An angled dual-head sandblasting structure
By designing an angled dual-head sandblasting structure, the problem of low efficiency in the traditional single-head sandblasting process was solved, achieving efficient removal of Diffuser film, improving production efficiency and capacity, and meeting the actual needs of the CVD field.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU EPITAXY ELECTRONIC MATERIALS CO LTD
- Filing Date
- 2025-06-30
- Publication Date
- 2026-06-30
Smart Images

Figure CN224425260U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sandblasting technology, specifically to an angled double-head sandblasting structure. Background Technology
[0002] In the field of chemical vapor deposition (CVD), the diffuser plays a crucial role. Its surface quality directly determines the uniformity of gas diffusion, which in turn has a decisive impact on the quality of thin film deposition. It can be said that the performance of the diffuser largely determines the final result of the entire CVD process.
[0003] However, with increased usage time, residual film gradually forms on the surface of the diffuser. This residual film severely interferes with normal gas diffusion, directly affecting coating quality. If this residual film is not treated promptly, subsequent coating processes will struggle to achieve the desired results, potentially leading to uneven coating, poor film quality, and ultimately reducing product yield and overall quality. Therefore, to ensure stable operation of the CVD process and product quality, effective removal of contaminants and residual film from the diffuser surface is essential.
[0004] Currently, the traditional single-head blasting process is a commonly used method for removing residual film from diffusers. This process uses a single nozzle to blast and peel off the diffuser workpiece. However, due to the porous structure of the diffuser itself, to completely remove the residual film from its surface and inside the pores, blasting needs to be performed from four different angles. This process exposes many serious shortcomings of the traditional single-head blasting process:
[0005] 1. Time-consuming multi-angle positioning: Traditional single nozzles can only operate in a fixed direction. To cover the complex porous structure of the diffuser, operators need to manually adjust the blasting angle multiple times, typically requiring four adjustments. During this manual repositioning process, the equipment has to be stopped, resulting in excessive downtime.
[0006] 2. Low production efficiency: To completely remove residual film from each diffuser, 5 to 10 sandblasting operations are generally required, and each sandblasting operation takes 5 to 10 hours. Such a long processing time results in extremely low production efficiency.
[0007] 3. Quantification of Production Capacity Loss: Due to the inefficiency of traditional single-head sandblasting processes, the daily production capacity of the equipment is severely compressed. Under an 8-hour workday, the daily production capacity of each machine is only 0.4 to 0.8 pieces. Such capacity is far from meeting the requirements of mass production. For enterprises, this means failing to meet market demand, potentially missing many business opportunities, and impacting the company's economic benefits and market competitiveness.
[0008] 4. Limitations of Vertical Sandblasting: Traditional single-nozzle systems mostly employ vertical sandblasting. However, due to the funnel-shaped inner wall of the diffuser, this vertical sandblasting method cannot allow the abrasive to be sprayed vertically into the diffuser's inner wall. This results in low efficiency in removing residual film from the holes, with a residual film removal efficiency of only 85%. In other words, even after multiple sandblasting treatments, some residual film will still remain inside the holes, affecting the diffuser's performance and subsequent use.
[0009] Therefore, the traditional single-head sandblasting structure can no longer meet the actual needs of filter film stripping in the CVD field, and there is an urgent need for a more efficient and advanced sandblasting structure to solve these problems. Utility Model Content
[0010] Purpose of the utility model: In order to overcome the above shortcomings, the purpose of this utility model is to provide an angled double-head sandblasting structure. The design is reasonable. Through double-head sandblasting and multi-angle adjustment function, the number of sandblasting times and time are significantly reduced, production efficiency is greatly improved, residual film removal rate is increased, labor costs are reduced, and the application prospects are broad.
[0011] Technical solution: An angled dual-head sandblasting structure, comprising:
[0012] Sandblasting gun heads, the number of which is 2;
[0013] Sandblasting gun head base, with two sandblasting gun heads symmetrically arranged in front of the sandblasting gun head base;
[0014] A directional positioning block is provided, which is located on the left and right sides of the contact position between the sandblasting gun head and the sandblasting gun head base and is fixedly connected to the sandblasting gun head base; wherein, the sandblasting gun head is provided with a plurality of screw holes a, and the directional positioning block is provided with a plurality of screw holes b that cooperate with the screw holes a, and the sandblasting gun head and the directional positioning block are connected by gun head fixing screws.
[0015] A rotating base is located behind the sandblasting gun head base and connects the sandblasting gun head base and the sandblasting machine to assist in rotation.
