A magnetic levitation molecular pump operation testing device

Abstract

This application discloses a magnetic levitation molecular pump operation testing device, comprising: a testing platform with a plurality of connection structures spaced apart thereon, including forward connection structures and reverse connection structures. The forward connection structures are used for connection and fixation when the molecular pump body is installed upright, and the reverse connection structures are used for connection and fixation when the molecular pump body is installed upside down; a testing connection unit disposed below the testing platform, the testing connection unit including a cable unit for connecting to the molecular pump body under test, a cooling pipeline, and a vacuum pipeline; and a testing control system electrically connected to the cable unit. This magnetic levitation molecular pump operation testing device provides a reliable molecular pump operation testing environment, improves the testing efficiency of the molecular pump, and enhances the safety of the testing environment.

Description

Technical Field

[0001] The embodiments of this utility model relate to the field of magnetic levitation molecular pump testing technology. More specifically, this utility model relates to a magnetic levitation molecular pump operation testing device. Background Technology

[0002] Magnetic levitation molecular pumps require long-term operational testing before being put into use. During this long-term testing, the magnetic levitation molecular pump must remain stationary to ensure the accuracy of the test results.

[0003] Existing testing methods for magnetic levitation molecular pumps have the following drawbacks: First, when magnetic levitation molecular pumps are placed on the ground for extended periods, accidental collisions are likely to occur. Such collisions can lead to pump instability, and in extreme cases, even pump breakage, severely impacting the accuracy and safety of the test. Second, if the magnetic levitation molecular pump shifts during testing, or if damaged parts are ejected at high speed, these situations can affect other molecular pumps being tested. This mutual influence can lead to deviations in test results and may even damage other molecular pumps. Finally, magnetic levitation molecular pumps require various wiring and piping, including power cords, control lines, water cooling pipes, and vacuum bellows, for operation. If these lines and pipes are haphazardly placed on the ground next to the molecular pump, it not only creates confusion but also hinders the disassembly, assembly, and testing process. This inconvenience not only affects testing efficiency but may also increase safety hazards during the testing process. Utility Model Content

[0004] In order to solve one or more of the technical problems mentioned above, this utility model provides a magnetic levitation molecular pump operation testing device.

[0005] This utility model provides a magnetic levitation molecular pump operation testing device, comprising: a testing platform on which a plurality of connection structures are spaced apart, the connection structures including forward connection structures and reverse connection structures, the forward connection structures being used for connection and fixation when the molecular pump body is installed upright, and the reverse connection structures being used for connection and fixation when the molecular pump body is installed upside down; a testing connection unit disposed below the testing platform, the testing connection unit including a cable unit for connecting to the molecular pump body under test, a cooling pipeline, and a vacuum pipeline; and a testing control system electrically connected to the cable unit.

[0006] In some embodiments, the test platform includes: a support frame; a platform mounting plate horizontally disposed on the support frame, a connecting structure disposed on the platform mounting plate; and a tray disposed below the platform mounting plate.

[0007] In some embodiments, the test platform also includes a liquid level sensor disposed within a tray, and the test control system is electrically connected to an external cooling system and the liquid level sensor.

[0008] In some embodiments, a through space is formed in the area of ​​the support frame located below the platform mounting plate. The through space includes: a through channel formed along the length direction of the support frame; and a connection channel connected to the through channel and corresponding to a plurality of connection structures. The cable unit, cooling pipe, and vacuum pipe are all disposed in the through channel. One end of the cable unit is used to connect to an external power supply device, one end of the cooling pipe is used to connect to an external cooling system, and one end of the vacuum pipe is used to connect to an external vacuum environment. The other ends of the cable unit, cooling pipe, and vacuum pipe are connected to the pump body of each molecular pump under test through the connection channels.

[0009] In some embodiments, the connection structure further includes a connecting bolt, the forward connection structure includes a forward connection hole, the position of which corresponds to the fixing hole position when the molecular pump body under test is installed upright, and the reverse connection structure includes a reverse connection hole, the position of which corresponds to the fixing hole position when the molecular pump body under test is installed upside down.

[0010] In some embodiments, the test platform further includes a cushioning adjustment pad disposed at the bottom of the support frame.

[0011] In some embodiments, the test platform further includes a switch module disposed on the side of the test platform, and the switch module is electrically connected to the cable unit.

[0012] In some embodiments, the test platform further includes a connector disposed on the side of the test platform, which is connected to cooling lines and vacuum lines.

[0013] In some embodiments, the platform mounting plate includes several plate sections, which are sequentially spliced ​​together by a concave-convex structure, and several connecting structures are respectively disposed on the several plate sections.

[0014] In some embodiments, the support frame is constructed from metal profiles connected together.

