A silicon component storage vehicle

Abstract

This utility model provides a silicon component storage cart, including a box with a receiving cavity, a plurality of lower partition rods equidistantly arranged on the box and located within the receiving cavity, a plurality of upper partition rods arranged on the box and located within the receiving cavity and above the lower partition rods, a drain pipe arranged on the side end of the box and connected to the receiving cavity, a control component arranged on the drain pipe for controlling the opening or closing of the drain pipe to allow liquid in the receiving cavity to be discharged outward or to stop the discharge outward, and an overflow pipe arranged on the box and connected to the receiving cavity at one end and connected to the drain pipe at the other end for allowing liquid in the receiving cavity to be discharged from the drain pipe when the liquid in the receiving cavity reaches a certain height.

Description

Technical Field

[0001] This utility model relates to the field of storage device technology, specifically to a silicon component storage vehicle. Background Technology

[0002] Silicon components refer to various parts made of silicon material, widely used in semiconductor manufacturing, integrated circuits, and chip manufacturing. They mainly include silicon rings and silicon electrodes. These components are primarily used in 8-12 inch plasma etching cavities. During integrated circuit manufacturing, silicon components are etched simultaneously with the wafer to ensure the uniformity of the etched electrical properties, thus determining the process quality.

[0003] During the production of silicon components, silicon disks and rings cannot be exposed to air for extended periods. This is because the surface of silicon disks and rings reacts with oxygen in the air to form an amorphous silicon oxide film, which can lead to a decrease in the performance of the silicon disks or even damage them. Therefore, the traditional method of storing silicon components is to immerse them directly in pure water to isolate them from the air and prevent them from being exposed to the air for extended periods.

[0004] While traditional methods of storing silicon components can achieve a degree of isolation, when traditional silicon components are immersed in pure water, multiple silicon components are usually stacked together, making it impossible to separate each silicon component and inconvenient to remove the immersed silicon components. Utility Model Content

[0005] The purpose of this invention is to provide a silicon component storage vehicle in response to the defects and deficiencies of the existing technology.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a silicon component storage cart, comprising a box body with a receiving cavity, a plurality of lower partition rods equidistantly arranged on the box body within the receiving cavity for separating and placing a plurality of silicon components, a plurality of upper partition rods arranged on the box body within the receiving cavity and above the lower partition rods for providing auxiliary support to the silicon components when they are placed between the plurality of lower partition rods, a drain pipe arranged on the side end of the box body and connected to the receiving cavity for draining liquid from the receiving cavity, a control component arranged on the drain pipe for controlling the opening or closing of the drain pipe to drain or stop the draining of liquid from the receiving cavity, and an overflow pipe arranged on the box body and connected to the receiving cavity at one end and connected to the drain pipe at the other end for draining liquid from the drain pipe when the liquid in the receiving cavity reaches a certain height.

[0007] A further improvement is that an adjustment mechanism is provided between each of the upper partition rods and the housing, located within the receiving cavity, for laterally adjusting the position of each upper partition rod to reduce or increase the lateral distance between the lower partition rod and the upper partition rod.

[0008] A further improvement is made to the adjustment mechanism, which includes a front connecting plate and a rear connecting plate symmetrically arranged on the housing within the accommodating cavity; a front support plate and a rear support plate respectively disposed at the upper ends of the front connecting plate and the rear connecting plate; an adjustment rod disposed at the upper ends of the front connecting plate and the rear connecting plate; adjustment waist holes respectively opened laterally on the front support plate and the rear support plate; and a fixing member disposed on the adjustment rod for fixing the front support plate and the rear support plate to the front connecting plate and the rear connecting plate. Each of the upper partition rods is fixedly disposed between the front support plate and the rear support plate, and the adjustment rod is slidably engaged with the adjustment waist hole.

[0009] A further improvement is that the fixing component includes a fixing nut threaded onto the adjusting rod. A further improvement is that the control component is a control valve located on the drain pipe for controlling the opening or closing of the drain pipe, so as to allow or stop the discharge of liquid from the receiving cavity.