[0016] The dual-head sandblasting structure described in this invention features two symmetrically arranged sandblasting heads in front of the sandblasting head base, achieving dual-head sandblasting and doubling the efficiency in a single blast. Compared to traditional single-head sandblasting structures, this significantly reduces the number of blasting passes and the time required.
[0017] Secondly, the directional positioning blocks are located on the left and right sides of the contact position between the sandblasting gun head and the sandblasting gun head base, and are fixedly connected to the sandblasting gun head base. The sandblasting gun head is connected to the directional positioning blocks by screws. This allows the sandblasting gun head to be adjusted at multiple angles, adapting to the complex porous structure of the diffuser, and reducing the number of times and time required for manual adjustment of the sandblasting angle.
[0018] Secondly, the rotating base is located behind the sandblasting gun head base, connecting the sandblasting gun head base and the sandblasting machine, and is used to assist rotation. This provides more flexibility for sandblasting operations, allowing the position and angle of the sandblasting gun head to be adjusted according to actual needs, further improving the sandblasting effect on different parts of the diffuser.
[0019] Furthermore, in the aforementioned angled dual-head sandblasting structure, the sandblasting gun head has 6 screw holes a.
[0020] Furthermore, in the aforementioned angled dual-head sandblasting structure, three screw holes a are symmetrically arranged on the upper and lower sides of the sandblasting gun head.
[0021] Three screw holes (a) are symmetrically arranged on the upper and lower sides of the sandblasting gun head. This symmetrical layout makes the angle adjustment of the sandblasting gun head more stable and uniform. When adjusting the angle, it ensures that the force on both sides of the sandblasting gun head is balanced, avoiding uneven sandblasting caused by improper angle adjustment. At the same time, the symmetrical screw hole layout also facilitates operation for the operator, improving the efficiency and accuracy of angle adjustment.
[0022] Furthermore, in the aforementioned angled double-headed sandblasting structure, the directional positioning block has 6 screw holes b.
[0023] The directional positioning block has six screw holes (b) that mate with the six screw holes (a) on the sandblasting gun head. Different combinations of screw holes allow for angle adjustments to meet various sandblasting process requirements. For example, when sandblasting the OUT and IN surfaces of a diffuser, the appropriate screw hole combination can be selected to adjust the angle of the sandblasting gun head based on different surface characteristics and residual film conditions.
[0024] Furthermore, in the aforementioned angled double-headed sandblasting structure, the directional positioning block is also provided with a central screw hole, and a rotatable screw is provided in the central screw hole.
[0025] A rotatable screw is installed in the central screw hole on the directional positioning block, providing an additional fine-tuning method for adjusting the angle of the sandblasting gun head. After making approximate angle adjustments through screw holes a and b, more precise angle adjustments can be made by rotating the screw, allowing the sandblasting gun head to be more accurately aligned with the target area of the diffuser, improving the removal of residual film. For example, when it is necessary to treat some tiny holes or residual film in specific locations on the diffuser, the rotatable screw can be used for fine angle adjustments.
[0026] Furthermore, in the aforementioned angled double-headed sandblasting structure, the screw holes b are distributed in a ring around the central screw hole.
[0027] The annularly distributed screw holes (b) offer more angle options, covering a wider angle range to better accommodate the complex shapes and structures of the diffuser. Operators can select appropriate positions within the annularly distributed screw holes (b) to install screws, enabling multi-angle adjustment of the sandblasting gun head, depending on the specific diffuser requirements.
[0028] Furthermore, in the aforementioned angled dual-head sandblasting structure, the sandblasting gun head base is provided with several fixing screw holes. These fixing screw holes are evenly distributed at equal angular intervals with the center of the circle as the center of symmetry. The sandblasting gun head base is connected to the rotating base by rotating the fixing screws.
[0029] Furthermore, in the aforementioned angled dual-head sandblasting structure, the sandblasting gun head base has four fixing screw holes, corresponding to the four directions of sandblasting peeling: up, down, left, and right.
[0030] The sandblasting gun head base has four fixing screw holes, corresponding to the four directions of sandblasting peeling: up, down, left, and right. This allows the angled dual-head sandblasting structure to easily achieve symmetrical sandblasting operations both vertically and horizontally, meeting the residual film removal needs of the diffuser in different directions.
[0031] Furthermore, in the aforementioned angled dual-head sandblasting structure, the rotation range of the rotating base is 180°.
[0032] Furthermore, in the aforementioned angled dual-head sandblasting structure, the rotating base includes a rotating device and a base, with the rotating device disposed between the sandblasting gun head base and the base.