[0015] The magnetic levitation molecular pump operation test device described above secures the molecular pump to the test platform, preventing displacement or tilting due to accidental contact during testing, thus providing a reliable operating test environment. Furthermore, the unified placement of the test connection units below the test platform effectively avoids the inconvenience of disassembly and assembly of the molecular pump and the testing process caused by messy wiring and piping, improving the efficiency of molecular pump testing and enhancing the safety of the test environment. Attached Figure Description

[0016] The above and other objects, features, and advantages of the present invention will become readily understood by reading the following detailed description of exemplary embodiments with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0017] Figure 1 This is an exemplary application scenario of the magnetic levitation molecular pump operation test device according to an embodiment of this utility model;

[0018] Figure 2 A schematic diagram of the structure of the magnetic levitation molecular pump operation test device according to an embodiment of the present invention is shown;

[0019] Figure 3 This invention presents a front view of the structure of a magnetic levitation molecular pump operation test device according to an embodiment of the present invention.

[0020] Figure 4 for Figure 3 The diagram shows a top view of the magnetic levitation molecular pump operation test device. Detailed Implementation

[0021] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0022] Figure 1 The illustration shows a scenario where the magnetic levitation molecular pump operation test device 100 according to an embodiment of the present invention is applied to the operation test of the magnetic levitation molecular pump 200. Figures 2 to 4 The structure of a magnetic levitation molecular pump operation test device 100 according to an embodiment of the present invention is shown. For example... Figures 2 to 4 As shown, combined with Figure 1 A magnetic levitation molecular pump operation testing device 100 includes: a testing platform 1 on which a plurality of connection structures 11 are arranged at intervals, the connection structures 11 including forward connection structures and reverse connection structures, the forward connection structures being used for connection and fixation when the molecular pump body is installed upright, and the reverse connection structures being used for connection and fixation when the molecular pump body is installed upside down; a testing connection unit 2, which is disposed below the testing platform 1, the testing connection unit 2 including a cable unit 21 for connecting to the pump body of the molecular pump 200 under test, a cooling pipe 22, and a vacuum pipe 23; and a testing control system, which is electrically connected to the cable unit 21.

[0023] When using the magnetic levitation molecular pump operation testing device 100 according to an embodiment of the present invention, the molecular pump 200 to be tested is arranged and placed on the testing platform 1 (e.g., Figure 1 As shown in the diagram, the molecular pumps 200 are then fixed using the connection structure 11 to simultaneously test multiple molecular pumps 200. In this application, the forward and reverse connection structures allow multiple molecular pumps 200 to be installed upright or upside down to meet different testing requirements. Before testing, the test connection unit 2 is connected to each molecular pump 200, including a cable unit 21, a cooling pipe 22, and a vacuum pipe 23. The cable unit 21 provides power and data transmission for the molecular pumps 200, the cooling pipe 22 cools the molecular pumps 200 during testing, and the vacuum pipe 23 connects the molecular pumps 200 to the vacuum environment. After the molecular pumps 200 are fixed and connected, a long-term operation test is performed using the test control system.

[0024] With the above-described configuration, the magnetic levitation molecular pump operation testing device 100 according to this embodiment of the present invention fixes the molecular pump 200 onto the testing platform 1, preventing displacement or tilting of the molecular pump 200 due to accidental contact during testing, thus providing a reliable operating testing environment. Simultaneously, the magnetic levitation molecular pump operation testing device 100 of this embodiment of the present invention provides a more flexible installation method for the molecular pump 200; that is, the molecular pump 200 can be installed upright or upside down, both allowing for long-term operation testing. Furthermore, placing the testing connection unit 2 below the testing platform 1 effectively avoids the inconvenience of disassembling and testing the molecular pump 200 due to messy wiring and piping, improving the testing efficiency of the molecular pump 200 and enhancing the safety of the testing environment.

[0025] Please refer to Figure 2 and Figure 3 In some embodiments, the test platform 1 may include: a support frame 12; a platform mounting plate 15, which is horizontally disposed on the support frame 12, and a connecting structure 11 disposed on the platform mounting plate 15; and a tray (not shown in the figure), which is disposed below the platform mounting plate 15.

[0026] In the prior art, the magnetic levitation molecular pump 200 operates unattended for extended periods. During operation, the pump requires cooling water, which sometimes leads to leaks at the water pipe joints. In this application, a tray is placed under the test platform 1 to collect leaked liquid, preventing short circuits caused by liquid leakage into the electrical or circuitry of the accessories, thereby improving the safety of the magnetic levitation molecular pump operation test device 100.

[0027] In some embodiments, the test platform 1 may also include a liquid level sensor (not shown) disposed in a tray, and the test control system is also electrically connected to an external cooling system and the liquid level sensor.

