A piezoelectric vibration damping device with a connecting rod

Abstract

This utility model belongs to the technical field of vibration damping equipment and discloses a piezoelectric vibration damping device with connecting rods. It includes an upper panel, a lower panel, and piezoelectric vibration dampers arranged between them. The number of piezoelectric vibration dampers is three or more, and adjacent piezoelectric vibration dampers are connected by connecting rods. Furthermore, each piezoelectric vibration damper may include a single-leg top plate, a single-leg bottom plate, a passive vibration damping element, an intermediate mass block, a horizontal piezoelectric actuator, a vertical piezoelectric actuator, a horizontal velocity sensor, and a vertical velocity sensor. This utility model can ensure comprehensive and accurate signal monitoring of the entire vibration damping device while reducing the number of sensors, and makes the entire signal control simpler and more convenient. In addition, it can effectively prevent the piezoelectric actuators from being subjected to horizontal or vertical shear forces during operation, thereby improving the reliability and service life of the vibration damping device.

Description

Technical Field

[0001] This utility model belongs to the technical field of vibration reduction equipment, and more specifically, relates to a piezoelectric vibration reduction device with a connecting rod. Background Technology

[0002] High-performance vibration damping devices are crucial for ensuring the stable operation of equipment such as semiconductor manufacturing equipment, precision testing equipment, measurement equipment, and ultra-precision machine tools. Most existing vibration damping devices employ a combination of passive and active damping elements in their overall structure. Examples include air springs and voice coil motors in a hybrid parallel configuration, air springs combined with pneumatic actuators, and vibration-damping rubber combined with piezoelectric ceramics. This allows for functions such as low-frequency suppression and high-frequency isolation.

[0003] However, further research shows that the existing solutions mentioned above still have the following defects or shortcomings: First, such devices usually contain multiple types and a large number of sensors, and the system contains multiple signals, which makes the overall structure of the product complex, costly, and increases the difficulty of signal control of the system; Second, when using actuators such as piezoelectric ceramics, existing devices are prone to generating horizontal or vertical shear forces during operation, which can damage the piezoelectric actuators and affect the vibration reduction accuracy.

[0004] Accordingly, further research and improvement are urgently needed in this field to better meet the modern high-precision and ultra-high-precision vibration reduction requirements. Utility Model Content

[0005] To address one or more of the aforementioned deficiencies or needs of existing technologies, this utility model provides a piezoelectric vibration damping device with a connecting rod. By re-examining and redesigning the internal structure and configuration of the device, and further making targeted improvements to the specific structural forms of key components such as the vertical piezoelectric actuator, comprehensive and accurate signal monitoring of the entire vibration damping device can be achieved while reducing the number of sensors, making the signal control simpler and more convenient. Furthermore, it effectively prevents the piezoelectric actuator from being subjected to horizontal or vertical shear forces during operation, thereby improving the reliability and service life of the vibration damping device.

[0006] To achieve the above objectives, according to this utility model, a piezoelectric vibration damping device with a connecting rod is provided. The piezoelectric vibration damping device includes an upper panel, a lower panel, and a piezoelectric vibration damper disposed between the two, wherein:

[0007] The number of piezoelectric vibration dampers is three or more, and adjacent piezoelectric vibration dampers are connected by connecting rods.

[0008] As a further preferred embodiment of this utility model, the number of piezoelectric vibration dampers is four, and each of the piezoelectric vibration dampers is symmetrically arranged at the four corners of the lower panel.

[0009] As a further preferred embodiment of this utility model, each of the piezoelectric vibration dampers includes a single-leg top plate, a single-leg bottom plate, a passive vibration damping element, an intermediate mass block, a horizontal piezoelectric actuator, a vertical piezoelectric actuator, a horizontal velocity sensor, and a vertical velocity sensor, wherein:

[0010] The single-leg top plate is used to fit and connect with the upper panel, thereby connecting the load; the upper end of the passive vibration damping element is in contact with the single-leg top plate, and its lower end is connected to the intermediate mass block; one side of the intermediate mass block is connected to the horizontal piezoelectric actuator, and its lower part is connected to the vertical piezoelectric actuator; both the horizontal and vertical piezoelectric actuators are mounted on the single-leg bottom plate and then fixed to the lower panel through the single-leg bottom plate; in addition, the horizontal speed sensor and the vertical speed sensor are respectively located near the intermediate mass block and are used to sense the horizontal and vertical movement speeds of the intermediate mass block, respectively.

[0011] As a further preferred embodiment of this utility model, the two ends of the connecting rod are respectively fixedly mounted on the intermediate mass blocks of the two adjacent piezoelectric dampers.