[0033] The beneficial effects of this utility model are as follows: The angled double-head sandblasting structure described in this utility model is reasonably designed. Through double-head sandblasting and multi-angle adjustment functions, it significantly reduces the number of sandblasting operations and time, and increases the proportion of continuous operation time of the equipment. The multi-angle adjustment of the sandblasting gun head is realized through the directional positioning block and rotating base, so that the abrasive can be sprayed more accurately onto the surface and inside the holes of the diffuser, especially the abrasive can be sprayed vertically onto the inner wall of the diffuser holes, which improves the residual film removal efficiency. It reduces the number of times and time of manual adjustment of the sandblasting angle, reduces the labor intensity and difficulty of the operators, and thus reduces labor costs. The structure has flexible angle adjustment and rotation functions, which can adapt to the complex porous structure of the diffuser and different sandblasting process requirements. Whether it is a left-right symmetrical or up-down symmetrical sandblasting operation, it can be achieved by adjusting the angle and position of the sandblasting gun head, which enhances the adaptability and versatility of the equipment. Attached Figure Description
[0034] Figure 1 This is a schematic diagram of the Diffuser sandblasting peeling process of the angled dual-head sandblasting structure described in this utility model;
[0035] Figure 2 This is a schematic diagram of the angled double-head sandblasting structure described in this utility model;
[0036] Figure 3 This is a front view of the sandblasting gun head with the angled dual-head sandblasting structure described in this utility model;
[0037] Figure 4 This is a front view of the directional positioning block of the angled double-headed sandblasting structure described in this utility model;
[0038] Figure 5 This is a side view of the sandblasting gun head base with the angled double-head sandblasting structure described in this utility model;
[0039] In the diagram: 1. Sandblasting gun head, 11. Screw hole a11, 2. Sandblasting gun head base, 21. Fixed screw hole, 3. Directional positioning block, 31. Screw hole b31, 32. Rotatable screw, 33. Rotating base, 4. Rotating device, 41. Base, 42. Product a. Detailed Implementation
[0040] The following is in conjunction with the appendix Figure 1 , 2 Examples 1, 2, and 3 further illustrate this utility model.
[0041] Example 1
[0042] like Figure 1 , 2As shown, the angled double-head sandblasting structure of this utility model includes a sandblasting gun head 1, a sandblasting gun head base 2, a directional positioning block 3, and a rotating base 4.
[0043] like Figure 1 , 2 As shown in Figures 3, 4, and 5, the assembly process of the angled double-head sandblasting structure of this utility model is as follows:
[0044] 1. Prepare 2 sandblasting gun heads, 1. 1 sandblasting gun head base, 2. 4 directional positioning blocks, 3. 1 rotating base, 4. Several screws including M8 screws, rotating fixing screws, etc.
[0045] 2. Check whether there are 6 screw holes a11 on the sandblasting gun head 1, and whether 3 screw holes a11 are symmetrically arranged on the upper and lower sides of the sandblasting gun head 1 respectively; the directional positioning block 3 has 6 screw holes b31 that cooperate with the screw holes a11 and 1 intermediate screw hole 32. A rotatable screw 33 is provided in the intermediate screw hole 32, and the screw holes b31 are distributed in a ring around the intermediate screw hole 32.
[0046] 3. Check that the sandblasting gun head base 2 has 4 fixing screw holes 21. These fixing screw holes 21 are evenly distributed at equal angular intervals with the center of the circle as the center of symmetry, corresponding to the sandblasting peeling in the four directions of up, down, left and right respectively.
[0047] 4. The rotating base 4 includes a rotating device 41 and a base 42. The rotating device 41 is disposed between the sandblasting gun head base 2 and the base 42. The rotation range of the rotating base 4 is 180°.
[0048] 5. Arrange the two sandblasting gun heads 1 symmetrically in front of the sandblasting gun head base 2.
[0049] 6. Place the directional positioning block 3 on the left and right sides of the contact position between the sandblasting gun head 1 and the sandblasting gun head base 2, and use M8 screws to fix the directional positioning block 3 to the sandblasting gun head base 2.
[0050] 7. Connect the screw hole a11 on the sandblasting gun head 1 to the screw hole b31 on the directional positioning block 3 using M8 screws to initially fix the position of the sandblasting gun head 1.
[0051] 8. The rotating base 4 is located behind the sandblasting gun head base 2. The rotating base 4 is connected to the sandblasting gun head base 2 using rotating fixing screws, so that the rotating base 4 connects the sandblasting gun head base 2 and the sandblasting machine, and is used to assist rotation.