[0010] A further improvement is that the control component is a sealing head located on the drain pipe within the receiving cavity, and the sealing head is sealed and fixed to the drain pipe by a flexible connection.

[0011] A further improvement is that the enclosure is made of nylon or epoxy resin.

[0012] A further improvement is that each of the upper and lower partition rods is made of nylon, epoxy resin, or silicone rubber.

[0013] A further improvement is that the lower end of the box is equipped with conveyor wheels.

[0014] After adopting the above technical solution, the beneficial effects of this utility model are as follows: When it is necessary to store silicon components, pure water is continuously injected into the receiving cavity. Each silicon component is placed in the transverse gap between the lower and upper partition rods. The lower and upper partition rods limit the placement of the silicon components, allowing each silicon component to be placed separately, which facilitates the removal of the soaked silicon components. When the continuously injected pure water covers the silicon components and the drain pipe, the excessively high pure water level is discharged outward from the overflow pipe. Since the surface of the silicon component has multiple small pores, the cleanliness of the pure water in the receiving cavity is ensured by the continuous injection of pure water. By allowing the pure water to flow continuously, impurities are prevented from forming on the surface of the still pure water, thereby preventing impurities from entering the small pores of the silicon component and damaging it.

[0015] Further effects: When it is necessary to control the lateral movement of each upper partition rod, the fixing nut is tightened with a tool to release the pressure on the front and rear support plates. Then, the upper partition rod can be driven laterally to move the front and rear support plates laterally. During the lateral movement, the adjusting rod moves laterally in the adjusting hole. Through the sliding fit between the adjusting rod and the adjusting hole, the lateral movement can be guided. Thus, the lateral distance between the lower and upper partition rods can be adjusted according to the thickness or width of the silicon component, improving the size adaptability to the silicon component. After the movement position of the upper partition rod is confirmed, the fixing nut is tightened into the adjusting rod until the fixing nut abuts and presses against the front and rear support plates, thereby restricting the lateral movement of the front and rear support plates. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a front sectional view of the present invention;

[0018] Figure 2 This is a top view of the present invention;

[0019] Figure 3 It corresponds Figure 1 Enlarged view of part A.

[0020] Explanation of reference numerals in the attached drawings: 1. Receiving cavity; 2. Box body; 3. Lower partition rod; 4. Upper partition rod; 5. Drain pipe; 6. Overflow pipe; 7. Front connecting plate; 8. Rear connecting plate; 9. Adjusting rod; 10. Adjusting waist hole; 11. Fixing nut; 12. Control valve; 13. Conveying wheel; 14. Front support plate; 15. Rear support plate. Detailed Implementation

[0021] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments.

[0022] See Figures 1 to 3As shown, the technical solution adopted in this specific embodiment is: a silicon component storage vehicle, including a box 2 with a receiving cavity 1, a plurality of lower partition rods 3 equidistantly arranged on the box 2 within the receiving cavity 1 for separating and placing a plurality of silicon components, a plurality of upper partition rods 4 arranged on the box 2 within the receiving cavity 1 and above the lower partition rods for providing auxiliary support to the silicon components when they are placed between the plurality of lower partition rods 3, a drain pipe 5 arranged on the side end of the box 2 and connected to the receiving cavity 1 for draining liquid from the receiving cavity 1, a control component arranged on the drain pipe 5 for controlling the opening or closing of the drain pipe 5 to drain or stop the liquid from the receiving cavity 1, and an overflow pipe 6 arranged on the box 2 and connected to the receiving cavity 1, and connected to the drain pipe 5 at the other end for draining liquid from the drain pipe 5 when the liquid in the receiving cavity 1 reaches a certain height.

