa to 1.0 MPa is introduced into the dust removal chamber 140 to generate ultrasonic energy in the ultrasonic dust removal head to vibrate and remove dust from the product.
[0027] The dust collector uses nitrogen gas at a pressure of 0.2 MPa to 1.0 MPa to control the sequence, intensity, and time of blowing and sucking air, thereby achieving a closed-loop airflow environment with positive and negative pressure, which enables the ultrasonic dust removal head to generate ultrasonic energy for dust removal.
[0028] In addition, sensors are installed inside the dust collection chamber 140 to detect products arriving at the chamber. This allows for advance notification of product arrival and enables the cleaning of products based on parameters such as product structure, cleaning method, cleaning frequency, and cleaning time.
[0029] For feeding, the feeding bin 100 is equipped with multiple clamping posts 101, and the multiple clamping posts 101 form a receiving groove for positioning the product.
[0030] In this application, the four corners of the feeding bin 100 are respectively provided with clamping posts 101. The four clamping posts 101 form a square accommodating cavity to accommodate the product, which serves to limit the product and prevent the product from shifting during the lifting and lowering process, thus preventing the robot arm 120 from accurately grasping the product.
[0031] Among them, such as Figure 2 As shown, the card post 101 is provided with an inclined surface 101a. The inclined surface 101a can guide the product into the receiving cavity of the feeding bin 100, so that the product can fall into the receiving cavity accurately and quickly.
[0032] The robotic arm 120 is also connected to a lifting mechanism, which is used to drive the robotic arm 120 to lift and lower, so that the robotic arm 120 is lifted and lowered to the position corresponding to the loading bin 100 and the dust removal platform 110, so that the robotic arm 120 can easily grab and place products.
[0033] This application uses a lifting mechanism to first raise the robotic arm 120 to the same height as the loading bin 100, which facilitates the robotic arm 120 to grab products from the loading bin 100. At the same time, the lifting motion can also move the robotic arm 120 to the same height as the dust removal platform 110, which facilitates the robotic arm 120 to place the grabbed products onto the dust removal platform 110.
[0034] In some embodiments, the lifting mechanism may be a cylinder, which drives the lifting and lowering, and has a convenient structure and high reliability.
[0035] As for the dust removal platform 110, a limiting mold, such as a limiting groove, is also provided on the dust removal platform 110. The robot arm 120 places the product in the limiting mold, which can prevent the position of the product from changing when the robot arm 120 is pulled out of the dust removal platform 110.
[0036] In addition, the gripping end 121 of the robotic arm 120 is set as a V-shaped end to reduce the contact area and friction between the robotic arm 120 and the product, so that the product can quickly detach from the robotic arm 120 and enter the limiting groove of the dust removal platform 110.
[0037] This application enables automatic control. By setting up a control unit, which is electrically connected to the robot arm 120, conveyor belt, ultrasonic dust removal head, and dust removal machine, the control unit can automatically control the movement or operation of the above components, realize the coordinated operation of products at various workstations on the production line, automatic dust removal, automatic flow, etc., and improve efficiency and automation.
[0038] This application adopts a two-line parallel approach, with two feeding bins 100 and two dust removal platforms 110, and the two dust removal platforms 110 and two feeding bins 100 are arranged side by side; it also includes a translation component 150 arranged along the parallel direction F, and the dust removal bin 140 is connected to the translation component 150 for moving the dust removal bin 140, so that the dust removal bin 140 moves along the parallel direction F to dock with the dust removal platforms 110 in different rows.
[0039] For example, Figure 1 The system includes a placement platform 130 for placing the dust collection bin 140. There are two placement platforms 130 along the parallel direction F, which are located at the rear ends of the two dust collection platforms 110 respectively. The translation component 150 can drive the dust collection bin 140 to move between the two placement platforms 130. The translation component 150 is used to adjust the position of the dust collection bin 140, which can shorten the stagnation time caused by the feeding of the two feeding bins 100, realize continuous dust removal, and improve work efficiency.
[0040] The specific method is as follows: When the sensor on the first line senses the arrival of a part, it transmits the information to the control unit. The control unit then controls the robot arm 120 on the second line to extend. For example, by sensing the position of the loading bin 100 through the sensor, the control unit controls the lifting mechanism to raise the robot arm 120 to the height corresponding to the sensor. This height is consistent with the height of the loading bin 100, which makes it convenient for the robot arm 120 to pick up a single product. The control unit controls the speed of the second conveyor belt so that when the product to be dusted on the second line arrives at the placement platform 130, the dust removal bin 140 located above the placement platform 130 is exactly above the placement platform 130 of the second line through the translation component 150 for dust removal.
[0041] In summary, the purification device provided in this application embodiment operates using the following steps:
[0042] Step S1: When the product to be cleaned is conveyed to the feeding hopper 100 by manual or automatic feeding, four locking posts 101 will be set at the bottom of the feeding hopper 100 to ensure accurate positioning and to support the product.
[0043] Step S2: After receiving a batch of products, the loading bin 100 raises the robotic arm 120 through the lifting mechanism. When the sensor inside the loading bin 100 senses the product, the control unit controls the robotic arm 120 to extend and raise it to the height corresponding to the sensor, so that the robotic arm 120 and the loading bin 100 are at the same height. The robotic arm 120 then grabs the single product to be cleared from the loading bin 100.
[0044] Step S3: After the robot arm 120 obtains the product, the control unit controls the robot arm 120 to retract and descend to directly above the dust removal platform 110, and to make full contact with the dust removal platform 110 to place the product on the dust removal platform 110.