[0052] Example 2
[0053] Based on the structural foundation of Embodiment 1 above, the angle adjustment process of the angled dual-head sandblasting structure of this utility model is as follows:
[0054] 1. Determine the angle based on the product.
[0055] Taking a diffuser as an example, determine the angle of the sandblasting gun head 1 based on its dimensions and material. Generally, when left-right symmetry is selected, the angle of the sandblasting gun head 1 is 45-90° and 115-135°, and the sandblasting gun head 1 is arranged symmetrically inward; when top-bottom symmetry is selected, the parameters are the same as for left-right symmetry.
[0056] 2. Adjust the angle of the sandblasting gun head 1 relative to the rotating base 4.
[0057] Unscrew the fixing screw in the directional positioning block 3. At this time, the sandblasting gun head 1 can be rotated relative to the rotating base 4. Rotate the sandblasting gun head 1 to a suitable angle, such as the intersection of 45-90° and 115-135°, so that the two sandblasting gun heads 1 are arranged symmetrically.
[0058] After rotation, screw the fixing screw into the directional positioning block 3 and tighten it with a wrench to fix the angle of the sandblasting gun head 1 relative to the rotating base 4.
[0059] 3. Adjust the sandblasting angle of the sandblasting gun head 1 relative to product a.
[0060] Unscrew the rotating fixing screws of the rotating base 4, and select either up-and-down sandblasting (i.e., the sandblasting gun head 1 is symmetrical up and down) or left-and-right sandblasting (i.e., the sandblasting gun head 1 is symmetrical left and right) according to the actual situation.
[0061] After determining the rotation angle, align the hole of the rotating base 4, screw in the rotating fixing screw, and tighten it with a wrench. At this time, the sandblasting angle of the sandblasting gun head 1 relative to product a is fixed.
[0062] Example 3
[0063] Based on the structural foundation of Embodiment 1 and above, the angled dual-head sandblasting structure of this utility model has the following sandblasting process:
[0064] 1. Parameter settings and debugging
[0065] Use a wrench to tighten the screw into the predetermined angle hole, so that the sandblasting gun head 1 is adjusted to the angle according to the predetermined parameters, including the sandblasting gun head angle of 45°-90° and symmetrical layout for spraying up and down or left and right, without any order.
[0066] The robotic arm is used to adjust the distance between the sandblasting gun head 1 and the product, the height of the sandblasting gun head, etc., and to adjust the sandblasting coverage area according to the size of product a. For example, when spraying left and right, it is necessary to ensure that the right sandblasting gun head 1 can spray the leftmost side of product a, and the left sandblasting gun head 1 needs to spray the rightmost side of product a; the same applies to spraying up and down.
[0067] After the parameters are adjusted, the robotic arm is returned to its origin and a trial run is started, with the entire process monitored for any positioning issues or other abnormalities.
[0068] 2. Preparations before sandblasting
[0069] After confirming that the sand tank has sufficient sand and the air pressure is stable, close and lock the sandblasting room door, turn on the dust collector and sand return fan, turn on the air jet and sandblasting equipment to conduct a test sandblasting, and adjust the air pressure to ensure the air pressure is stable.
[0070] 3. Sandblasting operation
[0071] After the air pressure is adjusted, the jet sandblasting device is turned off and then turned back on. The robotic arm's movement path is then activated, allowing the robotic arm to operate according to the pre-defined pattern and begin symmetrical sandblasting from left to right.
[0072] After completing the symmetrical sandblasting, adjust the direction of the sandblasting gun head 1. Only the rotation direction needs to be adjusted to change to up-down sandblasting. Then, perform sandblasting again according to the above plan.
[0073] After the OUT side is sandblasted, flip product a over and fix it in place.
[0074] Adjust the angle of the sandblasting gun head 1 to vertical sandblasting, facing product a, and perform sandblasting again according to the above plan.
[0075] 4. Follow-up processing
[0076] After sandblasting is completed, the sandblasting device is turned off, and the air blowing device is turned on normally to blow away the residual sand on the product.
[0077] After the air blowing is completed, use an endoscope and CCD to check the condition of the residual film inside the hole. If it is completely peeled off, the Diffuser sandblasting peeling is finished.
[0078] From the above, it can be seen that the angled double-head sandblasting structure described in this utility model, compared with the traditional single-head sandblasting structure, is as follows:
[0079] 1. Comparison of multi-angle positioning time
[0080] Traditional single-head sandblasting requires operators to manually adjust the sandblasting angle multiple times, typically requiring four adjustments, resulting in significant equipment downtime. In contrast, the angled dual-head sandblasting structure, with its symmetrically arranged dual sandblasting nozzles, covers both angles symmetrically in a single operation. This reduces the number of angle adjustments from four to two, decreasing manual adjustment time by 50% and significantly shortening equipment downtime.