[0023] Each of the upper partition rods 4 is provided with an adjustment mechanism within the receiving cavity 1 for laterally adjusting the position of each upper partition rod 4 to decrease or increase the lateral distance between the lower partition rod 3 and the upper partition rod 4. The adjustment mechanism includes a front connecting plate 7 and a rear connecting plate 8 symmetrically arranged on the receiving cavity 1 within the receiving cavity 1, a front support plate 14 and a rear support plate 15 respectively disposed at the upper ends of the front connecting plate 7 and the rear connecting plate 8, an adjustment rod 9 respectively disposed at the upper ends of the front connecting plate 7 and the rear connecting plate 8, and a laterally opening... The front support plate 14 and the rear support plate 15 are provided with adjustment waist holes 10, and the adjustment rod 9 is provided with a fixing member for fixing the front support plate 14 and the rear support plate 15 to the front connecting plate 7 and the rear connecting plate 8. The fixing member includes a fixing nut 11 threadedly connected to the adjustment rod 9. The fixing nut 11 can be a common hexagonal nut or a wing nut that is easy to turn by hand. Each of the upper partition rods 4 is fixedly arranged between the front support plate 14 and the rear support plate 15. The adjustment rod 9 is slidably engaged with the adjustment waist holes 10.

[0024] The upper partition rod 4 is fixedly installed between the front and rear support plates 15 and the rear support plate 15 by means of adhesive or hot fusion. The front connecting plate 7 and the rear connecting plate 8 are also installed on the box body 2 by means of adhesive or hot fusion and are located in the receiving cavity 1.

[0025] The control component is a control valve 12 installed on the drain pipe 5 to control the opening or closing of the drain pipe 5, so as to allow or stop the liquid in the receiving cavity 1 to be discharged outwards. The control valve 12 can be a butterfly valve, a ball valve, or a gate valve. The control valve 12 is installed in the middle of the drain pipe 5 by means of threads, flanges, or fittings. The other end of the overflow pipe 6 is connected to the tail end of the drain pipe 5, and the head of the drain pipe 5 is located inside the receiving cavity 1.

[0026] The control component can also be a sealing head installed on the drain pipe 5 within the receiving cavity 1, with the sealing head and drain pipe 5 sealed and fixed by a flexible connection. The flexible connection can be an elastic sealing strip installed on the sealing head or the sealing head can be made of an elastic rubber material. By interfering with or loosely fitting the sealing head and drain pipe 5, the drain pipe 5 can be sealed to prevent liquid in the receiving cavity 1 from draining out of the drain pipe 5.

[0027] The enclosure 2 is a nylon enclosure 2 or an epoxy resin enclosure 2.

[0028] Each of the upper partition rods 4 and lower partition rods 3 is made of nylon, epoxy resin, or silicone rubber. Epoxy resin and silicone rubber can directly contact the silicone components without easily damaging their surface. Teflon tape can be applied to each upper partition rod 4 and lower partition rod 3 for further protection against damage to the silicone components.

[0029] The lower end of the housing 2 is provided with conveyor wheels 13, which are universal wheels. There are four conveyor wheels 13 in total. The four conveyor wheels 13 are installed at the lower end of the housing 2 by fitting, welding or snapping.

[0030] The working principle of this utility model is as follows: When it is necessary to store silicon components, pure water is continuously injected into the receiving cavity 1 through the water pipe. Each silicon component is placed in the transverse gap between the lower partition rod 3 and the upper partition rod 4. The lower partition rod 3 and the upper partition rod 4 limit the placement of the silicon components, which can separate each silicon component for easy removal of the soaked silicon components. When the continuously injected pure water covers the silicon components and the drain pipe 5, the pure water with an excessive liquid level is discharged outward from the overflow pipe 6. Since there are multiple small pores on the surface of the silicon components, the cleanliness of the pure water in the receiving cavity 1 is ensured by the continuous injection of pure water. The continuous flow of pure water prevents impurities from forming on the surface of the still pure water, thereby preventing impurities from entering the small pores of the silicon components and damaging them.