[0012] As a further preferred embodiment of this invention, the passive vibration damping element is vibration damping rubber.

[0013] As a further preferred embodiment of this utility model, both the horizontal piezoelectric actuator and the vertical piezoelectric actuator are piezoelectric ceramic structures.

[0014] As a further preferred embodiment of the present invention, the vertical piezoelectric actuator includes a horizontal actuator, a lower wedge block horizontally connected to the horizontal actuator, an upper wedge block disposed on the cross-section of the lower wedge block and slidable relative to it, and a vertical guide rail for guiding the upper wedge block to perform vertical movement.

[0015] As a further preferred embodiment of this utility model, the vertical guide rail has a V-shaped cross-section.

[0016] As a further preferred embodiment of this invention, the other side of the intermediate mass block is connected to a shear force decoupling mechanism.

[0017] As a further preferred embodiment of this invention, the piezoelectric vibration damping device is also equipped with a controller.

[0018] In summary, compared with the prior art, the above-described technical solution conceived by this utility model has the following main technical advantages:

[0019] (1) This utility model designs the internal structure and arrangement of the piezoelectric vibration damping device. Each link connects the adjacent piezoelectric vibration dampers, which allows the adjacent piezoelectric vibration dampers and their intermediate mass blocks to move in a restricted manner along the direction defined by the link during operation, thereby improving the overall vibration damping effect. In addition, this link-type piezoelectric vibration damping device does not require a separate horizontal velocity sensor for each piezoelectric vibration damper. It can equip only a common horizontal velocity sensor for a group of adjacent piezoelectric vibration dampers, which reduces equipment complexity and cost, and also helps to make the related signal control simpler and more convenient.

[0020] (2) The present invention may further selectively make targeted improvements to the specific structural form of key components such as vertical piezoelectric actuators. In this invention, by designing the specific structural components as upper and lower wedges that slide in contact with each other and using a horizontal actuator to drive along a V-shaped guide rail, the horizontal motion can be converted into vertical motion, while ensuring that the vertical piezoelectric actuator is not subjected to horizontal or vertical shear force, so that the piezoelectric actuator is not easily damaged.

[0021] (3) The piezoelectric vibration damping device of this utility model has a compact overall structure and is easy to operate. It can ensure comprehensive and accurate signal monitoring of the entire vibration damping device while reducing the number of sensors. It also has the advantages of high reliability, easy maintenance and good applicability. Therefore, it is especially suitable for high reliability vibration damping applications such as semiconductor manufacturing equipment, precision testing equipment, measurement equipment and ultra-precision machining tools. Attached Figure Description

[0022] Figure 1 This is a top view of the overall structure of a piezoelectric vibration damping device with a connecting rod according to a preferred embodiment of the present invention;

[0023] Figure 2 This is a perspective view of the overall structure of a piezoelectric vibration damping device with a connecting rod according to a preferred embodiment of the present invention.

[0024] Figure 3 This is a three-dimensional structural view of a single piezoelectric vibration damper according to a preferred embodiment of the present invention;

[0025] Figure 4 It is used to display more specifically. Figure 3 Schematic diagrams of horizontal and vertical piezoelectric actuators;

[0026] Figure 5a This is a schematic diagram of the structure of a vertical piezoelectric actuator according to another preferred embodiment of the present invention;

[0027] Figure 5bIt is used for more specific display Figure 5a A schematic diagram of a vertical guide rail with a V-shaped cross-section;

[0028] Figure 6 This is a schematic diagram illustrating the operation of the piezoelectric vibration damping device according to this utility model;

[0029] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0030] 1-Piezoelectric vibration damper; 2-Upper panel; 3-Lower panel; 4-Connecting rod; 11-Single leg top plate; 12-Single leg bottom plate; 13-Passive vibration damping element; 14-Intermediate mass block; 15-Horizontal piezoelectric actuator; 16-Vertical piezoelectric actuator; 17-Horizontal velocity sensor; 18-Vertical velocity sensor; 161-Horizontal actuator; 162-Lower wedge; 163-Upper wedge; 164-Vertical guide rail; F-Horizontal driving force. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0032] It should be understood that expressions such as "comprising" and "may include" as used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as "comprising" and / or "having" may be interpreted as indicating a specific characteristic, number, operation, constituent element, component, or combination thereof, but should not be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0033] It should be understood that the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0035] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] Figure 1 This is a top view of the overall structure of a piezoelectric vibration damping device with a connecting rod according to a preferred embodiment of the present invention. Figure 2 This is a perspective view of the overall structure of a piezoelectric vibration damping device with a connecting rod according to a preferred embodiment of the present invention. See below for further details. Figure 1 and Figure 2 To explain this utility model in more detail.

