A MEMS multidimensional force sensor

Abstract

This utility model discloses a MEMS multidimensional force sensor, relating to the field of sensor technology. It includes a sensor body comprising an upper mounting flange, a lower mounting flange, an elastomer, and strain gauges. The elastomer is mounted between the upper and lower mounting flanges, and the strain gauges are adhered to the surface of the elastomer. The elastomer employs an asymmetric structure, and the strain gauges are flexible MEMS strain gauges capable of converting the deformation of the elastomer into a change in resistance through the piezoresistive effect. This utility model achieves synchronous decoupled measurement of X, Y, and Z forces and Mx, My, and Mz moments by setting four sets of asymmetric strain beams around the central strain table and arranging sixteen sets of flexible MEMS strain gauges in the key stress concentration areas of each crossbeam and longitudinal beam. This effectively reduces interdimensional coupling errors and improves the accuracy of multidimensional force detection.

Description

Technical Field

[0001] This utility model relates to the field of sensor technology, specifically a MEMS multidimensional force sensor. Background Technology

[0002] Multidimensional force sensors can simultaneously measure forces and torques in multiple directions and are widely used in modern intelligent manufacturing, such as in high-precision operations like precision assembly and microelectromechanical system (MEMS) machining. While strain gauge-based multidimensional force sensors have a wide range of applications, traditional strain gauges suffer from problems such as difficult installation, low accuracy, slow response, and susceptibility to fatigue. However, the application of MEMS flexible strain gauges efficiently converts mechanical strain into a sensitive element that measures changes in analog signals, enabling more accurate measurement of forces and torques with high precision and fast response.

[0003] The MEMS multidimensional force sensor mainly consists of two mounting flanges, an elastic body positioned between the two flanges, and multiple MEMS flexible strain gauges at different detection positions on the elastic body. The two mounting flanges are fixed to the connection point of the object to be detected, such as a robotic arm joint. Under external force feedback, the elastic body between the two flanges deforms accordingly, causing the corresponding MEMS flexible strain gauges to undergo mechanical deformation, thus changing their resistance. After preliminary analysis and calibration using a decoupling algorithm, the sensor outputs calculated force changes in the three directions X, Y, and Z: Fx, Fy, and Fz, as well as torques Mx, My, and Mz.

[0004] As mentioned above, the elastomer and strain gauge are key factors affecting the detection accuracy, response time, and long-term stability of sensors. However, most force sensors on the market are traditional strain gauge-type multidimensional force sensors, which use the principle of resistance strain gauges. These sensors suffer from low detection accuracy, long response time, hysteresis, drift, and other problems after long-term use, resulting in poor stability. Their detection accuracy cannot meet the requirements of precise robot operation.

[0005] Based on this, a MEMS multidimensional force sensor is now provided, which can eliminate the drawbacks of existing devices. Utility Model Content

[0006] The purpose of this invention is to provide a MEMS multidimensional force sensor to solve the problems in the background technology.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A MEMS multidimensional force sensor includes a sensor body, which is composed of an upper mounting flange, a lower mounting flange, an elastomer, and a strain gauge. The elastomer is installed between the upper and lower mounting flanges, and the strain gauge is attached to the surface of the elastomer. The elastomer has an asymmetric structure, and the strain gauge is a MEMS flexible strain gauge that can convert the deformation of the elastomer into a change in resistance through the piezoresistive effect.

[0009] Based on the above technical solutions, this utility model also provides the following optional technical solutions:

[0010] In one alternative: the upper mounting flange includes an upper mounting flange body, and the upper mounting flange body is provided with upper fixing bolts for mounting the elastomer.

[0011] In one alternative: the lower mounting flange includes a lower mounting flange body, the lower mounting flange body is provided with a lower fixing bolt for mounting an elastomer, and a signal cable is provided on one side of the lower mounting flange.

[0012] In one alternative: the elastomer includes a central strain table, four strain beams are connected to the side of the central strain table, and one end of each strain beam is provided with a strain fixing end.

[0013] In one alternative: the central axis strain gauge is fixed by an upper fixing bolt, and the strain gauge fixing end is provided with a fixing hole that matches the lower fixing bolt.

[0014] In one alternative: the strain beam includes a crossbeam connected to the central strain table and a longitudinal beam connected to one end of the crossbeam.

[0015] In one alternative embodiment: there are sixteen sets of strain gauges, which are respectively attached to the left and right sides of the crossbeam and the top and bottom sides of the longitudinal beam.

[0016] In one alternative: the signal cable is a sixteen-wire harness cable.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0018] This invention achieves synchronous decoupled measurement of X, Y, and Z forces and Mx, My, and Mz moments by setting four sets of asymmetric strain beams around the central strain table and arranging 16 sets of MEMS flexible strain gauges in the key stress concentration areas of each crossbeam and longitudinal beam. This effectively reduces interdimensional coupling errors and improves the accuracy of multidimensional force detection. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of this utility model.

[0020] Figure 2 This is an exploded structural diagram of the present invention.

[0021] Figure 3 This is a schematic diagram of the upper mounting flange in this utility model.

[0022] Figure 4 This is a schematic diagram of the lower mounting flange in this utility model.

[0023] Figure 5 This is a schematic diagram of the structure of the elastomer in this utility model.