[0045] For example, during this process, a limiting mold needs to be matched and set on the dust removal platform 110 according to the structure of the dust removal product. The limiting mold can be used to support the product and prevent the product from directly contacting the robot arm 120.
[0046] Step S4: After the robotic arm 120 places the product on the dust removal platform 110, it begins to pull it out of the dust removal platform 110 and then rises again to pull out a new product to be cleaned.
[0047] Step S5: When the robotic arm 120 picks up a new product to be cleaned, the control unit regulates the conveyor belt under the dust removal platform 110 to transport the dust removal platform 110 carrying the product to be cleaned directly under the dust removal chamber 140.
[0048] During this process, the product on the dust removal platform 110 can be precisely positioned below the dust removal fixture by using the hollow area of the dust removal fixture.
[0049] In this process, the ultrasonic dust removal head inside the dust removal chamber 140 utilizes the principle of ultrasonic vibration and positive and negative pressure closed-loop airflow to generate ultrasonic energy inside the dust removal machine outside the main body, thereby achieving non-contact dust removal.
[0050] Step S6: After the sensor in the dust collection chamber 140 detects the arrival of the product, it cleans the product according to parameters such as product structure, cleaning method, cleaning frequency, and cleaning time. The process is as follows:
[0051] (1) The dust removal fixture automatically descends within the dust removal chamber 140 and stops directly above the product to be cleaned;
[0052] (2) The dust removal fixture corresponds one-to-one with the internal cavity structure of the product to be cleaned;
[0053] (3) The dust collector uses nitrogen gas with a pressure of 0.2Mpa to 1.0Mpa to control the blowing and sucking sequence, intensity and time, so as to realize a positive and negative pressure closed-loop airflow environment, so that ultrasonic energy is generated inside the ultrasonic dust removal head and dust is removed above the dust removal fixture.
[0054] The dust removal fixtures used in the above process are dust removal hollow structures of different shapes and sizes. Their structures match the outer frame of the product to be cleaned, allowing some of the surfaces to be cleaned to be exposed, while other parts that do not need to be cleaned are isolated by non-hollow areas. This structure is suitable for mass production of bases.
[0055] The above process can also remove static electricity from the product, preventing the product from attracting foreign objects due to static electricity.
[0056] To further improve the dust removal effect, this process can perform multiple dust removals at different pressures and for different durations on products that still have poor dust removal effect after the initial dust removal, with the help of image recognition.
[0057] Step S7: The cleaned products are conveyed to the next production process via a conveyor belt controlled by the control unit.
[0058] The purification device of this application can be applied to the dust removal process of wafers to reduce the amount of dust adhering to the wafer surface during the fine-tuning etching process, and effectively remove dust from both the inside and outside of the product, eliminating residual dust and other foreign objects, avoiding the risk of product defects caused by dust removal, and reducing resource waste. On the one hand, it satisfies the need for foreign object cleaning before product fine-tuning, and on the other hand, it enhances the dust removal efficiency after fine-tuning, reduces the impact of foreign objects on the product itself, and thus improves product yield.
[0059] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.
Claims
1. A purification device, characterized in that, include: The system consists of a feeding hopper, a dust removal platform, and a dust removal chamber arranged sequentially. The dust removal platform is connected to a conveyor belt. A robotic arm is installed between the feeding hopper and the dust removal platform to transfer products from the feeding hopper to the dust removal platform. The conveyor belt then transports the dust removal platform and the products to the area below the dust removal chamber. The dust removal chamber is equipped with an ultrasonic dust removal head and a dust collector that creates a positive and negative pressure closed-loop airflow environment within the chamber to remove dust from the products.
2. The purification device according to claim 1, characterized in that, It also includes a dust removal fixture, which has a hollow area that corresponds to and is connected to the area of the product to be dusted. The conveyor belt transports the product to the bottom of the dust removal chamber, and the ultrasonic dust removal head removes dust from the area of the product to be dusted through the hollow area of the dust removal fixture.
3. The purification device according to claim 1, characterized in that, The dust collector is equipped with nitrogen gas at a pressure of 0.2 MPa to 1.0 MPa to blow into the dust collection chamber, so as to generate ultrasonic energy in the ultrasonic dust removal head to vibrate and remove dust from the product.
4. The purification device according to claim 1, characterized in that, The dust removal chamber is also equipped with sensors to detect the products arriving at the dust removal chamber.
5. The purification device according to any one of claims 1 to 4, characterized in that, There are two feeding hoppers and two dust removal platforms, with the two dust removal platforms and the two feeding hoppers arranged side by side; it also includes a translation component arranged along the side-by-side direction, with the dust removal hopper connected to the translation component for moving the dust removal hopper and docking the dust removal hopper with the dust removal platforms in different rows.
6. The purification device according to any one of claims 1 to 4, characterized in that, The feeding hopper is equipped with multiple clamping posts, and the clamping posts form a receiving cavity for positioning the product.
7. The purification device according to any one of claims 1 to 4, characterized in that, The robotic arm is also connected to a lifting mechanism, which drives the robotic arm to rise and fall to a position corresponding to the loading bin and the dust removal platform, so that the robotic arm can easily pick up and put down the product.
8. The purification device according to any one of claims 1 to 4, characterized in that, The dust removal platform is equipped with a limiting mold, and the robotic arm places the product inside the limiting mold to position the product.
9. The purification device according to any one of claims 1 to 4, characterized in that, The gripping end of the robotic arm is V-shaped.
10. The purification device according to any one of claims 1 to 4, characterized in that, It also includes a control unit, which is electrically connected to the robotic arm, the conveyor belt, the ultrasonic dust removal head, and the dust collector, respectively.