A vacuum chamber pumping structure and coating equipment
By installing a shielding part in the vacuum chamber's evacuation structure to cover the vacuum pipe connection port, the problem of foreign objects entering the vacuum pump unit and causing damage is solved, thus protecting the vacuum pump unit and improving evacuation efficiency.
CN224430682UActive Publication Date: 2026-06-30SHENZHEN ARRAYED MATERIALS TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN ARRAYED MATERIALS TECH CO LTD
- Filing Date
- 2025-06-12
- Publication Date
- 2026-06-30
Smart Images
Figure CN224430682U_ABST
Abstract
This utility model provides a vacuum chamber evacuation structure and coating equipment, belonging to the technical field of semiconductor manufacturing equipment. It includes a vacuum chamber body; a vacuum pipe connected to the bottom of the vacuum chamber; a vacuum pump unit connected to the vacuum pipe; and a shielding part covering the connection port of the vacuum pipe. The shielding part has air holes for the vacuum pipe to connect to the vacuum chamber. In the event of substrate damage, substrate fragments falling can be prevented from entering the vacuum pipe by shielding the connection port between the vacuum pipe and the vacuum chamber, thus solving the problem of damage to the vacuum pump unit due to foreign objects.
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