[0024] Figure reference numerals: 1. Sensor body; 11. Upper mounting flange; 111. Upper mounting flange body; 112. Upper fixing bolt; 12. Lower mounting flange; 121. Lower mounting flange body; 122. Lower fixing bolt; 13. Elastic body; 131. Strain gauge fixing end; 1311. Fixing hole; 132. Central axis strain gauge; 133. Strain beam; 1331. Crossbeam; 1332. Longitudinal beam; 14. Strain gauge; 15. Signal cable. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0026] In one embodiment, such as Figures 1-5As shown, a MEMS multidimensional force sensor includes a sensor body 1, which comprises an upper mounting flange 11, a lower mounting flange 12, an elastic body 13, and a strain gauge 14. The elastic body 13 is installed between the upper mounting flange 11 and the lower mounting flange 12. The strain gauge 14 is attached to the surface of the elastic body 13. The elastic body 13 has an asymmetric structure. The strain gauge 14 is a MEMS flexible strain gauge that can convert the deformation of the elastic body into a change in resistance through the piezoresistive effect. The upper mounting flange 11 includes an upper mounting flange body 111, on which an upper fixing bolt 112 for mounting the elastic body 13 is provided. The lower mounting flange 12 includes a lower mounting flange body 121, on which a lower fixing bolt 122 for mounting the elastic body 13 is provided. A signal cable 15 is provided on one side of the lower mounting flange 12. The elastic body 13 includes a central axial strain gauge. The strain gauge 132 has four strain beams 133 connected to its side. One end of each strain beam 133 has a strain fixing end 131. The strain gauge 132 is fixed by an upper fixing bolt 112. The strain fixing end 131 has a fixing hole 1311 that matches the lower fixing bolt 122. The strain beam 133 includes a crossbeam 1331 connected to the strain gauge 132 and a longitudinal beam 1332 connected to one end of the crossbeam 1331. In use, the sensor body 1 is installed on the object to be tested. The force of the object to be tested is transmitted to the sensor body 1, causing the sensor body 1 to undergo a certain small deformation under the action of external force. That is, the elastic body 13 undergoes corresponding deformation. When the elastic body 13 deforms, the strain gauge 14 changes synchronously. Based on the piezoresistive effect, the resistance change is dominated, and the small strain is converted into a measurable electrical signal, thereby knowing the stress condition of the elastic body.

[0027] In one embodiment, such as Figure 5 As shown, there are sixteen groups of strain gauges 14. The sixteen groups of strain gauges 14 are respectively attached to the left and right sides of the crossbeam 1331 and the upper and lower sides of the longitudinal beam 1332. The strain gauges 14 use a MEMS flexible strain gauge as a force-sensitive element. The force-sensitive structure is prepared on a flexible polyimide substrate using micro-nano fabrication technology. Based on the piezoresistive effect of "strain-resistance change", when an external force causes the strain gauge to deform, the resistance value of the force-sensitive material will change linearly with the strain. The magnitude of the force or strain can be inverted by measuring the resistance change. The signal cable 15 uses a sixteen-wire harness cable. The strain gauges 14 are arranged in groups of four, with each group outputting four signal lines, for a total of four groups. Each group outputs four signal lines, namely power positive, power negative, signal output positive, and signal output negative.

[0028] The above embodiments disclose a MEMS multidimensional force sensor. In use, the sensor body 1 is installed on the object to be detected. The force exerted by the object to be detected is transmitted to the sensor body 1, causing the sensor body 1 to undergo a certain small deformation under the action of external force. That is, the elastic body 13 undergoes corresponding deformation. When the elastic body 13 deforms, the strain gauge 14 changes synchronously. Based on the piezoresistive effect, the resistance change is dominated, and the small strain is converted into a measurable electrical signal. Then, the corresponding data is transmitted to the control system through the signal cable 15, thereby knowing the force condition of the elastic body.

[0029] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A MEMS multidimensional force sensor, comprising a sensor body (1), characterized in that, The sensor body (1) consists of an upper mounting flange (11), a lower mounting flange (12), an elastomer (13), and a strain gauge (14). The elastomer (13) is installed between the upper mounting flange (11) and the lower mounting flange (12). The strain gauge (14) is attached to the surface of the elastomer (13). The elastomer (13) adopts an asymmetric structure. The strain gauge (14) is a MEMS flexible strain gauge that can convert the deformation of the elastomer into a change in resistance through the piezoresistive effect.

2. The MEMS multidimensional force sensor according to claim 1, characterized in that, The upper mounting flange (11) includes an upper mounting flange body (111), and the upper mounting flange body (111) is provided with upper fixing bolts (112) for mounting the elastomer (13).

3. A MEMS multidimensional force sensor according to claim 1, characterized in that, The lower mounting flange (12) includes a lower mounting flange body (121), the lower mounting flange body (121) is provided with a lower fixing bolt (122) for mounting an elastic body (13), and a signal cable (15) is provided on one side of the lower mounting flange (12).

4. A MEMS multidimensional force sensor according to claim 1, characterized in that, The elastic body (13) includes a central strain table (132), and four strain beams (133) are connected to the side of the central strain table (132). One end of each strain beam (133) is provided with a strain fixing end (131).

5. A MEMS multidimensional force sensor according to claim 4, characterized in that, The central strain gauge (132) is fixed by an upper fixing bolt (112), and the strain fixing end (131) is provided with a fixing hole (1311) that matches the lower fixing bolt (122).

6. A MEMS multidimensional force sensor according to claim 4, characterized in that, The strain beam (133) includes a crossbeam (1331) connected to the central strain table (132) and a longitudinal beam (1332) connected to one end of the crossbeam (1331).

7. A MEMS multidimensional force sensor according to claim 1, characterized in that, There are sixteen sets of strain gauges (14), which are respectively attached to the left and right sides of the crossbeam (1331) and the upper and lower sides of the longitudinal beam (1332).

8. A MEMS multidimensional force sensor according to claim 3, characterized in that, The signal cable (15) is a sixteen-wire harness cable.

Images