[0081] 2. Comparison of production efficiency
[0082] Using a traditional single-head sandblasting structure, each diffuser typically requires 5-10 sandblasting operations to completely remove residual film, with each sandblasting session taking 5-10 hours. However, the angled dual-head sandblasting structure reduces the number of sandblasting operations from 5-10 to 2-4 without affecting residual film removal efficiency. The total time per part is reduced from 5-10 hours to 2.5-5 hours, significantly improving production efficiency.
[0083] 3. Production Capacity Comparison
[0084] Under an 8-hour workday, the traditional single-head sandblasting structure only achieves a daily output of 0.4 to 0.8 pieces per machine. However, the angled double-head sandblasting structure increases the continuous operation time from 30% to 75%, raising the daily output from 0.4 to 0.8 pieces to 0.8 to 1.2 pieces, better meeting mass production requirements and improving the company's economic efficiency and market competitiveness.
[0085] 4. Comparison of residual film removal rates
[0086] Traditional single-head sandblasting structures mostly employ vertical sandblasting. However, due to the funnel-shaped inner wall of the diffuser, this vertical sandblasting method cannot ensure that the abrasive is sprayed vertically into the diffuser's inner wall, resulting in a residual film removal efficiency of only 85%. In contrast, angled dual-head sandblasting structures, by setting the angle (typically 45~90°), allow the abrasive to be sprayed vertically into the diffuser's inner wall, achieving a residual film removal efficiency of ≥98%, resulting in significantly better residual film removal.
[0087] As can be seen from the above embodiments, the angled dual-head sandblasting structure has significant advantages in solving the problems of the traditional single-head sandblasting process. It can improve production efficiency, increase capacity, and improve residual film removal rate, thus meeting the actual needs of Diffuser residual film stripping in the CVD field.
[0088] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of the present utility model, and these improvements should also be considered within the protection scope of the present utility model.
Claims
1. A double-headed sandblasting structure with an angle, characterized in that, include: Sandblasting gun head (1), the number of which is 2; Sandblasting gun head base (2), with two sandblasting gun heads (1) arranged symmetrically in front of the sandblasting gun head base (2); Directional positioning block (3) is set on the left and right sides of the contact position between the sandblasting gun head (1) and the sandblasting gun head base (2) and is fixedly connected to the sandblasting gun head base (2); wherein, the sandblasting gun head (1) is provided with a plurality of screw holes a (11) and the directional positioning block (3) is provided with a plurality of screw holes b (31) that cooperate with the screw holes a (11), and the sandblasting gun head (1) and the directional positioning block (3) are connected by gun head fixing screws; Rotating base (4) is located behind the sandblasting gun head base (2). The rotating base (4) connects the sandblasting gun head base (2) and the sandblasting machine and is used to assist rotation.
2. The angled double-head sandblasting structure according to claim 1, characterized in that, The sandblasting gun head (1) has 6 screw holes a (11).
3. The angled double-head sandblasting structure according to claim 2, characterized in that, Three screw holes a (11) are symmetrically arranged on the upper and lower sides of the sandblasting gun head (1).
4. The angled double-head sandblasting structure according to claim 1, characterized in that, The directional positioning block (3) has 6 screw holes b (31).
5. The angled double-head sandblasting structure according to claim 4, characterized in that, The directional positioning block (3) is also provided with a central screw hole (32), and a rotatable screw (33) is provided in the central screw hole (32).
6. The angled double-head sandblasting structure according to claim 5, characterized in that, The screw holes b (31) are arranged in a ring around the central screw hole (32).
7. The angled double-head sandblasting structure according to claim 1, characterized in that, The sandblasting gun head base (2) has several fixing screw holes (21). The fixing screw holes (21) are evenly distributed at equal angular intervals with the center of the circle as the center of symmetry. The sandblasting gun head base (2) and the rotating base (4) are connected by rotating the fixing screws.
8. The angled double-head sandblasting structure according to claim 7, characterized in that, The sandblasting gun head base (2) has four fixing screw holes (21), which correspond to the four directions of sandblasting peeling: up, down, left, and right.
9. The angled double-head sandblasting structure according to claim 7, characterized in that, The rotation range of the rotating base (4) is 180°.
10. The angled double-head sandblasting structure according to claim 7, characterized in that, The rotating base (4) includes a rotating device (41) and a base (42), wherein the rotating device (41) is disposed between the sandblasting gun head base (2) and the base (42).