[0028] In the prior art, the magnetic levitation molecular pump 200 operates unattended for extended periods. During operation, the pump requires cooling water, which can sometimes lead to leaks at the water pipe joints. The magnetic levitation molecular pump operation testing device 100 of this embodiment addresses this by installing a liquid level sensor within the tray. When the leaked liquid reaches a set height, the sensor sends a signal to the test control system. Upon receiving this information, the test control system automatically controls the magnetic levitation molecular pump 200 to report a fault and shut down, while simultaneously shutting down the external cooling system. This further enhances the safety of the magnetic levitation molecular pump operation testing device 100.

[0029] Please continue to refer to Figure 2 and Figure 3 In some embodiments, a through space 13 is formed in the area of ​​the support frame 12 located below the platform mounting plate 15. The through space 13 includes: a through channel formed along the length direction of the support frame 12; and a connecting channel connected to the through channel and corresponding to a plurality of connecting structures 11. The cable unit 21, the cooling pipe 22, and the vacuum pipe 23 are all disposed in the through channel. One end of the cable unit 21 is used to connect to an external power supply device, one end of the cooling pipe 22 is used to connect to an external cooling system, and one end of the vacuum pipe 23 is used to connect to an external vacuum environment. The other ends of the cable unit 21, the cooling pipe 22, and the vacuum pipe 23 are connected to the pump body of each molecular pump to be tested through each connecting channel.

[0030] In this application, the cable unit 21, cooling pipe 22, and vacuum pipe 23 all pass through the through space 13 in the middle of the frame of the test platform 1, which effectively avoids the inconvenience of disassembling and testing the molecular pump 200 due to the mess of lines and pipes. At the same time, when installing the molecular pump 200, the connection channel also facilitates the insertion of the forklift support legs of the forklift that lifts it, so as to facilitate the installation of the molecular pump 200, thereby improving the efficiency of the installation and testing of the molecular pump 200 and improving the safety of the test environment.

[0031] Please refer to Figure 4 In some embodiments, the connection structure 11 further includes a connecting bolt, the forward connection structure includes a forward connection hole, the position of the forward connection hole corresponds to the fixing hole position when the molecular pump body to be tested is installed upright, and the reverse connection structure includes a reverse connection hole, the position of the reverse connection hole corresponds to the fixing hole position when the molecular pump body to be tested is installed upside down.

[0032] In this application, the molecular pump 200 and the platform mounting plate 15 are fixed together by corresponding forward and reverse connection holes and by connecting bolts, which makes the fixing method more flexible and allows the molecular pump 200 to be used in a variety of fixing methods, thereby improving the practicality of the magnetic levitation molecular pump operation test device 100 of this utility model embodiment.

[0033] Please refer to Figure 2 and Figure 3 In some embodiments, a buffer adjustment pad 14 is also included, which is disposed at the bottom of the support frame 12.

[0034] In this application, the buffer adjustment pad 14 can be set at the bottom of the support leg of the support frame 12 to adjust the level of the test platform 1, and at the same time play a certain shock absorption effect, so as to make the test results of the molecular pump 200 more accurate.

[0035] In some embodiments, the test platform 1 may further include a switch module (not shown) disposed on the side of the test platform 1, and the switch module is electrically connected to the cable unit 21.

[0036] In some embodiments, the test platform 1 may further include: a connector (not shown in the figure) disposed on the side of the test platform 1, the connector being connected to the cooling line 22 and the vacuum line 23.

[0037] In this application, by setting a switch module and a connector, the opening and closing of the magnetic levitation molecular pump operation test device 100 and the connection of the pipeline are facilitated, making the use of the magnetic levitation molecular pump operation test device 100 of this utility model embodiment more convenient and simple.

[0038] Please continue to refer to Figure 4 In some embodiments, the platform mounting plate 15 may include a plurality of plate sections, which are sequentially spliced ​​together by a concave-convex structure 151, and a plurality of connecting structures 11 are respectively disposed on the plurality of plate sections.

[0039] In this application, several plates are sequentially spliced ​​together by concave-convex structures 151, making the installation of the platform mounting plate 15 faster. Simultaneously, the splicing of the concave-convex structures 151 prevents misalignment of the plates, ensuring accurate positioning of the connecting structures 11. Furthermore, several connecting structures 11 are respectively disposed on several plates, meaning one connecting structure 11 is present on each plate. This ensures that the structures of the plates are identical, facilitating manufacturing. Simultaneously, the individual plates can be easily connected and disconnected from the molecular pump 200. When testing multiple molecular pumps 200 simultaneously, this does not affect other molecular pumps 200, making the magnetic levitation molecular pump operation testing device 100 of this embodiment more convenient to use.

[0040] In some embodiments, the panel may be further divided into two sub-panels, which are then joined together to form the panel.

[0041] In some embodiments, the support frame 12 may be constructed from metal profiles connected together.