[0037] like Figure 1 and Figure 2 As shown, the piezoelectric vibration damping device of this utility model includes an upper panel 2, a lower panel 3, and piezoelectric vibration dampers 1 arranged between the two. The number of piezoelectric vibration dampers can be designed to be three, four, or more; in the preferred embodiment shown, there are four. Each piezoelectric vibration damper 1 is symmetrically arranged at the four corners of the lower panel 3, and adjacent piezoelectric vibration dampers 1 are connected by connecting rods 4, specifically along the horizontal X-axis and the vertical Y-axis.

[0038] See Figure 3 and Figure 4 Each piezoelectric vibration damper 1 includes a single-leg top plate 11, a single-leg bottom plate 12, a passive vibration damping element 13, an intermediate mass block 14, a horizontal piezoelectric actuator 15, a vertical piezoelectric actuator 16, a horizontal velocity sensor 17, and a vertical velocity sensor 18, wherein:

[0039] The single-leg top plate 11 is used to fit and connect with the upper panel 2, thereby connecting the load; the upper end of the passive damping element 13 is in contact with the single-leg top plate 11, and its lower end is connected to the intermediate mass block 14; one side of the intermediate mass block 14 is connected to the horizontal piezoelectric actuator 15, and its lower part is connected to the vertical piezoelectric actuator 16; the horizontal piezoelectric actuator 15 and the vertical piezoelectric actuator 16 are both mounted on the single-leg bottom plate 12, and then fixed to the lower panel 3 through the single-leg bottom plate 12; in addition, the horizontal speed sensor 17 and the vertical speed sensor 18 can be respectively set near the intermediate mass block 14, and are used to sense the horizontal and vertical movement speeds of the intermediate mass block 14 respectively.

[0040] More specifically, the passive damping element 13 is preferably damping rubber, and the horizontal piezoelectric actuator 15 and the vertical piezoelectric actuator 16 are both preferably piezoelectric ceramic structures. Furthermore, both ends of the connecting rod 4 are respectively fixedly mounted on the intermediate mass block 14 of each of the two adjacent piezoelectric dampers 1.

[0041] Through the above design, each link connects the adjacent piezoelectric vibration dampers at the four corners. This allows the adjacent piezoelectric vibration dampers and their intermediate mass blocks to move in a restricted manner along the direction defined by the link during operation, thereby improving the overall vibration damping effect. Furthermore, this link-type piezoelectric vibration damping device eliminates the need for a separate horizontal velocity sensor for each piezoelectric vibration damper; a shared horizontal velocity sensor can be provided for only a group of adjacent piezoelectric vibration dampers. This reduces equipment complexity and cost, while also making the related signal control simpler and more convenient. For example, if the above piezoelectric vibration damping device did not use link connections, each intermediate mass within the four piezoelectric vibration dampers would require two actuators to control its movement along each axis, and each intermediate mass would require one horizontal sensor and one vertical sensor, totaling eight velocity sensors for the four intermediate masses. In this invention, the number of velocity sensors can be reduced to six, namely four vertical and two horizontal, and the overall control logic is also simplified.

[0042] According to a preferred embodiment of the present invention, further optional improvements have been made to the specific structural form of key components such as the vertical piezoelectric actuator.

[0043] See Figure 5a In addition to the conventional structure, the vertical piezoelectric actuator of this invention can also be modified in other ways. Specifically, the vertical piezoelectric actuator 16 may include a horizontal actuator 161, a lower wedge 162 horizontally connected to the horizontal actuator 161, an upper wedge 163 disposed on the cross-section of the lower wedge 162 and slidable relative to it, and a vertical guide rail 164 for guiding the upper wedge 163 to perform vertical movement.

[0044] See also Figure 5b The vertical guide rail 164 is preferably designed with a V-shaped cross-section.

[0045] With the above design, when a horizontal driving force F is applied through the horizontal actuator 161, the upper and lower wedges of the vertical piezoelectric actuator will correspondingly convert the horizontal motion into vertical motion. At the same time, by cooperating with the V-shaped guide rail, when the piezoelectric output force clamps the upper and lower wedges, it is also ensured that the vertical piezoelectric actuator will not be subjected to horizontal or vertical shear force, making the piezoelectric actuator less susceptible to damage.

[0046] Furthermore, the other side of the intermediate mass block is preferably connected to a shear force decoupling mechanism, thereby further ensuring the reliability of the above-mentioned working process.

[0047] The working principle of the piezoelectric vibration damping device of this utility model will be explained in detail below.