[0031] When it is necessary to control the lateral movement of each upper partition rod 4, the fixing nut 11 is tightened with a tool to release the pressure on the front support plate 14 and the rear support plate 15. Then, the upper partition rod 4 can be driven laterally to move the front support plate 14 and the rear support plate 15 laterally. During the lateral movement, the adjusting rod 9 moves laterally in the adjusting waist hole 10. Through the sliding fit between the adjusting rod 9 and the adjusting waist hole 10, the lateral movement can be guided. Thus, the lateral distance between the lower partition rod 3 and the upper partition rod 4 can be adjusted according to the thickness or width of the silicon component, thereby improving the size adaptability to the silicon component. After the movement position of the upper partition rod 4 is confirmed, the fixing nut 11 is tightened into the adjusting rod 9 until the fixing nut 11 abuts and presses against the front support plate 14 and the rear support plate 15, thereby restricting the lateral movement of the front support plate 14 and the rear support plate 15.

[0032] This utility model aims to protect the structure of the product. The model numbers of the components are not the focus of this utility model's protection, as they are known technology. Any component on the market that can achieve the functions described above can be used as a silicon component storage vehicle. Therefore, the model numbers and other parameters of the components are not described in detail in this utility model. The contribution of this utility model lies in the scientific combination of the various components.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions provided are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of protection of this utility model as defined by the appended claims and their equivalents. Any aspects of this utility model not detailed herein are well-known to those skilled in the art.

Claims

1. A silicon parts storage cart, characterized by: The device includes a housing with a receiving cavity; several lower partition rods equidistantly arranged on the housing within the receiving cavity for separating and placing several silicon components; several upper partition rods arranged on the housing within the receiving cavity and above the lower partition rods for providing auxiliary support to the silicon components when they are placed between the lower partition rods; a drain pipe located on the side of the housing and connected to the receiving cavity for draining liquid from the receiving cavity; a control component on the drain pipe for controlling the opening or closing of the drain pipe to drain or stop the draining of liquid from the receiving cavity; and an overflow pipe located on the housing and connected to the receiving cavity, with one end connected to the drain pipe and the other end connected to the drain pipe for draining liquid from the drain pipe when the liquid in the receiving cavity reaches a certain height. An adjustment mechanism is provided between each of the upper partition rods and the housing, located within the receiving cavity, for laterally adjusting the position of each upper partition rod to reduce or increase the lateral distance between the lower partition rod and the upper partition rod.

2. A silicon component storage cart according to claim 1, characterized in that: The adjustment mechanism includes a front connecting plate and a rear connecting plate symmetrically arranged on the housing within the receiving cavity; a front support plate and a rear support plate respectively disposed at the upper ends of the front connecting plate and the rear connecting plate; an adjustment rod disposed at the upper ends of the front connecting plate and the rear connecting plate; adjustment waist holes respectively opened laterally on the front support plate and the rear support plate; and a fixing member disposed on the adjustment rod for fixing the front support plate and the rear support plate to the front connecting plate and the rear connecting plate. Each of the upper partition rods is fixedly disposed between the front support plate and the rear support plate, and the adjustment rod is slidably engaged with the adjustment waist hole.

3. A silicon component storage cart according to claim 2, wherein: The fastener includes a fixing nut threaded onto the adjusting rod.

4. A silicon component storage cart according to claim 1, wherein: The control element is a control valve installed on the drain pipe to control the opening or closing of the drain pipe, so as to allow the liquid in the receiving cavity to be discharged outward or to stop the discharge outward.

5. A silicon component storage cart according to claim 1, wherein: The control component is a sealing head located in the receiving cavity on the drain pipe, and the sealing head is sealed and fixed to the drain pipe by a flexible connection.

6. A silicon component storage cart according to claim 1, wherein: The enclosure is made of nylon or epoxy resin.

7. A silicon component storage cart according to claim 1, wherein: Each of the upper and lower partition rods is made of nylon, epoxy resin, or silicone rubber.

8. A silicon component storage cart according to claim 1, wherein: The lower end of the box is equipped with a conveyor wheel.

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