[0042] In this application, the support frame 12 is preferably made of aluminum alloy profile. With this configuration, the test platform 1 is composed of aluminum profile and plate, which makes the magnetic levitation molecular pump operation test device 100 of this utility model easy to install and lightweight, and facilitates the use of the magnetic levitation molecular pump operation test device 100.

[0043] In the foregoing description of this application, unless otherwise expressly specified and limited, the terms "fixed," "installed," "connected," or "linked" should be interpreted broadly. For example, the term "linked" can refer to a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can refer to the internal communication of two components or the interaction between two components. Therefore, unless otherwise expressly limited in this application, those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0044] Based on the above description of this application, those skilled in the art will also understand that the following terms used, such as "upper," "lower," "front," "rear," "left," "right," "length," "width," "thickness," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," "circumferential," "center," "longitudinal," "transverse," "clockwise," or "counterclockwise," are terms indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings of this application. They are only for the purpose of facilitating the explanation of the present invention and simplifying the description, and do not explicitly or implicitly suggest that the device or element involved must have the specific orientation, or be constructed and operated in a specific orientation. Therefore, the above-mentioned orientation or positional relationship terms cannot be understood or interpreted as a limitation on the present invention.

[0045] Furthermore, the terms "first" or "second," etc., used in this application to refer to numbers or ordinal numbers are for descriptive purposes only and should not be construed as explicitly or implicitly indicating relative importance or specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, or more, unless otherwise explicitly specified.

[0046] While various embodiments of the present invention have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Many modifications, alterations, and alternatives will occur to those skilled in the art without departing from the spirit and intent of the present invention. It should be understood that various alternatives to the embodiments of the present invention described herein may be employed in the practice of the present invention. The appended claims are intended to define the scope of protection of the present invention and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A testing device for the operation of a magnetically levitated molecular pump, characterized in that, include: The test platform has several connection structures spaced apart on it. The connection structures include forward connection structures and reverse connection structures. The forward connection structures are used for connection and fixation when the molecular pump body is installed upright, and the reverse connection structures are used for connection and fixation when the molecular pump body is installed upside down. A test connection unit, disposed below the test platform, includes a cable unit for connecting to the molecular pump body under test, cooling lines, and vacuum lines; and... A test control system is electrically connected to the cable unit.

2. The magnetic levitation molecular pump operation testing device according to claim 1, characterized in that, The testing platform includes: Support frame; A platform mounting plate, horizontally mounted on the support frame, and the connecting structure mounted on the platform mounting plate; and... A tray is positioned below the platform mounting plate.

3. The magnetic levitation molecular pump operation testing device according to claim 2, characterized in that, The test platform also includes a liquid level sensor, which is installed in the tray, and the test control system is also electrically connected to the external cooling system and the liquid level sensor.

4. The magnetic levitation molecular pump operation testing device according to claim 2, characterized in that, The area of ​​the support frame located below the platform mounting plate has a through space, which includes: a through channel formed along the length of the support frame; and a connection channel connected to the through channel and corresponding to a plurality of the connection structures; wherein the cable unit, the cooling pipe, and the vacuum pipe are all disposed within the through channel, one end of the cable unit is used to connect to an external power supply device, one end of the cooling pipe is used to connect to an external cooling system, one end of the vacuum pipe is used to connect to an external vacuum environment, and the other ends of the cable unit, the cooling pipe, and the vacuum pipe are connected to the pump body of each molecular pump to be tested through each of the connection channels.

5. The magnetic levitation molecular pump operation testing device according to any one of claims 1-4, characterized in that, The connection structure also includes connecting bolts. The forward connection structure includes a forward connection hole, the position of which corresponds to the fixing hole position when the molecular pump body under test is installed upright. The reverse connection structure includes a reverse connection hole, the position of which corresponds to the fixing hole position when the molecular pump body under test is installed upside down.

6. The magnetic levitation molecular pump operation testing device according to any one of claims 2-4, characterized in that, The test platform also includes a buffer adjustment pad, which is located at the bottom of the support frame.

7. The magnetic levitation molecular pump operation testing device according to any one of claims 2-4, characterized in that, The test platform also includes a switch module, which is disposed on the side of the test platform and is electrically connected to the cable unit.

8. The magnetic levitation molecular pump operation testing device according to any one of claims 2-4, characterized in that, The test platform also includes a connector, which is disposed on the side of the test platform and is connected to the cooling pipeline and the vacuum pipeline.

9. The magnetic levitation molecular pump operation testing device according to any one of claims 2-4, characterized in that, The platform mounting plate includes several plate sections, which are sequentially spliced ​​together by a concave-convex structure, and several connecting structures are respectively disposed on the several plate sections.

10. The magnetic levitation molecular pump operation testing device according to any one of claims 2-4, characterized in that, The support frame is constructed from interconnected metal profiles.

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