[0048] like Figure 6 As illustrated in the example, when the piezoelectric vibration damping device of this invention is working, the vertical velocity sensor collects the movement velocity of the intermediate mass block and feeds the velocity signal back to the externally configured controller. The controller calculates the voltage signal applied to the vertical piezoelectric actuator based on the velocity signal to generate a vertical displacement, and drives the intermediate mass block accordingly to achieve vertical vibration damping. At the same time, the horizontal velocity sensor collects the movement velocity of the intermediate mass block and feeds the velocity signal back to the controller. The controller calculates the voltage signal applied to the horizontal piezoelectric actuator based on the velocity signal to generate a horizontal displacement, and drives the intermediate mass block accordingly to achieve horizontal vibration damping.

[0049] Since each piezoelectric damper constitutes a 2-degree-of-freedom damping system, the four piezoelectric dampers can achieve a 6-degree-of-freedom damping function through their cooperation with each other, specifically linear motion in the X-axis, Y-axis, and Z-axis directions, as well as rotation around the X-axis, Y-axis, and Z-axis respectively.

[0050] In summary, the piezoelectric vibration damping device according to this utility model can ensure comprehensive and accurate signal monitoring of the entire vibration damping device while reducing the number of sensors, and makes the entire signal control simpler and more convenient. In addition, it can effectively prevent the piezoelectric actuator from being subjected to horizontal or vertical shear forces during operation, thereby improving the reliability and service life of the vibration damping device. It also has the advantages of high reliability, easy maintenance and good applicability. Therefore, it is particularly suitable for high-reliability vibration damping applications such as semiconductor manufacturing equipment, precision testing equipment, measuring equipment, and ultra-precision machine tools, and has good practical value and application prospects.

[0051] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A piezoelectric vibration damping device with a connecting rod, the piezoelectric vibration damping device comprising an upper panel (2), a lower panel (3), and a piezoelectric vibration damper (1) disposed between the two, characterized in that: The number of the piezoelectric dampers (1) is three or more, and two adjacent piezoelectric dampers (1) are connected by connecting rods (4).

2. The piezoelectric vibration damping device as described in claim 1, characterized in that, The number of piezoelectric dampers (1) is four, and each piezoelectric damper (1) is symmetrically arranged at the four corners of the lower panel.

3. The piezoelectric vibration damping device as described in claim 1 or 2, characterized in that, Each of the piezoelectric vibration dampers (1) includes a single-leg top plate (11), a single-leg bottom plate (12), a passive vibration damping element (13), an intermediate mass block (14), a horizontal piezoelectric actuator (15), a vertical piezoelectric actuator (16), a horizontal velocity sensor (17), and a vertical velocity sensor (18), wherein: The single-leg top plate (11) is used to fit and connect with the upper panel (2), thereby connecting the load; the upper end of the passive damping element (13) is in contact with the single-leg top plate (11), and its lower end is connected to the intermediate mass block (14); one side of the intermediate mass block (14) is connected to the horizontal piezoelectric actuator (15), and its lower part is connected to the vertical piezoelectric actuator (16); the horizontal piezoelectric actuator (15) and the vertical piezoelectric actuator (16) are both mounted on the single-leg bottom plate (12), and then fixed to the lower panel (3) through the single-leg bottom plate (12); in addition, the horizontal speed sensor (17) and the vertical speed sensor (18) are respectively located near the intermediate mass block (14), and are respectively used to sense the horizontal and vertical movement speeds of the intermediate mass block (14).

4. The piezoelectric vibration damping device as described in claim 3, characterized in that, The two ends of the connecting rod (4) are respectively fixed on the intermediate mass block (14) of each of the two adjacent piezoelectric dampers (1).

5. The piezoelectric vibration damping device as described in claim 4, characterized in that, The passive vibration damping element (13) is vibration damping rubber.

6. The piezoelectric vibration damping device as described in claim 5, characterized in that, Both the horizontal piezoelectric actuator (15) and the vertical piezoelectric actuator (16) are piezoelectric ceramic structures.

7. The piezoelectric vibration damping device as described in claim 3, characterized in that, The vertical piezoelectric actuator (16) includes a horizontal actuator (161), a lower wedge (162) horizontally connected to the horizontal actuator (161), an upper wedge (163) disposed on the cross surface of the lower wedge (162) and slidable relative to it, and a vertical guide rail (164) for guiding the upper wedge (163) to perform vertical movement.

8. The piezoelectric vibration damping device as described in claim 7, characterized in that, The vertical guide rail (164) has a V-shaped cross-section.

9. The piezoelectric vibration damping device as described in claim 8, characterized in that, The other side of the intermediate mass block (14) is connected to the shear force decoupling mechanism.

10. The piezoelectric vibration damping device as described in claim 9, characterized in that, The aforementioned piezoelectric vibration damping device is also equipped with a controller.

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